Patents by Inventor Yi-Hsiang Chao
Yi-Hsiang Chao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11972951Abstract: The present disclosure relates to a method for fabricating a semiconductor structure. The method includes providing a substrate with a gate structure, an insulating structure over the gate structure, and a S/D region; depositing a titanium silicide layer over the S/D region with a first chemical vapor deposition (CVD) process. The first CVD process includes a first hydrogen gas flow. The method also includes depositing a titanium nitride layer over the insulating structure with a second CVD process. The second CVD process includes a second hydrogen gas flow. The first and second CVD processes are performed in a single reaction chamber and a flow rate of the first hydrogen gas flow is higher than a flow rate of the second hydrogen gas flow.Type: GrantFiled: April 4, 2022Date of Patent: April 30, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Cheng-Wei Chang, Kao-Feng Lin, Min-Hsiu Hung, Yi-Hsiang Chao, Huang-Yi Huang, Yu-Ting Lin
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Publication number: 20240136191Abstract: A method of forming a semiconductor device includes forming source/drain regions on opposing sides of a gate structure, where the gate structure is over a fin and surrounded by a first dielectric layer; forming openings in the first dielectric layer to expose the source/drain regions; selectively forming silicide regions in the openings on the source/drain regions using a plasma-enhanced chemical vapor deposition (PECVD) process; and filling the openings with an electrically conductive material.Type: ApplicationFiled: January 2, 2024Publication date: April 25, 2024Inventors: Min-Hsiu Hung, Chien Chang, Yi-Hsiang Chao, Hung-Yi Huang, Chih-Wei Chang
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Patent number: 11901183Abstract: A method of forming a semiconductor device includes forming source/drain regions on opposing sides of a gate structure, where the gate structure is over a fin and surrounded by a first dielectric layer; forming openings in the first dielectric layer to expose the source/drain regions; selectively forming silicide regions in the openings on the source/drain regions using a plasma-enhanced chemical vapor deposition (PECVD) process; and filling the openings with an electrically conductive material.Type: GrantFiled: August 9, 2021Date of Patent: February 13, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Min-Hsiu Hung, Chien Chang, Yi-Hsiang Chao, Hung-Yi Huang, Chih-Wei Chang
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Publication number: 20230395426Abstract: Provided is a conductive structure and a method for forming such a structure. The method includes forming a treatable layer by depositing a layer comprising a metal over a structure; performing a directional treatment process on a targeted portion of the treatable layer to convert the targeted portion to a material different from a non-targeted portion of the treatable layer, wherein the directional treatment process is selected from the group consisting of nitridation, oxidation, chlorination, carbonization; and selectively removing the non-targeted portion from the structure, wherein the targeted portion remains over the structure.Type: ApplicationFiled: June 1, 2022Publication date: December 7, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yi-Hsiang Chao, Shu-Lan Chang, Ching-Yi Chen, Shih-Wei Yeh, Pei Shan Chang, Ya-Yi Cheng, Yu-Chen Ko, Yu-Shiuan Wang, Chun-Hsien Huang, Hung-Chang Hsu, Chih-Wei Chang, Ming-Hsing Tsai, Wei-Jung Lin
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Publication number: 20230386822Abstract: A pre-cleaning technique described herein may be used to remove native oxides and/or other contaminants from a semiconductor device in a manner in which the likelihood of chopping, clipping, and/or sidewall spacer thickness reduction is reduced. As described herein, a protection layer is formed on a capping layer over a gate structure of a transistor. A pre-cleaning operation is then performed to remove native oxides from the top surface of a source/drain region of the transistor. In the pre-cleaning operation, the protection layer is consumed instead of the material of the capping layer. In this way, the use of the protection layer reduces the likelihood of removal of material from the capping layer and/or reduces the amount of material that is removed from the capping layer during the pre-cleaning operation.Type: ApplicationFiled: May 27, 2022Publication date: November 30, 2023Inventors: Yi-Hsiang CHAO, Chih-Sheng CHOU, Shu-Ting YANG, Ting-Wei WENG, Peng-Hao HSU, Chun-Hsien HUANG, Hung-Hsu CHEN, Hung-Chang HSU, Chih-Wei CHANG, Ming-Hsing TSAI
