Patents by Inventor Yi-Chen Lo
Yi-Chen Lo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240124163Abstract: A magnetic multi-pole propulsion array system is applied to at least one external cathode and includes a plurality of magnetic multi-pole thrusters connected adjacent to each other. Each magnetic multi-pole thruster includes a propellant provider, a discharge chamber, an anode and a plurality of magnetic components. The propellant provider outputs propellant. The discharge chamber is connected with the propellant provider to accommodate the propellant. The anode is disposed inside the discharge chamber to generate an electric field. The plurality of magnetic components is respectively disposed on several sides of the discharge chamber. One of the several sides of the discharge chamber of the magnetic multi-pole thruster is applied for one side of a discharge chamber of another magnetic multi-pole thruster.Type: ApplicationFiled: December 19, 2022Publication date: April 18, 2024Applicant: National Cheng Kung UniversityInventors: Yueh-Heng Li, Yu-Ting Wu, Chao-Wei Huang, Wei-Cheng Lo, Hsun-Chen Hsieh, Ping-Han Huang, Yi-Long Huang, Sheng-Wen Liu, Wei-Cheng Lien
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Publication number: 20240129012Abstract: A wearable device includes a frame element and a dielectric substrate. The frame element includes a first metal element, a second metal element, and a third metal element. A first gap is provided between the first metal element and the second metal element. A second gap is provided between the second metal element and the third metal element. A third gap is provided between the third metal element and the first metal element. The dielectric substrate is surrounded by the first metal element, the second metal element, and the third metal element. A first antenna element is formed by the first metal element. A second antenna element is formed by the second metal element. A third antenna element is formed by the third metal element.Type: ApplicationFiled: December 6, 2022Publication date: April 18, 2024Inventors: Jing-Yao XU, Chung-Ting HUNG, Chun-Yuan WANG, Chu-Yu TANG, Yi-Chih LO, Yu-Chen ZHAO, Chih-Tsung TSENG
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Publication number: 20240113731Abstract: A ghost key preventing circuit includes plural driving lines, plural sensing lines, plural key switches, plural bias resistors and a controller. The plural driving lines and the plural sensing lines are collaboratively formed as a matrix circuit. The plural key switches are included in the matrix circuit. The plural bias resistors are connected with the corresponding sensing lines. When the key switch of a specified switch circuit is turned on, a divided voltage is generated and outputted from the specified switch circuit. The controller judges whether the key switch of the specified switch circuit is normally turned on or the key switch is a ghost key according to the divided voltage.Type: ApplicationFiled: January 5, 2023Publication date: April 4, 2024Inventors: Chih-Chen Chang, Yi-Liang Chen, Yu-Ting Lo
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Patent number: 11929424Abstract: A method includes forming a semiconductor fin on a substrate; forming a dielectric layer over the semiconductor fin; forming a metal gate electrode in the dielectric layer and extending across the semiconductor fin; forming a source/drain regions on the semiconductor fin and on opposite sides of the metal gate electrode; performing a first non-zero bias plasma etching process to the metal gate electrode; after performing the first non-zero bias plasma etching process, performing a first zero bias plasma etching process to the metal gate electrode.Type: GrantFiled: July 26, 2022Date of Patent: March 12, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Chen Lo, Li-Te Lin, Pinyen Lin
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Publication number: 20240072114Abstract: Various embodiments of the present disclosure provide a semiconductor device structure. In one embodiment, the semiconductor device structure includes a plurality of semiconductor layers vertically stacked over a substrate, a source/drain feature in contact with each of the plurality of the semiconductor layers, an inner spacer disposed between two adjacent semiconductor layers, a gate electrode layer surrounding a portion of each of the plurality of the semiconductor layers, a gate dielectric layer disposed between the semiconductor layer and the gate electrode layer, a gate spacer in contact with a portion of the gate dielectric layer. The semiconductor device structure further includes a first cap layer comprising a first portion disposed between and in contact with the source/drain feature and the gate spacer, and a second portion disposed between and in contact with gate spacer and the inner spacer.Type: ApplicationFiled: January 25, 2023Publication date: February 29, 2024Inventor: Yi-Chen LO
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Publication number: 20240063288Abstract: A semiconductor device includes first and second gate structures over a substrate, the first gate structure has a first width that is smaller than a second width of the second gate structure, in which a lower portion of the first gate structure having a first work-function material (WFM) layer, the first WFM layer having a top surface, a lower portion of the second gate structure having a second WFM layer, the second WFM layer having a top surface. A first gate electrode is disposed over the first WFM layer and a second gate electrode has a lower portion disposed in the second WFM layer, in which the first gate electrode has a first width that is smaller than a second width of the second gate electrode, and wherein the top surface of the second WFM layer is at a level below a top surface of the second gate electrode.Type: ApplicationFiled: November 3, 2023Publication date: February 22, 2024Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Chen LO, Jung-Hao CHANG, Li-Te LIN, Pinyen LIN
