Patents by Inventor Yen-Chang Chu

Yen-Chang Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220122293
    Abstract: There is provided a temperature measurement system including an image sensor, a thermal sensor and a processor. The image sensor captures an image frame. The thermal sensor captures a thermal image. The processor calibrates measured temperatures of the thermal sensor and calibrates offset pixels between the image frame and the thermal image corresponding to different operating distances.
    Type: Application
    Filed: January 3, 2022
    Publication date: April 21, 2022
    Inventors: Chih-Ming SUN, Po-Wei YU, Yen-Chang CHU
  • Publication number: 20220102396
    Abstract: A system and method for forming pixels in an image sensor is provided. In an embodiment, a semiconductor device includes an image sensor including a first pixel region and a second pixel region in a substrate, the first pixel region being adjacent to the second pixel region. A first anti-reflection coating is over the first pixel region, the first anti-reflection coating reducing reflection for a first wavelength range of incident light. A second anti-reflection coating is over the second pixel region, the second anti-reflection coating reducing reflection for a second wavelength range of incident light that is different from the first wavelength range.
    Type: Application
    Filed: December 13, 2021
    Publication date: March 31, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yen-Chang Chu, Yeur-Luen Tu, Cheng-Yuan Tsai
  • Publication number: 20220061675
    Abstract: There is provided a forehead temperature measurement system including an image sensor, a thermal sensor and a processor. The image sensor is used to output an image frame. The thermal sensor is used to output a thermal image. The processor is used to determine a forehead region in the image frame, map the forehead region to the thermal image and identify a forehead temperature according to a forehead mapped region in the thermal image. The processor further calibrates or compensates the forehead temperature according to an area. of the forehead region.
    Type: Application
    Filed: July 26, 2021
    Publication date: March 3, 2022
    Inventors: Po-Wei YU, Yi-Chung CHEN, Ting-Yang CHANG, Chih-Ming SUN, Kai-Shun CHEN, Yen-Chang CHU
  • Patent number: 11201183
    Abstract: A system and method for forming pixels in an image sensor is provided. In an embodiment, a semiconductor device includes an image sensor including a first pixel region and a second pixel region in a substrate, the first pixel region being adjacent to the second pixel region. A first anti-reflection coating is over the first pixel region, the first anti-reflection coating reducing reflection for a first wavelength range of incident light. A second anti-reflection coating is over the second pixel region, the second anti-reflection coating reducing reflection for a second wavelength range of incident light that is different from the first wavelength range.
    Type: Grant
    Filed: September 12, 2019
    Date of Patent: December 14, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-Chang Chu, Yeur-Luen Tu, Cheng-Yuan Tsai
  • Publication number: 20210327748
    Abstract: In a method of manufacturing a semiconductor device, a first interlayer dielectric (ILD) layer is formed over a substrate, a chemical mechanical polishing (CMP) stop layer is formed over the first ILD layer, a trench is formed by patterning the CMP stop layer and the first ILD layer, a metal layer is formed over the CMP stop layer and in the trench, a sacrificial layer is formed over the metal layer, a CMP operation is performed on the sacrificial layer and the metal layer to remove a portion of the metal layer over the CMP stop layer, and a remaining portion of the sacrificial layer over the trench is removed.
    Type: Application
    Filed: June 28, 2021
    Publication date: October 21, 2021
    Inventors: Tsai-Ming HUANG, Wei-Chieh HUANG, Hsun-Chung KUANG, Yen-Chang CHU, Cheng-Che CHUNG, Chin-Wei LIANG, Ching-Sen KUO, Jieh-Jang CHEN, Feng-Jia SHIU, Sheng-Chau CHEN
  • Patent number: 11152426
    Abstract: Each memory cell in an array includes a vertical stack that comprises a bottom electrode, a memory element, and a top electrode. An etch stop dielectric layer is formed over the array of memory cells. A first dielectric matrix layer is formed over the etch stop dielectric layer. The top surface of the first dielectric matrix layer is raised in a memory array region relative to a logic region due to topography. The first dielectric matrix layer is planarized by performing a chemical mechanical planarization process using top portions of the etch stop dielectric layer. A second dielectric matrix layer is formed over the first dielectric matrix layer. Metallic cell contact structures are formed through the second dielectric matrix layer on a respective subset of the top electrodes over vertically protruding portions of the etch stop dielectric layer that laterally surround the array of vertical stacks.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: October 19, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Cheng-Tai Hsiao, Yen-Chang Chu, Hsun-Chung Kuang
  • Publication number: 20210239544
    Abstract: There is provided a force sensor including a substrate and a polymer material layer. The substrate has a circuit layout that includes a first electrode and a second electrode configured to form a capacitor therebetween. The polymer material layer covers at least on a space between the first electrode and the second electrode, and is used to change capacitance of the capacitor while being pressed. The force sensor is arranged inside a stem of an earphone for detecting the user input.
