Patents by Inventor Won-ju Kim

Won-ju Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion generating apparatus for semiconductor manufacturing equipment including magnetic field switching apparatus
    Patent number: 5973329
    Abstract: An ion generating apparatus for semiconductor fabricating equipment includes a device for reversing the orientation of a magnetic field. In this manner, the potential energy of a plurality of filaments in the ion generating apparatus are maintained at a substantially equal level, and consequently, asymmetric damage to one of the plurality of filaments due to concentration and collision of the thermal electrons is prevented, thereby prolonging the maintenance cycle of the ion generating apparatus.
    Type: Grant
    Filed: April 22, 1998
    Date of Patent: October 26, 1999
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Won-ju Kim