Patents by Inventor Yi-Fang Lee
Yi-Fang Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20220238658Abstract: Some embodiments include an integrated assembly having a gate material, an insulative material adjacent the gate material, and a semiconductor oxide adjacent the insulative material. The semiconductor oxide has a channel region proximate the gate material and spaced from the gate material by the insulative material. An electric field along the gate material induces carrier flow within the channel region, with the carrier flow being along a first direction. The semiconductor oxide includes a grain boundary having a portion which extends along a second direction that crosses the first direction of the carrier flow. In some embodiments, the semiconductor oxide has a grain boundary which extends along the first direction and which is offset from the insulative material by an intervening portion of the semiconductor oxide. The carrier flow is within the intervening region and substantially parallel to the grain boundary. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: April 13, 2022Publication date: July 28, 2022Applicant: Micron Technology, Inc.Inventors: Yi Fang Lee, Isamu Asano, Ramanathan Gandhi, Scott E. Sills
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Patent number: 11398263Abstract: A semiconductor structure includes an electrode, a ferroelectric material adjacent the electrode, the ferroelectric material comprising an oxide of at least one of hafnium and zirconium, the ferroelectric material doped with bismuth, and another electrode adjacent the ferroelectric material on an opposite side thereof from the first electrode. Related semiconductor structures, memory cells, semiconductor devices, electronic systems, and related methods are disclosed.Type: GrantFiled: July 15, 2020Date of Patent: July 26, 2022Assignee: Micron Technology, Inc.Inventors: Albert Liao, Wayne I. Kinney, Yi Fang Lee, Manzar Siddik
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Patent number: 11393688Abstract: Systems, methods and apparatus are provided for a semiconductor structure. An example method includes a method for forming a contact surface on a vertically oriented access devices. The method includes forming a first source/drain region and a second source/drain region vertically separated by a channel region, forming a sacrificial etch stop layer on a first side of the second source/drain region, wherein the channel region is in contact with a second side of the second source/drain region, forming a dielectric layer on a first side of the sacrificial etch stop layer, where the second source/drain region is connected to a second side of the sacrificial etch stop layer, removing the dielectric layer using a first etch process to expose the sacrificial etch stop layer, and removing the sacrificial etch stop layer using a second etch process to form a contact surface on the second source/drain region.Type: GrantFiled: August 4, 2020Date of Patent: July 19, 2022Assignee: Micron Technology, Inc.Inventors: Jerome A. Imonigie, Guangjun Yang, Anish A. Khandekar, Yoshitaka Nakamura, Yi Fang Lee
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Publication number: 20220181434Abstract: A vertical transistor comprises a top source/drain region, a bottom source/drain region, a channel region vertically between the top and bottom source/drain regions, and a gate operatively laterally-adjacent the channel region. The top source/drain region and the channel region have a top interface and the bottom source/drain region and the channel region have a bottom interface. The channel region is crystalline and has an average crystal grain size of its crystal grains that is less than 20 nanometers. The channel region at the top interface or at the bottom interface has greater horizontal texture than volume of the crystal grains in the channel region that is vertically between the crystal grains that are at the top and bottom interfaces. Other embodiments and aspects are disclosed.Type: ApplicationFiled: December 9, 2020Publication date: June 9, 2022Applicant: Micron Technology, Inc.Inventors: Yi Fang Lee, Hung-Wei Liu, Ning Lu, Anish A. Khandekar, Jeffery B. Hull, Silvia Borsari
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Patent number: 11335775Abstract: Some embodiments include a transistor having an active region containing semiconductor material. The semiconductor material includes at least one element selected from Group 13 of the periodic table in combination with at least one element selected from Group 16 of the periodic table. The active region has a first region, a third region offset from the first region, and a second region between the first and third regions. A gating structure is operatively adjacent to the second region. A first carrier-concentration-gradient is within the first region, and a second carrier-concentration-gradient is within the third region. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: November 19, 2020Date of Patent: May 17, 2022Assignee: Micron Technology, Inc.Inventors: Srinivas Pulugurtha, Jaydip Guha, Scott E. Sills, Yi Fang Lee
