Abstract: Wall surfaces of the nozzle channel include a first wall surface which extends in the first direction and in which the nozzle is provided and a second wall surface which extends in the first direction and is opposite to the first wall surface, wall surfaces of the first communication channel include a third wall surface which extends in the second direction and a distance from which to the nozzle in the first direction is longest and a fourth wall surface which extends in the second direction and is opposite to the third wall surface, and a fifth wall surface which extends in a third direction set between the first direction and the second direction is provided between the second wall surface and the fourth wall surface.

Abstract: a first sloped portion that is provided between the first wall surface and the third wall surface includes a first constituting surface that extends in a third direction between the first direction and the second direction.

Abstract: Provided is a liquid discharging head including: a nozzle discharging a liquid; a chamber plate having a plurality of pressure chambers, drive elements provided in correspondence with each pressure chamber, and a plurality of lead electrodes for supplying electric signals to the drive elements; and a circuit substrate having terminals coupled to the lead electrodes. A first pressure chamber and a second pressure chamber communicate with the nozzle in common. A first segment electrode is formed so as to overlap the first pressure chamber and is not to overlap the second pressure chamber in plan view. A second segment electrode is formed so as to overlap the second pressure chamber and is not to overlap the first pressure chamber in plan view. The first segment electrode and the second segment electrode are coupled to the same lead electrode.

Abstract: A liquid ejecting head including: an individual flow path row in which a plurality of individual flow paths communicating with a nozzle that ejects a liquid in a first axis direction are arranged in parallel along a second axis orthogonal to a first axis, and a first common liquid chamber communicating with the plurality of individual flow paths, in which each of the plurality of individual flow paths has a pressure chamber that stores a liquid.

Abstract: A liquid ejecting head including: an individual flow path row in which a plurality of individual flow paths communicating with a nozzle that ejects a liquid in a first axis direction are arranged in parallel along a second axis orthogonal to a first axis, and a first common liquid chamber communicating with the plurality of individual flow paths, in which each of the plurality of individual flow paths has a pressure chamber that stores a liquid.

Abstract: A liquid ejecting head including: an individual flow path row in which a plurality of individual flow paths communicating with a nozzle that ejects a liquid in a first axis direction are arranged in parallel along a second axis orthogonal to a first axis, and a first common liquid chamber communicating with the plurality of individual flow paths, in which each of the plurality of individual flow paths has a pressure chamber that stores a liquid.

Abstract: A liquid ejecting head including: an individual flow path row in which a plurality of individual flow paths communicating with a nozzle that ejects a liquid in a first axis direction are arranged in parallel along a second axis orthogonal to a first axis, and a first common liquid chamber communicating with the plurality of individual flow paths, in which each of the plurality of individual flow paths has a pressure chamber that stores a liquid.

Abstract: Provided are an MEMS device, a liquid ejecting head, a liquid ejecting apparatus, a manufacturing method of a MEMS device, a manufacturing method of a liquid ejecting head and a manufacturing method of a liquid ejecting apparatus. Provided is a MEMS device that includes a first substrate on which a flexibly deformable thin film member is laminated, a second substrate disposed at an interval with respect to the first substrate, and an adhesion layer that adheres the first substrate to the second substrate, in which an end of the thin film member extends to the outside of the end of the first substrate in an in-plane direction of the first substrate.

Abstract: A liquid ejecting head includes a nozzle plate, a multilayer substrate, and a pressure chamber substrate. The multilayer substrate includes a liquid chamber wall portion. The liquid chamber wall portion has a first wall surface facing a common liquid chamber. The multilayer substrate has a supply flow path which has an inlet portion coupled to the first wall surface and via which the common liquid chamber communicates with the first pressure chamber. When a direction from the common liquid chamber toward the first pressure chamber is defined as a first direction, and a direction intersecting the first direction is defined as a second direction, the supply flow path includes a first portion having a first width in the inlet portion and a second portion having a second width, in a first cross section along the first direction and the second direction. The first width is narrower than the second width.

Abstract: A liquid ejecting head includes a nozzle plate, a multilayer substrate, and a pressure chamber substrate. The multilayer substrate includes a communication flow path penetrating a first flow path arrangement layer, a insulating layer, and a second flow path arrangement layer. When a direction from the pressure chamber substrate toward the nozzle plate is defined as a first direction, and a direction intersecting the first direction is defined as a second direction, the communication flow path includes a first portion having a first width and a second portion having a second width in a first cross section along the first direction and the second direction, the first width is narrower than the second width, the first portion includes the insulating layer, and the communication flow path includes a first inclined portion having a wall surface inclined to the first direction between the first portion and the second portion.

Abstract: A liquid discharging head includes a nozzle plate and a chamber plate, the chamber plate is disposed on a second surface side of the nozzle plate, and a first pressure chamber and a second pressure chamber among a plurality of pressure chambers communicate with a nozzle through one communication flow path.