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Patent number: 11843041Abstract: A semiconductor device includes first and second gate structures over a substrate, the first gate structure has a first width that is smaller than a second width of the second gate structure, in which a lower portion of the first gate structure having a first work-function material (WFM) layer, the first WFM layer having a top surface, a lower portion of the second gate structure having a second WFM layer, the second WFM layer having a top surface. A first gate electrode is disposed over the first WFM layer and a second gate electrode has a lower portion disposed in the second WFM layer, in which the first gate electrode has a first width that is smaller than a second width of the second gate electrode, and wherein the top surface of the second WFM layer is at a level below a top surface of the second gate electrode.Type: GrantFiled: July 1, 2022Date of Patent: December 12, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Chen Lo, Jung-Hao Chang, Li-Te Lin, Pinyen Lin
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Publication number: 20230261091Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, a fin structure over the substrate, a gate structure over the fin structure, a first inner spacer layer formed in the fin structure and adjacent to the gate structure, and a second inner spacer layer extending through the first inner spacer layer.Type: ApplicationFiled: April 28, 2023Publication date: August 17, 2023Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Yi-Chen LO
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Patent number: 11652157Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, a fin structure over the substrate, a gate structure over the fin structure, a first inner spacer layer formed in the fin structure and adjacent to the gate structure, and a second inner spacer layer extending through the first inner spacer layer.Type: GrantFiled: March 28, 2022Date of Patent: May 16, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Yi-Chen Lo
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Publication number: 20230029651Abstract: The present disclosure describes a semiconductor device having a protection layer on inner spacer structures, The semiconductor device includes a nanostructure on a substrate. The nanostructure includes multiple semiconductor layers. The semiconductor device further includes a gate structure wrapped around a middle portion of the multiple semiconductor layers and a spacer structure adjacent to an end portion of the multiple semiconductor layers. The gate structure includes a high-k dielectric layer. The semiconductor device further includes a protection layer between the high-k dielectric layer and the spacer structure.Type: ApplicationFiled: May 6, 2022Publication date: February 2, 2023Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Yi-Chen Lo
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Patent number: 11522065Abstract: A method includes following steps. First and second gate electrodes are formed over a substrate, with an ILD layer between the first and second gate electrodes. A first etch operation is performed to etch the first and second gate electrodes. A sacrificial layer is formed across the etched first and second gate electrodes and the ILD layer. A second etch operation is performed to etch the sacrificial layer and the etched the first and second gate electrodes.Type: GrantFiled: March 19, 2021Date of Patent: December 6, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Chen Lo, Jung-Hao Chang, Li-Te Lin, Pinyen Lin
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Publication number: 20220359724Abstract: A method includes forming a semiconductor fin on a substrate; forming a dielectric layer over the semiconductor fin; forming a metal gate electrode in the dielectric layer and extending across the semiconductor fin; forming a source/drain regions on the semiconductor fin and on opposite sides of the metal gate electrode; performing a first non-zero bias plasma etching process to the metal gate electrode; after performing the first non-zero bias plasma etching process, performing a first zero bias plasma etching process to the metal gate electrode.Type: ApplicationFiled: July 26, 2022Publication date: November 10, 2022Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Chen LO, Li-Te LIN, Pinyen LIN
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Publication number: 20220336623Abstract: A semiconductor device includes first and second gate structures over a substrate, the first gate structure has a first width that is smaller than a second width of the second gate structure, in which a lower portion of the first gate structure having a first work-function material (WFM) layer, the first WFM layer having a top surface, a lower portion of the second gate structure having a second WFM layer, the second WFM layer having a top surface. A first gate electrode is disposed over the first WFM layer and a second gate electrode has a lower portion disposed in the second WFM layer, in which the first gate electrode has a first width that is smaller than a second width of the second gate electrode, and wherein the top surface of the second WFM layer is at a level below a top surface of the second gate electrode.Type: ApplicationFiled: July 1, 2022Publication date: October 20, 2022Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Chen LO, Jung-Hao CHANG, Li-Te LIN, Pinyen LIN
