Patents by Inventor Xiaosong Zhang

Xiaosong Zhang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230197627
    Abstract: An electronic device comprising a multideck structure including a base stack of materials and one or more stacks of materials on the base stack of materials, at least one high aspect ratio feature in an array region in the base stack of materials and in the one or more stacks of materials, and overlay marks including an optical contrast material in or on only an upper portion of the base stack of materials in an overlay mark region of the electronic device is disclosed. The overlay mark region is laterally adjacent to the array region and the overlay marks are adjacent to at least one additional high aspect ratio feature in the base stack of materials. Additional electronic devices and memory devices are disclosed.
    Type: Application
    Filed: February 13, 2023
    Publication date: June 22, 2023
    Inventors: Rohit Kothari, Harsh Narendrakumar Jain, John D. Hopkins, Xiaosong Zhang
  • Patent number: 11626423
    Abstract: In some embodiments, a memory array comprising strings of memory cells comprise laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Insulative pillars are laterally-between and longitudinally-along immediately-laterally-adjacent of the memory blocks. The pillars comprise vertically-spaced and radially-projecting insulative rings in the conductive tiers as compared to the insulative tiers. Other embodiments, including methods, are disclosed.
    Type: Grant
    Filed: July 12, 2021
    Date of Patent: April 11, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Xiaosong Zhang, Yi Hu, Tom J. John, Wei Yeeng Ng, Chandra Tiwari
  • Publication number: 20230063178
    Abstract: A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack structure, a stadium structure within the stack structure and comprising steps defined by horizontal ends of at least some of the tiers, a first ledge extending upward from a first uppermost step of the steps of the stadium structure and interfacing with a first internal sidewall of the two internal sidewalls of the stack structure, and a second ledge extending upward from a second, opposite uppermost step of the steps of the stadium structure and interfacing with a second, opposite internal sidewall of the two internal sidewalls.
    Type: Application
    Filed: December 29, 2021
    Publication date: March 2, 2023
    Inventors: Bo Zhao, Matthew J. King, Jason Reece, Michael J. Gossman, Shruthi Kumara Vadivel, Martin J. Barclay, Lifang Xu, Joel D. Peterson, Matthew Park, Adam L. Olson, David A. Kewley, Xiaosong Zhang, Justin B. Dorhout, Zhen Feng Yow, Kah Sing Chooi, Tien Minh Quan Tran, Biow Hiem Ong
  • Patent number: 11581264
    Abstract: An electronic device comprising at least one high aspect ratio feature in a base stack of materials, overlay marks in or on only an upper portion of the base stack of materials, and an additional stack of materials adjacent the base stack of materials, the additional stack of materials comprising the at least one high aspect ratio feature. Additional electronic devices and memory devices are disclosed, as are methods of forming high aspect ratio features in an electronic device.
    Type: Grant
    Filed: August 21, 2019
    Date of Patent: February 14, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Rohit Kothari, Harsh Narendrakumar Jain, John D. Hopkins, Xiaosong Zhang
  • Patent number: 11563027
    Abstract: Microelectronic devices include a lower deck and an upper deck, each comprising a stack structure with a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. A lower array of pillars extends through the stack structure of the lower deck, and an upper array of pillars extends through the stack structure of the upper deck. Along an interface between the lower deck and the upper deck, the pillars of the lower array align with the pillars of the upper array. At least at elevations comprising bases of the pillars, a pillar density of the pillars of the lower array differs from a pillar density of the pillars of the upper array, “pillar density” being a number of pillars per unit of horizontal area of the respective array. Related methods and electronic systems are also disclosed.