Abstract: Provided is a liquid discharging head including: a nozzle discharging a liquid; a chamber plate having a plurality of pressure chambers, drive elements provided in correspondence with each pressure chamber, and a plurality of lead electrodes for supplying electric signals to the drive elements; and a circuit substrate having terminals coupled to the lead electrodes. A first pressure chamber and a second pressure chamber communicate with the nozzle in common. A first segment electrode is formed so as to overlap the first pressure chamber and is not to overlap the second pressure chamber in plan view. A second segment electrode is formed so as to overlap the second pressure chamber and is not to overlap the first pressure chamber in plan view. The first segment electrode and the second segment electrode are coupled to the same lead electrode.

Abstract: Provided is a liquid discharging head including a nozzle discharging a liquid; a chamber plate in which a plurality of pressure chambers are arranged side by side on a first surface side; and a flow path plate having a second surface formed with an opening of a communication flow path, wherein a first region of a partition wall between a first pressure chamber and a second pressure chamber adjacent to each other among the plurality of pressure chambers is constrained by being bonded to the second surface of the flow path plate, and a second region of the partition wall overlaps the opening of the communication flow path in plan view.

Abstract: Provided is a liquid discharging head including: a nozzle discharging a liquid; a pressure chamber row in which a plurality of pressure chambers communicating with the nozzle are arranged side by side along a first axis direction; and a first reservoir and a second reservoir commonly communicating with the plurality of pressure chambers, in which the pressure chamber row includes a first pressure chamber communicating with the first reservoir and a second pressure chamber communicating with the second reservoir, and the liquid discharging head further comprises a communication flow path causing the first pressure chamber and the second pressure chamber to commonly communicate with one nozzle.

Abstract: Provided is a liquid discharging head including: a nozzle discharging a liquid; a chamber plate having a plurality of pressure chambers, a drive element provided to correspond to each of the pressure chambers, and a plurality of lead electrodes for supplying an electric signal to the drive element; and a circuit substrate having a terminal coupled to the lead electrode. A first pressure chamber and a second pressure chamber communicate with the nozzle in common. The chamber plate includes a first individual lead electrode for the drive element corresponding to the first pressure chamber and a second individual lead electrode for the drive element corresponding to the second pressure chamber. The terminal of the circuit substrate is coupled so as to overlap the first individual lead electrode and the second individual lead electrode in plan view.

Abstract: A MEMS device which includes an adhesive which adheres a first substrate and a second substrate to each other, in which a first space which includes an electrode, an individual electrode, a common electrode, a bump electrode, and a piezoelectric element and which is configured as a closed space which is isolated from an atmosphere by the first substrate, the second substrate, and the adhesive is disposed in a space between the first substrate and the second substrate, and in which a second space which does not include any of the electrode, the individual electrode, the common electrode, the bump electrode, or the piezoelectric element and which communicates with the atmosphere due to a through-hole which penetrates at least one of the first substrate and the second substrate is disposed in the space between the first substrate and the second substrate.

Abstract: A liquid ejecting head includes a nozzle plate, a multilayer substrate, and a pressure chamber substrate. The multilayer substrate includes a communication flow path penetrating a first flow path arrangement layer, a insulating layer, and a second flow path arrangement layer. When a direction from the pressure chamber substrate toward the nozzle plate is defined as a first direction, and a direction intersecting the first direction is defined as a second direction, the communication flow path includes a first portion having a first width and a second portion having a second width in a first cross section along the first direction and the second direction, the first width is narrower than the second width, the first portion includes the insulating layer, and the communication flow path includes a first inclined portion having a wall surface inclined to the first direction between the first portion and the second portion.

Abstract: A liquid ejecting head includes a nozzle plate, a multilayer substrate, and a pressure chamber substrate. The multilayer substrate includes a liquid chamber wall portion. The liquid chamber wall portion has a first wall surface facing a common liquid chamber. The multilayer substrate has a supply flow path which has an inlet portion coupled to the first wall surface and via which the common liquid chamber communicates with the first pressure chamber. When a direction from the common liquid chamber toward the first pressure chamber is defined as a first direction, and a direction intersecting the first direction is defined as a second direction, the supply flow path includes a first portion having a first width in the inlet portion and a second portion having a second width, in a first cross section along the first direction and the second direction. The first width is narrower than the second width.

Abstract: A piezoelectric device including a pressure chamber, a piezoelectric element, and a vibration plate, in which the piezoelectric element is provided with a first electrode, a second electrode, and a piezoelectric layer, the vibration plate has a first portion overlapping the piezoelectric element and a second portion having a thickness smaller than that of the first portion and overlapping an inner peripheral surface of a side wall of the pressure chamber, a side surface of the piezoelectric element which intersects the vibration plate has a first surface inclined at a first angle, the vibration plate has a second surface, between the first portion and the second portion, inclined at a second angle smaller than the first angle, and an end portion of the second surface on the side wall side of the pressure chamber overlaps the side wall of the pressure chamber.

Abstract: A MEMS device includes a first substrate; a second substrate that is disposed laminated on the first substrate; and a functional element that is disposed between the first substrate and the second substrate, in which the second substrate is smaller than the first substrate, and in planar view, an end portion of the second substrate is disposed inside an end portion of the first substrate.