Abstract: There are provided a memory device and a manufacturing method of the memory device. The memory device includes: a first gate stack structure and a second gate stack structure, disposed on a substrate; and a slit disposed between the first gate stack structure and the second gate stack structure to electrically isolate the first gate stack structure and the second gate stack structure from each other.

Abstract: The present technology relates to a semiconductor memory device and a method of manufacturing the same. The semiconductor memory device includes a first stack structure, a plurality of first slits passing through the first stack structure in a vertical direction and extending in a first horizontal direction orthogonal to the vertical direction, a first source line layer contacting an a top portion of the first stack structure, a second source line layer directly contacting the first source line layer, a second stack structure contacting the second source line layer and overlapping with the first stack structure in the vertical direction, and a plurality of second slits passing through the second stack structure in the vertical direction and extending in a second horizontal direction orthogonal to the vertical direction.

Abstract: A memory device includes a first peripheral circuit having first page buffers is functionally divided into a cell region and a connection region. A first memory cell array positioned on the first peripheral circuit includes first bit lines that are electrically connected to the first page buffers. A second memory cell array positioned on the first memory cell array includes second bit lines, which are electrically connected to the first bit lines, respectively. The first peripheral circuit is able to make use of both memory arrays using connections between the two memory arrays.

Abstract: The present technology includes a memory device and a method of manufacturing the memory device. The memory device includes a memory block in which first and second connection regions and a cell region between the first and second connection regions are designated, a word line included in the memory block, a first drain selection line included in the memory block and positioned on the word line, a first drain contact contacting the first drain selection line of the first connection region, a second drain contact contacting the first drain selection line of the second connection region, and a first drain voltage supply line commonly contacting the first and second drain contacts.

Abstract: A memory device may include a stack structure including a plurality of conductive layers and a plurality of interlayer insulating layers, which are alternately stacked along a first direction, an opening extending in the first direction from at least one conductive layer, among the plurality of conductive layers, in the stack structure, and a contact plug in the opening. The opening may include a protrusion portion protruding in a second direction intersecting the first direction.

Abstract: There are provided a memory device and a manufacturing method of the memory device. The memory device includes: a first gate stack structure and a second gate stack structure, disposed on a substrate; and a slit disposed between the first gate stack structure and the second gate stack structure to electrically isolate the first gate stack structure and the second gate stack structure from each other.

Abstract: A memory device may include: a stack structure including a plurality of conductive layers and a plurality of interlayer insulating layers, which are alternately stacked along a first direction, the stack structure including a cell region and a contact region, the contact region extending from the cell region and having a stepped structure; a plurality of contact plugs respectively in contact with the plurality of conductive layers in the contact region, the plurality of contact plugs extending in the first direction; and a plurality of lower pillars respectively in contact with the contact plugs, the plurality of lower pillars being located on the bottom of the contact plugs in the stack structure. Each of the plurality of lower pillars may include a liner layer in contact with the stack structure, and a pillar structure surrounded by the liner layer.

Abstract: A semiconductor device, and a method of manufacturing the same, includes a gate stack including a plurality of conductive lines extending in a first horizontal direction, a first slit and a second slit passing through the gate stack in a vertical direction and extending in the first horizontal direction, and a plurality of cell plugs extending in the vertical direction orthogonal to the first horizontal direction in the gate stack between the first slit and the second slit. Each of the first slit and the second slit includes a first portion extending in a diagonal direction between the first horizontal direction and a second horizontal direction orthogonal to the first horizontal direction, and a second portion extending in the first horizontal direction.

Abstract: The present disclosure relates to a semiconductor memory device. The semiconductor memory device includes a gate stack, a hole penetrating the gate stack, and a channel structure. The hole has an undercut region defined on a sidewall thereof. The channel structure covers a portion of the undercut region and opens another portion of the undercut region.

Abstract: A memory device, and a method of manufacturing the same, includes a first select line including a first cell area, a second select line including a second cell area disposed in a first direction from the first cell area, a first separation pattern extending in a second direction intersecting the first direction between the first cell area and the second cell area, second separation patterns extending from both ends of the first separation pattern in the first direction and a third direction opposite the first direction, respectively, and a third separation pattern extending from at least one of the second separation patterns in the second direction, and disposed in a direction opposite the first separation pattern with respect to the at least one second separation pattern.

