Abstract: The present invention provides an Al2O3 coated Si3N4 cutting tool comprising a Si3N4 based substrate body and a coating layer on the substrate body, wherein the coating layer has at least one Al2O3 coating layer consisting of amorphous Al2O3 or nanocrystalline ?-, ?-, or ?-Al2O3. The hard and wear resistant refractory coating is deposited onto the Si3N4-based substrate body by reactive sputtering using bipolar pulsed DMS technique or dual magnetron sputtering method at substrate temperatures of 300-700° C. During the deposition, preferably, the substrate temperature is controlled to achieve the desired crystal structure of the coating. To form amorphous Al2O3 coating on the surface of the substrates, the deposition temperature can be controlled from 300 to 500° C.; on the other hand, to form nanocrystalline ?-, ?-, or ?-Al2O3, the deposition temperature can be controlled in the range of 500-700° C.

Abstract: The present invention provides an Al2O3 coated Si3N4 cutting tool comprising a Si3N4 based substrate body and a coating layer on the substrate body, wherein the coating layer has at least one Al2O3 coating layer consisting of amorphous Al2O3 or nanocrystalline ?-, ?-, or ?-Al2O3. The hard and wear resistant refractory coating is deposited onto the Si3N4-based substrate body by reactive sputtering using bipolar pulsed DMS technique or dual magnetron sputtering method at substrate temperatures of 300-700° C. During the deposition, preferably, the substrate temperature is controlled to achieve the desired crystal structure of the coating. To form amorphous Al2O3 coating on the surface of the substrates, the deposition temperature can be controlled from 300 to 500° C.; on the other hand, to form nanocrystalline ?-, ?-, or ?-Al2O3, the deposition temperature can be controlled in the range of 500-700° C.

Abstract: A voice file retrieval method comprising the steps of: inputting a word; determining if voicing of the word is needed or not; obtaining a storage home address of a voice file corresponding to the word from a voice field of the word if the voice of the word is needed; and retrieving the voice file from the storage home address. By providing a voice field of the word, the storage home address of the voice file can be directly obtained. Hence, the retrieval speed can be increased, and the time to wait for an articulation of the word can be shortened.

Abstract: A voice file retrieval method comprising the steps of: inputting a word; determining if voicing of the word is needed or not; obtaining a storage home address of a voice file corresponding to the word from a voice field of the word if the voice of the word is needed; and retrieving the voice file from the storage home address. By providing a voice field of the word, the storage home address of the voice file can be directly obtained. Hence, the retrieval speed can be increased, and the time to wait for an articulation of the word can be shortened.

Abstract: A method of removing residual fluorine present in a HDP-CVD chamber which includes a high pressure seasoning process, a dry-cleaning process, and a low-pressure deposition process.