Patents by Inventor Wolfgang Lehnert

Wolfgang Lehnert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9012295
    Abstract: In one embodiment a method of forming a compressive polycrystalline semiconductive material layer is disclosed. The method comprises forming a polycrystalline semiconductive seed layer over a substrate and forming a silicon layer by depositing silicon directly on the polycrystalline silicon seed layer under amorphous process conditions at a temperature below 600 C.
    Type: Grant
    Filed: October 25, 2012
    Date of Patent: April 21, 2015
    Assignee: Infineon Technologies AG
    Inventors: Wolfgang Lehnert, Stefan Pompl, Markus Meyer
  • Publication number: 20140335676
    Abstract: According to an embodiment, a composite wafer includes a carrier substrate having a graphite layer and a monocrystalline semiconductor layer attached to the carrier substrate.
    Type: Application
    Filed: July 24, 2014
    Publication date: November 13, 2014
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze, Karsten Kellermann, Michael Sommer, Christian Rottmair, Roland Rupp
  • Publication number: 20140306184
    Abstract: In various embodiments, an electronic component is provided. The electronic component may include a dielectric structure; and a two-dimensional material containing structure over the dielectric structure. The dielectric structure is doped with dopants to change the electric characteristic of the two-dimensional material containing structure.
    Type: Application
    Filed: April 11, 2013
    Publication date: October 16, 2014
    Applicant: Infineon Technologies AG
    Inventors: Guenther Ruhl, Wolfgang Lehnert, Rudolf Berger
  • Patent number: 8822306
    Abstract: According to an embodiment, a composite wafer includes a carrier substrate having a graphite layer and a monocrystalline semiconductor layer attached to the carrier substrate.
    Type: Grant
    Filed: August 9, 2011
    Date of Patent: September 2, 2014
    Assignee: Infineon Technologies AG
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze, Karsten Kellermann, Michael Sommer, Christian Rottmair, Roland Rupp
  • Publication number: 20140235058
    Abstract: A method for forming a semiconductor device includes providing a semiconductor body which has a main surface and a first n-type semiconductor region, forming a trench which extends from the main surface into the first n-type semiconductor region, and forming a dielectric layer having fixed negative charges on a surface of the trench, by performing at least one atomic layer deposition using an organometallic precursor.
    Type: Application
    Filed: April 24, 2014
    Publication date: August 21, 2014
    Inventors: Anton Mauder, Hans-Joachim Schulze, Franz Hirler, Wolfgang Lehnert, Rudolf Berger, Klemens Pruegl, Helmut Strack
  • Publication number: 20140225125
    Abstract: A composite wafer includes a substrate and a SiC-based functional layer. The substrate includes a porous carbon substrate core and an encapsulating layer encapsulating the substrate core. The SiC-based functional layer comprises, at an interface region with the encapsulating layer, at least one of: a carbide and a silicide formed by reaction of a portion of the SiC-based functional layer with a carbide-and-silicide-forming metal. An amount of the carbide-and-silicide-forming metal, integrated over the thickness of the functional layer, is 10?4 mg/cm2 to 0.1 mg/cm2.
    Type: Application
    Filed: February 12, 2013
    Publication date: August 14, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Rudolf Berger, Hans-Joachim Schulze, Anton Mauder, Wolfgang Lehnert, Günther Ruhl, Roland Rupp
  • Patent number: 8786012
    Abstract: A power semiconductor device has a semiconductor body which includes an active area and a peripheral area which both define a horizontal main surface of the semiconductor body. The semiconductor body further includes an n-type semiconductor layer, a pn junction and at least one trench. The n-type semiconductor layer is embedded in the semiconductor body and extends to the main surface in the peripheral area. The pn junction is arranged between the n-type semiconductor layer and the main surface in the active area. The at least one trench extends in the peripheral area from the main surface into the n-type semiconductor layer and includes a dielectric layer with fixed negative charges. In the vertical direction, the dielectric layer is arranged both below and above the pn junction. The dielectric layer with fixed negative charges typically has a negative net charge. Further, a method for forming a semiconductor device is provided.
