Abstract: An exposure apparatus includes a substrate holder configured to hold a substrate and move, a module including a spatial light modulator having light modulation elements that are two-dimensionally arranged, an illumination unit irradiating the spatial light modulator with illumination lights, and a projection unit guiding the illumination light from the light modulation elements to respective light irradiation areas that are two-dimensionally arranged on the substrate in first and second directions, and a control unit configured to drive the substrate holder in a scanning direction, wherein the light modulation elements are two-dimensionally arranged to be inclined at a predetermined angle ? (0°<?<90°) with respect to the scanning direction and a non-scanning direction orthogonal to the scanning direction, and when a predetermined region of the substrate is exposed, the control unit scans the substrate holder at such a speed that spot positions are arranged in a staggered arrangement.

Abstract: An ammonia manufacturing apparatus includes: an ammonia synthesis unit synthesizing ammonia under a chemical reaction using hydrogen and nitrogen as a raw material gas in a reactor; and a heat storage unit including a heating medium. The heat storage unit can supply heat from the heating medium to the ammonia synthesis unit when an amount of the raw material gas supplied to the ammonia synthesis unit increases.

Abstract: The optical module includes an optical separating element. The optical separating element includes a birefringent material and has a first face and a second face. The first face is configured to receive a signal light and a LO light. The signal light includes a first polarized light and a second polarized light. The first polarized light travels from the first face to the second face in a first direction and is emitted from a first emission spot on the second face. The second polarized light travels from the first face to the second face in a second direction and is emitted from a second emission spot on the second face. The LO light travels from the first face to the second face in the first direction and is emitted from a LO light emission spot which is located between the first emission spot and the second emission spot.

Abstract: An optical module includes a base plate, a carrier, an optical semiconductor device, an optical lens component, and a transmissive resin member in a cured state disposed between the optical semiconductor device and the optical lens component. The optical semiconductor device has an optical end surface, and emits an outgoing beam from the optical end surface or receives an incoming beam at the optical end surface. The optical lens component has a first lens surface and a second lens surface, the first lens surface facing the optical end surface of the optical semiconductor device, the first lens surface being provided between the optical end surface and the second lens surface. The transmissive resin contains either an optical path of the outgoing beam or an optical path of the incoming beam between the optical end surface of the optical semiconductor device and the first lens surface of the optical lens component.

Abstract: The plant control method includes the following. Calculating a first reference amount to be supplied for an amount of hydrogen to be supplied to a second production device (40). Making a decision on whether or not the amount of remaining hydrogen in a storage device (20) at the beginning of a subject term falls within a reference range.

Abstract: A coherent receiver comprising: a signal port receiving the signal light that has two polarization components at right angles each other; a polarization dependent beam splitter (PBS) that splits the signal light into two portions depending on the polarizations contained in the signal light; a beam splitter (BS) that splits the local light into two portions; a multi-mode interference (MMI) device that interferes between one of the two portions of the signal light and one of the two portions of the local light; optical components provided between the PBS and the MMI device; and wherein the PBS splitting a first wavelength range of the signal light and a second wavelength range outside the first wavelength range.

Abstract: An optical module includes a base having a first surface, a board having a second surface and a third surface, an optical circuit element having a fourth surface, a fifth surface and two ports, and an array lens. The first surface is joined to the second surface by a first solder. The third surface has a first metallic pattern and a second metallic pattern that are joined to the fourth surface by a second solder. The array lens is fixed onto the first surface of the base so as to be optically coupled to the two ports provided at one end of the optical circuit element in the first direction. The first metallic pattern is formed closer than the second metallic pattern to the one end of the optical circuit element in the first direction and is formed between the two ports in the second direction.

Abstract: An optical semiconductor device comprises: a first wiring pattern provided on a carrier mounting surface of a dielectric substrate; a first reference potential pattern surrounding the first wiring pattern; a carrier block provided on the carrier mounting surface and having a main surface, a side surface, and a second wiring pattern and a second reference potential pattern constituting coplanar lines; and an optical semiconductor element provided on the main surface. One end portion of the second wiring pattern extends to at least an end edge on the side surface side in the main surface and is conductively joined to the first wiring pattern with a conductive joining material therebetween. One end portion of the second reference potential pattern extends to at least the end edge on the side surface side in the main surface and is conductively joined to the first reference potential pattern with a conductive joining material therebetween.

Abstract: Included are: a raw material component storage unit that stores the raw material component supplied to the ammonia synthesis unit; a high-pressure raw material component storage unit that stores the raw material component at a pressure higher than a pressure at which the raw material component is stored in the raw material component storage unit; and a surplus electric power processing unit including a high-pressure raw material component transfer unit that boosts and transfers the raw material component from the raw material component storage unit to the high-pressure raw material component storage unit, and an expander that converts pressure energy of the raw material component supplied from the high-pressure raw material component storage unit into motive power to generate power.

Abstract: An optical module that provides a semiconductor modulator, an input lens system and first and second output lens systems, and two monitor photodiodes is disclosed. The semiconductor modulator provides an input port, first and second output ports, and two monitor ports in one side thereof. The input port and the first and second output ports face the input lens system and the first and second lens systems, respectively. The two monitor ports face the two monitor photodiodes, respectively. The first and second output ports are symmetrically disposed with respect to the input port in the one side. The two monitor ports are disposed in respective outer sides of the first and second output ports and symmetrically with respect to the input port.

