Patents by Inventor Yixiong Liu

Yixiong Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210287900
    Abstract: The present disclosure provides methods for treating film layers in a substrate including positioning the substrate in a processing volume of a processing chamber. The substrate can have high aspect ratio features extending a depth from a substrate surface to a bottom surface. The feature can have a width defined by a first sidewall and a second sidewall. A film with a composition that includes metal is formed on the substrate surface and the first sidewall, the second sidewall, and the bottom surface of each feature. The film in the feature can have a seam extending substantially parallel to the first and second sidewalls. The film is annealed and exposed to an oxygen radical while converting the metal of the film to a metal oxide. The metal oxide is exposed to a hydrogen radical while converting the metal oxide to a metal fill layer.
    Type: Application
    Filed: March 12, 2020
    Publication date: September 16, 2021
    Inventors: Yixiong YANG, Wei LIU, Yuan-hui LO, Srinivas GANDIKOTA, Jacqueline Samantha WRENCH, Yongjing LIN, Wen Ting CHEN, ShihChung CHEN
  • Patent number: 11101128
    Abstract: The present disclosure provides methods for treating film layers in a substrate including positioning the substrate in a processing volume of a processing chamber. The substrate can have high aspect ratio features extending a depth from a substrate surface to a bottom surface. The feature can have a width defined by a first sidewall and a second sidewall. A film with a composition that includes metal is formed on the substrate surface and the first sidewall, the second sidewall, and the bottom surface of each feature. The film in the feature can have a seam extending substantially parallel to the first and second sidewalls. The film is annealed and exposed to an oxygen radical while converting the metal of the film to a metal oxide. The metal oxide is exposed to a hydrogen radical while converting the metal oxide to a metal fill layer.
    Type: Grant
    Filed: March 12, 2020
    Date of Patent: August 24, 2021
    Assignee: Applied Materials, Inc.
    Inventors: Yixiong Yang, Wei Liu, Yuan-hui Lo, Srinivas Gandikota, Jacqueline Samantha Wrench, Yongjing Lin, Wen Ting Chen, ShihChung Chen
  • Publication number: 20200384541
    Abstract: In one aspect, methods of making freestanding metal matrix composite articles and alloy articles are described. A method of making a freestanding composite article described herein comprises disposing over a surface of the temporary substrate a layered assembly comprising a layer of infiltration metal or alloy and a hard particle layer formed of a flexible sheet comprising organic binder and the hard particles. The layered assembly is heated to infiltrate the hard particle layer with metal or alloy providing a metal matrix composite, and the metal matrix composite is separated from the temporary substrate. Further, a method of making a freestanding alloy article described herein comprises disposing over the surface of a temporary substrate a flexible sheet comprising organic binder and powder alloy and heating the sheet to provide a sintered alloy article. The sintered alloy article is then separated from the temporary substrate.
    Type: Application
    Filed: February 6, 2020
    Publication date: December 10, 2020
    Inventors: Qingjun ZHENG, Yixiong Liu, James A. Faust, Mark D. Rowe, Danie J. De Wet, Sudharsan Subbaiyan, Michael J. Meyer
  • Patent number: 10844481
    Abstract: In one aspect, articles are described comprising wear resistant coatings employing one or more composite refractory layers. For example, a coated article described herein comprises a substrate and a coating deposited by CVD adhered to the substrate, the coating including a multiphase refractory layer comprising an alumina phase and a zirconia phase, wherein the zirconia phase has a texture coefficient for the (200) growth direction, TC(200), greater than 4.
    Type: Grant
    Filed: April 17, 2019
    Date of Patent: November 24, 2020
    Assignee: KENNAMETAL INC.
    Inventors: Rodrigo Alejandro Cooper, Karl Heinz Wendt, Peter Leicht, Bhaskar Alok, Yixiong Liu
  • Patent number: 10808325
    Abstract: In one aspect, coated cutting tools are described herein comprising a substrate and a coating comprising a refractory layer deposited by physical vapor deposition adhered to the substrate, the refractory layer comprising M1?xAlxN wherein x?0.68 and M is titanium, chromium or zirconium, the refractory layer including a cubic crystalline phase and having hardness of at least 25 GPa.
    Type: Grant
    Filed: December 7, 2018
    Date of Patent: October 20, 2020
    Assignee: KENNAMETAL INC.
    Inventors: Vineet Kumar, Ronald Penich, Yixiong Liu
  • Patent number: 10570521
    Abstract: Cutting tools are described having coatings which can demonstrate desirable wear resistance and increased cutting lifetimes. A coated cutting tool described herein has a substrate and a coating with a plurality of alternating layers of a first layer of Al2O3 and a second layer of at least one of MeAl2O3 and MeAl2O3/MeO2 composite, wherein Me is Zr, Hf, Ti or a combination thereof. The coating has a superlattice-like structure.
    Type: Grant
    Filed: June 23, 2017
    Date of Patent: February 25, 2020
    Assignee: KENNAMETAL INC.