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Publication number: 20230260836Abstract: A method includes forming a dielectric layer over a source/drain region. An opening is formed in the dielectric layer. The opening exposes a portion of the source/drain region. A conductive liner is formed on sidewalls and a bottom of the opening. A surface modification process is performed on an exposed surface of the conductive liner. The surface modification process forms a surface coating layer over the conductive liner. The surface coating layer is removed to expose the conductive liner. The conductive liner is removed from the sidewalls of the opening. The opening is filled with a conductive material in a bottom-up manner. The conductive material is in physical contact with a remaining portion of the conductive liner and the dielectric layer.Type: ApplicationFiled: May 13, 2022Publication date: August 17, 2023Inventors: Pei Shan Chang, Yi-Hsiang Chao, Chun-Hsien Huang, Peng-Hao Hsu, Kevin Lee, Shu-Lan Chang, Ya-Yi Cheng, Ching-Yi Chen, Wei-Jung Lin, Chih-Wei Chang, Ming-Hsing Tsai
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Publication number: 20230223302Abstract: A method includes forming a dielectric layer over an epitaxial source/drain region. An opening is formed in the dielectric layer. The opening exposes a portion of the epitaxial source/drain region. A barrier layer is formed on a sidewall and a bottom of the opening. An oxidation process is performing on the sidewall and the bottom of the opening. The oxidation process transforms a portion of the barrier layer into an oxidized barrier layer and transforms a portion of the dielectric layer adjacent to the oxidized barrier layer into a liner layer. The oxidized barrier layer is removed. The opening is filled with a conductive material in a bottom-up manner. The conductive material is in physical contact with the liner layer.Type: ApplicationFiled: May 13, 2022Publication date: July 13, 2023Inventors: Pin-Wen Chen, Chang-Ting Chung, Yi-Hsiang Chao, Yu-Ting Wen, Kai-Chieh Yang, Yu-Chen Ko, Peng-Hao Hsu, Ya-Yi Cheng, Min-Hsiu Hung, Chun-Hsien Huang, Wei-Jung Lin, Chih-Wei Chang, Ming-Hsing Tsai
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Publication number: 20220230884Abstract: The present disclosure relates to a method for fabricating a semiconductor structure. The method includes providing a substrate with a gate structure, an insulating structure over the gate structure, and a S/D region; depositing a titanium silicide layer over the S/D region with a first chemical vapor deposition (CVD) process. The first CVD process includes a first hydrogen gas flow. The method also includes depositing a titanium nitride layer over the insulating structure with a second CVD process. The second CVD process includes a second hydrogen gas flow. The first and second CVD processes are performed in a single reaction chamber and a flow rate of the first hydrogen gas flow is higher than a flow rate of the second hydrogen gas flow.Type: ApplicationFiled: April 4, 2022Publication date: July 21, 2022Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Cheng-Wei Chang, Kao-Feng Lin, Min-Hsiu Hung, Yi-Hsiang Chao, Huang-Yi Huang, Yu-Ting Lin
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Publication number: 20220156580Abstract: An anomaly detection device based on a generative adversarial network architecture, which uses the single-type training data composed of multiple normal signals to train an anomaly detection model. The anomaly detection device includes an encoder, a generator, a discriminator, and a random vector generator. In the training phase of anomaly detection model, the random latent vectors generated by the random vector generator are sequentially input to a generator to generate the synthesized signals with the same dimension as the normal signals. The synthesized signals are sequentially input into a discriminator to output the corresponding discriminant values. When the corresponding discriminant values are under the predetermined threshold, the corresponding synthesized signals are selected as the anomalous class training data, and the real normal signals are selected as the normal class training data.Type: ApplicationFiled: December 29, 2020Publication date: May 19, 2022Inventors: Yi-Hsiang CHAO, Chih-Hung HSIEH, Ming-Yu SHIH
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Patent number: 11295956Abstract: The present disclosure relates to a method for fabricating a semiconductor structure. The method includes providing a substrate with a gate structure, an insulating structure over the gate structure, and a S/D region; depositing a titanium silicide layer over the S/D region with a first chemical vapor deposition (CVD) process. The first CVD process includes a first hydrogen gas flow. The method also includes depositing a titanium nitride layer over the insulating structure with a second CVD process. The second CVD process includes a second hydrogen gas flow. The first and second CVD processes are performed in a single reaction chamber and a flow rate of the first hydrogen gas flow is higher than a flow rate of the second hydrogen gas flow.Type: GrantFiled: May 29, 2020Date of Patent: April 5, 2022Inventors: Cheng-Wei Chang, Kao-Feng Lin, Min-Hsiu Hung, Yi-Hsiang Chao, Huang-Yi Huang, Yu-Ting Lin
