Abstract: A method for inspecting the filled state of a plurality of via-holes which pass through a non-conductive circuit board and are filled with a conductive substance and an apparatus for carrying out the method are disclosed.The surface of the circuit board is illuminated in two directions to generate shadows depending on the concave or convex state of the fillers in a plurality of via-holes. An optical image of the illuminated surface of the circuit board is detected. Each edge of the two shadow areas, which exist in the detected optical image and are generated in one via-hole by light irradiation in two directions, is detected. Whether the filler in this one via-hole is in the concave state or convex state is identified according to the mutual position relationship of the detected edges. The length of each shadow area is detected, and whether the concave state or convex state of the filler is within a predetermined allowance is decided according to the detection results.

Abstract: A flame-retardant olefinic resin composition comprising(a) at least one ethylene copolymer selected from the group consisting of ethylene-.alpha.-olefin copolymers, ethylene-ethyl acrylate copolymer and ethylene-methyl methacrylate copolymer,(b) a silane-grafted polymer obtained by grafting a silane to an olefinic resin,(c) a maleic acid or maleic anhydride derivative of a polyethylene, an ethylene-vinyl acetate copolymer or an ethylene-.alpha.-olefin copolymer,(d) (i) an ethylene-ethyl acrylate-maleic anhydride copolymer or an ethylene-methyl methacrylate-maleic anhydride copolymer, or (d) (ii) a silicone-modified polymer obtained by graft-polymerizing a reactive polyorganosiloxane to a thermoplastic resin, or (d) (iii) a mixture of (d) (i) and (d) (ii).

Abstract: A pattern defect detecting method and apparatus are disclosed on a connectivity processor to input a binary picture signal pattern and a pad position coordinate and outputting connectivity data between pads. Here, the connectivity processing refers to a processing for giving the identical number to one aggregation of connected or linked pads for the pads given to a serial pattern. In the connectivity processor wherein a plane on which the drawn pattern to be inspected is scanned by a linear sensor, the connectivity processing can be releazed almost concurrently with the scanning by driving a temporary memory.Also, a pattern defect detecting apparatus the above-mentioned connectivity. The invention processing coping with the difficulties of a required inspection level, and also represents a processing time of each embodiment theoretically. A moving time of the bed on which an inspecting object is placed and others are added to the real processing time.

Abstract: In an X-ray tomographic imaging system and method, an object to be inspected is irradiated with X-rays from an X-ray source to obtain an X-ray transmission image of the object. The X-ray transmission image is converted by an X-ray fluorescence image intensifier into a detection image. The intensity of the detection image is also intensified by the X-ray fluorescence image intensifier. A photo-electric converter converts the intensified detection image from the X-ray fluorescence image intensifier into an electrical signal. The object to be inspected is held by an object holder rotatably at a position in proximity to the X-ray source and movably in a direction of the axis of rotation of the object and a direction perpendicular to the rotation axis. The electrical signal from the photo-electric converter is processed to a cross-sectional image.

Abstract: In accordance with the present invention, there is provided a pattern defect detecting apparatus using a scanning and transmission electron microscope, comprising an electron gun for accelerating an electron beam with high energy enough to transmit it through a sample and for radiating the accelerated electron beam, a condenser lens for focusing the electron beam generated by said electron gun, a beam deflection coil for deflecting the electron beam focused by said condenser lens, an objective lens for further focusing the electron beam deflected by said beam deflection coil onto a fixed spot, an XY stage for disposing the sample so as to be opposed to said objective lens, said XY stage being movable in X and Y directions in a step and repeat manner, a sample chamber for housing the XY stage in vacuum, said sample chamber including at least the outlet of the electron beam of said objective lens, an electron beam detector for detecting electron beams transmitted through said sample, said electron beam detector

Abstract: A flame-retardant olefinic resin composition comprising(A) 100 parts by weight of a mixed resin consisting of an olefinic resin and a silane-grafted polymer obtained by grafting a silane to said olefinic resin,(B) 50 to 300 parts by weight of a hydrated metal compound, and(C) 0.1 to 30 parts by weight of a dicarboxylic acid or dicarboxylic acid anhydride derivative.

Abstract: Method of and apparatus for checking the geometry of multi-layer patterns for IC structures having identical functions, each of the multi-layer patterns including layer patterns arranged in different level layers, wherein electrical image signals corresponding to any two of the multi-layer patterns and having more than two levels are registered with each other and then compared to determine unmatched and matched portions. The comparison of the registered electric image signals may be performed with respect to their amplitude or their gradients. The registration and comparison of two electric image signals may be repeated for all of the layer patterns with the matched portions being no longer subjected to the registration and comparison. A defect detection signal is produced from finally unmatched portions, if any, of the electric image signals having undergone the said registration and comparison.

Abstract: An apparatus for inspecting an appearance of soldered portions connected between the pads formed on a printed circuit board and leads of an electronic body part. A slit light beam is directed to portions to be inspected and scanned thereon with a light fluorescent image generated from the substrate portion of the printed circuit board and a dark fluorescent image generated from the leads, pads and soldered portions being detected with an image signal being generated in accordance therewith. The image signal is binarized and different functions are extracted from the binarized signal which functions are utilized in connection with other functions and previously obtained data to determine whether an abnormal portion is present or not in a predetermined position on the circuit board.

Abstract: A flame-retardant olefinic resin composition comprising (1) 100 parts by weight of an ethylenic polymer resin mixture having an average density of 0.890 to 0.915 g/cm.sup.3, of (a) an ethylenic polymer consisting mainly of an ethylene-alpha-olefin copolymer and (b) a silane-grafted polymer obtained by grafting a silane to at least one component of said ethylenic polymer (a), and (2) 50 to 300 parts by weight of a hydrated metal compound.