    Inventors: Zhenyu Liu, Peter Rudolf Leicht, Yixiong Liu
  • Patent number: 10562101
    Abstract: In one aspect, methods of making freestanding metal matrix composite articles and alloy articles are described. A method of making a freestanding composite article described herein comprises disposing over a surface of the temporary substrate a layered assembly comprising a layer of infiltration metal or alloy and a hard particle layer formed of a flexible sheet comprising organic binder and the hard particles. The layered assembly is heated to infiltrate the hard particle layer with metal or alloy providing a metal matrix composite, and the metal matrix composite is separated from the temporary substrate. Further, a method of making a freestanding alloy article described herein comprises disposing over the surface of a temporary substrate a flexible sheet comprising organic binder and powder alloy and heating the sheet to provide a sintered alloy article. The sintered alloy article is then separated from the temporary substrate.
    Type: Grant
    Filed: January 24, 2017
    Date of Patent: February 18, 2020
    Assignee: KENNAMETAL INC.
    Inventors: Qingjun Zheng, Yixiong Liu, James A. Faust, Mark J. Rowe, Danie J. De Wet, Sudharsan Subbaiyan, Michael J. Meyer
  • Publication number: 20190242013
    Abstract: In one aspect, articles are described comprising wear resistant coatings employing one or more composite refractory layers. For example, a coated article described herein comprises a substrate and a coating deposited by CVD adhered to the substrate, the coating including a multiphase refractory layer comprising an alumina phase and a zirconia phase, wherein the zirconia phase has a texture coefficient for the (200) growth direction, TC(200), greater than 4.
    Type: Application
    Filed: April 17, 2019
    Publication date: August 8, 2019
    Inventors: Rodrigo Alejandro Cooper, Karl Heinz Wendt, Peter Leicht, Bhaskar Alok, Yixiong Liu
  • Patent number: 10273575
    Abstract: In one aspect, articles are described comprising wear resistant coatings employing one or more composite refractory layers. For example, a coated article described herein comprises a substrate and a coating deposited by CVD adhered to the substrate, the coating including a multiphase refractory layer comprising an alumina phase and a zirconia phase, wherein the zirconia phase has a texture coefficient for the (200) growth direction, TC(200), greater than 4.
    Type: Grant
    Filed: August 31, 2016
    Date of Patent: April 30, 2019
    Assignee: KENNAMETAL INC.
    Inventors: Rodrigo Alejandro Cooper, Karl Heinz Wendt, Peter Leicht, Bhaskar Alok, Yixiong Liu
  • Patent number: 10272497
    Abstract: In one aspect, methods of making cladded articles are described herein. A method of making a cladded article, in some embodiments, comprises disposing over a surface of a metallic substrate a sheet comprising organic binder and powder metal or powder alloy having a solidus temperature at least 100° C. less than the metallic substrate and heating the powder metal or powder alloy to provide a sintered metal or sintered alloy cladding metallurgically bonded to the metallic substrate.
    Type: Grant
    Filed: March 17, 2016
    Date of Patent: April 30, 2019
    Assignee: KENNAMETAL INC.
    Inventors: Qingjun Zheng, Yixiong Liu, James A. Faust, Danie J. De Wet, Sudharsan Subbaiyan, Piyamanee Komolwit, Mark J. Rowe
  • Publication number: 20190106795
    Abstract: In one aspect, coated cutting tools are described herein comprising a substrate and a coating comprising a refractory layer deposited by physical vapor deposition adhered to the substrate, the refractory layer comprising M1?xAlxN wherein x?0.68 and M is titanium, chromium or zirconium, the refractory layer including a cubic crystalline phase and having hardness of at least 25 GPa.
    Type: Application
    Filed: December 7, 2018
    Publication date: April 11, 2019
    Inventors: Vineet KUMAR, Ronald PENICH, Yixiong LIU
  • Patent number: 10253410
    Abstract: A coated cutting insert includes a substrate that is either a ceramic substrate or polycrystalline cubic boron nitride-containing substrate and has a substrate surface.
    Type: Grant
    Filed: April 13, 2017
    Date of Patent: April 9, 2019
    Assignee: KENNAMETAL INC.
    Inventors: Vineet Kumar, Ronald M. Penich, Peter R. Leicht, Mark S. Greenfield, Yixiong Liu
  • Patent number: 10202686
    Abstract: In one aspect, articles are described herein comprising refractory coatings employing an inter-anchored multilayer architecture. Articles having refractory coatings described herein, in some embodiments, are suitable for high wear and/or abrasion applications such as metal cutting operations. A coated article described herein comprises a substrate and a coating deposited by CVD adhered to the substrate, the coating including a refractory layer comprising a plurality of sublayer groups, a sublayer group comprising a Group IVB metal nitride sublayer and an adjacent layer alumina sublayer, the Group IVB metal nitride sublayer comprising a plurality of nodules interfacing with the alumina sublayer.
