Patents by Inventor Yeh-Jiun Tung
Yeh-Jiun Tung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11892777Abstract: The present application relates to contact immersion lithography exposure units and methods of their use. An example contact exposure unit includes a container configured to contain a fluid material and a substrate disposed within the container. The substrate has a first surface and a second surface, and the substrate includes a photoresist material on at least the first surface. The contact exposure unit includes a photomask disposed within the container. The photomask is optically coupled to the photoresist material by way of a gap comprising the fluid material. The contact exposure unit also includes an inflatable balloon configured to be controllably inflated so as to apply a desired force to the second surface of the substrate to controllably adjust the gap between the photomask and the photoresist material.Type: GrantFiled: October 13, 2022Date of Patent: February 6, 2024Assignee: Waymo LLCInventors: Hongqin Shi, Yeh-Jiun Tung, James Dunphy, Cesar Gensoli
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Publication number: 20230333319Abstract: One example LIDAR device comprises a substrate and a waveguide disposed on the substrate. A first section of the waveguide extends lengthwise on the substrate in a first direction. A second section of the waveguide extends lengthwise on the substrate in a second direction different than the first direction. A third section of the waveguide extends lengthwise on the substrate in a third direction different than the second direction. The second section extends lengthwise between the first section and the second section. The LIDAR device also comprises a light emitter configured to emit light. The waveguide is configured to guide the light inside the first section toward the second section, inside the second section toward the third section, and inside the third section away from the second section.Type: ApplicationFiled: June 19, 2023Publication date: October 19, 2023Inventors: James Dunphy, David Hutchison, Pierre-Yves Droz, Yeh-Jiun Tung
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Patent number: 11714233Abstract: One example LIDAR device comprises a substrate and a waveguide disposed on the substrate. A first section of the waveguide extends lengthwise on the substrate in a first direction. A second section of the waveguide extends lengthwise on the substrate in a second direction different than the first direction. A third section of the waveguide extends lengthwise on the substrate in a third direction different than the second direction. The second section extends lengthwise between the first section and the second section. The LIDAR device also comprises a light emitter configured to emit light. The waveguide is configured to guide the light inside the first section toward the second section, inside the second section toward the third section, and inside the third section away from the second section.Type: GrantFiled: June 8, 2022Date of Patent: August 1, 2023Assignee: Waymo LLCInventors: James Dunphy, David Hutchison, Pierre-Yves Droz, Yeh-Jiun Tung
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Publication number: 20230194669Abstract: An example lidar system includes a housing defining an interior space. The housing includes at least one optical window. The lidar system also includes a rotatable mirror assembly disposed within the interior space. The rotatable mirror assembly includes a transmit mirror portion and a receive mirror portion. The lidar system additionally includes a transmitter disposed within the interior space. The transmitter is configured to emit emission light into an environment of the lidar system along a transmit path. The lidar system also includes a receiver disposed within the interior space. The receiver is configured to detect return light that is received from the environment along a receive path. The lidar system additionally includes at least one optical baffle configured to minimize stray light in the interior space.Type: ApplicationFiled: December 22, 2021Publication date: June 22, 2023Inventors: Jason Watson, David Duff, Justin Andrade, Blaise Gassend, Alex Bogatko, Alex Rivas, Michael Brickner, Yeh-Jiun Tung, Hui Son
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Publication number: 20230055675Abstract: The present application relates to contact immersion lithography exposure units and methods of their use. An example contact exposure unit includes a container configured to contain a fluid material and a substrate disposed within the container. The substrate has a first surface and a second surface, and the substrate includes a photoresist material on at least the first surface. The contact exposure unit includes a photomask disposed within the container. The photomask is optically coupled to the photoresist material by way of a gap comprising the fluid material. The contact exposure unit also includes an inflatable balloon configured to be controllably inflated so as to apply a desired force to the second surface of the substrate to controllably adjust the gap between the photomask and the photoresist material.Type: ApplicationFiled: October 13, 2022Publication date: February 23, 2023Inventors: Hongqin Shi, Yeh-Jiun Tung, James Dunphy, Cesar Gensoli
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Patent number: 11500295Abstract: The present application relates to contact immersion lithography exposure units and methods of their use. An example contact exposure unit includes a container configured to contain a fluid material and a substrate disposed within the container. The substrate has a first surface and a second surface, and the substrate includes a photoresist material on at least the first surface. The contact exposure unit includes a photomask disposed within the container. The photomask is optically coupled to the photoresist material by way of a gap comprising the fluid material. The contact exposure unit also includes an inflatable balloon configured to be controllably inflated so as to apply a desired force to the second surface of the substrate to controllably adjust the gap between the photomask and the photoresist material.Type: GrantFiled: February 3, 2021Date of Patent: November 15, 2022Assignee: Waymo LLCInventors: Hongqin Shi, Yeh-Jiun Tung, James Dunphy, Cesar Gensoli
