Abstract: A reactor 200 according to the present invention includes a heater storage section serving as a space section capable of accommodating a carbon heater for initial heating of silicon core wires. A carbon heater 13 is loaded in a deposition reaction space 20 in the reactor 200 only when necessary for initial heating of silicon core wires 12. After initial heating of the silicon core wires 12 is finished, the carbon heater 13 is unloaded from the deposition reaction space to the heater storage section 30. As a result, the carbon heater 13 is not unduly damaged in the reactor any longer and its deterioration is reduced. In addition, because of reduction in reaction with hydrogen gas in the reactor, the generation of methane is reduced, and thus carbon contamination of polycrystalline silicon is reduced.

Abstract: A method is provided for refining an argon gas, in which oxygen is added to the argon gas containing hydrogen, carbon monoxide (CO), and oxygen as impurities so that the hydrogen and the CO are converted into water and carbon dioxide in a catalyst tower, or hydrogen is added to the argon gas so that the oxygen is converted into the water; the method including: monitoring the hydrogen, the CO, and the oxygen on an outlet side of the catalyst tower; and at least one of adding the oxygen to the argon gas when any one of the hydrogen and the CO is detected on the outlet side of the catalyst tower, and adding the hydrogen when the oxygen is detected, wherein the oxygen or the hydrogen to be added is intermittently added to the catalyst tower relative to continuous supply of the argon gas to the catalyst tower.

Abstract: A reactor 200 according to the present invention includes a heater storage section serving as a space section capable of accommodating a carbon heater to initial heating of silicon core wires. A carbon heater 13 is loaded in a deposition reaction space 20 in the reactor 200 only when necessary for initial heating of silicon core wires 12. After initial heating of the silicon core wires 12 is finished, the carbon heater 13 is unloaded from the deposition reaction space to the heater storage section 30. As a result, the carbon heater 13 is not unduly damaged in the reactor any longer and its deterioration is reduced. In addition, because of reduction in reaction with hydrogen gas in the reactor, the generation of methane is reduced, and thus carbon contamination of polycrystalline silicon is reduced.

Abstract: In a remote control robot system including a plurality of slave arms, slave arm has a plurality of control modes of an automatic mode in which slave arm is operated based on a task program, a manual mode in which slave arm is operated based on an operator's operation received by a master device, and correctable automatic mode in which slave arm is operated based on task program while operation is sequentially corrected by the operator's operation received by master device. Operation sequence information includes an automatic part in which slave arm performs a work in the automatic mode, and a selected part in which slave arm performs a work in one selected from plurality of control modes, and the selected parts do not overlap with each other in time among the plurality of slave arms. Based on the operation sequence information, the plurality of slave arms are operated.

Abstract: A reactor 200 according to the present invention includes a heater storage section serving as a space section capable of accommodating a carbon heater for initial heating of silicon core wires. A carbon heater 13 is loaded in a deposition reaction space 20 in the reactor 200 only when necessary for initial heating of silicon core wires 12. After initial heating of the silicon core wires 12 is finished, the carbon heater 13 is unloaded from the deposition reaction space to the heater storage section 30. As a result, the carbon heater 13 is not unduly damaged in the reactor any longer and its deterioration is reduced. In addition, because of reduction in reaction with hydrogen gas in the reactor, the generation of methane is reduced, and thus carbon contamination of polycrystalline silicon is reduced.

Abstract: A robot system includes a robot main body, memory part configured to store information for causing robot main body to perform given operation, as saved operational information, motion controller configured to control operation of robot main body by using saved operational information as automatic operational information for causing robot main body to operate, and an operation correcting device configured to generate, by being operated, manipulating information for correcting operation of robot main body during operation. Motion controller controls robot main body to perform an operation corrected from operation related to automatic operational information in response to a reception of the manipulating information while robot main body is operating by using automatic operational information. Memory part is configured to be storable of corrected operational information for causing robot main body to perform corrected operation as saved operational information, when robot main body performs corrected operation.