    Type: Grant
    Filed: September 9, 2020
    Date of Patent: January 24, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Md Zakir Ullah, Xiaosong Zhang, Adam L. Olson, Mohammad Moydul Islam, Tien Minh Quan Tran, Chao Zhu, Zhigang Yang, Merri L. Carlson, Hui Chin Chong, David A. Kewley, Kok Siak Tang
  • Publication number: 20220405592
    Abstract: A multi-feature log anomaly detection method includes steps of: preliminarily processing a log data set to obtain a log entry word group corresponding to all semantics of a log sequence in the log data set, and using the log entry word group as a semantic feature of the log sequence; extracting a type feature, a time feature and a quantity feature of the log sequence, and encoding the semantic feature, the type feature, the time feature and the quantity feature into a log feature vector set of the log sequence; training a BiGRU neural network model with all log feature vector sets to obtain a trained BiGRU neural network mode; and inputting the log data set to be detected into the trained BiGRU neural network model for prediction, and determining whether the log sequence is a normal or abnormal log sequence according to a prediction result.
    Type: Application
    Filed: August 25, 2022
    Publication date: December 22, 2022
    Inventors: Weina Niu, Xiaosong Zhang, Zimu Li
  • Patent number: 11520240
    Abstract: A method of aligning a wafer for semiconductor fabrication processes may include applying a magnetic field to a wafer, detecting one or more residual magnetic fields from one or more alignment markers within the wafer, responsive to the detected one or more residual magnetic fields, determining locations of the one or more alignment markers. The marker locations may be determined relative to an ideal grid, followed by determining a geometrical transformation model for aligning the wafer, and aligning the wafer responsive to the geometrical transformation model. Related methods and systems are also disclosed.
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: December 6, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms, Stephen J. Kramer
  • Publication number: 20220108927
    Abstract: A method for measuring overlay between an interest level and a reference level of a wafer includes applying a magnetic field to a wafer, detecting at least one residual magnetic field emitted from at least one registration marker of a first set of registration markers within the wafer, responsive to the detected one or more residual magnetic fields, determining a location of the at least one registration marker of the first set registration markers, determining a location of at least one registration marker of a second set of registration markers, and responsive to the respective determined locations of the at least one registration marker of the first set of registration markers and the at least one registration marker of the second set of registration markers, calculating a positional offset between an interest level of the wafer and a reference level of the wafer. Related methods and systems are also disclosed.
    Type: Application
    Filed: December 15, 2021
    Publication date: April 7, 2022
    Inventors: Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms, Stephen J. Kramer
  • Publication number: 20220077177
    Abstract: Microelectronic devices include a lower deck and an upper deck, each comprising a stack structure with a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. A lower array of pillars extends through the stack structure of the lower deck, and an upper array of pillars extends through the stack structure of the upper deck. Along an interface between the lower deck and the upper deck, the pillars of the lower array align with the pillars of the upper array. At least at elevations comprising bases of the pillars, a pillar density of the pillars of the lower array differs from a pillar density of the pillars of the upper array, “pillar density” being a number of pillars per unit of horizontal area of the respective array. Related methods and electronic systems are also disclosed.
    Type: Application
    Filed: September 9, 2020
    Publication date: March 10, 2022
    Inventors: Md Zakir Ullah, Xiaosong Zhang, Adam L. Olson, Mohammad Moydul Islam, Tien Minh Quan Tran, Chao Zhu, Zhigang Yang, Merri L. Carlson, Hui Chin Chong, David A. Kewley, Kok Siak Tang
  • Publication number: 20220077169
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Intervening material is laterally-between and longitudinally-along immediately-laterally-adjacent of the memory blocks. The intervening material comprises longitudinally-alternating first and second regions that individually have a vertically-elongated seam therein. The vertically-elongated seam in the first regions are taller than in the second regions. Additional embodiments, including method, are disclosed.
    Type: Application
    Filed: November 12, 2021
    Publication date: March 10, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Yi Hu, Ramey M. Abdelrahaman, Narula Bilik, Daniel Billingsley, Zhenyu Bo, Joan M. Kash, Matthew J. King, Andrew Li, David Neumeyer, Wei Yeeng Ng, Yung K. Pak, Chandra Tiwari, Yiping Wang, Lance Williamson, Xiaosong Zhang
  • Patent number: 11251096
    Abstract: A method for measuring overlay between an interest level and a reference level of a wafer includes applying a magnetic field to a wafer, detecting at least one residual magnetic field emitted from at least one registration marker of a first set of registration markers within the wafer, responsive to the detected one or more residual magnetic fields, determining a location of the at least one registration marker of the first set registration markers, determining a location of at least one registration marker of a second set of registration markers, and responsive to the respective determined locations of the at least one registration marker of the first set of registration markers and the at least one registration marker of the second set of registration markers, calculating a positional offset between an interest level of the wafer and a reference level of the wafer. Related methods and systems are also disclosed.