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Patent number: 11222818Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a fin structure over a semiconductor substrate and forming a gate stack over the fin structure. The method also includes forming an epitaxial structure over the fin structure, and the epitaxial structure is adjacent to the gate stack. The method further includes forming a dielectric layer over the epitaxial structure and forming an opening in the dielectric layer to expose the epitaxial structure. In addition, the method includes applying a metal-containing material on the epitaxial structure while the epitaxial structure is heated so that a portion of the epitaxial structure is transformed to form a metal-semiconductor compound region.Type: GrantFiled: July 13, 2018Date of Patent: January 11, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Hsiang Chao, Min-Hsiu Hung, Chun-Wen Nieh, Ya-Huei Li, Yu-Hsiang Liao, Li-Wei Chu, Kan-Ju Lin, Kuan-Yu Yeh, Chi-Hung Chuang, Chih-Wei Chang, Ching-Hwanq Su, Hung-Yi Huang, Ming-Hsing Tsai
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Publication number: 20210375630Abstract: A method of forming a semiconductor device includes forming source/drain regions on opposing sides of a gate structure, where the gate structure is over a fin and surrounded by a first dielectric layer; forming openings in the first dielectric layer to expose the source/drain regions; selectively forming silicide regions in the openings on the source/drain regions using a plasma-enhanced chemical vapor deposition (PECVD) process; and filling the openings with an electrically conductive material.Type: ApplicationFiled: August 9, 2021Publication date: December 2, 2021Inventors: Min-Hsiu Hung, Chien Chang, Yi-Hsiang Chao, Hung-Yi Huang, Chih-Wei Chang
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Patent number: 11107690Abstract: A method of forming a semiconductor device includes forming source/drain regions on opposing sides of a gate structure, where the gate structure is over a fin and surrounded by a first dielectric layer; forming openings in the first dielectric layer to expose the source/drain regions; selectively forming silicide regions in the openings on the source/drain regions using a plasma-enhanced chemical vapor deposition (PECVD) process; and filling the openings with an electrically conductive material.Type: GrantFiled: February 1, 2019Date of Patent: August 31, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Min-Hsiu Hung, Chien Chang, Yi-Hsiang Chao, Hung-Yi Huang, Chih-Wei Chang
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Patent number: 11011611Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate having a conductive region made of silicon, germanium or a combination thereof. The semiconductor device structure also includes an insulating layer over the semiconductor substrate and a fill metal material layer in the insulating layer. In addition, the semiconductor device structure includes a nitrogen-containing metal silicide or germanide layer between the conductive region and the fill metal material layers.Type: GrantFiled: June 29, 2020Date of Patent: May 18, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTDInventors: Min-Hsiu Hung, Yi-Hsiang Chao, Kuan-Yu Yeh, Kan-Ju Lin, Chun-Wen Nieh, Huang-Yi Huang, Chih-Wei Chang, Ching-Hwanq Su
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Publication number: 20200335597Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a fin structure formed over a semiconductor substrate and a gate structure formed over the fin structure. The semiconductor device structure also includes an isolation feature over a semiconductor substrate and below the gate structure. The semiconductor device structure further includes two spacer elements respectively formed over a first sidewall and a second sidewall of the gate structure. The first sidewall is opposite to the second sidewall and the two spacer elements have hydrophobic surfaces respectively facing the first sidewall and the second sidewall. The gate structure includes a gate dielectric layer and a gate electrode layer separating the gate dielectric layer from the hydrophobic surfaces of the two spacer elements.Type: ApplicationFiled: June 29, 2020Publication date: October 22, 2020Inventors: Min-Hsiu HUNG, Yi-Hsiang CHAO, Kuan-Yu YEH, Kan-Ju LIN, Chun-Wen NIEH, Huang-Yi HUANG, Chih-Wei CHANG, Ching-Hwanq SU