Abstract: A semiconductor device may include: a gate structure including insulating layers and conductive layers alternately stacked; first supports located in the gate structure, each first support including a second channel layer; second supports located in the gate structure, each second support including a barrier layer; and contact structures extending between the second supports through the gate structure, wherein each contact structure is connected to a corresponding conductive layer.

Abstract: A method of manufacturing a semiconductor device is provided. The method may include forming a stack, forming a preliminary stepped structure by patterning the stack, forming a first stepped structure, a second stepped structure, and an opening located between the first stepped structure and the second stepped structure by etching the preliminary stepped structure, forming a passivation layer that fills the opening and covers the first stepped structure, and forming a third stepped structure by etching the second stepped structure using the passivation layer as an etching barrier.

Abstract: In a method of manufacturing a semiconductor device, an additional, induced-stress-limiting structure may be provided on a surface, which opposes stress that can be induced in a semiconductor device during its manufacturing processes. Such a stress compensation layer may be formed on a surface to compensate a stress applied to the rest of structure.

Abstract: A semiconductor device may include a gate structure, a source structure that is disposed on the gate structure, channel structures that extend into the source structure through the gate structure and include a channel layer and a memory layer surrounding the channel layer, the memory layer including a cut area that exposes the channel layer, and a slit structure that extends into the source structure through the gate structure between the channel structures, an upper surface of the slit structure being disposed at a lower level than the cut area.

Abstract: A memory device includes: a memory cell array including a plurality of cell plugs; a first slit isolating the memory cell array into a plurality of memory regions, the first slit extending in a first direction; and second slits penetrating the plurality of memory regions, the second slits being arranged to be spaced apart from each other in a second direction intersecting the first direction. Gate lines included in each of the plurality of memory regions may be isolated from each other by the first slit. Each gate line located in the same layer among the gate lines included in each of the plurality of memory regions may extend through a first connection region between the second slits for each corresponding memory region.

Abstract: A semiconductor device may include: a first gate structure including a plurality of first conductive layers that are alternately stacked with a plurality of first insulating layers; a second gate structure including a plurality of second conductive layers that are alternately stacked with a plurality of second insulating layers; a third gate structure including third conductive layers that are alternately stacked with a plurality of third insulating layers; and a first contact plug extending into the first gate structure through the third gate structure and the second gate structure, the first contact plug connected to a first of the plurality of first conductive layers, and the first contact plug including a first inflection portion located at an interface between the second gate structure and the third gate structure.

Abstract: There are provided a memory device and a manufacturing method of a memory device. The memory device includes a plurality of conductive layers, support structures penetrating the plurality of conductive layers, a contact hole exposing any one of the plurality of conductive layers and any one of the plurality of support structures, and a contact disposed in the contact hole.

Abstract: There are provided a memory device and a manufacturing method thereof. The memory device includes: a first stack structure including a plurality of first interlayer insulating layers and a plurality of conductive layers for first word lines, which are alternately stacked; and a second stack structure including a plurality of second interlayer insulating layers and a plurality of conductive layers for second word lines, which are alternately stacked; a first etch stop layer disposed between the first stack structure and the second stack structure; and a plurality of first word line contacts extending to the inside of the first stack structure through the second stack structure and the first etch stop layer.

Abstract: A method of manufacturing a semiconductor device is provided. The method may include forming a stack, forming a preliminary stepped structure by patterning the stack, forming a first stepped structure, a second stepped structure, and an opening located between the first stepped structure and the second stepped structure by etching the preliminary stepped structure, forming a passivation layer that fills the opening and covers the first stepped structure, and forming a third stepped structure by etching the second stepped structure using the passivation layer as an etching barrier.

Abstract: A semiconductor device may include: a gate structure including conductive layers and insulating layers that are alternately stacked. Tapered supports formed in the gate structure layers have a first width at a first level of the layers and a second width smaller than the first width at a second level of the layers. A tapered contact structure is located between the tapered supports in the gate structure having a third width at the first level and a fourth width larger than the third width at the second level. The gate structure taper and the contact structure taper are “mirror images” of each other.