Abstract: A method of forming a resist on a substrate and processing the resist in a resist processing system having a processing region and a non-processing region which are air-conditioned, the method comprising the steps of, transferring the substrate into the non-processing region, coating the resist on the substrate, exposing the coated resist, developing the exposed resist, subjecting the coated resist at least once, to heat treatment in a period from the transferring step to the developing step, detecting at least once, the concentration of an alkaline component which causes defective resolution of the resist in a processing atmosphere in a period from the transferring step to the developing step, setting a threshold value for the concentration of the alkaline component in the processing atmosphere which causes the defective resolution of the resist, and controlling and changing at least one processing atmosphere in the steps in accordance with a detected concentration of the alkaline component and the threshold

Abstract: A method of subjecting a plurality of wafers to coating and beating treatments where a first boat is placed on a stage arranged in an interface section. The first boat is capable of containing the wafers stacked at intervals in a vertical direction. The stage is capable of moving in a horizontal direction, and has a plurality of positions for respectively placing a plurality of boats. The wafers are conveyed from a supply section to a coating section, and are subjected to a coating treatment one by one. The wafers, which have undergone the coating treatment, are conveyed to the interface section. The wafers, which have undergone the coating treatment, are loaded into the first boat placed on the stage, in the interface section. The first boat containing the wafers, which have undergone the coating treatment, is located at a transfer position by moving the stage. The first boat, located at a transfer position by moving the stage.

Abstract: A method of forming a resist on a substrate and processing the resist in a resist processing system having a processing region and a non-processing region which are air-conditioned, the method comprising the steps of, transferring the substrate into the non-processing region, coating the resist on the substrate, exposing the coated resist, developing the exposed resist, subjecting the coated resist at least once, to heat treatment in a period from the transferring step to the developing step, detecting at least once, the concentration of an alkaline component which causes defective resolution of the resist in a processing atmosphere in a period from the transferring step to the developing step, setting a threshold value for the concentration of the alkaline component in the processing atmosphere which causes the defective resolution of the resist, and controlling and changing at least one processing atmosphere in the steps in accordance with a detected concentration of the alkaline component and the threshold

Abstract: The transmitting device latches the time of the absolute clock when the V-sync signal of the video signal block is transmitted, adds to the latched time a predetermined delay time equivalent to the sum of the time required for the transmitting device to process the video signal block and the time required for the transmittance; and transmits the resulting sum value together with the video signal block. The receiver extracts the sum value and produces the V-sync signal delayed by said predetermined delay time.

Abstract: A method of forming a resist on a substrate and processing the resist in a resist processing system having a processing region and a non-processing region which are air-conditioned, the method comprising the steps of, transferring the substrate into the non-processing region, coating the resist on the substrate, exposing the coated resist, developing the exposed resist, subjecting the coated resist at least once, to heat treatment in a period from the transferring step to the developing step, detecting at least once, the concentration of an alkaline component which causes defective resolution of the resist in a processing atmosphere in a period from the transferring step to the developing step, setting a threshold value for the concentration of the alkaline component in the processing atmosphere which causes the defective resolution of the resist, and controlling and changing at least one processing atmosphere in the steps in accordance with a detected concentration of the alkaline component and the threshold

Abstract: The present invention provides a substrate treating system for successively treating a plurality of substrates W under an air-conditioned environment.

Abstract: In a data transmission apparatus for transmitting digital video and audio data, a block forming circuit forms a plurality of data blocks of transmission data composed of at least one of digital video data, digital audio data, and digital auxiliary data related to the digital video data and the digital audio data. Thereafter, a grouping circuit groups a plurality of data blocks outputted from the block forming circuit so as to form transmission group data of one transmission unit block having a time length of approximately one three-hundredth second, and then transmits the transmission group data. Further, a classifying circuit preferably classifies the transmission group data into a plurality of sections, by adding section identification data to each transmission group data.

Abstract: When modulating by an interleaved NRZI technique by inserting one bit per every m bits of input data series, the frequency characteristics of bit rows varying by the polarity ("0" or "1") of the bit to be inserted are compared, and the bit row closer to the desired frequency characteristic is selected as the output series, so that recording is effected by controlling the frequency characteristics of the digital signal.

Abstract: An apparatus for subjecting a plurality of wafers to coating and heating treatments, including a coating section for subjecting the wafers to a coating treatment one by one, a heating section for subjecting wafers which have undergone the coating treatment to a heating treatment all together, and an interface section arranged between the coating section and the heating section. The wafers are heat-treated in the heat treatment section while the wafers are stacked at intervals in a vertical direction in a boat. The wafers which have undergone the coating treatment are loaded into the boat by a conveying member in the interface section. The conveying member and the boat are surrounded by a surrounding space formed by a casing at the interface section. A circulation line is combined with an air supply and exhaust system, for circulating air in the surrounding space.