    Type: Grant
    Filed: September 5, 2018
    Date of Patent: February 15, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms, Stephen J. Kramer
  • Publication number: 20220016243
    Abstract: The present invention relates to methods, uses, and compositions for the treatment of cancer (e.g., a lung cancer; a cervical cancer; a breast cancer; a head and neck cancer; a liver cancer; a bladder cancer; a gastric cancer; an esophageal cancer; a pancreatic cancer; a kidney or renal cancer; a melanoma; an ovarian cancer; or a colorectal cancer). More specifically, the invention concerns the treatment of patients having cancer with an anti-TIGIT antagonist antibody, including treatment with an anti-TIGIT antagonist antibody in a combination therapy.
    Type: Application
    Filed: January 26, 2021
    Publication date: January 20, 2022
    Applicants: Genentech, Inc., Hoffmann-La Roche Inc.
    Inventors: Catherine LAI, Janet LAU, Anthony Jongha LEE, Shi LI, Yvonne Gail LIN-LIU, Christina Jeanne MATHENY, Diana MENDUS, Raymond D. MENG, Anh NGUYEN DUC, Jilpa Bhupendra PATEL, Thinh Quang PHAM, Isabelle Anne ROONEY, Heather Blythe STEVENS, Sarah Marie TROUTMAN, Lijia WANG, Yulei WANG, Patrick Georges Robert WILLIAMS, Benjamin WU, Yibing YAN, Aijing ZHANG, Xiaosong ZHANG, Marcus Dale BALLINGER, Hila BARAK, Elizabeth Alexandra BENNETT, Marcela Lucia CASTRO, Edward Namserk CHA, Hui Min Phyllis CHAN, Stephen CHUI, Christopher Roland COTTER, Viraj Vinay DEGAONKAR, Barbara Jennifer GITLITZ, Tien HOANG, Kimberly Mayumi KOMATSUBARA
  • Publication number: 20210399012
    Abstract: In some embodiments, a memory array comprising strings of memory cells comprise laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Insulative pillars are laterally-between and longitudinally-along immediately-laterally-adjacent of the memory blocks. The pillars comprise vertically-spaced and radially-projecting insulative rings in the conductive tiers as compared to the insulative tiers. Other embodiments, including methods, are disclosed.
    Type: Application
    Filed: July 12, 2021
    Publication date: December 23, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Xiaosong Zhang, Yi Hu, Tom J. John, Wei Yeeng Ng, Chandra Twari
  • Patent number: 11205654
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Intervening material is laterally-between and longitudinally-along immediately-laterally-adjacent of the memory blocks. The intervening material comprises longitudinally-alternating first and second regions that individually have a vertically-elongated seam therein. The vertically-elongated seam in the first regions are taller than in the second regions. Additional embodiments, including method, are disclosed.
    Type: Grant
    Filed: August 25, 2019
    Date of Patent: December 21, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Yi Hu, Ramey M. Abdelrahaman, Narula Bilik, Daniel Billingsley, Zhenyu Bo, Joan M. Kash, Matthew J. King, Andrew Li, David Neumeyer, Wei Yeeng Ng, Yung K. Pak, Chandra Tiwari, Yiping Wang, Lance Williamson, Xiaosong Zhang
  • Publication number: 20210375670
    Abstract: An apparatus comprises a structure including an upper insulating material overlying a lower insulating material, a conductive element underlying the lower insulating material, and a conductive material comprising a metal line and a contact. The conductive material extends from an upper surface of the upper insulating material to an upper surface of the conductive element. The structure also comprises a liner material adjacent the metal line. A width of an uppermost surface of the conductive material of the metal line external to the contact is relatively less than a width of an uppermost surface of the conductive material of the contact. Related methods, memory devices, and electronic systems are disclosed.
