Patents by Inventor Yi-Shing (Michael) Chu

Yi-Shing (Michael) Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7030444
    Abstract: A split gate flash memory cell structure is disclosed for prevention of reverse tunneling. A gate insulator layer is formed over a semiconductor surface and a floating gate is disposed over the gate insulator layer. A floating gate insulator layer is disposed over the floating gate and sidewall insulator spacers are disposed along bottom portions of the floating gate sidewall adjacent to said gate insulator layer. The sidewall insulator spacers are formed from a spacer insulator layer that had been deposited in a manner that constitutes a minimal expenditure of an available thermal budget and etching processes used in fashioning the sidewall insulator spacers etch the spacer insulator layer faster than the gate insulator layer and the floating gate insulator layer. An intergate insulator layer is disposed over exposed portions of the gate insulator layer, the floating gate, the floating gate insulator layer and the sidewall insulator spacers.
    Type: Grant
    Filed: February 25, 2004
    Date of Patent: April 18, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Chi Tu, Wen-Ting Chu, Yi-Shing Chang, Yi-Jiun Lin
  • Publication number: 20060068546
    Abstract: A non-volatile memory is described. A substrate comprising a stacked layer is provided. A sacrificial layer is deposited and patterned to form a first opening. A first spacer is formed on sidewalls of the first opening, and the stacked layer is etched using the first spacer as a first mask to form a second opening. An isolation layer is formed in a portion of the first and the second openings, and a conductive filling layer is formed thereon. The stacked layer is etched using a portion of the conductive filling layer as a second mask.
    Type: Application
    Filed: September 29, 2004
    Publication date: March 30, 2006
    Inventor: Yi-Shing Chang
  • Publication number: 20050184331
    Abstract: A split gate flash memory cell structure is disclosed for prevention of reverse tunneling. A gate insulator layer is formed over a semiconductor surface and a floating gate is disposed over the gate insulator layer. A floating gate insulator layer is disposed over the floating gate and sidewall insulator spacers are disposed along bottom portions of the floating gate sidewall adjacent to said gate insulator layer. The sidewall insulator spacers are formed from a spacer insulator layer that had been deposited in a manner that constitutes a minimal expenditure of an available thermal budget and etching processes used in fashioning the sidewall insulator spacers etch the spacer insulator layer faster than the gate insulator layer and the floating gate insulator layer. An intergate insulator layer is disposed over exposed portions of the gate insulator layer, the floating gate, the floating gate insulator layer and the sidewall insulator spacers.
    Type: Application
    Filed: February 25, 2004
    Publication date: August 25, 2005
    Inventors: Kuo-Chi Tu, Wen-Ting Chu, Yi-Shing Chang, Yi-Jiun Lin
  • Publication number: 20050179080
    Abstract: A memory device and the method for manufacturing same is disclosed. The device comprises a first oxide layer on top of a substrate, a floating gate layer on top of the first oxide layer, a second oxide layer over the floating gate layer, wherein the second oxide layer and the floating gate layer have a first opening and a second opening respectively, and wherein the width of second opening is bigger than the width of the narrowest region of the first opening so that the floating gate layer is pulled back horizontally underneath the second oxide layer. A source region is in the substrate underneath the first oxide layer, and a third oxide layer fills in the first and second openings conforming to the contour thereof, wherein the third oxide has a third opening to reach a portion of the source region. Further, a control gate material fills in the third opening.
    Type: Application
    Filed: March 30, 2005
    Publication date: August 18, 2005
    Inventors: Yi-Shing Chang, Wen-Ting Chu
  • Publication number: 20050133850
    Abstract: A method for forming an improved etching hardmask oxide layer in a polysilicon etching process including providing a planarized semiconductor wafer process surface including adjacent first exposed polysilicon portions and exposed oxide portions; selectively etching through a thickness portion of the exposed oxide portions; thermally growing an oxide hardmask layer over the exposed polysilicon portions to form oxide hardmask portions; exposing second exposed polysilicon portions adjacent at least one oxide hardmask portion; and, etching through a thickness portion of the second exposed polysilicon portions.
    Type: Application
    Filed: February 3, 2005
    Publication date: June 23, 2005
    Inventors: Yi-Shing Chang, Yeur-Luen Tu, Chia-Shiung Tsai, Wen-Ting Chu
  • Patent number: 6890821
    Abstract: A memory device and the method for manufacturing the same is disclosed. The device includes a first oxide layer on top of a substrate, a floating gate layer on top of the first oxide layer, and a second oxide layer over the floating gate layer. The second oxide layer and the floating gate layer have a first opening and a second opening respectively wherein the width of second opening is bigger than the width of the narrowest region of the first opening so that the floating gate layer is pulled back horizontally underneath the second oxide layer. A source region is in the substrate underneath the first oxide layer, and a third oxide layer fills in the first and second openings conforming to the contour thereof. The third oxide has a third opening to reach a portion of the source region. Further, a control gate material fills in the third opening.
