Patents by Inventor Yoichi Tamaki

Yoichi Tamaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Germanium-containing silicon nitride film
    Patent number: 4126880
    Abstract: A germanium-containing silicon nitride film has a germanium content of 0.5 to 10 atomic-% that of the silicon content. Since the film has a much smaller stress than a conventional silicon nitride (Si.sub.3 N.sub.4) film, it is very suitable as a mask for fabricating a semiconductor device and an insulating or a protective film for a semiconductor device.
    Type: Grant
    Filed: January 4, 1977
    Date of Patent: November 21, 1978
    Assignee: Hitachi, Ltd.
    Inventors: Yoichi Tamaki, Seiichi Isomae, Masahiko Ogirima, Akira Shintani, Michiyoshi Maki