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Publication number: 20220328324Abstract: In a method of forming a pattern over a semiconductor substrate, a target layer to be patterned is formed over a substrate, a mask pattern including an opening is formed in a mask layer, a shifting film is formed in an inner sidewall of the opening, a one-directional etching operation is performed to remove a part of the shifting film and a part of the mask layer to form a shifted opening, and the target layer is patterned by using the mask layer with the shifted opening as an etching mask. A location of the shifted opening is laterally shifted from an original location of the opening.Type: ApplicationFiled: April 9, 2021Publication date: October 13, 2022Inventors: Yi-Chen LO, Yi-Shan CHEN, Chih-Kai YANG, Pinyen LIN
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Publication number: 20220319861Abstract: A technique for semiconductor manufacturing is provided. The technique includes the operations as follows. A semiconductor structure having a first material is received. A plurality of first main etches are performed to the semiconductor structure for a plurality of first durations under the first etching chemistry. A plurality of pumping operations are performed for a plurality of pumping durations, each of the pumping operations being prior to each of the first main etches. Each of the first durations is in a range of from about 1 second to about 2.5 seconds.Type: ApplicationFiled: June 24, 2022Publication date: October 6, 2022Inventors: HAN-YU LIN, LI-TE LIN, TZE-CHUNG LIN, FANG-WEI LEE, YI-LUN CHEN, JUNG-HAO CHANG, YI-CHEN LO, FO-JU LIN, KENICHI SANO, PINYEN LIN
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Patent number: 11424341Abstract: A semiconductor device includes a substrate, a semiconductor fin, a gate electrode, a pair of gate spacers, a dielectric cap, and a hard mask layer. The semiconductor fin extends upwardly from the substrate. The gate electrode straddles the semiconductor fin. The pair of gate spacers is on opposite sidewalls of the gate electrode. The dielectric cap is atop the gate electrode and laterally between the pair of gate spacers. The hard mask layer is atop the dielectric cap and laterally between the pair of gate spacers. A bottommost position of the hard mask layer is not lower than a topmost position of the dielectric cap.Type: GrantFiled: July 24, 2020Date of Patent: August 23, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Chen Lo, Li-Te Lin, Pinyen Lin
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Publication number: 20220223715Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, a fin structure over the substrate, a gate structure over the fin structure, a first inner spacer layer formed in the fin structure and adjacent to the gate structure, and a second inner spacer layer extending through the first inner spacer layer.Type: ApplicationFiled: March 28, 2022Publication date: July 14, 2022Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Yi-Chen LO
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Patent number: 11373878Abstract: A technique for semiconductor manufacturing is provided. The technique includes the operations as follows. A semiconductor structure having a first material and a second material is revived. The first material has a first incubation time to a first etching chemistry. The second material has a second incubation time to the first etching chemistry. The first incubation time is shorter than the second incubation time. A first main etch to the semiconductor structure for a first duration by the first etching chemistry is performed. The first duration is greater than the first incubation time and shorter than the second incubation time.Type: GrantFiled: January 20, 2021Date of Patent: June 28, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Han-Yu Lin, Li-Te Lin, Tze-Chung Lin, Fang-Wei Lee, Yi-Lun Chen, Jung-Hao Chang, Yi-Chen Lo, Fo-Ju Lin, Kenichi Sano, Pinyen Lin
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Publication number: 20220164601Abstract: A contrastive learning method for color constancy employs a fully-supervised construction of contrastive pairs, driven by a novel data augmentation. The contrastive learning method includes receiving two training images, constructing positive and negative contrastive pairs by the novel data augmentation, extracting representations by a feature extraction function, and training a color constancy model by contrastive learning representations in the positive contrastive pair are closer than representations in the negative contrastive pair. The positive contrastive pair contains images having an identical illuminant while negative contrastive pair contains images having different illuminants. The contrastive learning method improves the performance without additional computational costs. The desired contrastive pairs allow the color constancy model to learn better illuminant feature that are particular robust to worse-cases in data sparse regions.Type: ApplicationFiled: November 18, 2021Publication date: May 26, 2022Inventors: Yi-Chen LO, Chia-Che CHANG
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Patent number: 11289586Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, a fin structure over the substrate, a gate structure over the fin structure, a first inner spacer layer formed in the fin structure and adjacent to the gate structure, and a second inner spacer layer extending through the first inner spacer layer.Type: GrantFiled: August 11, 2020Date of Patent: March 29, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Yi-Chen Lo