    Type: Grant
    Filed: July 6, 2012
    Date of Patent: July 22, 2014
    Assignee: Infineon Technologies Austria AG
    Inventors: Anton Mauder, Franz Hirler, Wolfgang Lehnert, Rudolf Berger, Klemens Pruegl, Hans-Joachim Schulze, Helmut Strack
  • Patent number: 8748974
    Abstract: A power semiconductor device has a semiconductor body which includes an active area and a peripheral area which both define a horizontal main surface of the semiconductor body. The semiconductor body further includes an n-type semiconductor layer, a pn junction and at least one trench. The n-type semiconductor layer is embedded in the semiconductor body and extends to the main surface in the peripheral area. The pn junction is arranged between the n-type semiconductor layer and the main surface in the active area. The at least one trench extends in the peripheral area from the main surface into the n-type semiconductor layer and includes a dielectric layer with fixed negative charges. In the vertical direction, the dielectric layer is arranged both below and above the pn junction. The dielectric layer with fixed negative charges typically has a negative net charge. Further, a method for forming a semiconductor device is provided.
    Type: Grant
    Filed: July 6, 2012
    Date of Patent: June 10, 2014
    Assignee: Infineon Technologies Austria AG
    Inventors: Anton Mauder, Franz Hirler, Wolfgang Lehnert, Rudolf Berger, Klemens Pruegl, Hans-Joachim Schulze, Helmut Strack
  • Publication number: 20140145305
    Abstract: A method for manufacturing a semiconductor device and a semiconductor device are disclosed. The method comprises forming a trench in a substrate, partially filling the trench with a first semiconductive material, forming an interface along a surface of the first semiconductive material, and filling the trench with a second semiconductive material. The semiconductor device includes a first electrode arranged along sidewalls of a trench and a dielectric arranged over the first electrode. The semiconductor device further includes a second electrode at least partially filling the trench, wherein the second electrode comprises an interface within the second electrode.
    Type: Application
    Filed: January 31, 2014
    Publication date: May 29, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Wolfgang Lehnert, Michael Stadtmueller, Stefan Pompl, Markus Meyer
  • Publication number: 20140110838
    Abstract: Various embodiments provide a semiconductor device, including a final metal layer having a top side and at least one sidewall; and a passivation layer disposed over at least part of at least one of the top side and the at least one sidewall of the final metal layer; wherein the passivation layer has a substantially uniform thickness.
    Type: Application
    Filed: October 22, 2012
    Publication date: April 24, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Michael Rogalli, Wolfgang Lehnert
  • Patent number: 8685828
    Abstract: A method for manufacturing a semiconductor device and a semiconductor device are disclosed. The method comprises forming a trench in a substrate, partially filling the trench with a first semiconductive material, forming an interface along a surface of the first semiconductive material, and filling the trench with a second semiconductive material. The semiconductor device includes a first electrode arranged along sidewalls of a trench and a dielectric arranged over the first electrode. The semiconductor device further includes a second electrode at least partially filling the trench, wherein the second electrode comprises an interface within the second electrode.
    Type: Grant
    Filed: January 14, 2011
    Date of Patent: April 1, 2014
    Assignee: Infineon Technologies AG
    Inventors: Wolfgang Lehnert, Michael Stadtmueller, Stefan Pompl, Markus Meyer
  • Publication number: 20140070232
    Abstract: A composite wafer including a carrier substrate having a graphite core and a monocrystalline semiconductor substrate or layer attached to the carrier substrate and a corresponding method for manufacturing such a composite wafer is provided.
    Type: Application
    Filed: February 26, 2013
    Publication date: March 13, 2014
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze
  • Patent number: 8404562
    Abstract: According to an embodiment, a composite wafer includes a carrier substrate having a graphite core and a monocrystalline semiconductor layer attached to the carrier substrate.
    Type: Grant
    Filed: September 30, 2010
    Date of Patent: March 26, 2013
    Assignee: Infineon Technologies AG
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze
  • Patent number: 8318575
    Abstract: In one embodiment a method of forming a compressive polycrystalline semiconductive material layer is disclosed. The method comprises forming a polycrystalline semiconductive seed layer over a substrate and forming a silicon layer by depositing silicon directly on the polycrystalline silicon seed layer under amorphous process conditions at a temperature below 600 C.
