Patents by Inventor Yen-Ming Chen

Yen-Ming Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Epitaxial structures for fin-like field effect transistors
    Patent number: 10680084
    Abstract: Epitaxial structures of a fin-like field effect transistor (FinFET) device includes a substrate, a fin structure including two fins, inner and outer fin spacers formed along both sidewalls of the fins, and isolation regions formed around the fins. The FinFET device further includes a gate structure formed over the fin structure and an epitaxial structure formed over the fin structure in a source/drain region. The epitaxial structure is formed by merging the fins with at least one epitaxial semiconductor layer and includes an air gap having a volume determined by the height and separation distance of the inner fin spacers.
    Type: Grant
    Filed: April 25, 2018
    Date of Patent: June 9, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Ta Yu, Sheng-Chen Wang, Feng-Cheng Yang, Yen-Ming Chen, Sai-Hooi Yeong
  • Semiconductor Device and Method
    Publication number: 20200176591
    Abstract: In an embodiment, a method includes: forming a fin extending from a substrate, the fin having a first width and a first height after the forming; forming a dummy gate stack over a channel region of the fin; growing an epitaxial source/drain in the fin adjacent the channel region; and after growing the epitaxial source/drain, replacing the dummy gate stack with a metal gate stack, the channel region of the fin having the first width and the first height before the replacing, the channel region of the fin having a second width and a second height after the replacing, the second width being less than the first width, the second height being less than the first height.
    Type: Application
    Filed: April 12, 2019
    Publication date: June 4, 2020
    Inventors: I-Hsieh Wong, Yen-Ting Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
  • Semiconductor Device including a High Density MIM Capacitor and Method
    Publication number: 20200176557
    Abstract: Methods of forming a 3-dimensional metal-insulator-metal super high density (3D-MIM-SHD) capacitor and semiconductor device are disclosed herein. A method includes depositing a base layer of a first dielectric material over a semiconductor substrate and etching a series of recesses in the base layer. Once the series of recesses have been etched into the base layer, a series of conductive layers and dielectric layers may be deposited within the series of recesses to form a three dimensional corrugated stack of conductive layers separated by the dielectric layers. A first contact plug may be formed through a middle conductive layer of the corrugated stack and a second contact plug may be formed through a top conductive layer and a bottom conductive layer of the corrugated stack. The contact plugs electrically couple the conductive layers to one or more active devices of the semiconductor substrate.
    Type: Application
    Filed: May 1, 2019
    Publication date: June 4, 2020
    Inventors: Jin-Mu Yin, Hung-Chao Kao, Dian-Hau Chen, Hui-Chi Chen, Hsiang-Ku Shen, Yen-Ming Chen
  • Method for Epitaxial Growth and Device
    Publication number: 20200168723
    Abstract: A semiconductor device includes first and second semiconductor fins extending from a substrate and a source/drain region epitaxially grown in recesses of the first and second semiconductor fins. A top surface of the source/drain region is higher than a surface level with top surfaces of the first and second semiconductor fins. The source/drain region includes a plurality of buffer layers. Respective layers of the plurality of buffer layers are embedded between respective layers of the source/drain region. Each of the plurality of buffer layers may have an average thickness in a range of about 2 ? to about 30 ?.
    Type: Application
    Filed: November 13, 2019
    Publication date: May 28, 2020
    Inventors: Tzu-Hsiang Hsu, Ting-Yeh Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
  • Shielding Structures
    Publication number: 20200168574
    Abstract: Semiconductor device packages and method are provided. A semiconductor device package according to the present disclosure includes a substrate including a first region, a passive device disposed over the first region of the substrate, a contact pad disposed over the passive device, a passivation layer disposed over the contact pad, a recess through the passivation layer, and an under-bump metallization (UBM) layer. The recess exposes the contact pad and the UBM layer includes an upper portion disposed over the passivation layer and a lower portion disposed over a sidewall of the recess. A projection of the upper portion of the UBM layer along a direction perpendicular to the substrate falls within an area of the contact pad.
