Patents by Inventor Ya-Chen Kao

Ya-Chen Kao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140141533
    Abstract: One method includes forming an anti-ferromagnetic layer on a substrate. A ferromagnetic layer may be formed on the anti-ferromagnetic layer. The ferromagnetic layer includes a first, second and third portions where the second portion is located between the first and third portions. A first ion irradiation is performed to only one portion of the ferromagnetic layer. A second ion irradiation is performed to another portion of the ferromagnetic layer.
    Type: Application
    Filed: January 31, 2014
    Publication date: May 22, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Huang Lai, Sheng-Huang Huang, Kuo-Feng Huang, Ming-Te Liu, Chun-Jung Lin, Ya-Chen Kao, Wen-Cheng Chen
  • Patent number: 8648401
    Abstract: A semiconductor memory device includes a first ferromagnetic layer magnetically pinned and positioned within a first region of a substrate; a second ferromagnetic layer approximate the first ferromagnetic layer; and a barrier layer interposed between the first ferromagnetic layer and the first portion of the second ferromagnetic layer. The second ferromagnetic layer includes a first portion being magnetically free and positioned within the first region; a second portion magnetically pinned to a first direction and positioned within a second region of the substrate, the second region contacting the first region from a first side; and a third portion magnetically pinned to a second direction and positioned within a third region of the substrate, the third region contacting the first region from a second side.
    Type: Grant
    Filed: September 17, 2010
    Date of Patent: February 11, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Huang Lai, Sheng-Huang Huang, Kuo-Feng Huang, Ming-Te Liu, Chun-Jung Lin, Ya-Chen Kao, Wen-Cheng Chen
  • Patent number: 8629518
    Abstract: A magnetic tunnel junction (MTJ) etching process uses a sacrifice layer. An MTJ cell structure includes an MTJ stack with a first magnetic layer, a second magnetic layer, and a tunnel barrier layer in between the first magnetic layer and the second magnetic layer, and a sacrifice layer adjacent to the second magnetic layer, where the sacrifice layer protects the second magnetic layer in the MTJ stack from oxidation during an ashing process. The sacrifice layer does not increase a resistance of the MTJ stack. The sacrifice layer can be made of Mg, Cr, V, Mn, Ti, Zr, Zn, or any alloy combination thereof, or any other suitable material. The sacrifice layer can be multi-layered and/or have a thickness ranging from 5 ? to 400 ?. The MTJ cell structure can have a top conducting layer over the sacrifice layer.
    Type: Grant
    Filed: July 1, 2010
    Date of Patent: January 14, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Jen Wang, Ya-Chen Kao, Chun-Jung Lin
  • Patent number: 8570792
    Abstract: A magnetoresistive random access memory (MRAM) cell includes a magnetic tunnel junction (MTJ), a top electrode disposed over the MTJ, a bottom electrode disposed below the MTJ, and an induction line disposed above or below the MTJ. The induction line is configured to induce a magnetic field at the MTJ.
    Type: Grant
    Filed: January 24, 2012
    Date of Patent: October 29, 2013
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tien-Wei Chiang, Kai-Chun Lin, Ya-Chen Kao, Hung-Chang Yu
  • Publication number: 20130200475
    Abstract: A magnetoresistive random access memory (MRAM) device and a method of manufacture are provided. The MRAM device comprises a magnetic pinned layer, a compound GMR structure acting as a free layer, and a non-magnetic barrier layer separating the pinned and GMR layers. The barrier layer is provided to reduce the magnetic coupling of the free layer and GMR structure, as well as provide a resistive state (high or low) for retaining binary data (0 or 1) in the device. The GMR structure provides physical electrode connectivity for set/clear memory functionality which is separated from the physical electrode connectivity for the read functionality for the memory device.
    Type: Application
    Filed: February 2, 2012
    Publication date: August 8, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tien-Wei Chiang, Chwen Yu, Ya-Chen Kao
  • Publication number: 20130188418
    Abstract: A magnetoresistive random access memory (MRAM) cell includes a magnetic tunnel junction (MTJ), a top electrode disposed over the MTJ, a bottom electrode disposed below the MTJ, and an induction line disposed above or below the MTJ. The induction line is configured to induce a magnetic field at the MTJ.
    Type: Application
    Filed: January 24, 2012
    Publication date: July 25, 2013
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tien-Wei CHIANG, Kai-Chun LIN, Ya-Chen KAO, Hung-Chang YU
  • Publication number: 20130155759
    Abstract: Test structures, methods of manufacturing thereof, test methods, and magnetic random access memory (MRAM) arrays are disclosed. In one embodiment, a test structure is disclosed. The test structure includes an MRAM cell having a magnetic tunnel junction (MTJ) and a transistor coupled to the MTJ. The test structure includes a test node coupled between the MTJ and the transistor, and a contact pad coupled to the test node.
