Abstract: An electromagnetic wave matching element makes it possible to reduce the cost of a transmission system to a great degree. An electromagnetic wave matching element is adapted to allow electromagnetic wave beams incident from an entrance to be reflected by using plural mirrors to couple these reflected electromagnetic wave beams to an external transmission system through an exit. Mirrors are used that have a shape adapted to receive the plural electromagnetic waves in a beam form and to output electromagnetic wave beams having a predetermined distribution in which the number of the output electromagnetic waves is different from the number of the received electromagnetic waves.

Abstract: A method for etching a ferroelectric film made of a compound containing lead of the present invention, includes the steps of: forming an insulating film, metal films, and a ferroelectric film on a substrate in this order; forming an etching resistant film on the ferroelectric film, followed by patterning; and etching the ferroelectric film with a mixed gas containing an inert gas and a halogen gas or a halogenated gas as an etching gas, using the patterned etching resistant film as an etching mask.

Abstract: A dielectric thin film device comprising at least an electrode and a dielectric thin film, said dielectric thin film being a laminate of a plurality of layers whose compositions comprise the same kinds of atoms including volatile atom(s) but are different in the content of the volatile atom(s) in at least one layer from the other.