Abstract: A method for fabricating a semiconductor package, the method includes forming at least one conductive via having a first end and a second end opposite the first end in a wafer, in which the wafer has a first surface and a second surface opposite the first surface, and the first end of the conductive via is exposed of the first surface of the wafer; grinding the second surface of the wafer to form an inner portion and a ring portion surrounding the inner portion of the wafer, wherein the inner portion has a thinner thickness than that of the ring portion; and etching the inner portion to expose the second end of the conductive via.

Abstract: A fan-out wafer-level-package (FOWLP) is provided. The FOWLP includes a redistribution layer (RDL) comprising a dielectric layer and a first metal layer; a passive device in the first metal layer; a first passivation layer covering a top surface of the RDL; a second passivation layer covering a bottom surface of the RDL; a chip mounted on the first passivation layer; a molding compound around the chip and on the first passivation layer; a via opening penetrating through the second passivation layer, the dielectric layer, and the second passivation layer, thereby exposing a terminal of the chip; a contact opening in the second passivation layer; and a second metal layer in the via opening and the contact opening to electrically connect one electrode of the passive device with the terminal of the chip.

Abstract: A multi-device package includes a substrate, at least two device regions, a first redistribution layer, an external chip, a plurality of first connectors and a conductive contact. The two device regions are formed from the substrate, and the substrate has a first surface and a second surface opposite to the first surface. The first redistribution layer is disposed on the first surface and electrically connected to the two device regions, and the external chip is disposed on the first redistribution layer. The first connectors are interposed between the first redistribution layer and the external chip to interconnect the first redistribution layer and the external chip, and the conductive contact is extended from the second surface to the first surface of the substrate to electrically connect the device region.

Abstract: A multi-device package includes a substrate, at least two device regions, a first redistribution layer, an external chip, a plurality of first connectors and a conductive contact. The two device regions are formed from the substrate, and the substrate has a first surface and a second surface opposite to the first surface. The first redistribution layer is disposed on the first surface and electrically connected to the two device regions, and the external chip is disposed on the first redistribution layer. The first connectors are interposed between the first redistribution layer and the external chip to interconnect the first redistribution layer and the external chip, and the conductive contact is extended from the second surface to the first surface of the substrate to electrically connect the device region.

Abstract: A multi-device package includes a substrate, at least two device regions, a first redistribution layer, an external chip and a plurality of first connectors. The two device regions are formed from the substrate, and the first redistribution layer is disposed on the substrate and electrically connected to the two device regions. The external chip is disposed on the first redistribution layer, and the first connectors are interposed between the first redistribution layer and the external chip to interconnect the two.

Abstract: A through silicon via structure is provided, including a substrate, an isolation layer, a conductive layer and a dielectric layer. The substrate has a through-hole therein. The isolation layer is disposed on two sidewalls of the through-hole. The conductive layer is disposed in the through-hole and covers the isolation layer, and the conductive layer includes a first portion and a second portion, wherein the first portion fills a portion of the through-hole, and the second portion is located on the sidewalls in the other portion of the through-hole, such that the conductive layer has a concave part. The dielectric layer is disposed in the concave part and fills the concave part.

Abstract: A method for forming a semiconductor structure is provided. The method includes providing a substrate; forming a dielectric layer on the substrate; forming a conductor pattern on a main surface of the dielectric layer, the conductor pattern having a top surface and sidewalls; and performing a selective atomic layer deposition (ALD) process to selectively deposit a conformal metal layer onto the top surface and sidewalls of the conductor pattern, but without depositing onto the main surface of the dielectric layer substantially.

Abstract: A method for forming a semiconductor structure is provided. The method includes providing a substrate; forming a dielectric layer on the substrate; forming a conductor pattern on a main surface of the dielectric layer, the conductor pattern having a top surface and sidewalls; and performing a selective atomic layer deposition (ALD) process to selectively deposit a conformal metal layer onto the top surface and sidewalls of the conductor pattern, but without depositing onto the main surface of the dielectric layer substantially.

Abstract: A semiconductor structure is provided. The semiconductor structure includes a substrate; a dielectric layer overlying the substrate; a conductor pattern on a main surface of the dielectric layer, the conductor pattern having a top surface and sidewalls; and a conformal metal layer selectively deposited on the top surface and sidewalls, but without deposited on the main surface of the dielectric layer substantially.

Abstract: A method of forming the multi metal layers thin film has Ti sputtered on top surface of a substrate by PVD first. Then, Ti is transformed into TiN via CVD. Thus, by skipping the extra process steps of wafer cleaning and surface treating, the method not only solves the stress problems between two different metal layers but also improves the cycle time and particle performance for the production without any yield impact.

Abstract: A method for controlling a thickness of a first layer of an electrical contact of a semiconductor device, whereby the semiconductor device comprises a semiconductor layer, a first layer and a second layer, whereby at least a part of the semi-conductor layer is covered with the first layer, whereby at least a part of the first layer is covered with the second layer, whereby the second layer is exposed to a plasma gas, whereby an upper face of the first layer adjacent to the second layer is treated by the plasma gas and an interlayer is generated between the first and the second layer reducing the thickness of the first layer.

Abstract: A method for controlling a thickness of a first layer of an electrical contact of a semiconductor device, whereby the semiconductor device comprises a semiconductor layer, a first layer and a second layer, whereby at least a part of the semi-conductor layer is covered with the first layer, whereby at least a part of the first layer is covered with the second layer, whereby the second layer is exposed to a plasma gas, whereby an upper face of the first layer adjacent to the second layer is treated by the plasma gas and an interlayer is generated between the first and the second layer reducing the thickness of the first layer.