Patents by Inventor Xinwei Chen

Xinwei Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck and production method therefor
    Publication number: 20040196614
    Abstract: The present invention provides an electrostatic chuck comprising a substrate, a dielectric layer formed by thermal spraying on an upper face of the substrate, an internal electrode embedded in the dielectric layer, a feeder terminal portion extending from a lower face of the substrate to the internal electrode, and an electrode provided in the feeder terminal portion, wherein the feeder terminal portion and the substrate are fixed to each other by mechanical joining.
    Type: Application
    Filed: April 1, 2004
    Publication date: October 7, 2004
    Applicant: NHK SPRING CO., LTD.
    Inventors: Shinya Miyaji, Xinwei Chen, Shinji Saito