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Publication number: 20220299705Abstract: One example LIDAR device comprises a substrate and a waveguide disposed on the substrate. A first section of the waveguide extends lengthwise on the substrate in a first direction. A second section of the waveguide extends lengthwise on the substrate in a second direction different than the first direction. A third section of the waveguide extends lengthwise on the substrate in a third direction different than the second direction. The second section extends lengthwise between the first section and the second section. The LIDAR device also comprises a light emitter configured to emit light. The waveguide is configured to guide the light inside the first section toward the second section, inside the second section toward the third section, and inside the third section away from the second section.Type: ApplicationFiled: June 8, 2022Publication date: September 22, 2022Inventors: James Dunphy, David Hutchison, Pierre-Yves Droz, Yeh-Jiun Tung
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Patent number: 11385406Abstract: One example LIDAR device comprises a substrate and a waveguide disposed on the substrate. A first section of the waveguide extends lengthwise on the substrate in a first direction. A second section of the waveguide extends lengthwise on the substrate in a second direction different than the first direction. A third section of the waveguide extends lengthwise on the substrate in a third direction different than the second direction. The second section extends lengthwise between the first section and the second section. The LIDAR device also comprises a light emitter configured to emit light. The waveguide is configured to guide the light inside the first section toward the second section, inside the second section toward the third section, and inside the third section away from the second section.Type: GrantFiled: October 29, 2019Date of Patent: July 12, 2022Assignee: Waymo LLCInventors: James Dunphy, David Hutchison, Pierre-Yves Droz, Yeh-Jiun Tung
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Patent number: 11275312Abstract: The present application relates to contact immersion lithography systems and methods of their use. An example immersion lithography system includes a photomask substrate and at least one sensor disposed along a surface of the photomask substrate. The immersion lithography system also includes a controller having at least one processor and a memory. The at least one processor is configured to execute program instructions stored in the memory so as to carry out operations. The operations include receiving, from the at least one sensor, information indicative of an electric field proximate to the at least one sensor. The operations also include determining, based on the received information, at least one of: a thickness of a liquid layer adjacent to the photomask substrate or a distance to a further substrate adjacent to the photomask substrate.Type: GrantFiled: November 30, 2020Date of Patent: March 15, 2022Assignee: Waymo LLCInventors: James Dunphy, Hongqin Shi, David Hutchison, Yeh-Jiun Tung, Eric Copenhaver, Nao Chuei
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Publication number: 20210191276Abstract: The present application relates to contact immersion lithography exposure units and methods of their use. An example contact exposure unit includes a container configured to contain a fluid material and a substrate disposed within the container. The substrate has a first surface and a second surface, and the substrate includes a photoresist material on at least the first surface. The contact exposure unit includes a photomask disposed within the container. The photomask is optically coupled to the photoresist material by way of a gap comprising the fluid material. The contact exposure unit also includes an inflatable balloon configured to be controllably inflated so as to apply a desired force to the second surface of the substrate to controllably adjust the gap between the photomask and the photoresist material.Type: ApplicationFiled: February 3, 2021Publication date: June 24, 2021Inventors: Hongqin Shi, Yeh-Jiun Tung, James Dunphy, Cesar Gensoli
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Publication number: 20210124020Abstract: One example LIDAR device comprises a substrate and a waveguide disposed on the substrate. A first section of the waveguide extends lengthwise on the substrate in a first direction. A second section of the waveguide extends lengthwise on the substrate in a second direction different than the first direction. A third section of the waveguide extends lengthwise on the substrate in a third direction different than the second direction. The second section extends lengthwise between the first section and the second section. The LIDAR device also comprises a light emitter configured to emit light. The waveguide is configured to guide the light inside the first section toward the second section, inside the second section toward the third section, and inside the third section away from the second section.Type: ApplicationFiled: October 29, 2019Publication date: April 29, 2021Inventors: James Dunphy, David Hutchison, Pierre-Yves Droz, Yeh-Jiun Tung
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Patent number: 10948830Abstract: The present application relates to contact immersion lithography exposure units and methods of their use. An example contact exposure unit includes a container configured to contain a fluid material and a substrate disposed within the container. The substrate has a first surface and a second surface, and the substrate includes a photoresist material on at least the first surface. The contact exposure unit includes a photomask disposed within the container. The photomask is optically coupled to the photoresist material by way of a gap comprising the fluid material. The contact exposure unit also includes an inflatable balloon configured to be controllably inflated so as to apply a desired force to the second surface of the substrate to controllably adjust the gap between the photomask and the photoresist material.Type: GrantFiled: December 23, 2019Date of Patent: March 16, 2021Assignee: Waymo LLCInventors: Hongqin Shi, Yeh-Jiun Tung, James Dunphy, Cesar Gensoli
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Patent number: 9871219Abstract: The present invention provides an emissive region in organic light emitting devices having a combined emission from at least two emissive materials, a fluorescent blue emissive material and a phosphorescent emissive material. The emissive region may further comprise additional fluorescent or phosphorescent emissive materials. Preferably, the emissive region has three different emissive materials—a red emissive material, a green emissive material and a blue emissive material. Organic light emitting devices incorporating the emissive region provides a high color-stability of the light emission over a wide range of currents or luminances.Type: GrantFiled: March 30, 2017Date of Patent: January 16, 2018Assignee: Universal Display CorporationInventors: Yeh-Jiun Tung, Michael S. Weaver, Michael Hack, James R. Esler