    Type: Application
    Filed: August 12, 2021
    Publication date: December 2, 2021
    Inventors: Xiaosong Zhang, Yongjun J. Hu, David A. Kewley, Md Zahid Hossain, Michael J. Irwin, Daniel Billingsley, Suresh Ramarajan, Robert J. Hanson, Biow Hiem Ong, Keen Wah Chow
  • Publication number: 20210317532
    Abstract: We found mutations of the R132 residue of isocitrate dehydrogenase 1 (IDH1) in the majority of grade II and III astrocytomas and oligodendrogliomas as well as in gliblastomas that develop from these lower grade lesions. Those tumors without mutations in IDH1 often had mutations at the analogous R172 residue of the closely related IDH2 gene. These findings have important implications for the pathogenesis and diagnosis of malignant gliomas.
    Type: Application
    Filed: November 6, 2020
    Publication date: October 14, 2021
    Inventors: Bert Vogelstein, Kenneth W. Kinzler, D. Williams Parsons, Xiaosong Zhang, Jimmy Cheng-Ho Lin, Rebecca J. Leary, Philipp Angenendt, Nickolas Papadopoulos, Victor Velculescu, Giovanni Parmigiani, Rachel Karchin, Sian Jones, Hai Yan, Darell Bigner, Chien-Tsun Kuan, Gregory J. Riggins
  • Publication number: 20210263429
    Abstract: A method of aligning a wafer for semiconductor fabrication processes may include applying a magnetic field to a wafer, detecting one or more residual magnetic fields from one or more alignment markers within the wafer, responsive to the detected one or more residual magnetic fields, determining locations of the one or more alignment markers. The marker locations may be determined relative to an ideal grid, followed by determining a geometrical transformation model for aligning the wafer, and aligning the wafer responsive to the geometrical transformation model. Related methods and systems are also disclosed.
    Type: Application
    Filed: May 7, 2021
    Publication date: August 26, 2021
    Inventors: Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms, Stephen J. Kramer
  • Patent number: 11101171
    Abstract: An apparatus comprises a structure including an upper insulating material overlying a lower insulating material, a conductive element underlying the lower insulating material, and a conductive material comprising a metal line and a contact. The conductive material extends from an upper surface of the upper insulating material to an upper surface of the conductive element. The structure also comprises a liner material adjacent the metal line. A width of an uppermost surface of the conductive material of the metal line external to the contact is relatively less than a width of an uppermost surface of the conductive material of the contact. Related methods, memory devices, and electronic systems are disclosed.
    Type: Grant
    Filed: August 16, 2019
    Date of Patent: August 24, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Xiaosong Zhang, Yongjun J. Hu, David A. Kewley, Md Zahid Hossain, Michael J. Irwin, Daniel Billingsley, Suresh Ramarajan, Robert J. Hanson, Biow Hiem Ong, Keen Wah Chow
  • Patent number: 11075219
    Abstract: In some embodiments, a memory array comprising strings of memory cells comprise laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Insulative pillars are laterally-between and longitudinally-along immediately-laterally-adjacent of the memory blocks. The pillars comprise vertically-spaced and radially-projecting insulative rings in the conductive tiers as compared to the insulative tiers. Other embodiments, including methods, are disclosed.
    Type: Grant
    Filed: August 20, 2019
    Date of Patent: July 27, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Xiaosong Zhang, Yi Hu, Tom J. John, Wei Yeeng Ng, Chandra Tiwari
  • Patent number: 11009798
    Abstract: A method of aligning a wafer for semiconductor fabrication processes may include applying a magnetic field to a wafer, detecting one or more residual magnetic fields from one or more alignment markers within the wafer, responsive to the detected one or more residual magnetic fields, determining locations of the one or more alignment markers. The marker locations may be determined relative to an ideal grid, followed by determining a geometrical transformation model for aligning the wafer, and aligning the wafer responsive to the geometrical transformation model. Related methods and systems are also disclosed.
    Type: Grant
    Filed: September 5, 2018
    Date of Patent: May 18, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms, Stephen J. Kramer