    Type: Application
    Filed: December 16, 2011
    Publication date: June 20, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ya-Chen Kao, Tien-Wei Chiang, Chun-Jung Lin
  • Patent number: 8450722
    Abstract: A magnetoresistive random access memory (MRAM) cell includes a magnetic tunnel junction (MTJ), a top electrode disposed over the MTJ, a bottom electrode disposed below the MTJ, and an induction line disposed to one side of the MTJ. The induction line is configured to induce a perpendicular magnetic field at the MTJ.
    Type: Grant
    Filed: July 15, 2011
    Date of Patent: May 28, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Te Liu, Tien-Wei Chiang, Ya-Chen Kao, Wen-Cheng Chen
  • Patent number: 8416600
    Abstract: Apparatus and methods are disclosed herein for a reverse-connection STT MTJ element of a MRAM to overcome the source degeneration effect when switching the magnetization of the MTJ element from the parallel to the anti-parallel direction. A memory cell of a MRAM having a reverse-connection MTJ element includes a switching device having a source, a gate, and a drain, and a reverse-connection MTJ device having a free layer, a fixed layer, and an insulator layer interposed between the free layer and the fixed layer. The free layer of the reverse-connection MTJ device is connected to the drain of the switching device and the fixed layer is connected to a bit line (BL). The reverse-connection MTJ device applies the lower IMTJ capability of the memory cell caused by the source degeneration effect to the less stringent IMTJ(AP->P) while preserving the higher IMTJ capability for the more demanding IMTJ(P->AP).
    Type: Grant
    Filed: November 25, 2009
    Date of Patent: April 9, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Jung Lin, Yu-Jen Wang, Ya-Chen Kao, Wen-Cheng Chen, Ming-Te Liu
  • Publication number: 20130075839
    Abstract: The present disclosure provides a MTJ stack for an MRAM device. The MTJ stack includes a pinned ferromagnetic layer over a pinning layer; a tunneling barrier layer over the pinned ferromagnetic layer; a free ferromagnetic layer over the tunneling barrier layer; a conductive oxide layer over the free ferromagnetic layer; and a oxygen-based cap layer over the conductive oxide layer.
    Type: Application
    Filed: September 24, 2011
    Publication date: March 28, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Ming Chen, Ya-Chen Kao, Ming-Te Liu, Chung-Yi Yu, Cheng-Yuan Tsai, Chun-Jung Lin
  • Publication number: 20130038418
    Abstract: A communications structure comprises a first semiconductor substrate having a first coil, and a second semiconductor substrate having a second coil above the first semiconductor substrate. Inner edges of the first and second coils define a boundary of a volume that extends below the first coil and above the second coil. A ferromagnetic core is positioned at least partially within the boundary, such that a mutual inductance is provided between the first and second coils for wireless transmission of signals or power between the first and second coils.
    Type: Application
    Filed: August 10, 2011
    Publication date: February 14, 2013
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ping-Lin Yang, Jun-De Jin, Fu-Lung Hsueh, Sa-Lly Liu, Tong-Chern Ong, Chun-Jung Lin, Ya-Chen Kao
  • Publication number: 20130015538
    Abstract: A magnetoresistive random access memory (MRAM) cell includes a magnetic tunnel junction (MTJ), a top electrode disposed over the MTJ, a bottom electrode disposed below the MTJ, and an induction line disposed to one side of the MTJ. The induction line is configured to induce a perpendicular magnetic field at the MIJ.
    Type: Application
    Filed: July 15, 2011
    Publication date: January 17, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Te LIU, Tien-Wei CHIANG, Ya-Chen KAO, Wen-Cheng CHEN
  • Publication number: 20120068279
    Abstract: A semiconductor memory device includes a first ferromagnetic layer magnetically pinned and positioned within a first region of a substrate; a second ferromagnetic layer approximate the first ferromagnetic layer; and a barrier layer interposed between the first ferromagnetic layer and the first portion of the second ferromagnetic layer. The second ferromagnetic layer includes a first portion being magnetically free and positioned within the first region; a second portion magnetically pinned to a first direction and positioned within a second region of the substrate, the second region contacting the first region from a first side; and a third portion magnetically pinned to a second direction and positioned within a third region of the substrate, the third region contacting the first region from a second side.
    Type: Application
    Filed: September 17, 2010
    Publication date: March 22, 2012
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Huang Lai, Sheng-Huang Huang, Kuo-Feng Huang, Ming-Te Liu, Chun-Jung Lin, Ya-Chen Kao, Wen-Cheng Chen
  • Patent number: 8110881
    Abstract: A MRAM cell structure includes a bottom electrode; a magnetic tunnel junction unit disposed on the bottom electrode; a top electrode disposed on the magnetic tunnel junction unit; and a blocking layer disposed on the top electrode, wherein the blocking layer is wider than the magnetic tunnel junction unit for preventing against formation of a short circuit between a contact and the magnetic tunnel junction unit.
