Abstract: In the present invention, a gas flow rate adjustment apparatus that outputs a raw material gas to an ozone generation apparatus is provided. The gas flow rate adjustment apparatus includes a plurality of flow rate adjustment parts, and outputs a second mixed gas serving as the raw material gas to the ozone generation apparatus. The second mixed gas includes an oxygen gas outputted from a first oxygen flow rate adjustment part and a first mixed gas outputted from a mixed gas flow rate adjustment part. The raw material gas generated by the gas flow rate adjustment apparatus, which includes an oxygen gas and a nitrogen gas, contains the nitrogen gas added to the oxygen gas with the rate of addition being in a range of more than 0 PPM and not more than 100 PPM.

Abstract: An ozone gas output flow rate management unit configured to receive a plurality of ozone gas outputs from a plurality of ozone generation units and capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of the plurality of ozone gas outputs to any of a plurality of ozone treatment apparatuses by performing an opening/closing operation of a plurality of ozone gas control valves provided in the ozone gas output flow rate management unit.

Abstract: A plasma generation apparatus according to the present invention includes an electrode cell and a housing that encloses the electrode cell. The electrode cell includes a first electrode, a discharge space, a second electrode, dielectrics, and a pass-through formed in a central portion in a plan view. An insulating tube having a cylindrical shape is arranged within the pass-through. Ejection holes are formed in a side surface of the cylindrical shape. The plasma generation apparatus further includes a precursor supply part that is connected to a hollow portion of the insulating tube and configured to supply a metal precursor.

Abstract: The present invention provides a plasma generation apparatus that, even when a source gas is supplied into a housing where an electrode cell is arranged, does not cause a problem of corrosion of a power feed part and an electrode surface arranged in the housing and a problem of deposition of a metal in a place within the housing other than a discharge part of the electrode cell. A plasma generation apparatus (100) according to the present invention includes an electrode cell and a housing (16) that encloses the electrode cell. The electrode cell includes a first electrode (3), a second electrode (1) facing the first electrode (3) with interposition of a discharge space (6) therebetween, and dielectrics (2a, 2b) arranged on main surfaces of the electrodes (1, 3).

Abstract: A gas pipe integrated block includes a plurality of internal pipe paths. The plurality of internal pipe paths are connected to a nitrogen-free ozone generator in which a photocatalytic material for generating ozone is applied to a discharge surface, a controller (an MFC, a gas filter, and an APC), a raw material gas supply port, and an ozone gas output port. Thereby, a raw material gas input pipe path extending from the raw material gas supply port through the APC to the nitrogen-free ozone gas generator, and an ozone gas output pipe path extending from the nitrogen-free ozone generator through the gas filter and the MFC to the ozone gas output port, are formed in an integrated unit.

Abstract: In the present invention, particularly, means for removing moisture contained in a raw material gas is provided in a raw material gas supply part so that the amount of moisture contained in the raw material gas that is supplied to an ozone gas supply system is reduced, and additionally an ozone gas output flow rate management unit is provided that is configured to receive a plurality of ozone gas outputs from a plurality of nitrogen-free ozone generation units and capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of the plurality of ozone gas outputs to any of a plurality of ozone treatment apparatuses by performing an opening/closing operation on a plurality of ozone gas control valves provided in the ozone gas output flow rate management unit.

Abstract: One ozone concentrating chamber is provided therein with a part of a cooling temperature range where ozone can be selectively condensed or an oxygen gas can be selectively removed by transmission from an ozonized oxygen gas, and a part of a temperature range where condensed ozone can be vaporized, and condensed ozone is vaporized by moving condensed ozone with flow of a fluid or by gravitation to the part where condensed ozone can be vaporized, whereby the ozonized oxygen gas can be increased in concentration. Such a constitution is provided that a particle material 13 for condensation and vaporization filled in the ozone concentrating chambers 11 and 12 has a spherical shape of a special shape with multifaceted planes on side surfaces, or an oxygen transmission membrane 130 capable of selectively transmitting an oxygen gas in an ozone gas is provided.

Abstract: One ozone concentrating chamber is provided therein with a part of a cooling temperature range where ozone can be selectively condensed or an oxygen gas can be selectively removed by transmission from an ozonized oxygen gas, and a part of a temperature range where condensed ozone can be vaporized, and condensed ozone is vaporized by moving condensed ozone with flow of a fluid or by gravitation to the part where condensed ozone can be vaporized, whereby the ozonized oxygen gas can be increased in concentration. Such a constitution is provided that a particle material 13 for condensation and vaporization filled in the ozone concentrating chambers 11 and 12 has a spherical shape of a special shape with multifaceted planes on side surfaces, or an oxygen transmission membrane 130 capable of selectively transmitting an oxygen gas in an ozone gas is provided.