Abstract: A printed circuit pattern inspection system, in which the optical image of circuit patterns is transformed into an electrical signal, the signal is converted into a binary digital signal, the connectivity relationship between selected two points of pattern in the form of binary signal is examined, connection data representative of the connectivity relationship and expressed by a pair of numbers given to the points is generated, and the connection data is compared with design data which is produced from design information and expressed in the form of a circulation list of numbers given to points in linkage relationship, whereby determination of defectiveness of patterns is made basing on the result of comparison.

Abstract: An object to be inspected which is jointed to a circuit board is vibrated in a contactless manner by applying a gas jet or a magnetic force to the object, a laser beam is irradiated on the object, and a laser beam reflected from the object is detected by a linear sensor to observe a laser speckle pattern for the object. Quality of a joint junction state of the object is judged from the laser speckle pattern.

Abstract: A method and an apparatus for detecting the position and posture of an object (5, 9, 10) are characterized by two planar light beams (3a, 3b) alternately projected on the object (5, 9, 10) to be handled and intersection lines (A, B) formed between the two planar light beams (3a, 3b) and the object (5, 9, 10) which are imaged by a single image pickup device (2) positioned between the two planar light beams (3a, 3b).A bright line occurring at a junction between an edge of the object and an intersection line is separated, extracted and transformed into an actual coordinate in a three dimensional coordinate system (x, y, z) by referring to corresponding relationships between the actual coordinate system (x, y, z) and a scanning coordinate system (i, j) so that the position and posture of the object (5, 9, 10) are detected in three dimensions.

Abstract: The present invention consists in a robot wherein a slit-light detector which is constructed of a light projector for projecting light so as to form a slit-light on an object to-be-handled and an image detector for detecting an image of the light-section waveform, is mounted on an operating member of the robot; means for scanning the slit-light detector is disposed; and the slit-light detector detects range data, on the basis of which a position, posture, inclination etc. of the object in a three-dimensional shape are detected, so that the robot can handle the object.

Abstract: Method and system of detecting a configuration of a three-dimensional object, in which use is made of a spot beam to be directed to the object. The spot beam is caused to scan the object in a horizontal direction and the resulting spot image is detected through observation in a direction transverse to the horizontal direction. The system includes a laser light source, two Fourier transformation lenses having their Fourier transformation planes intersecting each other on the optical axes of the lenses on a light deflector, a photoelectric converter provided on the object plane of one of the lenses, the laser light source being disposed on the same meridian as the converter, and at least one reflecting mirror provided for forming a real image of the spot of the beam on the object.

Abstract: A part feeding and assembling system comprises a bowl feeder composed of storage container for storing parts to be assembled and a transporting track for transporting the parts in a row, the transporting path having an end opened in the interior of the container, a visual recognition apparatus for imaging the parts being transported, determining whether the part as imaged is proper for assembling currently carried out, and recognizing position and direction of the proper part, and a robot for picking up the proper part by generating pick-up position data of the robot on the basis of the data representative of the position and direction of the proper part and assembling it to a part to be assembled at other station. The robot picks up only the proper part from those being transported. The bowl feeder introduces the improper parts to the container through the opening so that they are again placed on the transporting path for being recirculated.

Abstract: A device for measuring a flatness of a plate such as a silicon wafer, a GGG wafer, a printed circuit board, a ceramic substrate, or the like. The measuring device is provided with a disc which is disposed in parallel with the plate on one of the surfaces of the plate and is driven by a rotating drive source and a plurality of detectors for detecting a distance from the detector to the surface of the plate, the detectors being disposed on the surface closer to the disc. With this arrangement, distance data from the plurality of the detectors to the surface of the plate is obtained during the course of the rotation of the disc, and a flatness of the plate is measured.

Abstract: Disclosed is a shape detecting apparatus comprising a slit projector for projecting a slit bright line on a number of objects arrayed in a line, an image forming lens for forming the bright line image, an image scanning mechanism for the bright line image formed through the image forming lens in a height direction of the object and a one-dimensional image sensing device for self-scanning the bright line image formed therein with an array of image sensing elements orthogonal to the scanning direction by the image scanning mechanism.

Abstract: A ferromagnetic resin composition obtained by filling a thermoplastic resin with 70 to 97% by weight of rare earth-cobalt powder, the surface of which has been coated with a thermosetting resin or a thermoplastic resin. The composition gives a plastic magnet excellent in impact resistance.

Abstract: A mold apparatus for forming ring-shaped magnet from a plastic magnet material containing a magnetic powder under the influence of a magnetic field, comprising a stationary intermediate composite retainer plate and a movable intermediate composite retainer plate, the former being put on the latter, said movable intermediate composite retainer plate consisting of at least one cylindrical or inversed frusto-conical cavity block made of a magnetic material having a ring-shaped cavity, at least one cavity block holder made of non-magnetic material embracing and holding the cavity block and at least one cylindrical or inversed frusto-conical magnetism shielding member made of a non-magnetic material and disposed concentrically and in contact with the lower side of the cavity, said stationary intermediate composite retainer plate consisting of at least one cylindrical or inversed frusto-conical sprue block made of a magnetic material, and at least one sprue block holder made of a non-magnetic material embracing and

Abstract: An apparatus for inspecting the outer peripheral surface of a cylindrical object is disclosed, in which the light in slit form is radiated on the surface of an object such as a nuclear fuel pellet at an angle thereto, the light regularly reflected on the surface is detected by a detector, the detected image signal is quantized at threshold values higher and lower than an average level, and the binary signals are used to detect surface losses separately from an unground part and a metal inclusion as a first detection process.