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Patent number: 11329133Abstract: Some embodiments include an integrated assembly having a gate material, an insulative material adjacent the gate material, and a semiconductor oxide adjacent the insulative material. The semiconductor oxide has a channel region proximate the gate material and spaced from the gate material by the insulative material. An electric field along the gate material induces carrier flow within the channel region, with the carrier flow being along a first direction. The semiconductor oxide includes a grain boundary having a portion which extends along a second direction that crosses the first direction of the carrier flow. In some embodiments, the semiconductor oxide has a grain boundary which extends along the first direction and which is offset from the insulative material by an intervening portion of the semiconductor oxide. The carrier flow is within the intervening region and substantially parallel to the grain boundary. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: November 19, 2019Date of Patent: May 10, 2022Assignee: Micron Technology, Inc.Inventors: Yi Fang Lee, Isamu Asano, Ramanathan Gandhi, Scott E. Sills
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Publication number: 20220109008Abstract: Some embodiments include an integrated assembly which includes a base structure. The base structure includes a series of conductive structures which extend along a first direction. The conductive structures have steps which alternate with recessed regions along the first direction. Pillars of semiconductor material are over the steps. The semiconductor material includes at least one element selected from Group 13 of the periodic table in combination with at least one element selected from Group 16 of the periodic table. The semiconductor material may be semiconductor oxide in some applications. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: October 2, 2020Publication date: April 7, 2022Inventors: Scott E. Sills, Yi Fang Lee, Kevin J. Torek
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Publication number: 20220102348Abstract: A method used in forming integrated circuitry comprises forming conductive material over a substrate. The conductive material is patterned into a conductive line that is horizontally longitudinally elongated. The conductive material is vertically recessed in longitudinally-spaced first regions of the conductive line to form longitudinally-spaced conductive pillars that individually are in individual longitudinally-spaced second regions that longitudinally-alternate with the longitudinally-spaced first regions along the conductive line. The conductive pillars project vertically relative to the conductive material in the longitudinally-spaced and vertically-recessed first regions of the conductive line. Electronic components are formed directly above the conductive pillars. Individual of the electronic components are directly electrically coupled to individual of the conductive pillars. Additional methods, including structure independent of method, are disclosed.Type: ApplicationFiled: September 30, 2020Publication date: March 31, 2022Applicant: Micron Technology, Inc.Inventors: Vinay Nair, Silvia Borsari, Ryan L. Meyer, Russell A. Benson, Yi Fang Lee
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Publication number: 20220069083Abstract: Some embodiments include a transistor having an active region containing semiconductor material. The semiconductor material includes at least one element selected from Group 13 of the periodic table in combination with at least one element selected from Group 16 of the periodic table. The active region has a first region, a third region offset from the first region, and a second region between the first and third regions. A gating structure is operatively adjacent to the second region. A first carrier-concentration-gradient is within the first region, and a second carrier-concentration-gradient is within the third region. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: November 4, 2021Publication date: March 3, 2022Applicant: Micron Technology, Inc.Inventors: Srinivas Pulugurtha, Jaydip Guha, Scott E. Sills, Yi Fang Lee
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Publication number: 20220069082Abstract: Some embodiments include a transistor having an active region containing semiconductor material. The semiconductor material includes at least one element selected from Group 13 of the periodic table in combination with at least one element selected from Group 16 of the periodic table. The active region has a first region, a third region offset from the first region, and a second region between the first and third regions. A gating structure is operatively adjacent to the second region. A first carrier-concentration-gradient is within the first region, and a second carrier-concentration-gradient is within the third region. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: November 19, 2020Publication date: March 3, 2022Applicant: Micron Technology, Inc.Inventors: Srinivas Pulugurtha, Jaydip Guha, Scott E. Sills, Yi Fang Lee
