Abstract: A sputtering target according to one embodiment is an integrated sputtering target comprising a target portion and a backing plate portion, both of them being made of copper and unavoidable impurities, wherein a Vickers hardness Hv is 90 or more, and wherein a flat ratio of crystal grains in a cross section orthogonal to a sputtering surface is 0.35 or more and 0.65 or less.

Abstract: A sputtering target according to this invention comprises an alloy of Al and Sc and contains from 25 at. % to 50 at. % of Sc. The sputtering target has an oxygen content of 2000 ppm by mass or less, and a variation in Vickers hardness (Hv) of 20% or less.

Abstract: A sputtering target according to one embodiment is an integrated sputtering target comprising a target portion and a backing plate portion, both of them being made of copper and unavoidable impurities, wherein a Vickers hardness Hv is 90 or more, and wherein a flat ratio of crystal grains in a cross section orthogonal to a sputtering surface is 0.35 or more and 0.65 or less.

Abstract: Provided is a copper alloy sputtering target, wherein, based on charged particle activation analysis, the copper alloy sputtering target has an oxygen content of 0.6 wtppm or less, or an oxygen content of 2 wtppm or less and a carbon content of 0.6 wtppm or less. Additionally provided is a method for manufacturing a copper alloy sputtering target, wherein a copper raw material is melted in a vacuum or an inert gas atmosphere, a reducing gas is thereafter introduced into the melting atmosphere, an alloy element is subsequently added to a molten metal for alloying, and an obtained ingot is processed into a target shape. The present invention aims to provide a copper alloy sputtering target that generates few particles during sputtering, and a method for manufacturing such a sputtering target.

Abstract: A sputtering target according to this invention comprises an alloy of Al and Sc and contains from 25 at. % to 50 at. % of Sc. The sputtering target has an oxygen content of 2000 ppm by mass or less, and a variation in Vickers hardness (Hv) of 20% or less.

Abstract: Provided is a sputtering target formed from copper or a copper alloy, and the sputtering target contains either argon or hydrogen, or both, each in an amount of 1 wtppm or more and 10 wtppm or less. An object of the embodiment of the present invention is to provide a copper or copper alloy sputtering target which is capable of stably maintaining discharge even under conditions such as low pressure and low gas flow rate where it is difficult to continuously maintain sputtering discharge.

Abstract: Provided is a copper alloy sputtering target, wherein, based on charged particle activation analysis, the copper alloy sputtering target has an oxygen content of 0.6 wtppm or less, or an oxygen content of 2 wtppm or less and a carbon content of 0.6 wtppm or less. Additionally provided is a method for manufacturing a copper alloy sputtering target, wherein a copper raw material is melted in a vacuum or an inert gas atmosphere, a reducing gas is thereafter introduced into the melting atmosphere, an alloy element is subsequently added to a molten metal for alloying, and an obtained ingot is processed into a target shape. The present invention aims to provide a copper alloy sputtering target that generates few particles during sputtering, and a method for manufacturing such a sputtering target.

Abstract: A valve timing control device is provided with an electric motor (4) generating a magnetic retaining torque (Th) and a motor torque (Tm) in a motor shaft (102) based on a power supply. A power supply control system (6) controls the motor torque (Tm) by controlling the power supply supplied to the electric motor (4). A phase control mechanism (8) transmits a cam torque (Tca) that can alternate between a positive and a negative direction in response to rotation of a cam shaft, to the motor shaft (102) and controls a relative phase between the crank shaft and the cam shaft in accordance with a torque balance in the motor shaft (102). The power supply control system (6) eliminates the motor torque (Tm) that is balanced with the magnetic retaining torque (Th) and the cam torque (Tca) after a stop of the internal combustion engine (S105).

Abstract: An electric power supply driver executes duty control of turning on and off of a selected switching element to supply electric power to a corresponding stator coil in a case where an actual rotational direction and a target rotational direction of a motor shaft coincide with each other. Furthermore, the driver sets an on-duty ratio of the selected switching element below a lower limit value, which is at least required to rotate the motor shaft through the power supply to each corresponding stator coil in a case where the actual rotational direction and the target rotational direction do not coincide with each other.

Abstract: A first rotary member rotates with a crankshaft and has a first gear. A second rotary member rotates with a camshaft and has a second gear that is axially shifted from the first gear. A planetary rotary member has third and fourth gears, which are eccentrically meshed respectively with the first and second gears to perform a planetary motion. A biasing member is interposed between the planetary rotary member and a planetary carrier, which supports the planetary rotary member. The planetary rotary member is in contact with the biasing member at a contact portion having an axial center. The axial center is located on a radially inner side of a meshed portion between the second and fourth gears, which has a backlash larger than that of a meshed portion between the first and third gears.

Abstract: A valve timing control device is provided with an electric motor (4) generating a magnetic retaining torque (Th) and a motor torque (Tm) in a motor shaft (102) based on a power supply. A power supply control system (6) controls the motor torque (Tm) by controlling the power supply supplied to the electric motor (4). A phase control mechanism (8) transmits a cam torque (Tca) that can alternate between a positive and a negative direction in response to rotation of a cam shaft, to the motor shaft (102) and controls a relative phase between the crank shaft and the cam shaft in accordance with a torque balance in the motor shaft (102). The power supply control system (6) eliminates the motor torque (Tm) that is balanced with the magnetic retaining torque (Th) and the cam torque (Tca) after a stop of the internal combustion engine (S105).

