Abstract: An article comprises a body having a coating. The coating comprises a Y-O-F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.

Abstract: A method of applying a multi-layer plasma resistant coating on an article comprises performing plating or ALD to form a conformal first plasma resistant layer on an article, wherein the conformal first plasma resistant layer is formed on a surface of the article and on walls of high aspect ratio features in the article. The conformal first plasma resistant coating has a porosity of approximately 0% and a thickness of approximately 200 nm to approximately 1 micron. One of electron beam ion assisted deposition (EB-IAD), plasma enhanced chemical vapor deposition (PECVD), aerosol deposition or plasma spraying is then performed to form a second plasma resistant layer that covers the conformal first plasma resistant layer at a region of the surface but not at the walls of the high aspect ratio features.

Abstract: An article comprises a body having a coating. The coating comprises a Y—O—F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.

Abstract: Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a chamber component using an atomic layer deposition (ALD) process. The plasma resistant coating has a stress relief layer and a rare earth metal-containing oxide layer and uniformly covers features, such as those having an aspect ratio of about 3:1 to about 300:1.

Abstract: Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a chamber component using an atomic layer deposition (ALD) process. The plasma resistant coating has a stress relief layer and a layer comprising a solid solution of Y2O3—ZrO2 and uniformly covers features, such as those having an aspect ratio of about 3:1 to about 300:1.

Abstract: Determining a Curie temperature (Tc) distribution of a sample comprising magnetic material involves subjecting the sample to an electromagnetic field, heating the sample over a range of temperatures, generating a signal representative of a parameter of the sample that changes as a function of changing sample temperature while the sample is subjected to the electromagnetic field, and determining the Tc distribution of the sample using the generated signal and a multiplicity of predetermined parameters of the sample.

Abstract: A multi-layer coating for a surface of an article comprises a diffusion barrier layer and an erosion resistant layer. The diffusion barrier layer may be a nitride film including but not limited to TiNx, TaNx, Zr3N4, and TiZrxNy. The erosion resistant layer may be a rare oxide film comprising YZrxOy. The diffusion barrier layer and the erosion resistant layer may be deposited on the article's surface using a thin film deposition technique including but not limited to, ALD, PVD, and CVD.

Abstract: A multi-layer coating for a surface of an article comprising a diffusion barrier layer and an erosion resistant layer. The diffusion barrier layer may be a nitride film including but not limited to TiNx, TaNx, Zr3N4, and TiZrxNy. The erosion resistant layer may be a rare oxide film including but not limited to YF3, Y2O3, Er2O3, Al2O3, ZrO2, ErAlxOy, YOxFy, YAlxOy, YZrxOy and YZrxAlyOz. The diffusion barrier layer and the erosion resistant layer may be deposited on the article's surface using a thin film deposition technique including but not limited to, ALD, PVD, and CVD.

Abstract: The disclosure provides bio-asphalt, bio-asphalt compositions and a method for preparing them. It belongs to the technical field of asphalt material. The method of the disclosure uses bio-oil as the raw material, adopts a combination of extraction process and oxidation process to prepare bio-asphalt, and modifies the product obtained from bio-oil by extraction process or bio-asphalt with ordinary petroleum asphalt and/or aromatic hydrocarbon oil and a macromolecular material to obtain a bio-asphalt composition.

Abstract: An apparatus includes a substrate and a magnetic layer coupled to the substrate. The magnetic layer includes an alloy that has magnetic hardness that is a function of the degree of chemical ordering of the alloy. The degree of chemical ordering of the alloy in a first portion of the magnetic layer is greater than the degree of chemical ordering of the alloy in a second portion of the magnetic layer, and the first portion of the magnetic layer is closer to the substrate than the second portion of the magnetic layer.

Abstract: A device and method to facilitate display navigation by touch-less gesture are described. The device includes two or more ambient light sensors arranged at respective surface locations of the device, each of the two or more ambient light sensors measuring light intensity at the respective surface location. The device also includes a processor to detect a gesture as a detected gesture performed by an object in touch-less communication with the device and output a signal corresponding with the detected gesture, and a navigation gesture library to store two or more gestures and corresponding two or more signals, wherein the processor accesses the navigation gesture library when the device is not executing an application with an associated application gesture library.

Abstract: A device operable using touch-less and touchscreen gestures and a method and system to operate the device are described. The device includes two or more ambient light sensors arranged at respective surface locations of the device and sensing light intensity at the respective surface locations. The device also includes a processor coupled to the two or more ambient light sensors to identify a touch-less gesture based on the light intensity sensed by the two or more ambient light sensors, receive a touchscreen gesture, and operate the device based on the touch-less gesture and the touchscreen gesture.