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Publication number: 20220059693Abstract: Some embodiments include an integrated assembly having an access device between a storage element and a conductive structure. The access device has channel material which includes semiconductor material. The channel material has a first end and an opposing second end, and has a side extending from the first end to the second end. The first end is adjacent the conductive structure, and the second end is adjacent the storage element. Conductive gate material is adjacent the side of the channel material. A first domed metal-containing cap is over the conductive structure and under the channel material and/or a second domed metal-containing cap is over the channel material and under the storage element. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: August 20, 2020Publication date: February 24, 2022Applicant: Micron Technology, Inc.Inventors: Yoshitaka Nakamura, Yi Fang Lee, Jerome A. Imonigie, Scott E. Sills, Aaron Michael Lowe
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Publication number: 20220045195Abstract: Systems, methods and apparatus are provided for a semiconductor structure. An example method includes a method for forming a contact surface on a vertically oriented access devices. The method includes forming a first source/drain region and a second source/drain region vertically separated by a channel region, forming a sacrificial etch stop layer on a first side of the second source/drain region, wherein the channel region is in contact with a second side of the second source/drain region, forming a dielectric layer on a first side of the sacrificial etch stop layer, where the second source/drain region is connected to a second side of the sacrificial etch stop layer, removing the dielectric layer using a first etch process to expose the sacrificial etch stop layer, and removing the sacrificial etch stop layer using a second etch process to form a contact surface on the second source/drain region.Type: ApplicationFiled: August 4, 2020Publication date: February 10, 2022Inventors: Jerome A. Imonigie, Guangjun Yang, Anish A. Khandekar, Yoshitaka Nakamura, Yi Fang Lee
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Publication number: 20220028903Abstract: An array of vertical transistors comprises spaced pillars of individual vertical transistors that individually comprise an upper source/drain region, a lower source/drain region, and a channel region vertically there-between. The upper source/drain region comprises a conductor oxide material in individual of the pillars. The channel region comprises an oxide semiconductor material in the individual pillars. The lower source/drain region comprises a first conductive oxide material in the individual pillars atop and directly against a second conductive oxide material in the individual pillars. Horizontally-elongated and spaced conductor lines individually interconnect a respective multiple of the vertical transistors in a column direction. The conductor lines individually comprise the second conductive oxide material atop and directly against metal material. The first conductive oxide material, the second conductive oxide material, and the metal material comprise different compositions relative one another.Type: ApplicationFiled: July 21, 2020Publication date: January 27, 2022Applicant: Micron Technology, Inc.Inventors: Yi Fang Lee, Jaydip Guha, Lars P. Heineck, Kamal M. Karda, Si-Woo Lee, Terrence B. McDaniel, Scott E. Sills, Kevin J. Torek, Sheng-Wei Yang
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Publication number: 20210375868Abstract: Some embodiments include an integrated assembly having a first semiconductor material between two regions of a second semiconductor material. The second semiconductor material is a different composition than the first semiconductor material. Hydrogen is diffused within the first and second semiconductor materials. The conductivity of the second semiconductor material increases in response to the hydrogen diffused therein to thereby create a structure having the second semiconductor material as source/drain regions, and having the first semiconductor material as a channel region between the source/drain regions. A transistor gate is adjacent the channel region and is configured to induce an electric field within the channel region. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: August 6, 2021Publication date: December 2, 2021Applicant: Micron Technology, Inc.Inventors: Kamal M. Karda, Yi Fang Lee, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi, Karthik Sarpatwari, Scott E. Sills, Sameer Chhajed