    Type: Grant
    Filed: July 11, 2003
    Date of Patent: May 10, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Shing Chang, Wen-Ting Chu
  • Publication number: 20050093086
    Abstract: Each of an elevated diode sensor optoelectronic product and a method for fabricating the elevated diode sensor optoelectronic product employs a sidewall passivation dielectric layer passivating a sidewall of a patterned conductor layer which serves as a bottom electrode for an elevated diode within the elevated diode sensor optoelectronic product. The sidewall passivation dielectric layer eliminates contact between the patterned conductor layer and an intrinsic diode material layer within the elevated diode, thus providing enhanced performance of the elevated diode sensor optoelectronic product.
    Type: Application
    Filed: November 4, 2003
    Publication date: May 5, 2005
    Inventors: Dunn-Nian Yaung, Shou-Gwo Wuu, Ho-Ching Chien, Yi-Shing Chang
  • Patent number: 6855602
    Abstract: A method for forming an improved etching hardmask oxide layer in a polysilicon etching process including providing a planarized semiconductor wafer process surface including adjacent first exposed polysilicon portions and exposed oxide portions; selectively etching through a thickness portion of the exposed oxide portions; thermally growing an oxide hardmask layer over the exposed polysilicon portions to form oxide hardmask portions; exposing second exposed polysilicon portions adjacent at least one oxide hardmask portion; and, etching through a thickness portion of the second exposed polysilicon portions.
    Type: Grant
    Filed: March 27, 2003
    Date of Patent: February 15, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Shing Chang, Yeur-Luen Tu, Chia-Shiung Tsai, Wen-Ting Chu
  • Publication number: 20050013197
    Abstract: The present invention discloses a watch which has the function of playing and digital recording of a video-audio and image compressed software. The technical scheme is a MP4 multifunctional watch which comprises a MP4 video-audio and image playing unit and watch unit, in which the MP4 video-audio and image playing unit is mounted in a watch housing. By using the MP4 multifunctional watch, people not only receive accurate timing but also enjoy video and audio files and images whenever and wherever. Furthermore, the multifunctional watch is smaller in size, easier to be carried, with powerful multi-functions and convenient for operating.
    Type: Application
    Filed: July 13, 2004
    Publication date: January 20, 2005
    Inventors: Yi Shing Chung, Tsoi Chung
  • Publication number: 20050009273
    Abstract: A memory device and the method for manufacturing the same is disclosed. The device includes a first oxide layer on top of a substrate, a floating gate layer on top of the first oxide layer, and a second oxide layer over the floating gate layer. The second oxide layer and the floating gate layer have a first opening and a second opening respectively wherein the width of second opening is bigger than the width of the narrowest region of the first opening so that the floating gate layer is pulled back horizontally underneath the second oxide layer. A source region is in the substrate underneath the first oxide layer, and a third oxide layer fills in the first and second openings conforming to the contour thereof. The third oxide has a third opening to reach a portion of the source region. Further, a control gate material fills in the third opening.
    Type: Application
    Filed: July 11, 2003
    Publication date: January 13, 2005
    Inventors: Yi-Shing Chang, Wen-Ting Chu
  • Publication number: 20040188749
    Abstract: A method for forming an improved etching hardmask oxide layer in a polysilicon etching process including providing a planarized semiconductor wafer process surface including adjacent first exposed polysilicon portions and exposed oxide portions; selectively etching through a thickness portion of the exposed oxide portions; thermally growing an oxide hardmask layer over the exposed polysilicon portions to form oxide hardmask portions; exposing second exposed polysilicon portions adjacent at least one oxide hardmask portion; and, etching through a thickness portion of the second exposed polysilicon portions.
    Type: Application
    Filed: March 27, 2003
    Publication date: September 30, 2004
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Shing Chang, Yeur-Luen Tu, Chia-Shiung Tsai, Wen-Ting Chu
  • Publication number: 20040022130
    Abstract: A kind of multifunction wristwatch, wherein it comprises MP3 playing device and watch, in which the MP3 playing device is disposed inside the watch, the said watch is the electric watch, which is consisted of housing, time displaying circuit, displaying screen and watch belt; the said MP3 playing device is consisted of control button, playing control circuit and the memory, in which the control button is disposed on the housing and is connected with the playing control circuit; the playing control circuit is also connected with the memory and disposed on the circuit board in the housing being provided with the USB interface which could be connected with the charging circuit and the ear-phone. Therefor the present utility model has the advantages of charming appearance, small size, easy to carry and operate, convenient for charging and with multi-functions.
    Type: Application
    Filed: March 4, 2003
    Publication date: February 5, 2004
    Inventor: Yi Shing Chung
  • Publication number: 20040001392
    Abstract: A flash memory-disk watch comprising a clock work, a dial plate, pointers, and a watchcase having a bottom cover, a case body, a fixing ring and a glass watch cover. A flash memory disk is disposed under the clock work in the watchcase with the USU interface of the flash memory disk inserted in the side of the watchcase. By comparison with the conventional watch, the flash memory-disk watch according to the present utility model not only has the functions of a watch, but also ably integrates all of the functions of the same type of flash memory disk, so that it is a pioneer product in the watch industry.
    Type: Application
    Filed: March 11, 2003
    Publication date: January 1, 2004
    Inventor: Yi Shing Chung