    Type: Grant
    Filed: September 27, 2007
    Date of Patent: February 7, 2012
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ya-Chen Kao, Chun-Jung Lin, Yu-Jen Wang, Hsu-Chen Cheng, Feng-Jia Shiu, Yung-Tao Lin
  • Patent number: 7951670
    Abstract: A split gate memory cell. A floating gate is disposed on and insulated from a substrate comprising an active area separated by a pair of isolation structures formed therein. The floating gate is disposed between the pair of isolation structures and does not overlap the upper surface thereof. A cap layer is disposed on the floating gate. A control gate is disposed over the sidewall of the floating gate and insulated therefrom, partially extending to the upper surface of the cap layer. A source region is formed in the substrate near one side of the floating gate.
    Type: Grant
    Filed: March 6, 2006
    Date of Patent: May 31, 2011
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chen-Ming Huang, Hung-Cheng Sung, Wen-Ting Chu, Chang-Jen Hsieh, Ya-Chen Kao
  • Publication number: 20110122674
    Abstract: Apparatus and methods are disclosed herein for a reverse-connection STT MTJ element of a MRAM to overcome the source degeneration effect when switching the magnetization of the MTJ element from the parallel to the anti-parallel direction. A memory cell of a MRAM having a reverse-connection MTJ element includes a switching device having a source, a gate, and a drain, and a reverse-connection MTJ device having a free layer, a fixed layer, and an insulator layer interposed between the free layer and the fixed layer. The free layer of the reverse-connection MTJ device is connected to the drain of the switching device and the fixed layer is connected to a bit line (BL). The reverse-connection MTJ device applies the lower IMTJ capability of the memory cell caused by the source degeneration effect to the less stringent IMTJ(AP->P) while preserving the higher IMTJ capability for the more demanding IMTJ(P->AP).
    Type: Application
    Filed: November 25, 2009
    Publication date: May 26, 2011
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: CHUN-JUNG LIN, Yu-Jen Wang, Ya-Chen Kao, Wen-Cheng Chen, Ming-Te Liu
  • Publication number: 20110001201
    Abstract: A magnetic tunnel junction (MTJ) etching process uses a sacrifice layer. An MTJ cell structure includes an MTJ stack with a first magnetic layer, a second magnetic layer, and a tunnel barrier layer in between the first magnetic layer and the second magnetic layer, and a sacrifice layer adjacent to the second magnetic layer, where the sacrifice layer protects the second magnetic layer in the MTJ stack from oxidation during an ashing process. The sacrifice layer does not increase a resistance of the MTJ stack. The sacrifice layer can be made of Mg, Cr, V, Mn, Ti, Zr, Zn, or any alloy combination thereof, or any other suitable material. The sacrifice layer can be multi-layered and/or have a thickness ranging from 5 ? to 400 ?. The MTJ cell structure can have a top conducting layer over the sacrifice layer.
    Type: Application
    Filed: July 1, 2010
    Publication date: January 6, 2011
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Jen WANG, Ya-Chen KAO, Chun-Jung LIN
  • Patent number: 7834410
    Abstract: The present disclosure provides a semiconductor memory device. The device includes a bottom electrode over a semiconductor substrate; an anti-ferromagnetic layer disposed over the bottom electrode; a pinned layer disposed over the anti-ferromagnetic layer; a barrier layer disposed over the pinned layer; a first ferromagnetic layer disposed over the barrier layer; a buffer layer disposed over the first ferromagnetic layer, the buffer layer including tantalum; a second ferromagnetic layer disposed over the buffer layer; and a top electrode disposed over the second ferromagnetic layer.
    Type: Grant
    Filed: April 13, 2009
    Date of Patent: November 16, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Jen Wang, Ya-Chen Kao, Chun-Jung Lin
  • Publication number: 20100258886
    Abstract: The present disclosure provides a semiconductor memory device. The device includes a bottom electrode over a semiconductor substrate; an anti-ferromagnetic layer disposed over the bottom electrode; a pinned layer disposed over the anti-ferromagnetic layer; a barrier layer disposed over the pinned layer; a first ferromagnetic layer disposed over the barrier layer; a buffer layer disposed over the first ferromagnetic layer, the buffer layer including tantalum; a second ferromagnetic layer disposed over the buffer layer; and a top electrode disposed over the second ferromagnetic layer.
    Type: Application
    Filed: April 13, 2009
    Publication date: October 14, 2010
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Jen Wang, Ya-Chen Kao, Chun-Jung Lin
  • Patent number: 7683447
    Abstract: A method for fabricating a magnetoresistive random access memory (MRAM) device having a plurality of memory cells includes: forming a fixed magnetic layer having magnetic moments fixed in a predetermined direction; forming a tunnel layer over the fixed magnetic layer; forming a free magnetic layer, having magnetic moments aligned in a direction that is adjustable by applying an electromagnetic field, over the tunnel layer; forming a hard mask on the free magnetic layer partially covering the free magnetic layer; and unmagnetizing portions of the free magnetic layer uncovered by the hard mask for defining one or more magnetic tunnel junction (MTJ) units.
    Type: Grant
    Filed: September 12, 2007
    Date of Patent: March 23, 2010
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Jen Wang, Young-Shying Chen, Ya-Chen Kao, Chun-Jung Lin