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Patent number: 11107817Abstract: Some embodiments include an integrated assembly having a first semiconductor material between two regions of a second semiconductor material. The second semiconductor material is a different composition than the first semiconductor material. Hydrogen is diffused within the first and second semiconductor materials. The conductivity of the second semiconductor material increases in response to the hydrogen diffused therein to thereby create a structure having the second semiconductor material as source/drain regions, and having the first semiconductor material as a channel region between the source/drain regions. A transistor gate is adjacent the channel region and is configured to induce an electric field within the channel region. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: March 11, 2019Date of Patent: August 31, 2021Assignee: Micron Technology, Inc.Inventors: Kamal M. Karda, Yi Fang Lee, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi, Karthik Sarpatwari, Scott E. Sills, Sameer Chhajed
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Publication number: 20210247848Abstract: The present invention discloses a method for outputting a command by detecting a movement of an object, which includes the following steps. First, an image capturing device captures images generated by the movement of the object at different timings by. Next, a motion trajectory is calculated according to the plurality of images. Further next, a corresponding command is outputted according to the motion trajectory. The present invention also provides a system which employs the above-mentioned method.Type: ApplicationFiled: April 29, 2021Publication date: August 12, 2021Inventors: Yu-Hao Huang, Yi-Fang Lee, Ming-Tsan Kao, Nien-Tse Chen
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Patent number: 11023052Abstract: The present invention discloses a method for outputting a command by detecting a movement of an object, which includes the following steps. First, an image capturing device captures images generated by the movement of the object at different timings by. Next, a motion trajectory is calculated according to the plurality of images. Further next, a corresponding command is outputted according to the motion trajectory. The present invention also provides a system which employs the above-mentioned method.Type: GrantFiled: December 3, 2019Date of Patent: June 1, 2021Assignee: PIXART IMAGING INCORPORATIONInventors: Yu-Hao Huang, Yi-Fang Lee, Ming-Tsan Kao, Nien-Tse Chen
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Patent number: 10971500Abstract: A method used in fabrication of integrated circuitry comprises forming metal material outwardly of a substrate. At least a majority (i.e., up to and including 100%) of the metal material contains ruthenium in at least one of elemental-form, metal compound-form, or alloy-form. A masking material is formed outwardly of the ruthenium-containing metal material. The masking material comprises at least one of nine specifically enumerated materials or category of materials. The masking material is used as a mask while etching through an exposed portion of the ruthenium-containing metal material to form a feature of integrated circuitry that comprises the ruthenium-containing metal material.Type: GrantFiled: June 6, 2019Date of Patent: April 6, 2021Assignee: Micron Technology, Inc.Inventors: Ying Rui, Tong Liu, Yi Fang Lee, Davide Colombo, Silvia Borsari, Austin Johnson
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Patent number: 10950618Abstract: A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region. The individual memory cells comprise a capacitor comprising first and second electrodes having a capacitor insulator there-between. The first electrode electrically couples to the first source/drain region. Wordline structures extend elevationally through the insulative material and the memory cells of the vertically-alternating tiers. Individual of the gates that are in different of the memory cell tiers directly electrically couple to individual of the wordline structures. Sense-lines electrically couple to multiple of the second source/drain regions of individual of the transistors. Other embodiments are disclosed.Type: GrantFiled: November 29, 2018Date of Patent: March 16, 2021Assignee: Micron Technology, Inc.Inventors: Sanh D. Tang, Richard J. Hill, Yi Fang Lee, Martin C. Roberts
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Publication number: 20210013226Abstract: A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region. The individual memory cells comprise a capacitor comprising first and second electrodes having a capacitor insulator there-between. The first electrode electrically couples to the first source/drain region. Wordline structures extend elevationally through the insulative material and the memory cells of the vertically-alternating tiers. Individual of the gates that are in different of the memory cell tiers directly electrically couple to individual of the wordline structures. Sense-lines electrically couple to multiple of the second source/drain regions of individual of the transistors. Other embodiments are disclosed.Type: ApplicationFiled: September 22, 2020Publication date: January 14, 2021Applicant: Micron Technology, Inc.Inventors: Sanh D. Tang, Richard J. Hill, Yi Fang Lee, Martin C. Roberts