    Type: Grant
    Filed: April 24, 2017
    Date of Patent: February 12, 2019
    Assignee: KENNAMETAL INC.
    Inventors: Zhenyu Liu, Yixiong Liu
  • Patent number: 10184187
    Abstract: In one aspect, coated cutting tools are described herein comprising a substrate and a coating comprising a refractory layer deposited by physical vapor deposition adhered to the substrate, the refractory layer comprising M1-xAlxN wherein x?0.68 and M is titanium, chromium or zirconium, the refractory layer including a cubic crystalline phase and having hardness of at least 25 GPa.
    Type: Grant
    Filed: July 14, 2016
    Date of Patent: January 22, 2019
    Assignee: KENNAMETAL INC.
    Inventors: Vineet Kumar, Ronald Penich, Yixiong Liu
  • Patent number: 10100405
    Abstract: A coated cutting insert for a chipforming material removal operation wherein the coated insert has a substrate and a coating scheme on the substrate. The coating scheme includes a CVD transition coating layer. The coating scheme further includes a CVD multi-layered coating scheme having a plurality of coating sets. Each one of the coating sets has an aluminum oxide coating layer and a nitrogen-containing coating layer.
    Type: Grant
    Filed: April 20, 2015
    Date of Patent: October 16, 2018
    Assignee: KENNAMETAL INC.
    Inventors: Rodrigo A. Cooper, Zhenyu Liu, Peter R. Leicht, Yixiong Liu
  • Patent number: 9994717
    Abstract: A CVD-coated article has a substrate with a substrate surface and a CVD coating scheme on the substrate surface. The coating scheme includes a coating layer of Ti1-xMex nitride wherein Me is selected from the group of zirconium or hafnium or a mixture of zirconium and hafnium, and x equals between about 0.1 and about 0.9. The coating layer of Ti1-xMex nitride has a microhardness equal to between about 2300 HV0.05 and about 2600 HV0.05, a face centered cubic crystal structure, and a lattice constant equal to between about 0.427 nanometers and about 0.453 nanometers.
    Type: Grant
    Filed: April 13, 2015
    Date of Patent: June 12, 2018
    Assignee: KENNAMETAL INC.
    Inventors: Volkmar Sottke, Hartmut Westphal, Karl H. Wendt, Peter R. Leicht, Rodrigo A. Cooper, Yixiong Liu
  • Publication number: 20180057934
    Abstract: In one aspect, articles are described comprising wear resistant coatings employing one or more composite refractory layers. For example, a coated article described herein comprises a substrate and a coating deposited by CVD adhered to the substrate, the coating including a multiphase refractory layer comprising an alumina phase and a zirconia phase, wherein the zirconia phase has a texture coefficient for the (200) growth direction, TC(200), greater than 4.
    Type: Application
    Filed: August 31, 2016
    Publication date: March 1, 2018
    Inventors: Rodrigo Alejandro Cooper, Karl Heinz Wendt, Peter Leicht, Bhaskar Alok, Yixiong Liu
  • Patent number: 9903018
    Abstract: A coated cutting insert and a method for making the same. The coated cutting insert has a substrate with a substrate surface. There is a backing coating scheme on the substrate surface, and a TiAl2O3 coating layer wherein the TiAl2O3 coating layer is deposited using chemical vapor deposition from a gaseous composition including AiCl3, H2, TiCl4, CO2 and HCl.
    Type: Grant
    Filed: March 17, 2016
    Date of Patent: February 27, 2018
    Assignee: KENNAMETAL INC.
    Inventors: Zhenyu Liu, Rodrigo A. Cooper, Peter R. Leicht, Mark S. Greenfield, Yixiong Liu
  • Patent number: 9896767
    Abstract: In one aspect, coated cutting tools are described herein comprising a substrate and a coating comprising a refractory layer deposited by physical vapor deposition adhered to the substrate, the refractory layer comprising M1-xAlxN wherein x?0.68 and M is titanium, chromium or zirconium, the refractory layer including a cubic crystalline phase and having hardness of at least 25 GPa.
    Type: Grant
    Filed: April 9, 2014
    Date of Patent: February 20, 2018
    Assignee: KENNAMETAL INC
    Inventors: Vineet Kumar, Ronald Penich, Yixiong Liu
  • Patent number: 9890084
    Abstract: In one aspect, articles are described herein comprising refractory coatings employing alumina-based hybrid nanocomposite architectures. A coated article described herein comprises a substrate and a coating deposited by CVD adhered to the substrate, the coating including a composite refractory layer having a matrix phase comprising alumina and at least one particulate phase within the matrix phase, the particulate phase comprising nanoscale to submicron particles formed of at least one of an oxycarbide and oxycarbonitride of one or more metals selected from the group consisting of aluminum and Group IVB metals.
    Type: Grant
    Filed: October 1, 2015
    Date of Patent: February 13, 2018
    Assignee: KENNAMETAL INC.
    Inventors: Zhenyu Liu, Peter Rudolf Leicht, Yixiong Liu