Abstract: One ozone concentrating chamber is provided therein with a part of a cooling temperature range where ozone can be selectively condensed or an oxygen gas can be selectively removed by transmission from an ozonized oxygen gas, and a part of a temperature range where condensed ozone can be vaporized, and condensed ozone is vaporized by moving condensed ozone with flow of a fluid or by gravitation to the part where condensed ozone can be vaporized, whereby the ozonized oxygen gas can be increased in concentration. Such a constitution is provided that a particle material 13 for condensation and vaporization filled in the ozone concentrating chambers 11 and 12 has a spherical shape of a special shape with multifaceted planes on side surfaces, or an oxygen transmission membrane 130 capable of selectively transmitting an oxygen gas in an ozone gas is provided.

Abstract: An apparatus for producing high-concentration ozone gas has a plurality of adsorption/desorption columns and a plurality of valves capable of switching opening/closing of the passage of gas flowing into or out of the adsorption/desorption columns, such that each of the adsorption/desorption columns can performs ozone adsorption processing, evacuation processing or desorption processing. At least two of the adsorption/desorption columns are placed in a serial cycle arrangement to constitute a main adsorption/desorption column group, and one or more of the other adsorption/desorption columns is placed in parallel with the main adsorption/desorption column group to constitute an auxiliary adsorption/desorption column. The auxiliary adsorption/desorption column performs desorption processing during a period in which none of the adsorption/desorption columns of the main adsorption/desorption column group is performing desorption processing.

Abstract: Provided is an ozone concentrator including an ozone generator (3), adsorption/desorption columns (4) in which silica gel (6) cooled with a certain-temperature refrigerant (25) for concentrating ozone generated by the ozone generator (3) is packed, a refrigerating machine (23) for cooling the refrigerant (25), a vacuum pump (20) for enhancing a concentration of the ozone in one of the adsorption/desorption columns (4) by discharging mainly oxygen from the silica gel (6) adsorbing the ozone, a plurality of valves (8) to (13) for air pressure operations, for switching passages of gas that is allowed to flow in or flow out with respect to the adsorption/desorption columns (4), and ozone concentration meters (28, 29) for measuring the concentration of the ozone enhanced by the vacuum pump (20), in which a discharge line of the vacuum pump (20) is connected to another one of the adsorption/desorption columns (4), whereby the ozone is allowed to pass through another one of the adsorption/desorption columns again.

Abstract: An ozone gas output flow rate management unit configured to receive a plurality of ozone gas outputs from a plurality of ozone generation units and capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of the plurality of ozone gas outputs to any of a plurality of ozone treatment apparatuses by performing an opening/closing operation of a plurality of ozone gas control valves provided in the ozone gas output flow rate management unit.

Abstract: An object of the present invention is to provide a downsized ozone generation unit including control means having plurality of means for outputting an ozone gas, and the ozone generation unit. In the present invention, a gas pipe integrated block (30) has a plurality of internal pipe paths (R30a to R30f). The plurality of internal pipe paths are connected to an ozone generator (1), control means (an MFC (3), a gas filter (51), and an APC (4)), a raw gas supply port (14), an ozone gas output port (15), and cooling water inlet/outlet ports (13A, 13B), to thereby form a unit in which a raw gas input pipe path and an ozone gas output pipe path are integrated. The raw gas input pipe path extends from the raw gas supply port through the APC to the ozone gas generator. The ozone gas output pipe path extends from the ozone generator through the gas filter, the ozone concentration meter 5, and the MFC 3, to the ozone gas output port.

Abstract: An ozonized gas having a pressure exceeding atmospheric pressure and having a predetermined concentration is supplied to adsorption/desorption columns (4) at a low temperature state of 0° C. or less and a high pressure and packed with silica gel (6) serving as an adsorbent. The adsorption/desorption columns (4) have been constituted so that at least three of a plurality of adsorption/desorption columns (4), i.e., adsorption/desorption columns (4-1, 4-2, and 4-3), are disposed in a serial cycle arrangement to constitute a main adsorption/desorption column group (99), and that an adsorption/desorption column (4-4) is disposed in parallel with the main adsorption/desorption column group (99) to constitute an auxiliary adsorption/desorption column (999). In a period in which none of the three columns of the main adsorption/desorption column group (99) is performing desorption processing, the auxiliary adsorption/desorption column (999) performs desorption processing.

