Patents by Inventor Yoshiaki Fukuzumi

Yoshiaki Fukuzumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210126011
    Abstract: A nonvolatile semiconductor memory device that have a new structure are provided, in which memory cells are laminated in a three dimensional state so that the chip area may be reduced. The nonvolatile semiconductor memory device of the present invention is a nonvolatile semiconductor memory device that has a plurality of the memory strings, in which a plurality of electrically programmable memory cells is connected in series. The memory strings comprise a pillar shaped semiconductor; a first insulation film formed around the pillar shaped semiconductor; a charge storage layer formed around the first insulation film; the second insulation film formed around the charge storage layer; and first or nth electrodes formed around the second insulation film (n is natural number more than 1). The first or nth electrodes of the memory strings and the other first or nth electrodes of the memory strings are respectively the first or nth conductor layers that are spread in a two dimensional state.
    Type: Application
    Filed: January 5, 2021
    Publication date: April 29, 2021
    Applicant: Kioxia Corporation
    Inventors: Masaru KITO, Hideaki AOCHI, Ryota KATSUMATA, Akihiro NITAYAMA, Masaru KIDOH, Hiroyasu TANAKA, Yoshiaki FUKUZUMI, Yasuyuki MATSUOKA, Mitsuru SATO
  • Publication number: 20210126012
    Abstract: A nonvolatile semiconductor memory device that have a new structure are provided, in which memory cells are laminated in a three dimensional state so that the chip area may be reduced. The nonvolatile semiconductor memory device of the present invention is a nonvolatile semiconductor memory device that has a plurality of the memory strings, in which a plurality of electrically programmable memory cells is connected in series. The memory strings comprise a pillar shaped semiconductor; a first insulation film formed around the pillar shaped semiconductor; a charge storage layer formed around the first insulation film; the second insulation film formed around the charge storage layer; and first or nth electrodes formed around the second insulation film (n is natural number more than 1). The first or nth electrodes of the memory strings and the other first or nth electrodes of the memory strings are respectively the first or nth conductor layers that are spread in a two dimensional state.
    Type: Application
    Filed: January 5, 2021
    Publication date: April 29, 2021
    Applicant: Kioxia Corporation
    Inventors: Masaru KITO, Hideaki AOCHI, Ryota KATSUMATA, Akihiro NITAYAMA, Masaru KIDOH, Hiroyasu TANAKA, Yoshiaki FUKUZUMI, Yasuyuki MATSUOKA, Mitsuru SATO
  • Publication number: 20210118898
    Abstract: According to one embodiment, the array chip includes a three-dimensionally disposed plurality of memory cells and a memory-side interconnection layer connected to the memory cells. The circuit chip includes a substrate, a control circuit provided on the substrate, and a circuit-side interconnection layer provided on the control circuit and connected to the control circuit. The circuit chip is stuck to the array chip with the circuit-side interconnection layer facing to the memory-side interconnection layer. The bonding metal is provided between the memory-side interconnection layer and the circuit-side interconnection layer. The bonding metal is bonded to the memory-side interconnection layer and the circuit-side interconnection layer.
    Type: Application
    Filed: December 7, 2020
    Publication date: April 22, 2021
    Applicant: Toshiba Memory Corporation
    Inventors: Yoshiaki FUKUZUMI, Hideaki AOCHI, Mie MATSUO, Kenichiro YOSHII, Koichiro SHINDO, Kazushige KAWASAKI, Tomoya SANUKI
  • Publication number: 20210111189
    Abstract: According to an embodiment, a non-volatile memory device includes first electrodes stacked on an underlying layer, a second electrode provided on the first electrodes, a semiconductor layer extending in a first direction from the underlying layer to the second electrode, and a memory film provided between each of the first electrodes and the semiconductor layer. The semiconductor layer includes a first portion adjacent to the first electrodes and a second portion adjacent to the second electrode. The second portion has a thickness thinner than a thickness of the first portion in a second direction perpendicular to the first direction.
