Abstract: Provided is a substrate processing apparatus, more particularly, a substrate processing apparatus capable of suppressing an generation of process by-products in a substrate processing process. A substrate processing apparatus includes a chamber part configured to provide an inner space in which a substrate is processed, a gas supply part configured to supply a process gas to the inner space, a substrate support configured to support the substrate, a heating liner provided inside the chamber part to at least partially surround the inner space, and a heating part configured to heat the heating liner.

Abstract: A mid-gate assembly for a vehicle includes: a module frame installed between a passenger compartment and a cargo compartment of a vehicle and spaced apart from a floor of the vehicle; a mid-gate rotatably installed on the floor and configured to selectively close a lower side of the module frame by being rotated by a mid-gate regulator and open the lower side of the module frame by being folded toward the floor; and a back glass installed on the module frame and the mid-gate and configured to be selectively movable upward and downward by a back glass regulator.

Abstract: A non-transitory computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer. The data include: information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device. The overlay measurement device includes: a light source, an aperture that changes a beam from the light source to be suitable for photographing the first overlay mark or the second overlay mark, a detector that acquires an image of the first overlay mark and an image of the second overlay mark, a transceiver, and a processor electrically connected to the transceiver.

Abstract: This application relates to an optical sensor element. In one aspect, the optical sensor element includes a graphite column including one or more graphite rods. The optical sensor element may also include one or more first graphene layers partly or entirely covering each of both ends of the graphite column. The optical sensor element may further include one or more second graphene layers partly or entirely covering the outer circumferential surface of the graphite column. This application also relates to an optical sensor for measuring the concentration of a greenhouse gas and the optical sensor includes the optical sensor element.

Abstract: A display device includes at least one spatial light modulator displaying an image, a surface light source device providing an image display light from a rear direction of the spatial light modulator to the spatial light modulator, and at least one image transmission member forming a display path of an image displayed through at least one spatial light modulator, the surface light source device comprises an organic light emitting display surface in which light emitting pixels performing a surface light emission are disposed, and an emission driving circuit setting a light emission compensation value for the each of the block areas according to an average value of light emission grayscale deviation for each of the block areas of the organic light emitting display surface and compensating light emission grayscale in respect to the light emitting pixels by using the light emission compensation value for each of the block areas.

Abstract: Provided are a dielectric, a device including the same, and a method of preparing the dielectric. The dielectric material includes a NaNbO3 ternary material including a perovskite phase with a Sm element substituted into a Na site such that the NaNbO3 ternary material has a permittivity of 600 or more at 1 kHz, and a temperature coefficient of capacitance (TCC) of about ?15% to about 15% in a range of about ?55° C. to about +200° C.

Abstract: An embodiment of the present specification discloses a display device including a display panel including a display area and a non-display area adjacent to the display area and a metal dam disposed in the non-display area to surround at least three surfaces of the display panel. The display panel includes a substrate, a pixel driving circuit disposed on the substrate, and a light emitting element driven by the pixel driving circuit, the metal dam may be spaced a selected distance from an edge of the display panel, the metal dam may be formed of a plurality of metal layers connected through at least one hole, and the metal dam may include a first metal dam, a second metal dam, and a third metal dam that are disposed in the non-display area while surrounding at least three surfaces of the display area.

Abstract: A display device includes a first pixel region including a plurality of first pixels and a plurality of first gate control lines coupled to the first pixels, and a second pixel region spaced apart from the first pixel region. The second pixel region includes a plurality of second pixels and a plurality of second gate control lines coupled to the second pixels. The display device further includes a first non-pixel region disposed between the first pixel region and the second pixel region, and a first coupling line disposed in the first non-pixel region. The first coupling line commonly couples at least two first gate control lines and at least two second gate control lines.

Abstract: A control system for a fuel cell vehicle includes a driving motor of the fuel cell vehicle, a brake system of the fuel cell vehicle, and a controller configured to derive a required target regenerative braking torque when the fuel cell vehicle rolls in an opposite direction to a traveling direction on a slope and, when an available regenerative braking torque of the driving motor is less than the required target regenerative braking torque, control the brake system to generate braking torque by as much as a difference between the required target regenerative braking torque and the available regenerative braking torque.