Abstract: Provided is an ozone concentrator including an ozone generator (3), adsorption/desorption columns (4) in which silica gel (6) cooled with a certain-temperature refrigerant (25) for concentrating ozone generated by the ozone generator (3) is packed, a refrigerating machine (23) for cooling the refrigerant (25), a vacuum pump (20) for enhancing a concentration of the ozone in one of the adsorption/desorption columns (4) by discharging mainly oxygen from the silica gel (6) adsorbing the ozone, a plurality of valves (8) to (13) for air pressure operations, for switching passages of gas that is allowed to flow in or flow out with respect to the adsorption/desorption columns (4), and ozone concentration meters (28, 29) for measuring the concentration of the ozone enhanced by the vacuum pump (20), in which a discharge line of the vacuum pump (20) is connected to another one of the adsorption/desorption columns (4), whereby the ozone is allowed to pass through another one of the adsorption/desorption columns again.

Abstract: This invention provides a new photocatalyst material producing apparatus and photocatalyst material producing method that can produce a large quantity of photocatalyst material of high quality by a chemical reaction in light high-field plasma in a highly oxidative high-concentration ozone medium state, instead of systems to produce a photocatalyst material by PVD and CVD, which are conventional dry deposition methods. In a photocatalyst material producing method and photocatalyst material producing apparatus according to this invention, a pair of facing electrodes are provided via a dielectric material in a discharge gap where gas mainly containing oxygen gas is supplied, and an AC voltage is applied between the electrodes to generate dielectric barrier discharge (silent discharge or creeping discharge) in the discharge gap. Thus, oxygen gas containing ozone gas is created and a metal or metal compound is modified to a photocatalyst material by the dielectric barrier discharge.

Abstract: An apparatus for generating a dielectric-barrier discharge gas including a high-energy radical gas, at a high density and with high efficiency. A flat-plate-like first electrode and a flat-plate-like second electrode are arranged in opposite positions, and a dielectric body is arranged between the two electrodes. A discharge space is located between the first electrode and the dielectric body, within a gap between the first electrode and the dielectric body. The discharge space has three sides which are gas shielded and a fourth side which opens to end surfaces of the first electrode and the dielectric body. A cooling section cools at least the first electrode and a gas supply section supplies a raw material gas to the discharge space part. A dielectric-barrier discharge is generated in the discharge space part by applying an AC voltage to the first electrode and the second electrode.

Abstract: One ozone concentrating chamber is provided therein with a part of a cooling temperature range where ozone can be selectively condensed or an oxygen gas can be selectively removed by transmission from an ozonized oxygen gas, and a part of a temperature range where condensed ozone can be vaporized, and condensed ozone is vaporized by moving condensed ozone with flow of a fluid or by gravitation to the part where condensed ozone can be vaporized, whereby the ozonized oxygen gas can be increased in concentration. Such a constitution is provided that a particle material 13 for condensation and vaporization filled in the ozone concentrating chambers 11 and 12 has a spherical shape of a special shape with multifaceted planes on side surfaces, or an oxygen transmission membrane 130 capable of selectively transmitting an oxygen gas in an ozone gas is provided.

Abstract: A compact, inexpensive, large-capacity ozone generator with increased ease of apparatus maintenance. An ozone power supply includes an n-phase inverter for obtaining an AC voltage having a predetermined frequency and outputting an n-phase AC voltage waveform; n reactors and an n-phase transformer for converting an n-phase AC voltage to a high AC voltage; n high-voltage terminals for outputting the n-phase high AC voltage; and a low-voltage terminal having a common potential. Ozone generator units are electrically divided into n pieces within a discharge chamber. Each ozone generator unit includes n high-voltage electrode terminals and one low-voltage electrode terminal, common to all ozone generator units. Each ozone generator unit supports an n-phase AC discharge to generate ozone.

Abstract: This invention provides a new photocatalyst material producing apparatus and photocatalyst material producing method that can produce a large quantity of photocatalyst material of high quality by a chemical reaction in light high-field plasma in a highly oxidative high-concentration ozone medium state, instead of systems to produce a photocatalyst material by PVD and CVD, which are conventional dry deposition methods. In a photocatalyst material producing method and photocatalyst material producing apparatus according to this invention, a pair of facing electrodes are provided via a dielectric material in a discharge gap where gas mainly containing oxygen gas is supplied, and an AC voltage is applied between the electrodes to generate dielectric barrier discharge (silent discharge or creeping discharge) in the discharge gap. Thus, oxygen gas containing ozone gas is created and a metal or metal compound is modified to a photocatalyst material by the dielectric barrier discharge.