Abstract: Robot system which includes a master device configured to receive an operating instruction from an operator, slave arm, storage device configured to store operating sequence information that defines processing carried out by slave arm, and control device configured to control operation of slave arm. Control device includes a receiver configured to receive an input signal, motion controller configured to determine whether operating mode of slave arm is to be automatic, manual or correctable automatic mode and control operation of slave arm in determined operating mode, and continuation determinator configured to determine whether continuation of automatic mode is permitted. In a process at which slave arm is scheduled to operate in automatic mode, after motion controller suspends operation of slave arm in automatic mode at a given step of process, continuation determinator determines whether continuation of automatic mode is permitted based on input signal received by receiver when operation is suspended.

Abstract: The present invention provides a technique by which heat can be efficiently recovered from a coolant used to cool a reactor, and contamination with dopant impurities from an inner wall of a reactor when polycrystalline silicon is deposited within the reactor can be reduced to produce high-purity polycrystalline silicon. With the use of hot water 15 having a temperature higher than a standard boiling point as a coolant fed to the reactor 10, the temperature of the reactor inner wall is kept at a temperature of not more than 370° C. Additionally, the pressure of the hot water 15 to be recovered is reduced by a pressure control section provided in a coolant tank 20 to generate steam. Thereby, a part of the hot water is taken out as steam to the outside, and reused as a heating source for another application.

Abstract: A reactor 200 according to the present invention includes a heater storage section serving as a space section capable of accommodating a carbon heater to initial heating of silicon core wires. A carbon heater 13 is loaded in a deposition reaction space 20 in the reactor 200 only when necessary for initial heating of silicon core wires 12. After initial heating of the silicon core wires 12 is finished, the carbon heater 13 is unloaded from the deposition reaction space to the heater storage section 30. As a result, the carbon heater 13 is not unduly damaged in the reactor any longer and its deterioration is reduced. In addition, because of reduction in reaction with hydrogen gas in the reactor, the generation of methane is reduced, and thus carbon contamination of polycrystalline silicon is reduced.

Abstract: An air conditioning system includes a microcomputer unit that controls a utilization-side unit and a heat source-side unit of an air conditioner and a thermostat connected to the air conditioner. The thermostat switches between an ON state in which the thermostat inputs a control signal to the microcomputer unit and an OFF state in which the thermostat does not input the control signal to the microcomputer unit. The system further includes a relay that switches to a feed state in which power is fed to the microcomputer unit or a non-feed state in which power is not fed to the microcomputer unit, and a power-on circuit within or externally attached to the air conditioner. The power-on circuit switches the relay from the power non-feed state to the power feed state using a voltage of the control signal inputted to the microcomputer unit.

Abstract: A device for controlling an air conditioner has a remote controller which receives an alternating current voltage from a secondary side of a first transformer, a full-wave rectifier connected to a secondary side of a second transformer, and a processor which receives a current rectified by the full-wave rectifier. One of output nodes of the full-wave rectifier is connected to one terminal of the secondary side of the first transformer. The remote controller has a switch connected to the secondary side of the first transformer, and transmits information that indicates a state of the switch to the processor as the amplitude of an AC voltage on a signal line connecting the remote controller and the processor together.

Abstract: Robot system which includes a master device configured to receive an operating instruction from an operator, slave arm, storage device configured to store operating sequence information that defines processing carried out by slave arm, and control device configured to control operation of slave arm. Control device includes a receiver configured to receive an input signal, motion controller configured to determine whether operating mode of slave arm is to be automatic, manual or correctable automatic mode and control operation of slave arm in determined operating mode, and continuation determinator configured to determine whether continuation of automatic mode is permitted. In a process at which slave arm is scheduled to operate in automatic mode, after motion controller suspends operation of slave arm in automatic mode at a given step of process, continuation determinator determines whether continuation of automatic mode is permitted based on input signal received by receiver when operation is suspended.

Abstract: A robot system includes a robot main body, memory part configured to store information for causing robot main body to perform given operation, as saved operational information, motion controller configured to control operation of robot main body by using saved operational information as automatic operational information for causing robot main body to operate, and an operation correcting device configured to generate, by being operated, manipulating information for correcting operation of robot main body during operation. Motion controller controls robot main body to perform an operation corrected from operation related to automatic operational information in response to a reception of the manipulating information while robot main body is operating by using automatic operational information. Memory part is configured to be storable of corrected operational information for causing robot main body to perform corrected operation as saved operational information, when robot main body performs corrected operation.

