Abstract: A method of fabricating micro-electromechanical system (MEMS) structures that can prevent stiction between a microstructure and a substrate or adjacent structures after etching for releasing the microstructure is provided. In a micromaching process for fabricating a microstructure suspended above a substrate using a sacrificial layer, the fabricating method includes stacking an anti-stiction layer, which can be removed by dry etching, before or after stacking a sacrificial layer.

Abstract: A method of fabricating micro-electromechanical system (MEMS) structures that can prevent stiction between a microstructure and a substrate or adjacent structures after etching for releasing the microstructure is provided. In a micromaching process for fabricating a microstructure suspended above a substrate using a sacrificial layer, the fabricating method includes stacking an anti-stiction layer, which can be removed by dry etching, before or after stacking a sacrificial layer.

Abstract: Provided is a 2×2 optical switch includes a substrate, a first input fiber and a first output fiber, a second input fiber and a second output fiber, a rotating mirror, torsion bars, and an electrostatic force generating part. The first input fiber and a first output fiber are arranged at a predetermined distance from a central point in a first optical path passing through the central point over the substrate. The second input fiber and a second output fiber are arranged at a predetermined distance from the central point in a second optical path that passes through the central point and is orthogonal to the first optical path. The rotating mirror is positioned at around the central point and turns on a turning shaft. The torsion bars support the rotating mirror and the electrostatic force generating part supplies a drive force to the rotating mirror.

Abstract: A micromirror actuator includes: a substrate; spring units elastically supported by protrusion formed on the substrate; a micromirror connected to the spring units and formed to be capable of rotating; trenches formed in the substrate at either side of the protrusions to correspond to the surface of the micromirror; and lower electrodes formed in each of the trenches. Accordingly, it is possible to expand the range of the driving angle of the micromirror with the use of a lower voltage.

Abstract: A micromirror actuator includes a first substrate, at least one lower electrode, a micromirror, a two part second substrate, an upper electrode, a pair of support posts, and torsion bars. In the first substrate, a trench having a predetermined shape is formed. The lower electrode is formed in the trench. The micromirror faces the trench to be operative to pivot due to electrostatic forces and selectively to reflect incident light depending on pivoting positions thereof. The parts of the second substrate are formed on a portion of the first substrate and underneath the micromirror, respectively, and prevent the deformation of the micromirror. The upper electrode is formed on a portion of the second substrate on the first substrate and applies power to the micromirror. The pair of support posts protrude from the first substrate beside both sides of the trench. The torsion bars connect both sides of the micromirror to the pair of support posts.

Abstract: An actuator using an organic film membrane is provided and includes a substrate having a cavity with a bottom portion at a predetermined depth in the upper center, an organic film membrane attached on the upper surface of the substrate to close the upper portion of the cavity, and a driving electrode arranged on the organic film membrane. The driving electrode is driven by a piezoelectricity force or an electrostatic force. The membrane of the actuator can be easily fabricated, and the size of the actuator can be reduced while improving a yield.

Abstract: Provided are an actuator which can be actively driven so as to precisely control a driving angle of a micromirror, and a manufacturing method thereof. The micromirror actuator includes a substrate, a trench, a micromirror, and a driving angle control unit. The trench is formed in a predetermined position of the substrate and has at least one or more electrodes. The micromirror rotates by an electrostatic force generated through an interaction with the at least one or more electrodes so as to reflect incident light in a predetermined direction. The driving angle control unit supports the micromirror so as to control the position of an actuation shaft of the micromirror. Accordingly, the micromirror can stand erect at the accurate right angle without an additional actuator for correcting the error in the driving angle of the micromirror so as to reduce insertion loss.

Abstract: A method of manufacturing a micromirror actuator includes forming a trench on a substrate by etching, laminating a film-type organic layer on the substrate to cover but not fill the trench so that the trench is maintained hollow, and depositing and patterning a metal layer on the film-type organic layer and removing the film-type organic layer. According to the method of manufacturing a micromirror actuator, a micromirror can be easily planarized by laminating the film-type organic layer on the substrate including the trench, which reduces the cost of manufacturing the micromirror actuator and increases a reflectivity of the micromirror actuator by increasing the flatness level of the micromirror so as to enhance an optical transmission efficiency.

Abstract: A micromirror actuator includes: a substrate; spring units elastically supported by protrusions formed on the substrate; a micromirror connected to the spring units and formed to be capable of rotating; trenches formed in the substrate at either side of the protrusions to correspond to the surface of the micromirror; and lower electrodes formed in each of the trenches. Accordingly, it is possible to expand the range of the driving angle of the micromirror with the use of a lower voltage.

Abstract: A microactuator includes a wafer; a lower electrode formed on an upper surface of the wafer; a side electrode formed on the upper surface of the wafer in a perpendicular relation with the lower electrode; a pair of supporting posts protruding from the upper surface of the wafer, spaced from the lower electrode at a predetermined distance, respectively; a reflector spaced from the side electrode at a predetermined distance, and facing the lower electrode; and a pair of torsion springs disposed between the reflector and the supporting posts, and elastically supporting the reflector enabling pivoting movement of the reflector. By employing the side electrode, the microactuator can be driven with a low voltage. Also, since the side electrode serves as a stopper, the microactuator can pivot the reflector at an exact desired angle, without having to use a separate device.

