Abstract: A method of making a mold directly from the object to be molded is disclosed. The object is placed within a walled enclosure having a closed bottom and open top. A plurality of elongated metal rod elements is vertically introduced and packed into the enclosure in vertical contact with said object and side by side contact with one another. An infiltration agent, such as a liquid resin or metal, is introduced over the elongated metal rod elements and allow to permeate into the spaces between the rod elements. The mass consisting of the liquid infiltration agent and the elongated metal elements is allowed to solidify into a mold which is removed from the object.

Abstract: A micromachined membrane particle filter is formed by making holes in a silicon and coating over the holes with Parylene.

Abstract: A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

Abstract: A method of making a mould directly from the object to be moulded is disclosed. The object is placed within a walled enclosure having a closed bottom and open top. A plurality of elongated metal rod elements is vertically introduced and packed into the enclosure in vertical contact with said object and side by side contact with one another. An infiltration agent, such as a liquid resin or metal, is introduced over the elongated metal rod elements and allow to permeate into the spaces between the rod elements. The mass consisting of the liquid infiltration agent and the elongated metal elements is allowed to solidify into a mould which is removed from the object.

Abstract: A fuel cell is used to create pressure by reverse biasing the fuel cell. A voltage is applied across the fuel cell to change the liquid near the fuel cell into gas, and expand its volume. The volume expansion is used for work function, either to expand a housing or move a piston or the like. By removing the voltage, the fuel cell can regenerate by absorbing the gas to again create energy, thereby retracting the volume expansion. In an embodiment, water may be the electrolyte which is electrolyzed to form hydrogen and oxygen gas, and then recombined into water.

Abstract: A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

Abstract: An anti stiction structure for cantilever formation technique. In one embodiment, the polymer cantilever is prevented from sticking to the substrate by at amortized stick layer on the substrate during formation that is later removed as a sacrificial layer. In another embodiment, the cantilever includes downwardly extending legs.

Abstract: A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

Abstract: A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

Abstract: A micromachined membrane particle filter is formed by making holes in a silicon and coating over the holes with Parylene.

Abstract: A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

Abstract: A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

Abstract: A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed. The microbellows membrane is manufactured by alternating deposition of structural layers and sacrificial layers on a substrate. The structural layers can be made of silicon nitride and the sacrificial layers can be made of polysilicon. The substrate is etched from the back to form an opening exposing the sacrificial layers, and then the membrane is released by etching away the sacrificial layers.

Abstract: A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed.

Abstract: A micromachined, high Reynolds number, sub-millisecond liquid mixer for the study of chemical reaction kinetics. This bulk micromachined silicon mixer is capable of initiating and quenching chemical reactions in intervals as short as 100 .mu.s. The mixer chip contains two tee mixers connected by one channel which serves as a reaction chamber. Each tee mixer consists of opposing channels where liquids meet head-on and exit into a third channel forming the base of a "T".