Abstract: In a remote control robot system including a plurality of slave arms, slave arm has a plurality of control modes of an automatic mode in which slave arm is operated based on a task program, a manual mode in which slave arm is operated based on an operator's operation received by a master device, and correctable automatic mode in which slave arm is operated based on task program while operation is sequentially corrected by the operator's operation received by master device. Operation sequence information includes an automatic part in which slave arm performs a work in the automatic mode, and a selected part in which slave arm performs a work in one selected from plurality of control modes, and the selected parts do not overlap with each other in time among the plurality of slave arms. Based on the operation sequence information, the plurality of slave arms are operated.

Abstract: A method is provided for refining an argon gas, in which oxygen is added to the argon gas containing hydrogen, carbon monoxide(CO), and oxygen as impurities so that the hydrogen and the CO are converted into water and carbon dioxide in a catalyst tower, or hydrogen is added to the argon gas so that the oxygen is converted into the water; the method including: monitoring the hydrogen, the CO, and the oxygen on an outlet side of the catalyst tower; and at least one of adding the oxygen to the argon gas when any one of the hydrogen and the CO is detected on the outlet side of the catalyst tower, and adding the hydrogen when the oxygen is detected, wherein the oxygen or the hydrogen to be added is intermittently added to the catalyst tower relative to continuous supply of the argon gas to the catalyst tower.

Abstract: A motor driving apparatus includes a boosting section, a drive voltage output section, a detecting section, a storage section and a determining section. The boosting section generates a post-boosting voltage by boosting an input voltage. The drive voltage output section generates a drive voltage to drive a motor using the post-boosting voltage. The detecting section detects a value of the input voltage or a variation width relative to a reference value of the input voltage as variation power source variation information when there is power source variation. The storage section stores target value association information associating the power source variation information and a boosting target value of the post-boosting voltage. The determining section determines the boosting target value based on the power source variation information and target value association information. The target value association information is determined based on a range of operations of the drive voltage output section.

Abstract: An air conditioning system includes a microcomputer unit that controls a utilization-side unit and a heat source-side unit of an air conditioner and a thermostat connected to the air conditioner. The thermostat switches between an ON state in which the thermostat inputs a control signal to the microcomputer unit and an OFF state in which the thermostat does not input the control signal to the microcomputer unit. The system further includes a relay that switches to a feed state in which power is fed to the microcomputer unit or a non-feed state in which power is not fed to the microcomputer unit, and a power-on circuit within or externally attached to the air conditioner. The power-on circuit switches the relay from the power non-feed state to the power feed state using a voltage of the control signal inputted to the microcomputer unit.

Abstract: Raw material gas supply nozzles are arranged within a virtual concentric circle having its center at the center of a disk-like base plate (having an area half as large as an area of the base plate). Raw material gas is ejected at a flow velocity of 150 m/sec or more into a bell jar from the gas supply nozzles. In addition to one gas supply nozzle provided in a center portion of the base plate, three gas supply nozzles can be arranged at the vertex positions of a regular triangle inscribed in a circumscribed circle having its center at the gas supply nozzle in the center portion. With the gas supply nozzles so arranged, a smooth circulating flow is formed within a reactor.

Abstract: In order to obtain a polycrystalline silicon rod having an excellent shape, the placement relation between a source gas supplying nozzle 9 and metal electrodes 10 that are provided in a reactor is appropriately designed. The area of a disc-like base plate 5 is S0. An imaginary concentric circle C (radius c) centered at the center of the disc-like base plate 5 has an area S=S0/2. Further, a concentric circle A and a concentric circle B are imaginary concentric circles having the same center as that of the concentric circle C and having a radius a and a radius b, respectively (a<b<c). In the present invention, the electrode pairs 10 are placed inside of the imaginary concentric circle C and outside of the imaginary concentric circle B, and the gas supplying nozzle 9 is placed inside of the imaginary concentric circle A.

Abstract: Raw material gas supply nozzles are arranged within a virtual concentric circle having its center at the center of a disk-like base plate (having an area half as large as an area of the base plate). Raw material gas is ejected at a flow velocity of 150 m/sec or more into a bell jar from the gas supply nozzles. In addition to one gas supply nozzle provided in a center portion of the base plate, three gas supply nozzles can be arranged at the vertex positions of a regular triangle inscribed in a circumscribed circle having its center at the gas supply nozzle in the center portion. With the gas supply nozzles so arranged, a smooth circulating flow is formed within a reactor.