    Type: Application
    Filed: April 20, 2021
    Publication date: August 5, 2021
    Inventors: YEN-PO CHEN, HAO-CHE LIU, YEN-CHANG CHU, CHIH-MING SUN
  • Publication number: 20210217812
    Abstract: Each memory cell in an array includes a vertical stack that comprises a bottom electrode, a memory element, and a top electrode. An etch stop dielectric layer is formed over the array of memory cells. A first dielectric matrix layer is formed over the etch stop dielectric layer. The top surface of the first dielectric matrix layer is raised in a memory array region relative to a logic region due to topography. The first dielectric matrix layer is planarized by performing a chemical mechanical planarization process using top portions of the etch stop dielectric layer. A second dielectric matrix layer is formed over the first dielectric matrix layer. Metallic cell contact structures are formed through the second dielectric matrix layer on a respective subset of the top electrodes over vertically protruding portions of the etch stop dielectric layer that laterally surround the array of vertical stacks.
    Type: Application
    Filed: January 15, 2020
    Publication date: July 15, 2021
    Inventors: Cheng-Tai HSIAO, Yen-Chang Chu, Hsun-Chung Kuang
  • Patent number: 11049767
    Abstract: In a method of manufacturing a semiconductor device, a first interlayer dielectric (ILD) layer is formed over a substrate, a chemical mechanical polishing (CMP) stop layer is formed over the first ILD layer, a trench is formed by patterning the CMP stop layer and the first ILD layer, a metal layer is formed over the CMP stop layer and in the trench, a sacrificial layer is formed over the metal layer, a CMP operation is performed on the sacrificial layer and the metal layer to remove a portion of the metal layer over the CMP stop layer, and a remaining portion of the sacrificial layer over the trench is removed.
    Type: Grant
    Filed: September 26, 2019
    Date of Patent: June 29, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tsai-Ming Huang, Wei-Chieh Huang, Hsun-Chung Kuang, Yen-Chang Chu, Cheng-Che Chung, Chin-Wei Liang, Ching-Sen Kuo, Jieh-Jang Chen, Feng-Jia Shiu, Sheng-Chau Chen
  • Patent number: 11024774
    Abstract: Various embodiments of the present disclosure are directed towards a display device. The display device includes an isolation structure disposed over a semiconductor substrate. An electrode is disposed at least partially over the isolation structure. A light-emitting structure is disposed over the electrode. A conductive reflector is disposed below the isolation structure and electrically coupled to the electrode. The conductive reflector is disposed at least partially between sidewalls of the light-emitting structure. The conductive reflector comprises a non-metal-doped aluminum material.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: June 1, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yao-Wen Chang, Tzu-Chung Tsai, Yen-Chang Chu, Chia-Hua Lin
  • Publication number: 20210151353
    Abstract: An integrated circuit structure includes a package component, which further includes a non-porous dielectric layer having a first porosity, and a porous dielectric layer over and contacting the non-porous dielectric layer, wherein the porous dielectric layer has a second porosity higher than the first porosity. A bond pad penetrates through the non-porous dielectric layer and the porous dielectric layer. A dielectric barrier layer is overlying, and in contact with, the porous dielectric layer. The bond pad is exposed through the dielectric barrier layer. The dielectric barrier layer has a planar top surface. The bond pad has a planar top surface higher than a bottom surface of the dielectric barrier layer.
    Type: Application
    Filed: January 4, 2021
    Publication date: May 20, 2021
    Inventors: Hsun-Chung Kuang, Yen-Chang Chu, Cheng-Tai Hsiao, Ping-Yin Liu, Lan-Lin Chao, Yeur-Luen Tu, Chia-Shiung Tsai, Xiaomeng Chen
  • Publication number: 20210111312
    Abstract: Various embodiments of the present disclosure are directed towards a display device. The display device includes an isolation structure disposed over a semiconductor substrate. An electrode is disposed at least partially over the isolation structure. A light-emitting structure is disposed over the electrode. A conductive reflector is disposed below the isolation structure and electrically coupled to the electrode. The conductive reflector is disposed at least partially between sidewalls of the light-emitting structure. The conductive reflector comprises a non-metal-doped aluminum material.
    Type: Application
    Filed: October 15, 2019
    Publication date: April 15, 2021
    Inventors: Yao-Wen Chang, Tzu-Chung Tsai, Yen-Chang Chu, Chia-Hua Lin
  • Patent number: 10967479
    Abstract: The present disclosure relates to a chemical mechanical polishing (CMP) pad, and an associated method to perform a CMP process. In some embodiments, the CMP pad comprises a polishing layer having a front surface with protruding asperities while a back surface being planar. A film electrode is attached to the back surface of the polishing layer and is isolated from the front surface of the polishing layer. The CMP pad further comprises an insulating layer covering sidewall and bottom surfaces of the film electrode.