    Type: Application
    Filed: April 23, 2019
    Publication date: May 28, 2020
    Inventors: Chih-Fan Huang, Hui-Chi Chen, Kuo-Chin Chang, Chien-Huang Yeh, Hong-Seng Shue, Dian-Hau Chen, Yen-Ming Chen
  • Semiconductor Device with Self-Aligned Wavy Contact Profile and Method of Forming the Same
    Publication number: 20200168735
    Abstract: A semiconductor device and method of manufacturing the semiconductor device are provided. An exemplary semiconductor device comprises a fin disposed over a substrate, wherein the fin includes a channel region and a source/drain region; a gate structure disposed over the substrate and over the channel region of the fin; a source/drain feature epitaxially grown in the source/drain region of the fin, wherein the source/drain feature includes a top epitaxial layer and a lower epitaxial layer formed below the top epitaxial layer, and the lower epitaxial layer includes a wavy top surface; and a contact having a wavy bottom surface matingly engaged with the wavy top surface of the lower epitaxial layer of the source/drain feature..
    Type: Application
    Filed: October 18, 2019
    Publication date: May 28, 2020
    Inventors: Chia-Ta Yu, Yen-Chieh Huang, Wei-Yuan Lu, Feng-Cheng Yang, Yen-Ming Chen
  • INTERCONNECT STRUCTURE FOR SEMICONDUCTOR DEVICE AND METHODS OF FABRICATION THEREOF
    Publication number: 20200161240
    Abstract: Methods and devices for forming a conductive line disposed over a substrate. A first dielectric layer is disposed over the substrate and coplanar with the conductive line. A second dielectric layer disposed over the conductive line and a third dielectric layer disposed over the first dielectric layer. A via extends through the second dielectric layer and is coupled to the conductive line. The second dielectric layer and the third dielectric layer are coplanar and the second and third dielectric layers have a different composition. In some embodiments, the second dielectric layer is selectively deposited on the conductive line.
    Type: Application
    Filed: December 20, 2019
    Publication date: May 21, 2020
    Inventors: Chia-Ta YU, Kai-Hsuan LEE, Yen-Ming CHEN, Chi On CHUI, Sai-Hooi YEONG
  • Transistors with Recessed Silicon Cap and Method Forming Same
    Publication number: 20200161297
    Abstract: A method includes forming a semiconductor fin protruding higher than top surfaces of isolation regions. A top portion of the semiconductor fin is formed of a first semiconductor material. A semiconductor cap layer is formed on a top surface and sidewalls of the semiconductor fin. The semiconductor cap layer is formed of a second semiconductor material different from the first semiconductor material. The method further includes forming a gate stack on the semiconductor cap layer, forming a gate spacer on a sidewall of the gate stack, etching a portion of the semiconductor fin on a side of the gate stack to form a first recess extending into the semiconductor fin, recessing the semiconductor cap layer to form a second recess directly underlying a portion of the gate spacer, and performing an epitaxy to grow an epitaxy region extending into both the first recess and the second recess.
    Type: Application
    Filed: June 3, 2019
    Publication date: May 21, 2020
    Inventors: Yen-Ting Chen, Bo-Yu Lai, Chien-Wei Lee, Hsueh-Chang Sung, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
  • Pattern fidelity enhancement with directional patterning technology
    Patent number: 10658184
    Abstract: A method for semiconductor manufacturing includes providing a substrate and a patterning layer over the substrate; forming a hole in the patterning layer; applying a first directional etching along a first direction to inner sidewalls of the hole; and applying a second directional etching along a second direction to the inner sidewalls of the hole, wherein the second direction is different from the first direction.
    Type: Grant
    Filed: March 30, 2017
    Date of Patent: May 19, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Tien Shen, Chi-Cheng Hung, Chin-Hsiang Lin, Chien-Wei Wang, Ching-Yu Chang, Chih-Yuan Ting, Kuei-Shun Chen, Ru-Gun Liu, Wei-Liang Lin, Ya Hui Chang, Yuan-Hsiang Lung, Yen-Ming Chen, Yung-Sung Yen
  • Forming Transistor by Selectively Growing Gate Spacer
    Publication number: 20200152522
    Abstract: A method includes forming a gate dielectric layer on a semiconductor fin, and forming a gate electrode over the gate dielectric layer. The gate electrode extends on sidewalls and a top surface of the semiconductor fin. A gate spacer is selectively deposited on a sidewall of the gate electrode. An exposed portion of the gate dielectric layer is free from a same material for forming the gate spacer deposited thereon. The method further includes etching the gate dielectric layer using the gate spacer as an etching mask to expose a portion of the semiconductor fin, and forming an epitaxy semiconductor region based on the semiconductor fin.