    Type: Grant
    Filed: February 7, 2011
    Date of Patent: November 27, 2012
    Assignee: Infineon Technologies AG
    Inventors: Wolfgang Lehnert, Stefan Pompl, Markus Meyer
  • Publication number: 20120289023
    Abstract: A method for producing a semiconductor device having a sidewall insulation includes providing a semiconductor body having a first side and a second side lying opposite the first side. At least one first trench is at least partly filled with insulation material proceeding from the first side in the direction toward the second side into the semiconductor body. The at least one first trench is produced between a first semiconductor body region for a first semiconductor device and a second semiconductor body region for a second semiconductor device. An isolating trench extends from the first side of the semiconductor body in the direction toward the second side of the semiconductor body between the first and second semiconductor body regions in such a way that at least part of the insulation material of the first trench adjoins at least a sidewall of the isolating trench. The second side of the semiconductor body is partly removed as far as the isolating trench.
    Type: Application
    Filed: February 3, 2012
    Publication date: November 15, 2012
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Carsten Ahrens, Rudolf Berger, Manfred Frank, Uwe Hoeckele, Bernhard Knott, Ulrich Krumbein, Wolfgang Lehnert, Berthold Schuderer, Juergen Wagner, Stefan Willkofer
  • Publication number: 20120286355
    Abstract: A power semiconductor device has a semiconductor body which includes an active area and a peripheral area which both define a horizontal main surface of the semiconductor body. The semiconductor body further includes an n-type semiconductor layer, a pn junction and at least one trench. The n-type semiconductor layer is embedded in the semiconductor body and extends to the main surface in the peripheral area. The pn junction is arranged between the n-type semiconductor layer and the main surface in the active area. The at least one trench extends in the peripheral area from the main surface into the n-type semiconductor layer and includes a dielectric layer with fixed negative charges. In the vertical direction, the dielectric layer is arranged both below and above the pn junction. The dielectric layer with fixed negative charges typically has a negative net charge. Further, a method for forming a semiconductor device is provided.
    Type: Application
    Filed: July 6, 2012
    Publication date: November 15, 2012
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Anton Mauder, Franz Hirler, Wolfgang Lehnert, Rudolf Berger, Klemens Pruegl, Hans-Joachim Schulze, Helmut Strack
  • Publication number: 20120202327
    Abstract: In one embodiment a method of forming a compressive polycrystalline semiconductive material layer is disclosed. The method comprises forming a polycrystalline semiconductive seed layer over a substrate and forming a silicon layer by depositing silicon directly on the polycrystalline silicon seed layer under amorphous process conditions at a temperature below 600 C.
    Type: Application
    Filed: February 7, 2011
    Publication date: August 9, 2012
    Inventors: Wolfgang Lehnert, Stefan Pompl, Markus Meyer
  • Publication number: 20120181656
    Abstract: A method for manufacturing a semiconductor device and a semiconductor device are disclosed. The method comprises forming a trench in a substrate, partially filling the trench with a first semiconductive material, forming an interface along a surface of the first semiconductive material, and filling the trench with a second semiconductive material. The semiconductor device includes a first electrode arranged along sidewalls of a trench and a dielectric arranged over the first electrode. The semiconductor device further includes a second electrode at least partially filling the trench, wherein the second electrode comprises an interface within the second electrode.
    Type: Application
    Filed: January 14, 2011
    Publication date: July 19, 2012
    Inventors: Wolfgang Lehnert, Michael Stadtmueller, Stefan Pompl, Markus Meyer
  • Publication number: 20120080690
    Abstract: According to an embodiment, a composite wafer includes a carrier substrate having a graphite core and a monocrystalline semiconductor layer attached to the carrier substrate.
    Type: Application
    Filed: September 30, 2010
    Publication date: April 5, 2012
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze
  • Publication number: 20120083098
    Abstract: According to an embodiment, a composite wafer includes a carrier substrate having a graphite layer and a monocrystalline semiconductor layer attached to the carrier substrate.
    Type: Application
    Filed: August 9, 2011
    Publication date: April 5, 2012
    Applicant: Infineon Technologies AG
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze, Karsten Kellermann, Michael Sommer, Christian Rottmair, Roland Rupp