Abstract: The plant control method includes the following. Calculating a first reference amount to be supplied for an amount of hydrogen to be supplied to a second production device (40). Making a decision on whether or not the amount of remaining hydrogen in a storage device (20) at the beginning of a subject term falls within a reference range.

Abstract: A method according to one embodiment includes steps of: preparing an optical module and optical fiber holding member; attaching a clip member to a receptacle of the optical module and the optical fiber holding member; and pressing the receptacle of the optical module and the optical fiber holding member from below and pressing the clip member from above. The pressing step has pressing the first flat surface of the receptacle and the second flat surface of the optical fiber holding member at the third flat surface of the clip member, and which performed until the first flat surface of the receptacle and the second flat surface of the optical fiber holding member establish parallelism with the third flat surface of the clip member by using a jig that changes the parallelism of the pressing surface.

Abstract: An optical module includes a base plate, a carrier, an optical semiconductor device, an optical lens component, and a transmissive resin member in a cured state disposed between the optical semiconductor device and the optical lens component. The optical semiconductor device has an optical end surface, and emits an outgoing beam from the optical end surface or receives an incoming beam at the optical end surface. The optical lens component has a first lens surface and a second lens surface, the first lens surface facing the optical end surface of the optical semiconductor device, the first lens surface being provided between the optical end surface and the second lens surface. The transmissive resin contains either an optical path of the outgoing beam or an optical path of the incoming beam between the optical end surface of the optical semiconductor device and the first lens surface of the optical lens component.

Abstract: An optical connector according to an embodiment includes: a receptacle in a cylindrical shape, the receptacle being configured to hold a first optical fiber, the receptacle having a flat surface on an outer surface thereof, the flat surface being parallel with a first optical axis of the first optical fiber; a plug in a cylindrical shape, the plug being configured to hold an optical fiber, the plug having a flat surface on an outer surface thereof, the second flat surface being parallel with a second optical axis of the optical fiber; and a clip member having a contact surface the flat surface with the flat surface, the clip member being configured to press the receptacle and the plug against each other for optically coupling the first optical fiber to the second optical fiber.

Abstract: An optical module includes a base having a first surface, a board having a second surface and a third surface, an optical circuit element having a fourth surface, a fifth surface and two ports, and an array lens. The first surface is joined to the second surface by a first solder. The third surface has a first metallic pattern and a second metallic pattern that are joined to the fourth surface by a second solder. The array lens is fixed onto the first surface of the base so as to be optically coupled to the two ports provided at one end of the optical circuit element in the first direction. The first metallic pattern is formed closer than the second metallic pattern to the one end of the optical circuit element in the first direction and is formed between the two ports in the second direction.

Abstract: Included are: a raw material component storage unit that stores the raw material component supplied to the ammonia synthesis unit; a high-pressure raw material component storage unit that stores the raw material component at a pressure higher than a pressure at which the raw material component is stored in the raw material component storage unit; and a surplus electric power processing unit including a high-pressure raw material component transfer unit that boosts and transfers the raw material component from the raw material component storage unit to the high-pressure raw material component storage unit, and an expander that converts pressure energy of the raw material component supplied from the high-pressure raw material component storage unit into motive power to generate power.

Abstract: An optical semiconductor device comprises: a first wiring pattern provided on a carrier mounting surface of a dielectric substrate; a first reference potential pattern surrounding the first wiring pattern; a carrier block provided on the carrier mounting surface and having a main surface, a side surface, and a second wiring pattern and a second reference potential pattern constituting coplanar lines; and an optical semiconductor element provided on the main surface. One end portion of the second wiring pattern extends to at least an end edge on the side surface side in the main surface and is conductively joined to the first wiring pattern with a conductive joining material therebetween. One end portion of the second reference potential pattern extends to at least the end edge on the side surface side in the main surface and is conductively joined to the first reference potential pattern with a conductive joining material therebetween.

Abstract: A method according to one embodiment includes steps of: preparing an optical module and optical fiber holding member; attaching a clip member to a receptacle of the optical module and the optical fiber holding member; and pressing the receptacle of the optical module and the optical fiber holding member from below and pressing the clip member from above. The pressing step has pressing the first flat surface of the receptacle and the second flat surface of the optical fiber holding member at the third flat surface of the clip member, and which performed until the first flat surface of the receptacle and the second flat surface of the optical fiber holding member establish parallelism with the third flat surface of the clip member by using a jig that changes the parallelism of the pressing surface.

Abstract: An ammonia production plant includes an ammonia synthesis facility; a synthesis gas generating facility which generates a synthesis gas for synthesizing ammonia from the carbon-based raw material; and a power generating facility which obtains power. The synthesis gas generating facility includes an exhaust heat recovery unit which recovers exhaust heat. The power generating facility includes a combustion device which burns oxygen and fuel and a gas turbine which is driven by using a combustion gas containing a CO2 gas obtained by the combustion device as power so as to generate power and is configured to supply the CO2 gas discharged from the gas turbine as a recycle gas to the combustion device. The power obtained by the power generating facility powers the ammonia synthesis facility. The exhaust heat recovered by the exhaust heat recovery unit is used to heat the recycle gas.