    Type: Application
    Filed: January 13, 2020
    Publication date: May 14, 2020
    Inventors: Kai-Hsuan Lee, Chia-Ta Yu, Cheng-Yu Yang, Sheng-Chen Wang, Bo-Yu Lai, Bo-Cyuan Lu, Chi On Chui, Sai-Hooi Yeong, Feng-Cheng Yang, Yen-Ming Chen
  • FIN FIELD EFFECT TRANSISTOR (FINFET) DEVICE STRUCTURE WITH DUMMY FIN STRUCTURE
    Publication number: 20200144126
    Abstract: A fin field effect transistor (FinFET) device structure with dummy fin structures and method for forming the same are provided. The FinFET device structure includes an isolation structure over a substrate, and a first fin structure extended above the isolation structure. The FinFET device structure includes a second fin structure embedded in the isolation structure, and a liner layer formed on sidewalls of the first fin structures and sidewalls of the second fin structures. The FinFET device structure includes a material layer formed over the second fin structures, and the material layer and the isolation structure are made of different materials.
    Type: Application
    Filed: December 30, 2019
    Publication date: May 7, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tzung-Yi TSAI, Yen-Ming CHEN, Tsung-Lin LEE, Chih-Chieh YEH
  • METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH CAP LAYER
    Publication number: 20200144423
    Abstract: A method for forming a semiconductor device structure is provided. The method includes providing a substrate having a base, a first fin structure, and a second fin structure. The method includes forming a gate structure over the first fin structure and the second fin structure. The method includes forming a first source structure and a first drain structure on the first fin structure and on two opposite sides of the gate structure. The first source structure and the first drain structure are made of an N-type conductivity material. The method includes forming a cap layer over the first source structure and the first drain structure. The cap layer is doped with a Group IIIA element, and the cap layer adjacent to a top surface of the first source structure is thicker than the cap layer adjacent to a bottom surface of the first source structure.
    Type: Application
    Filed: December 30, 2019
    Publication date: May 7, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Feng-Ching CHU, Wei-Yang LEE, Feng-Cheng YANG, Yen-Ming CHEN
  • SEMICONDUCTOR DEVICE WITH EPITAXIAL SOURCE/DRAIN
    Publication number: 20200144364
    Abstract: A semiconductor device and method of manufacturing the semiconductor device are provided. In some embodiments, the semiconductor device includes a fin extending from a substrate and a gate structure disposed over the fin. The gate structure includes a gate dielectric formed over the fin, a gate electrode formed over the gate dielectric, and a sidewall spacer formed along a sidewall of the gate electrode. In some cases, a U-shaped recess is within the fin and adjacent to the gate structure. A first source/drain layer is conformally formed on a surface of the U-shaped recess, where the first source/drain layer extends at least partially under the adjacent gate structure. A second source/drain layer is formed over the first source/drain layer. At least one of the first and second source/drain layers includes silicon arsenide (SiAs).
    Type: Application
    Filed: December 20, 2019
    Publication date: May 7, 2020
    Inventors: Chia-Ta YU, Sheng-Chen WANG, Wei-Yuan LU, Chien-I KUO, Li-Li SU, Feng-Cheng YANG, Yen-Ming CHEN, Sai-Hooi YEONG
  • Semiconductor Device and Method of Manufacture
    Publication number: 20200135880
    Abstract: A semiconductor device including a gaseous spacer and a method for forming the same are disclosed. In an embodiment, a method includes forming a gate stack over a substrate; forming a first gate spacer on sidewalls of the gate stack; forming a second gate spacer over the first gate spacer; removing a portion of the second gate spacer, at least a portion of the second gate spacer remaining; removing the first gate spacer to form a first opening; and after removing the first gate spacer, removing the remaining portion of the second gate spacer through the first opening.
    Type: Application
    Filed: April 1, 2019
    Publication date: April 30, 2020
    Inventors: Yen-Ting Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
  • SEMICONDUCTOR DEVICE AND METHOD
    Publication number: 20200135574
    Abstract: A semiconductor device including a fin field effect transistor (FinFET) with a cut metal gate (CMG) and a method of manufacturing the semiconductor device are described herein. The method includes forming a CMG protective helmet structure at a top portion of a CMG dummy gate plug formed within a semiconductor substrate. The CMG protective helmet structure prevents consumption and damage of a dummy filler material in a CMG region and prevents undesirable polymer/residue byproducts from forming on top surfaces of epitaxial regions of the FinFET during etching processes.