Abstract: A valve timing controller has a shaft body as an output rotor, a torque generating system which generates the controlling torque outputted from the shaft body, and a planet carrier as an input rotor connected with the shaft body. A phase adjusting mechanism adjusts the relative rotational phase between a crankshaft and a camshaft according to the control torque inputted into the planet carrier from the shaft body. A bearing rotatably supports the planet carrier. The planet carrier forms a cylindrical input wall press-inserted in an inner circumference of the bearing. The input wall is provided with a fitting recess on its inner surface for engaging with the shaft body, the input wall is provided with a thin-wall portion of which thickness is reduced in a radial direction, and the fitting recess and the thin-wall portion are circumferentially arranged apart from each other.

Abstract: A valve timing controller includes a first rotor having a first gear, a second rotor having a second gear, and a planet gear engaged with the first and the second gear. The first rotor has the support opening and accommodates the second rotor therein. The second rotor has the supporting spindle part which supports the support opening from its inner circumference. The support opening and the supporting spindle part are formed in a minor diameter rather than the second gear which engages the planet gear with lubricant. The supporting opening and the supporting spindle part are positioned at a place which deviates from the second gear in an axial direction thereof.

Abstract: A valve timing controller includes a first rotary element having a first gear part, a second rotary element having a second gear part, and a planetary gear including a third gear part and a fourth gear part which respectively engage with the first gear part and the second gear part. The planetary gear performs a planetary motion to vary a relative rotational phase between the first rotary element and the second rotary element. The valve timing controller further includes a supporting member supporting the planetary gear in such a manner that the planetary gear is slidable in its axial direction between the first rotary element and the second rotary element, and an elastic member restricting a displacement of the planetary gear in its axial direction.

Abstract: A valve timing controller includes a first gear rotating together with a crankshaft, a planetary carrier eccentric to the first gear, a second gear engaging with the planetary carrier. The second gear performs a planetary motion while engaging with the first gear. The planetary motion is converted into a rotational motion of the camshaft to change a relative rotational phase between the crankshaft and the camshaft. A pressing element is provided between the planetary carrier and the second gear for pressing the second gear by the elastic force. An action line of the elastic force is inclined to the eccentric direction line of the planetary carrier in the circumferential direction.

Abstract: A valve timing controller is provided with a first rotary element including a first gear part, a second rotary element including a second gear part, and a third rotary element including a third gear part and a fourth gear part. The third gear part and the fourth gear part are meshed respectively with the first gear part and the second gear part. A stopper is provided so as to extend in the first rotary element in the radial direction for regulating a relative rotational phase shift angle between the first rotary element and the second rotary element. An interposing assembler is provided on the second rotary element for rotatably interposing the stoppers in an axial direction.

Abstract: A valve timing adjusting apparatus includes a driving-side rotor, a driven-side rotor, a sun gear, and a planet gear. The driving-side rotor is rotatable synchronously with the crankshaft. The driven-side rotor is received in the driving-side rotor and rotatable synchronously with a camshaft. The sun gear is rotatable integrally with the driving-side rotor. The planet gear moves epicyclically relative to the sun gear. The driving-side rotor includes a peripheral wall member and a bottom wall member. One of the sun gear and the bottom wall member is fitted with an inner peripheral side of one axial end portion of the peripheral wall member. The other one is fitted with an outer peripheral side of the other axial end portion of the peripheral wall member.

Abstract: An electric power supply driver executes duty control of turning on and off of a selected switching element to supply electric power to a corresponding stator coil in a case where an actual rotational direction and a target rotational direction of a motor shaft coincide with each other. Furthermore, the driver sets an on-duty ratio of the selected switching element below a lower limit value, which is at least required to rotate the motor shaft through the power supply to each corresponding stator coil in a case where the actual rotational direction and the target rotational direction do not coincide with each other.

Abstract: A first rotary member rotates with a crankshaft and has a first gear. A second rotary member rotates with a camshaft and has a second gear that is axially shifted from the first gear. A planetary rotary member has third and fourth gears, which are eccentrically meshed respectively with the first and second gears to perform a planetary motion. A biasing member is interposed between the planetary rotary member and a planetary carrier, which supports the planetary rotary member. The planetary rotary member is in contact with the biasing member at a contact portion having an axial center. The axial center is located on a radially inner side of a meshed portion between the second and fourth gears, which has a backlash larger than that of a meshed portion between the first and third gears.

Abstract: A driving-side rotatable body includes a driving-side inner gear, which has an axial extent that does not overlap with an axial extent of a driven-side inner gear of a driven-side rotatable body. A driven-side outer gear and a driving-side outer gear of a planet gear are meshed with and are driven together with the driven-side inner gear and the driving-side inner gear, so that the planet gear changes a relative rotational phase between the driven-side rotatable body and the driving-side rotatable body. The driven-side rotatable body supports the driving-side rotatable body from a radially inner side of the driving-side rotatable body at a location, which is radially outward of the driven-side inner gear.