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Publication number: 20200294807Abstract: The present disclosure relates to a method for fabricating a semiconductor structure. The method includes providing a substrate with a gate structure, an insulating structure over the gate structure, and a S/D region; depositing a titanium silicide layer over the S/D region with a first chemical vapor deposition (CVD) process. The first CVD process includes a first hydrogen gas flow. The method also includes depositing a titanium nitride layer over the insulating structure with a second CVD process. The second CVD process includes a second hydrogen gas flow. The first and second CVD processes are performed in a single reaction chamber and a flow rate of the first hydrogen gas flow is higher than a flow rate of the second hydrogen gas flow.Type: ApplicationFiled: May 29, 2020Publication date: September 17, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Cheng-Wei CHANG, Kao-Feng LIN, Min-Hsiu HUNG, Yi-Hsiang CHAO, Huang-Yi HUANG, Yu-Ting LIN
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Patent number: 10700177Abstract: A method for forming a semiconductor device structure is provided. The method includes providing a semiconductor substrate including a conductive region made of silicon, germanium or a combination thereof. The method also includes forming an insulating layer over the semiconductor substrate and forming an opening in the insulating layer to expose the conductive region. The method also includes performing a deposition process to form a metal layer over a sidewall and a bottom of the opening, so that a metal silicide or germanide layer is formed on the exposed conductive region by the deposition process. The method also includes performing a first in-situ etching process to etch at least a portion of the metal layer and forming a fill metal material layer in the opening.Type: GrantFiled: April 27, 2018Date of Patent: June 30, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Min-Hsiu Hung, Yi-Hsiang Chao, Kuan-Yu Yeh, Kan-Ju Lin, Chun-Wen Nieh, Huang-Yi Huang, Chih-Wei Chang, Ching-Hwanq Su
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Patent number: 10685842Abstract: The present disclosure relates to a method for fabricating a semiconductor structure. The method includes providing a substrate with a gate structure, an insulating structure over the gate structure, and a S/D region; depositing a titanium silicide layer over the S/D region with a first chemical vapor deposition (CVD) process. The first CVD process includes a first hydrogen gas flow. The method also includes depositing a titanium nitride layer over the insulating structure with a second CVD process. The second CVD process includes a second hydrogen gas flow. The first and second CVD processes are performed in a single reaction chamber and a flow rate of the first hydrogen gas flow is higher than a flow rate of the second hydrogen gas flow.Type: GrantFiled: May 18, 2018Date of Patent: June 16, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Cheng-Wei Chang, Kao-Feng Lin, Min-Hsiu Hung, Yi-Hsiang Chao, Huang-Yi Huang, Yu-Ting Lin
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Publication number: 20200176260Abstract: A method of forming a semiconductor device includes forming source/drain regions on opposing sides of a gate structure, where the gate structure is over a fin and surrounded by a first dielectric layer; forming openings in the first dielectric layer to expose the source/drain regions; selectively forming silicide regions in the openings on the source/drain regions using a plasma-enhanced chemical vapor deposition (PECVD) process; and filling the openings with an electrically conductive material.Type: ApplicationFiled: February 1, 2019Publication date: June 4, 2020Inventors: Min-Hsiu Hung, Chien Chang, Yi-Hsiang Chao, Hung-Yi Huang, Chih-Wei Chang
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Publication number: 20200020583Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a fin structure over a semiconductor substrate and forming a gate stack over the fin structure. The method also includes forming an epitaxial structure over the fin structure, and the epitaxial structure is adjacent to the gate stack. The method further includes forming a dielectric layer over the epitaxial structure and forming an opening in the dielectric layer to expose the epitaxial structure. In addition, the method includes applying a metal-containing material on the epitaxial structure while the epitaxial structure is heated so that a portion of the epitaxial structure is transformed to form a metal-semiconductor compound region.Type: ApplicationFiled: July 13, 2018Publication date: January 16, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yi-Hsiang CHAO, Min-Hsiu HUNG, Chun-Wen NIEH, Ya-Huei LI, Yu-Hsiang LIAO, Li-Wei CHU, Kan-Ju LIN, Kuan-Yu YEH, Chi-Hung CHUANG, Chih-Wei CHANG, Ching-Hwanq SU, Hung-Yi HUANG, Ming-Hsing TSAI