    Type: Application
    Filed: March 1, 2019
    Publication date: April 30, 2020
    Applicants: Taiwan Semiconductor Manufacturing Company, Ltd., Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Yu Yang, Feng-Cheng Yang, Wei-Yang Lee, Yen-Ming Chen, Yen-Ting Chen
  • AIR GAP FORMATION BETWEEN GATE SPACER AND EPITAXY STRUCTURE
    Publication number: 20200135590
    Abstract: A method includes forming a gate stack over a semiconductor substrate, forming a first spacer layer on a sidewall of the gate stack, forming a sacrificial spacer film over the first spacer layer, forming an epitaxy structure on the semiconductor substrate, and performing an etching process on the sacrificial spacer film to form a gap between the first spacer layer and the epitaxy structure. An outer portion of the sacrificial spacer film has a topmost end higher than that of an inner portion of the sacrificial spacer film after performing the etching process. The method further includes forming a second spacer layer to seal the gap between the epitaxy structure and the first spacer layer.
    Type: Application
    Filed: May 14, 2019
    Publication date: April 30, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Bo-Yu LAI, Kai-Hsuan LEE, Wei-Yang LEE, Feng-Cheng YANG, Yen-Ming CHEN
  • Source/Drain Features with an Etch Stop Layer
    Publication number: 20200126869
    Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a substrate having a first device region and a second device region, a first fin over the substrate in the first device region, a second fin over the substrate in the second device region, a first epitaxial feature over the first fin in the source/drain region of the first fin, a second epitaxial feature over the second fin in the source/drain region of the second fin, and a dielectric layer on the first and second epitaxial features. The first epitaxial feature is doped with a first dopant of a first conductivity and the second epitaxial feature is doped with a second dopant of a second conductivity different from the first conductivity. The dielectric layer is doped with the first dopant.
    Type: Application
    Filed: December 17, 2019
    Publication date: April 23, 2020
    Inventors: Feng-Ching Chu, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
  • Semiconductor Device with Air-Spacer
    Publication number: 20200127110
    Abstract: A method includes providing a structure having a substrate, a gate structure over the substrate, a sacrificial spacer over a sidewall of the gate structure, a source/drain feature over the substrate and adjacent to the gate structure; forming a dielectric layer over the gate structure, the sacrificial spacer, and the source/drain feature; with the dielectric layer over the gate structure, the sacrificial spacer, and the source/drain feature, forming a contact extending through the dielectric layer to the source/drain feature; removing the dielectric layer to expose the sacrificial spacer; etching the sacrificial spacer to form a trench; and depositing an inter-layer dielectric (ILD) layer, wherein the ILD layer caps the trench, thereby defining an air gap inside the trench.
    Type: Application
    Filed: December 19, 2019
    Publication date: April 23, 2020
    Inventors: Wei-Yang Lee, Feng-Cheng Yang, Chung-Te Lin, Yen-Ming Chen
  • Method of manufacturing semiconductor device with multi wire structure
    Patent number: 10629527
    Abstract: A semiconductor device includes a plurality of lower conductive lines overlying a substrate and extending in a first direction, an insulating layer overlying the plurality of lower conductive lines, a plurality of upper conductive lines overlying the insulating layer and the first conductive lines and extending in a second direction crossing the first direction, and a plurality of vias filled with a conductive material formed in the insulating layer. The plurality of upper conductive lines are arranged in the first direction with a first pitch. The plurality of vias includes first vias and second vias. At least one via of the first vias connects at least two lines of the plurality of lower conductive lines and one line of the plurality of upper conductive lines. An average width in the first direction of the first vias is different from an average width in the first direction of the second vias.
    Type: Grant
    Filed: November 20, 2018
    Date of Patent: April 21, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Yen Liu, Boo Yeh, Min-Chang Liang, Jui-Yao Lai, Sai-Hooi Yeong, Ying-Yan Chen, Yen-Ming Chen
  • Semiconductor Structure with Polyimide Packaging and Manufacturing Method
    Publication number: 20200105634
    Abstract: The present disclosure provides a method that includes providing an integrated circuit (IC) substrate having various devices and an interconnection structure that couples the devices to an integrated circuit; forming a first passivation layer on the IC substrate; forming a redistribution layer on the first passivation layer, the redistribution layer being electrically connected to the interconnection structure; forming a second passivation layer on the redistribution layer and the first passivation layer; forming a polyimide layer on the second passivation layer; patterning the polyimide layer, resulting in a polyimide opening in the polyimide layer; and etching the second passivation layer through the polyimide opening using the polyimide layer as an etch mask.
    Type: Application
    Filed: May 14, 2019
    Publication date: April 2, 2020
    Inventors: Chih-Fan Huang, Mao-Nan Wang, Kuo-Chin Chang, Hui-Chi Chen, Dian-Hau Chen, Yen-Ming Chen