Abstract: A method for manufacturing a driving module of an ink jet apparatus. The driving module is manufactured by the steps of: forming a working fluid chamber etching a wafer, vapor-depositing a low electrode in the working fluid chamber, attaching a polyamide sheet on the wafer, forming a membrane etching of the polyamide sheet, and vapor-depositing an upper electrode on the membrane. The working fluid chamber is formed by a wet etching process, while the membrane is formed by a dry etching process. Since the membrane is manufactured together with the driving module, no additional processes for separately making the membrane are required, and accordingly, a process for attaching the membrane is not required. Further, there is no waste of wafers and other materials for making the membrane, and the membrane is made to be appropriately thin, thus the ink jet apparatus is driven efficiently even with low potential difference.

Abstract: A method of manufacturing a micromirror actuator includes forming a trench on a substrate by etching, laminating a film-type organic layer on the substrate to cover but not fill the trench so that the trench is maintained hollow, and depositing and patterning a metal layer on the film-type organic layer and removing the film-type organic layer. According to the method of manufacturing a micromirror actuator, a micromirror can be easily planarized by laminating the film-type organic layer on the substrate including the trench, which reduces the cost of manufacturing the micromirror actuator and increases a reflectivity of the micromirror actuator by increasing the flatness level of the micromirror so as to enhance an optical transmission efficiency.

Abstract: A microactuator includes a wafer; a lower electrode formed on an upper surface of the wafer; a side electrode formed on the upper surface of the wafer in a perpendicular relation with the lower electrode; a pair of supporting posts protruding from the upper surface of the wafer, spaced from the lower electrode at a predetermined distance, respectively; a reflector spaced from the side electrode at a predetermined distance, and facing the lower electrode; and a pair of torsion springs disposed between the reflector and the supporting posts, and elastically supporting the reflector enabling pivoting movement of the reflector. By employing the side electrode, the microactuator can be driven with a low voltage. Also, since the side electrode serves as a stopper, the microactuator can pivot the reflector at an exact desired angle, without having to use a separate device.

Abstract: An electrostatic attraction type inkjetting apparatus including aboard having an ink chamber for receiving ink and a nozzle hole extending from the ink chamber to the extreme end of the board and thus open at the extreme end of the board; a membrane laminated on the board; a lower electrode received in the ink chamber; and an upper electrode disposed on the outer surface of the membrane. By the electrostatic attraction generated during an electric potential difference application between the upper and lower electrodes, the membrane is deformed inward to the ink chamber to press the ink of the ink chamber. Thus, the ink is jetted outward through the nozzle hole. Since the membrane and the driving section are integrally formed with each other, the manufacturing process becomes simpler, and electrostatic attraction generation, and ink discharge are performed efficiently.

Abstract: An apparatus for jetting a fluid to an exterior through a nozzle by exerting a driving force to the fluid held within a jetting fluid chamber and method of manufacturing the same. The apparatus employs an electrostatic force as the driving force for a driving part which is to be exerted to the fluid. The driving part for exerting the driving force to the fluid has upper and lower electrodes which are oppositely spaced apart from each other at a predetermined distance. The upper electrode is disposed within the interior of a membrane. Here, the membrane forms the lower surface of the jetting fluid chamber. Accordingly, the membrane is driven by the upper electrode which is displaced upward and downward due to the electrostatic force generated between the upper and lower electrodes, so that the driving force is exerted to the fluid within the jetting fluid chamber, and the fluid is jetted to the exterior through the nozzle.

Abstract: A deformable mirror device for changing a proceeding path of an incident light includes a substrate, a pair of posts protruding from the upper surface of the substrate and spaced a predetermined distance from each other, an electrode formed on the upper surface of the substrate, a reflection mirror arranged to face the electrode by being supported by the posts, and first and second support pieces having predetermined rigidities for supporting the reflection mirror. The support pieces are connected between the reflection mirror and the posts so that an inclination of the reflection mirror can be adjusted by an electrostatic attraction between the electrode and the reflection mirror. The electrode is arranged to be offset from the reflection mirror such that a magnitude of the forces applied to the electrode at the positions between each of the first and second support pieces and the reflection mirror differ from each other.

Abstract: An actuator having an asymmetric rigid structure for changing an optical beam path. The actuator has a base plate installed in a cover, first electrodes installed on an upper surface of the base plate by evaporation, a driving electrode disposed between the first electrodes, a pair of support plates each installed on a respective one of the first electrodes for receiving a voltage from the first electrodes, a reflecting plate disposed between the pair of support plates for reflecting an incident beam emitted from a beam source, and asymmetric members connected to the reflecting plate for adjusting an incident path of the incident beam and an inclination angle of a reflection beam with respect to the incident beam. The actuator can easily adjust the incident path of the incident beam and an inclination angle of the reflection beam with respect to the incident beam by asymmetrically inclining the reflecting plate.