Abstract: A digital signal recording apparatus for recording digital signal in synchronization blocks includes a generator for generating a synchronization pattern for indicating the beginning of each synchronization block, a generator for generating an ID data for indicating the sequence of the synchronization blocks, a generator for generating an ID parity for checking the ID data, a generator for generating additional information signal, which is a track width data, a generator for generating audio and video signals. Above data are applied to a pattern generator for generating track data comprising plural consecutive normal synchronization blocks immediately preceded by two mini-synchronization blocks and immediately followed by one mini-synchronization block. Each mini-synchronization block includes the synchrionization pattern, ID data, ID parity, and additional information signal. Each normal synchronization block includes the synchronization pattern, ID data, ID parity, and audio and video signal.

Abstract: A data transmission system suitable for effectively transmitting variety of data such as NTSC, PAL, and MPEG between various devices connected to a bus includes a data block generator generates a data block and a discrimination data identifying the generated data block from the source data. A data header generator generates a data header based on the discrimination data. A packet generator and an interface block generates a packet header and CRC error codes to compose a packet with thus generated data block and header.

Abstract: When modulating by an interleaved NRZI technique by inserting one bit per every m bits of input data series, the frequency characteristics of bit rows varying by the polarity ("0" or "1") of the bit to be inserted are compared and the bit row closer to the desired frequency characteristic is selected as the output series, so that recording is effected by controlling the frequency characteristics of the digital signal.

Abstract: A substrate processing apparatus according to this invention includes an interface section having a first transfer member for transferring an object from a coating process section for applying a process solution to the object in accordance with a single sheet process to an object holding member, and a moving member for detachably supplying a plurality of object holding member and simultaneously moving the plurality of object holding member, and a heat-treatment section having a second transfer member for transferring the object placed on the object holding member to a heat-treatment section for heat-treating the plurality of objects, which have undergone the coating process, in accordance with a batch process.

Abstract: An apparatus serving as a digital videocassette recorder (VCR) for recording analog video and audio signals as digital signals. The apparatus serves also as a digital data storage drive. The digital VCR and the storage drive share common circuitry and a common magnetic recording medium. This reduces the cost and enhances the efficiency at which tracks are used. The apparatus has a large storage capacity. The apparatus divides input digital data into two parts and performs error correction encoding for each of these two data parts to form sync blocks. These sync blocks are recorded in an audio signal recording area and a video signal recording area, respectively, on the recording medium. Error correction codes used during reading of digital data are the same as those used during recording of video and audio signals. The same track structure and the same sync block structure are used for these two modes of operation.

Abstract: The data transmission method employs IEEE P1394 protocol. The data header of the transmitted isochronous packet is added with a node identifier identifying the transmitter node, so that the receiver node can immediately identify the transmitter node, and can thereby request the transmitter node to maintain transmission. A Broadcast channel is a default channel used for isochronous packet transmission, unless a different channel number is otherwise specified. Thus, it is not necessary for the user to coordinate the channel number used by the transmitting and receiver nodes. It is also not necessary for the transmitter node to notify the receiver node, or the receiver node to notify the transmitter node, of the channel number used.

Abstract: A pilot signal is superposed and recorded on data at the beginning of each track. The beginning portion of the track is constituted only of codewords having a disparity of each 10 bits which is +2, 0 or -2. Also, the cumulative value of the disparities of every 10 bits may fluctuate in a period coinciding with the period of the pilot signal to be superposed. Therefore, the frequency spectrum in the beginning part of the track has a peak at the frequency of pilot signal, and using this peak as the pilot signal, tracking is controlled during reproduction.

Abstract: A digital signal recording/reproducing system specifically has an adaptive automatic equalizer for performing automatic waveform equalization disposed in a reproducing circuit of an RF system. In order to provide a run-up pattern which enables stable operation settlement of the adaptive automatic equalizer and a clock reproducing PLL at the time of reproduction, the digital signal recording/reproducing system comprises a run-up code generator for producing a run-up pattern composed of a combination of at least two digital value series of different inversion intervals. Thus, since an optimum run-up pattern for the reproducing circuit of the RF system is produced and recorded on a recording medium within a fixed period at the time recording, stable settlement of the operation of the clock reproducing PLL and the adaptive automatic equalizer is attained within a run-up period at the time of reproduction, thereby making it possible to suppress occurrence of a code error to a minimum.

Abstract: A sheet feeding apparatus with a sheet containing tray adapted to support a plurality of sheets and being shiftable between a sheet supplying position and a waiting position, a sheet supply roller for feeding out the sheet supported by the sheet containing tray at the sheet supplying position, a driving force transmitting device connected to the sheet supply roller and adapted to transmit a driving force from a drive source, and a holding device connected to the driving force transmitting device so that the sheet containing tray is shifted to the sheet supplying position by the driving force transmitted to the sheet supply roller and capable of holding the sheet containing tray at the sheet supplying position while the plurality of sheets are being supplied by the sheet supply roller.