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Publication number: 20170207408Abstract: The present invention provides an emissive region in organic light emitting devices having a combined emission from at least two emissive materials, a fluorescent blue emissive material and a phosphorescent emissive material. The emissive region may further comprise additional fluorescent or phosphorescent emissive materials. Preferably, the emissive region has three different emissive materials—a red emissive material, a green emissive material and a blue emissive material. Organic light emitting devices incorporating the emissive region provides a high color-stability of the light emission over a wide range of currents or luminances.Type: ApplicationFiled: March 30, 2017Publication date: July 20, 2017Applicant: Universal Display CorporationInventors: Yeh-Jiun TUNG, Michael S. WEAVER, Michael HACK, James R. ESLER
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Patent number: 9647227Abstract: The present invention provides an emissive region in organic light emitting devices having a combined emission from at least two emissive materials, a fluorescent blue emissive material and a phosphorescent emissive material. The emissive region may further comprise additional fluorescent or phosphorescent emissive materials. Preferably, the emissive region has three different emissive materials—a red emissive material, a green emissive material and a blue emissive material. Organic light emitting devices incorporating the emissive region provides a high color-stability of the light emission over a wide range of currents or luminances.Type: GrantFiled: May 29, 2015Date of Patent: May 9, 2017Assignee: Universal Display CorporationInventors: Yeh-Jiun Tung, Michael S. Weaver, Michael Hack, James R. Esler
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Publication number: 20150303395Abstract: The present invention provides an emissive region in organic light emitting devices having a combined emission from at least two emissive materials, a fluorescent blue emissive material and a phosphorescent emissive material. The emissive region may further comprise additional fluorescent or phosphorescent emissive materials. Preferably, the emissive region has three different emissive materials—a red emissive material, a green emissive material and a blue emissive material. Organic light emitting devices incorporating the emissive region provides a high color-stability of the light emission over a wide range of currents or luminances.Type: ApplicationFiled: May 29, 2015Publication date: October 22, 2015Applicant: UNIVERSAL DISPLAY CORPORATIONInventors: Yeh-Jiun TUNG, Michael S. WEAVER, Michael HACK, James R. ESLER
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Patent number: 9070884Abstract: The present invention provides organic light emitting devices having a combined emission from at least two emissive materials, a fluorescent blue emissive material and a phosphorescent emissive material. The device may further comprise additional fluorescent or phosphorescent emissive materials. In preferred embodiments, the invention provides OLEDs having three different emissive materials—a red emissive material, a green emissive material and a blue emissive material. The invention provides a device architecture which is optimized for efficiency and lifetime by using a combination of fluorescent and phosphorescent emitters. Further, in preferred embodiments the device architecture provides a high color-stability of the light emission over a wide range of currents or luminances.Type: GrantFiled: April 13, 2005Date of Patent: June 30, 2015Assignee: Universal Display CorporationInventors: Yeh-Jiun Tung, Michael S. Weaver, Michael Hack, James Esler
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Patent number: 9001412Abstract: A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.Type: GrantFiled: October 10, 2012Date of Patent: April 7, 2015Assignee: QUALCOMM MEMS Technologies, Inc.Inventors: Clarence Chui, William Cummings, Brian James Gally, Lior Kogut, Ming-Hau Tung, Yeh-Jiun Tung, Chih-Wei Chiang, Denis Endisch
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Publication number: 20140029858Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for using acoustic artifact data produced through normal operation of interferometric modulator (IMOD) displays to convey data in addition to the graphical content displayed using an IMOD display panel. In one aspect, such acoustic artifact data may be used to fingerprint or authenticate graphical content displayed by an IMOD display panel. In another aspect, the actuation of IMODs in an IMOD display panel may be modulated to produce a desired acoustic artifact data stream that may communicate information independently of, and simultaneously with, the display of graphical content.Type: ApplicationFiled: July 30, 2012Publication date: January 30, 2014Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.Inventor: Yeh-Jiun Tung
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Patent number: 8465851Abstract: A device is provided, having an anode, a cathode, and two adjacent organic layers disposed between the anode and the cathode. One organic layer is a phosphorescent emissive material. The other organic layer may comprise an aromatic hydrocarbon material, comprising an aromatic non-heterocyclic hydrocarbon core optionally substituted, and wherein the substituents are the same or different, and each is selected from the group consisting of alkyl, alkenyl, alkynyl, aryl, heteroalkyl, substituted aryl, substituted heteroaryl and heterocyclic groups. The second organic layer may comprise a material having a molecular dipole moment less than about 2.0 debyes, such that the device has an unmodified external quantum efficiency of at least about 3% and a lifetime of at least about 1000 hours at an initial luminance of about 100 to about 1000 cd/m2.Type: GrantFiled: December 22, 2011Date of Patent: June 18, 2013Assignees: Universal Display Corporation, The University of Southern CaliforniaInventors: Mark E. Thompson, Raymond Kwong, Yeh-Jiun Tung, Jason Brooks