Abstract: A display device includes: a display module including: a display panel including a first display surface having a first side and a second side opposite the first side, a second display surface extending from the first side at an angle with respect to the first display surface, and a third display surface extending from the second side at an angle with respect to the first display surface; and an input sensing circuit on the display panel; a first adhesive member on the first display surface, the second display surface, and the third display surface, the first adhesive member including an acrylic-based material; a second adhesive member on the first adhesive member, and including at least one of a polyurethane-based material, a polyethersulfone-based material, a polyamide-based material, or an ethylene-vinyl acetate-based material; and a window member on the second adhesive member.

Abstract: Provided is a surveillance system employing a plurality of unmanned aerial vehicles (UAVs), the surveillance system showing improved surveillance performance while optimizing common energy consumption for computing of all the UAVs and also providing a stable visual monitoring service using autonomous mobility of the plurality of UAVs regardless of movement of an object to be monitored and action uncertainty of an adjacent UAV.

Abstract: Provided are a drone taxi system based on multi-agent reinforcement learning and a drone taxi operation method using the same. The drone taxi system includes a plurality of drone taxies configured to receive call information including departure point information and destination information from passenger terminals present within a certain range and a control server configured to receive call information of passengers from each drone taxi, select a candidate passenger depending on whether a passenger is present, generate travel route information of each drone taxi from drone state information of the plurality of drone taxies through multi-agent reinforcement learning, and transmit the travel route information to the drone taxi.

Abstract: A junction passage control system based on a location of an OHT using a power line communication, includes: an OHT controller mounted on an OHT which moves along tracks; and a central controller that is installed in a junction section of the tracks and controls junction passing of a plurality of OHTs, wherein power lines are laid on the tracks in a zone from a start point of the junction section to an end point of the junction section, and the central controller and the OHT controller transmit and receive data for a junction passage control through power line communication to and from each other.

Abstract: A glass article used as a cover glass of a flexible display device has values of indices consistent with results of a pen drop test and excellent impact resistance characteristics.

Abstract: An electronic apparatus includes a display panel in which a central region and an edge region, adjacent to the central region, are defined, a functional layer disposed on a rear surface of the display panel and overlapping the central region, and a dam disposed on the rear surface of the display panel and overlapping the edge region. The functional layer includes a shock-absorbing material and a light-shielding material, and the dam includes a light-shielding material. A side surface of the functional layer is in contact with the dam.

Abstract: A composition for an organic optoelectronic device, an organic optoelectronic device including the same, and a display device, the composition including a first compound represented by Chemical Formula 1, and a second compound represented by Chemical Formula 2; or a combination of Chemical Formula 3 and Chemical Formula 4,

Abstract: A mother substrate for a display panel and a display panel using the same are disclosed. A mother substrate for a display panel includes a conductive ring disposed in a non-display area outside the display area and surrounding each of the display areas, and one or more dummy pixel driving circuits disposed in a non-display area outside the display area. An electrostatic discharge (ESD) prevention structure inside the dummy pixel driving circuit can prevent defects of display panels due to ESD occurring in the manufacturing process of the display panel.

Abstract: Provided are a substrate processing apparatus and a substrate processing method, which are capable of independently performing processes on a plurality of substrates in a multi-station chamber.

Abstract: In a method of manufacturing a packaging unit, a material layer is stacked for forming the semiconductor device on one surface of a substrate, a semiconductor device is formed by performing a semiconductor process on the material layer, a flow channel through which a cooling fluid flows is formed on the other surface of the substrate to enable direct cooling of the semiconductor device using the cooling fluid, a packaging block is disposed at a position spaced apart from the substrate for packaging of the semiconductor device, and an electrode placed on the packaging block is electrically connected to the semiconductor device, and a heat sink unit having a flow path forming portion in which a flow path communicating with the flow channel of the substrate is formed is arranged below the packaging block, and the substrate is combined with the heat sink unit.

Abstract: A display device includes a power supply to supply a first initialization power source to the pixels through a first initialization and to supply a second initialization power source to the pixels through a second power line.