    Type: Grant
    Filed: June 13, 2019
    Date of Patent: April 6, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chin-Wei Liang, Hsun-Chung Kuang, Yen-Chang Chu
  • Patent number: 10943940
    Abstract: Various structures of image sensors are disclosed, as well as methods of forming the image sensors. According to an embodiment, a structure comprises a substrate comprising photo diodes, an oxide layer on the substrate, recesses in the oxide layer and corresponding to the photo diodes, a reflective guide material on a sidewall of each of the recesses, and color filters each being disposed in a respective one of the recesses. The oxide layer and the reflective guide material form a grid among the color filters, and at least a portion of the oxide layer and a portion of the reflective guide material are disposed between neighboring color filters.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: March 9, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei Chuang Wu, Jhy-Jyi Sze, Yu-Jen Wang, Yen-Chang Chu, Shyh-Fann Ting, Ching-Chun Wang
  • Publication number: 20210013098
    Abstract: An integrated circuit structure includes a package component, which further includes a non-porous dielectric layer having a first porosity, and a porous dielectric layer over and contacting the non-porous dielectric layer, wherein the porous dielectric layer has a second porosity higher than the first porosity. A bond pad penetrates through the non-porous dielectric layer and the porous dielectric layer. A dielectric barrier layer is overlying, and in contact with, the porous dielectric layer. The bond pad is exposed through the dielectric barrier layer. The dielectric barrier layer has a planar top surface. The bond pad has a planar top surface higher than a bottom surface of the dielectric barrier layer.
    Type: Application
    Filed: September 28, 2020
    Publication date: January 14, 2021
    Inventors: Hsun-Chung Kuang, Yen-Chang Chu, Cheng-Tai Hsiao, Ping-Yin Liu, Lan-Lin Chao, Yeur-Luen Tu, Chia-Shiung Tsai, Xiaomeng Chen
  • Publication number: 20200373445
    Abstract: A photo-sensitive device includes a uniform layer, a gradated buffer layer over the uniform layer, a silicon layer over the gradated buffer layer, a photo-sensitive light-sensing region in the uniform layer and the silicon layer, a device layer on the silicon layer, and a carrier wafer bonded to the device layer.
    Type: Application
    Filed: August 14, 2020
    Publication date: November 26, 2020
    Inventors: Yu-Hung Cheng, Chia-Shiung Tsai, Cheng-Ta Wu, Xiaomeng Chen, Yen-Chang Chu, Yeur-Luen Tu
  • Patent number: 10790189
    Abstract: An integrated circuit structure includes a package component, which further includes a non-porous dielectric layer having a first porosity, and a porous dielectric layer over and contacting the non-porous dielectric layer, wherein the porous dielectric layer has a second porosity higher than the first porosity. A bond pad penetrates through the non-porous dielectric layer and the porous dielectric layer. A dielectric barrier layer is overlying, and in contact with, the porous dielectric layer. The bond pad is exposed through the dielectric barrier layer. The dielectric barrier layer has a planar top surface. The bond pad has a planar top surface higher than a bottom surface of the dielectric barrier layer.
    Type: Grant
    Filed: October 2, 2018
    Date of Patent: September 29, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsun-Chung Kuang, Yen-Chang Chu, Cheng-Tai Hsiao, Ping-Yin Liu, Lan-Lin Chao, Yeur-Luen Tu, Chia-Shiung Tsai, Xiaomeng Chen
  • Patent number: 10756222
    Abstract: A photo-sensitive device includes a uniform layer, a gradated buffer layer over the uniform layer, a silicon layer over the gradated buffer layer, a photo-sensitive light-sensing region in the uniform layer and the silicon layer, a device layer on the silicon layer, and a carrier wafer bonded to the device layer.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: August 25, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Hung Cheng, Chia-Shiung Tsai, Cheng-Ta Wu, Xiaomeng Chen, Yen-Chang Chu, Yeur-Luen Tu
  • Patent number: 10748948
    Abstract: A system and method for forming pixels in an image sensor is provided. In an embodiment, a semiconductor device includes an image sensor including a first pixel region and a second pixel region in a substrate, the first pixel region being adjacent to the second pixel region. A first anti-reflection coating is over the first pixel region, the first anti-reflection coating reducing reflection for a first wavelength range of incident light. A second anti-reflection coating is over the second pixel region, the second anti-reflection coating reducing reflection for a second wavelength range of incident light that is different from the first wavelength range.
    Type: Grant
    Filed: May 31, 2017
    Date of Patent: August 18, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-Chang Chu, Yeur-Luen Tu, Cheng-Yuan Tsai
  • Publication number: 20200135538
    Abstract: In a method of manufacturing a semiconductor device, a first interlayer dielectric (ILD) layer is formed over a substrate, a chemical mechanical polishing (CMP) stop layer is formed over the first ILD layer, a trench is formed by patterning the CMP stop layer and the first ILD layer, a metal layer is formed over the CMP stop layer and in the trench, a sacrificial layer is formed over the metal layer, a CMP operation is performed on the sacrificial layer and the metal layer to remove a portion of the metal layer over the CMP stop layer, and a remaining portion of the sacrificial layer over the trench is removed.
    Type: Application
    Filed: September 26, 2019
    Publication date: April 30, 2020
    Inventors: Tsai-Ming HUANG, Wei-Chieh HUANG, Hsun-Chung KUANG, Yen-Chang CHU, Cheng-Che CHUNG, Chin-Wei LIANG, Ching-Sen KUO, Jieh-Jang CHEN, Feng-Jia SHIU, Sheng-Chau CHEN