Abstract: A method for processing a substrate by plasma CVD includes: (i) forming a film on a substrate placed on a susceptor by applying RF power between the susceptor and a shower plate in the presence of a film-forming gas in a reactor; and (ii) upon completion of step (i), without unloading the substrate, applying amplitude-modulated RF power between the susceptor and the shower plate in the absence of a film-forming gas but in the presence of a non-film-forming gas to reduce a floating potential of the substrate.

Abstract: A circuit for measuring DC bias voltage occurring in an ungrounded electrode of a plasma processing apparatus, includes: a first terminal connected between the ungrounded electrode and the RF power source; a second terminal for determining a value of the DC bias voltage; a first resistance connected between the first terminal and the second terminal; a second resistance connected between the second terminal and a ground; and a condenser disposed in parallel to the second resistance between the second terminal and the ground. The sum of the first resistance value and the second resistance value is about 50 M? or greater.

Abstract: A method for monitoring plasma-induced damage to a substrate while being processed in a plasma CVD apparatus includes: measuring DC floating potential of the substrate using a detection electrode in contact with the substrate while the substrate is processed in the apparatus; and detecting abnormality as plasma-induced damage based on the measured DC floating potential.

Abstract: A resin worm wheel is formed by injection molding and includes a first end and a second end. The worm wheel is adapted to be driven by a worm. The worm wheel further includes: an engaging portion including a plurality of teeth engageable with the worm and a tooth space formed between the neighboring teeth; a first non-engaging portion adjacent to the engaging portion at the first end of the worm wheel and not engaging with the worm; and a first cutout portion formed at the first non-engaging portion continuously from the tooth space, the first cutout portion extending axially.

Abstract: A plasma CVD apparatus for forming a thin film on a substrate includes: a vacuum chamber; an upper electrode; a susceptor as a lower electrode; and a ring-shaped insulation plate disposed in a gap between the susceptor and an inner wall of the chamber in the vicinity of or in contact with the susceptor to minimize a floating potential charged on the substrate while processing the substrate.

Abstract: An actuating mechanism for a switching device includes a plurality of electromagnets used in combination. Each electromagnet includes a coil, a movable iron core adapted to move on the center axis of the coil, and a stationary iron core provided so as to cover the upper and lower surfaces and the outer peripheral surface of the coil. A permanent magnet is arranged in a gap surrounded by the movable iron core and the stationary core.

Abstract: An electromagnet a coil, a movable iron core adapted to move on the center axis of the coil, and a stationary iron core provided so as to cover the upper and lower surfaces and the outer peripheral surface of the coil. A permanent magnet is arranged in a gap surrounded by the movable iron core and the stationary core.

Abstract: A circuit for measuring DC bias voltage occurring in an ungrounded electrode of a plasma processing apparatus, includes: a first terminal connected between the ungrounded electrode and the RF power source; a second terminal for determining a value of the DC bias voltage; a first resistance connected between the first terminal and the second terminal; a second resistance connected between the second terminal and a ground; and a condenser disposed in parallel to the second resistance between the second terminal and the ground. The sum of the first resistance value and the second resistance value is about 50 M? or greater.

Abstract: An attachment structure for installing a load sensor to a vehicle seat includes the load sensor having a plate-shaped strain unit and a strain gauge for detecting a strain of the plate-shaped strain unit. The load sensor is structured that one end of the plate-shaped strain unit is fixed to a seating portion of the vehicle seat and the other end of the strain unit is fixed to a vehicle body. Also, a strain portion is defined between each fixed end of the plate-shaped strain unit, and the strain portion is deformable in a vertical direction relative to the vehicle seat. In addition, a load input point from the seating portion is defined approximately at a central portion of the strain portion of the plate-shaped strain unit.

Abstract: A vacuum switch comprises a vacuum container, a grounding switch and a load switch disposed in the container, and an external connection conductor disposed in the vacuum container and to be connected electrically inside and outside the vacuum container, and it is characterized in that the grounding switch and the external connection conductor are electrically connected to each other in the vacuum container.

Abstract: An electromagnet includes a coil, a movable iron core adapted to move on the center axis of the coil, and a stationary iron core provided so as to cover the upper and lower surfaces and the outer peripheral surface of the coil. A permanent magnet is arranged in a gap surrounded by the movable iron core and the stationary core.

Abstract: Disclosed is a vacuum switchgear wherein a ground switch, a load switch, and an external connecting conductor to be electrically connected with the inside and outside of the vacuum container are provided in a vacuum container; the ground switch and the external connecting conductor are electrically connected in the vacuum container; and the vacuum container has a joint construction of a body portion having openings on both ends thereof, and a lid joined to the opening of the body.

Abstract: A semiconductor substrate supporting apparatus for supporting a single semiconductor substrate in a plasma CVD apparatus comprises a placing block having a substrate placing area on which the substrate is placed. The substrate placing area is anodized and has as an outermost film an anodic oxide film having a thickness of about 30 ?m to about 60 ?m and/or a dielectric breakdown voltage of about 300 V or higher.

Abstract: A vacuum switch comprises a vacuum container, a grounding switch and a load switch disposed in the container, and an external connection conductor disposed in the vacuum container and to be connected electrically inside and outside the vacuum container, and it is characterized in that the grounding switch and the external connection conductor are electrically connected to each other in the vacuum container.

Abstract: Disclosed is a vacuum switchgear wherein a ground switch, a load switch, and an external connecting conductor to be electrically connected with the inside and outside of the vacuum container are provided in a vacuum container; the ground switch and the external connecting conductor are electrically connected in the vacuum container; and the vacuum container has a joint construction of a body portion having openings on both ends thereof, and a lid joined to the opening of the body.

Abstract: A vacuum switch comprises a vacuum container, a grounding switch and a load switch disposed in the container, and an external connection conductor disposed in the vacuum container and to be connected electrically inside and outside the vacuum container, and it is characterized in that the grounding switch and the external connection conductor are electrically connected to each other in the vacuum container.

Abstract: An electromagnet includes a coil, a movable iron core adapted to move on the center axis of the coil, and a stationary iron core provided so as to cover the upper and lower surfaces and the outer peripheral surface of the coil. A permanent magnet is arranged in a gap surrounded by the movable iron core and the stationary core.

Abstract: An electromagnet includes a coil, a movable iron core adapted to move on the center axis of the coil, and a stationary iron core provided so as to cover the upper and lower surfaces and the outer peripheral surface of the coil. A permanent magnet is arranged in a gap surrounded by the movable iron core and the stationary core.

Abstract: An electromagnet composed of a coil, a movable iron core adapted to move on the center axis of the coil, and a stationary iron core provided so as to cover the upper and lower surfaces and the outer peripheral surface of the coil, characterized by a permanent magnet arranged in a gap surrounded by the movable iron core and the stationary core, wherein the movable iron core is attracted by the stationary iron core by a magnetic field created by the permanent magnet, thereby it is possible to solve a problem inherent to a conventional electromagnet such that a permanent magnet is directly energized in a reverse direction during release operation so as to cause demagnetization of the permanent magnet.

Abstract: An electric contact member has a texture wherein fire proof metal powder having the form of a flat plate is diffused in a matrix of a highly conductive metal. The flat surface is oriented in one direction and the surface in parallel with the flat surface of the fire proof metal powder is used as a contact point face.