Abstract: An array of M.times.N thin film actuated mirrors for use in an optical projection system, includes an active matrix, an array of M.times.N actuating structures, an array of M.times.N mirror layers and an array of M.times.N supporting members. Each of the actuating structures includes a first a second and a third identically structured actuating parts, each of the actuating parts having at least a motion-inducing thin film layer, a first and a second electrodes. The first electrode from each of the actuating parts is connected to ground, thereby serving as the bias electrode, and the second electrode thereof functions as the signal electrode. Each of the mirror layers is provided with an odd number of tab portions, each of the tab portions being partially separated from the neighboring tab portions by a dividing slot therebetween.

Abstract: A photoresist is deposited on a glass substrate for forming a separation layer. Then, an array of reflectors is generated on the separation layer; followed by a supporting layer thereon, which is made of a self-adhesive epoxy. Thereafter, an actuator array is bonded on the supporting layer. The separation layer is then removed to disengage the glass substrate. The mirror array formation is finalized by patterning the separation layer. Consequently, the above inventive process allows the fabrication of a mirror array in a simple manner without having to employ the electroplating process.

Abstract: An array of M.times.N electrodisplacive actuated mirrors for use in an optical projection system is assembled by way of: (a) preparing two identical ceramic wafers; (b) forming M identical trenches thereon; (c) interlocking and bonding together to form a ceramic block; (d) forming a composite ceramic structure from the ceramic block by polishing the top and bottom surfaces thereof: (e) providing M.times.N signal electrodes and M+1 bias electrodes on the bottom and top surfaces thereof, respectively; (f) mounting on an active matrix to thereby form an array of M.times.N actuators; (g) preparing platforms, to be formed thereon a light reflecting layer; (h) forming the light reflecting layer; (i) patterning the light reflecting layer, including the platform into an array of M.times.N mirrors; and (j) making electrical connections to thereby form the array of M.times.N electrodisplacive actuated mirrors.

Abstract: The present invention relates to improved methods for fabricating and mounting an array of M.times.N mirrors on an array of M.times.N electrodisplacive actuators to thereby form an array of M.times.N electrodisplacive actuated mirrors for use in an optical projection system, wherein M and N are integers. In accordance with the present invention, there are provided two methods, one of the methods comprising the steps of: forming a separation layer on a substrate; providing a supporting layer on the separation layer; bonding the array of M.times.N actuators on the supporting layer; removing the separation layer so as to disengage the substrate; patterning the supporting layer into an array of M.times.N supporting members; and forming a light reflecting metallic layer on top of each of the supporting members to thereby provided the array of M.times.N electrodisplacive actuated mirrors.

Abstract: The present invention provides fluorinated alkyl compound derivatives represented by formula of: ##STR1## wherein: R is C.sub.2-4 lower alkyl, cyclohexyl or thiophene; phenyl substituted with hydrogen, C.sub.1-6 alkyl, haloalkyl, halogen or alkoxy; and,R.sub.f is fluorinated C.sub.1-3 lower alkyl.The fluorinated alkyl compound derivatives of the invention can be used as agrochemicals, drugs and intermediates therefor. The present invention also provides a novel process for preparing the fluorinated alkyl compound derivatives (I).

Abstract: The present invention provides novel fluorinated abscisic acid derivative represented by formula of: ##STR1## wherein: X is O(CH.sub.2).sub.2 O or O; and,R is hydroxymethyl, aldehyde, C.sub.1-2 alkoxycarbonyl or carboxyl group.The present invention also provides a novel process for preparing the fluorinated abscisic acid derivative represented as the formula (I), and also provides their use for plant growth regulator.