Abstract: A vacuum pressure control apparatus includes an annular elastic seal member formed with a valve seat, and a doubly eccentric butterfly valve element configured to come into contact or separate from the valve seat. The vacuum pressure control apparatus is to be placed on a pipe connecting a vacuum chamber and a vacuum pump. The vacuum pressure control apparatus is configured to rotate the butterfly valve element in a first direction from a first valve closed position corresponding to an initial state to change vacuum pressure in the vacuum chamber. The vacuum pressure control apparatus further includes a control unit configured to rotate the butterfly valve element in a direction opposite to a first direction so that the butterfly valve element is moved to a second valve closed position different from the first valve closed position.

Abstract: A fluid-device connecting structure includes a first fluid device having a first connection part, a second fluid device having a second connection part, an annular seal member to connect the first and second connection parts, and a coupling member to keep the first and second connection parts in a connected state. The coupling member includes a first coupling segment and a second coupling segment, each including at one end a first hinge part or a second hinge part. The first and second connection parts each have a cylindrical outer shape. The first coupling segment has a U-like shape having an opening and surrounds the first and second connection parts over a range more than 180 degrees of an entire circumference of each of the first and second connection parts.

Abstract: A vacuum pressure control apparatus includes an annular elastic seal member formed with a valve seat, and a doubly eccentric butterfly valve element configured to come into contact or separate from the valve seat. The vacuum pressure control apparatus is to be placed on a pipe connecting a vacuum chamber and a vacuum pump. The vacuum pressure control apparatus is configured to rotate the butterfly valve element in a first direction from a first valve closed position corresponding to an initial state to change vacuum pressure in the vacuum chamber. The vacuum pressure control apparatus further includes a control unit configured to rotate the butterfly valve element in a direction opposite to a first direction so that the butterfly valve element is moved to a second valve closed position different from the first valve closed position.

Abstract: In a gas flow monitoring method using a MFC (a flow control device) for controlling a flow rate of process gas from a process gas supply source and supply the process gas to a predetermined process chamber, a start shut-off valve placed upstream of the MFC, and a pressure gauge placed between the start shut-off valve and the MFC, the start shut-off valve is closed and a drop of pressure on an upstream side of the MFC is measured by the pressure gauge to measure a flow rate of the MFC, thereafter, the start shut-off valve is opened to monitor the flow rate of the MFC. The MFC is switched from an ON state to an OFF state before the start shut-off valve is opened. The method enables in-line monitoring a low rate of process gas without affecting a semiconductor manufacturing process.

Abstract: An air-driven shutoff valve includes a valve seat formed in a main body, a valve element movable into or out of contact with the valve seat, a drive part integrally connected to the valve element, and a pilot opening/closing valve configured to supply compressed fluid to drive the drive part. The pilot opening/closing valve includes (a) a first needle valve, a first motor to change an opening degree of the first needle valve, and a first check valve allowing the compressed fluid to flow only from a pilot opening/closing valve side to a drive part side, and (b) a second needle valve, a second motor to change an opening degree of the second needle valve, and a second check valve allowing the compressed fluid to flow only from the drive part side to the pilot opening/closing valve side.

Abstract: An air-driven shutoff valve includes a valve seat formed in a main body, a valve element movable into or out of contact with the valve seat, a drive part integrally connected to the valve element, and a pilot opening/closing valve configured to supply compressed fluid to drive the drive part. The pilot opening/closing valve includes (a) a first needle valve, a first motor to change an opening degree of the first needle valve, and a first check valve allowing the compressed fluid to flow only from a pilot opening/closing valve side to a drive part side, and (b) a second needle valve, a second motor to change an opening degree of the second needle valve, and a second check valve allowing the compressed fluid to flow only from the drive part side to the pilot opening/closing valve side.

Abstract: A transmission 7 includes three ball bearings 81A, 81B, 81C, an input shaft 74, an output holding member 83, and an output shaft 72. Each of the ball bearings 81A, 81B, 81C has an inner race, an outer race, and a plurality of rolling elements. The input shaft 74 has an insertion portion inserted into the inner race, and is rotated about the rotation axis of the ball bearing 81A, thereby rotating the inner race. When the inner race is rotated, the rolling elements roll in accordance with the rotation of the inner race. The output holding member 83 includes a holding portion 831 which is held by the rolling elements, and is rotated about the rotation axis of the ball bearing 81C in accordance with rolling of the rolling elements, whereby the output shaft 72 is rotated about the rotation axis of the ball bearing 81C.

Abstract: A flow rate controller is arranged such that a control circuit controls a proportional electromagnetic valve so that a flow rate detected by a flow rate sensor reaches a target flow rate. The proportional electromagnetic valve includes a coil supported in a holder, a bobbin and a fixed core, a valve element and a plate spring placed on a movable core, the valve seat, lead-in path, lead-out path, and orifice being formed in a body. The movable core is displaced by balance between an attractive force of the fixed core generated by excitation of the coil and an urging force of the plate spring, thereby adjusting the position of the valve element with respect to the valve seat to adjust the flow rate of a fluid. The orifice has an inside diameter set to a value of “?1 mm or more” and an axial length set to a value to have a ratio of “from 0.1 to 0.6 inclusive” to the inside diameter. The lead-out path has an inside diameter set to be larger than the inside diameter of the orifice.

