Patents by Inventor Yasushi Koyama

Yasushi Koyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus using deflector
    Publication number: 20040169147
    Abstract: A deflector which makes multilayered wiring possible and prevents contamination during the manufacture includes an electrode substrate (400) having a plurality of through holes, and an electrode pair made up of first and second electrodes which oppose the side walls of each through hole in order to control the locus of a charged particle beam passing through the through hole, and a wiring substrate (500) having connection wiring pads connected to the electrode pairs of the electrode substrate to individually apply voltages to the electrode pairs. This deflector is formed by bonding the electrode substrate and wiring substrate via the connection wiring pads of the wiring substrate.
    Type: Application
    Filed: February 27, 2004
    Publication date: September 2, 2004
    Applicants: Canon Kabushiki Kaisha, Hitachi High-Technologies Corporation
    Inventors: Haruhito Ono, Masatake Akaike, Kenji Tamamori, Futoshi Hirose, Yasushi Koyama, Atsunori Terasaki, Ken-ichi Nagae, Yoshinori Nakayama