Abstract: The present invention is applied to a base station for periodically transmitting a transmission signal to a terminal. The base station includes: a transmitter/receiver that receives a reception signal; a noise verifier that outputs information regarding a generation time and a generation period of the noise that is periodically generated if the reception signal includes the noise; and a transmission timing determiner that determines setting a transmission period of the transmission signal to the same period as the generation period of the noise based on the information regarding the generation time and the generation period of the noise that is output from the noise verifier and shifting a start position of the transmission period by a predetermined time from an arbitrary generation time of the noise, wherein the transmitter/receiver transmits the transmission signal to the terminal at transmission timing of the transmission signal determined by the transmission timing determiner.

Abstract: A fluid mixing system capable of quickly stabilizing flow rates of a plurality of fluids to be mixed is arranged to mix the fluids and deliver a mixture thereof to a container. The system includes a plurality of on-off valves for the respective fluids and delivering the fluids to the container. The on-off valves are caused to open and close in order according to respective duty ratios each indicating an opening/closing ratio in a cycle.

Abstract: A flow rate controller is arranged such that a control circuit controls a proportional electromagnetic valve so that a flow rate detected by a flow rate sensor reaches a target flow rate. The proportional electromagnetic valve includes a coil supported in a holder, a bobbin and a fixed core, a valve element and a plate spring placed on a movable core, the valve seat, lead-in path, lead-out path, and orifice being formed in a body. The movable core is displaced by balance between an attractive force of the fixed core generated by excitation of the coil and an urging force of the plate spring, thereby adjusting the position of the valve element with respect to the valve seat to adjust the flow rate of a fluid. The orifice has an inside diameter set to a value of “?1 mm or more” and an axial length set to a value to have a ratio of “from 0.1 to 0.6 inclusive” to the inside diameter. The lead-out path has an inside diameter set to be larger than the inside diameter of the orifice.

Abstract: A transmission 7 includes three ball bearings 81A, 81B, 81C, an input shaft 74, an output holding member 83, and an output shaft 72. Each of the ball bearings 81A, 81B, 81C has an inner race, an outer race, and a plurality of rolling elements. The input shaft 74 has an insertion portion inserted into the inner race, and is rotated about the rotation axis of the ball bearing 81A, thereby rotating the inner race. When the inner race is rotated, the rolling elements roll in accordance with the rotation of the inner race. The output holding member 83 includes a holding portion 831 which is held by the rolling elements, and is rotated about the rotation axis of the ball bearing 81C in accordance with rolling of the rolling elements, whereby the output shaft 72 is rotated about the rotation axis of the ball bearing 81C.

Abstract: A competition avoidance control method for a data transmission-reception system, a data transmission-reception system and a terminal for a data transmission-reception system for reducing electricity consumption by the terminal in wait state to send a PS-POLL. Each terminal sends a PS-POLL to an access point after a designated time has passed. Therefore, the terminals hardly send the PS-POLLs simultaneously to the access point. Thus, the terminals can avoid wasteful standby state, thus consuming lower amount of electricity while waiting to send PS-POLL.

Abstract: A fluid flow distribution and supply unit for distributing and supplying a fluid is adapted to immediately control a flow rate of a fluid to be distributed and promptly output the fluid at a predetermined flow distribution ratio. The fluid flow distribution and supply unit comprises a flow rate control device for controlling a flow rate of the fluid and a plurality of on/off valves connected to a secondary side of the flow rate control device. The on/off valves are duty controlled to open and close by determining one cycle corresponding to an operation period of the on/off valves and time-dividing the one cycle at the flow distribution ratio.

Abstract: A fluid mixing system capable of quickly stabilizing flow rates of a plurality of fluids to be mixed is arranged to mix the fluids and deliver a mixture thereof to a container. The system includes a plurality of on-off valves for the respective fluids and delivering the fluids to the container. The on-off valves are caused to open and close in order according to respective duty ratios each indicating an opening/closing ratio in a cycle.

Abstract: [Subject] To realize optimum handover in consideration of not only reception environment of a communication terminal itself but also situations on the other party of communication.

Abstract: To provide a gas supply unit capable of stabilizing a gas supply amount, the gas supply unit includes a mass flow controller, a first fluid control valve connected to the mass flow controller, a second fluid control valve connected in parallel to the first fluid control valve, and a third fluid control valve placed on a secondary side of the second fluid control valve. An opening degree of the third fluid control valve is adjusted based on a pressure difference between secondary pressure of the first fluid control valve and secondary pressure of the second fluid control valve.

Abstract: A liquid raw material supply unit for a vaporizer is adapted to supply a liquid raw material to the vaporizer that vaporizes the liquid raw material.

Abstract: A liquid raw material supply unit for a vaporizer is adapted to supply a liquid raw material to the vaporizer that vaporizes the liquid raw material.

Abstract: The invention has an object to provide a flow path block capable of reducing pressure loss, providing an extremely long flow path and a complex flow path, and achieving weight reduction, and a manufacturing method thereof. A flow path block (1) comprises a block body (11) formed with through holes (21) and a groove (22) communicating with the through holes (21) and a lid member (12) which covers the groove (22). The groove (22) can be formed with any depth and width by a cutting tool to reduce pressure loss. The groove (22) can also be formed in a long shape by the cutting tool, so that a very long flow path can be provided when the groove (22) is covered with the lid member (12). The groove (22) can be made freely by the cutting tool to provide a complex flow path. Further, the thickness of the block body (11) can be reduced to achieve weight reduction.