    Type: Application
    Filed: December 21, 2020
    Publication date: April 15, 2021
    Applicant: Toshiba Memory Corporation
    Inventors: Takashi ISHIDA, Yoshiaki FUKUZUMI, Takayuki OKADA, Masaki TSUJI
  • Publication number: 20210098493
    Abstract: In an example of forming a stacked memory array, a stack of alternating first and second dielectrics is formed. A dielectric extension is formed through the stack such that a first portion of the dielectric extension is in a first region of the stack between a first group of semiconductor structures and a second group of semiconductor structures in a second region of the stack and a second portion of the dielectric extension extends into a third region of the stack that does not include the first and second semiconductor structures. An opening is formed through the first region, while the dielectric extension couples the alternating first and second dielectrics in the third region to the alternating first and second dielectrics in the second region.
    Type: Application
    Filed: December 14, 2020
    Publication date: April 1, 2021
    Inventors: Paolo Tessariol, Yoshiaki Fukuzumi
  • Publication number: 20210082942
    Abstract: According to one embodiment, the array chip includes a three-dimensionally disposed plurality of memory cells and a memory-side interconnection layer connected to the memory cells. The circuit chip includes a substrate, a control circuit provided on the substrate, and a circuit-side interconnection layer provided on the control circuit and connected to the control circuit. The circuit chip is stuck to the array chip with the circuit-side interconnection layer facing to the memory-side interconnection layer. The bonding metal is provided between the memory-side interconnection layer and the circuit-side interconnection layer. The bonding metal is bonded to the memory-side interconnection layer and the circuit-side interconnection layer.
    Type: Application
    Filed: November 30, 2020
    Publication date: March 18, 2021
    Applicant: Toshiba Memory Corporation
    Inventors: Yoshiaki FUKUZUMI, Hideaki AOCHI
  • Patent number: 10916562
    Abstract: According to an embodiment, a non-volatile memory device includes first electrodes stacked on an underlying layer, a second electrode provided on the first electrodes, a semiconductor layer extending in a first direction from the underlying layer to the second electrode, and a memory film provided between each of the first electrodes and the semiconductor layer. The semiconductor layer includes a first portion adjacent to the first electrodes and a second portion adjacent to the second electrode. The second portion has a thickness thinner than a thickness of the first portion in a second direction perpendicular to the first direction.
    Type: Grant
    Filed: May 14, 2019
    Date of Patent: February 9, 2021
    Assignee: Toshiba Memory Corporation
    Inventors: Takashi Ishida, Yoshiaki Fukuzumi, Takayuki Okada, Masaki Tsuji
  • Patent number: 10916559
    Abstract: A nonvolatile semiconductor memory device that have a new structure are provided, in which memory cells are laminated in a three dimensional state so that the chip area may be reduced. The nonvolatile semiconductor memory device of the present invention is a nonvolatile semiconductor memory device that has a plurality of the memory strings, in which a plurality of electrically programmable memory cells is connected in series. The memory strings comprise a pillar shaped semiconductor; a first insulation film formed around the pillar shaped semiconductor; a charge storage layer formed around the first insulation film; the second insulation film formed around the charge storage layer; and first or nth electrodes formed around the second insulation film (n is natural number more than 1). The first or nth electrodes of the memory strings and the other first or nth electrodes of the memory strings are respectively the first or nth conductor layers that are spread in a two dimensional state.
    Type: Grant
    Filed: January 11, 2019
    Date of Patent: February 9, 2021
    Assignee: Kioxia Corporation
    Inventors: Masaru Kito, Hideaki Aochi, Ryota Katsumata, Akihiro Nitayama, Masaru Kidoh, Hiroyasu Tanaka, Yoshiaki Fukuzumi, Yasuyuki Matsuoka, Mitsuru Sato
  • Patent number: 10892270
    Abstract: According to one embodiment, the array chip includes a three-dimensionally disposed plurality of memory cells and a memory-side interconnection layer connected to the memory cells. The circuit chip includes a substrate, a control circuit provided on the substrate, and a circuit-side interconnection layer provided on the control circuit and connected to the control circuit. The circuit chip is stuck to the array chip with the circuit-side interconnection layer facing to the memory-side interconnection layer. The bonding metal is provided between the memory-side interconnection layer and the circuit-side interconnection layer. The bonding metal is bonded to the memory-side interconnection layer and the circuit-side interconnection layer.
    Type: Grant
    Filed: July 11, 2019
    Date of Patent: January 12, 2021
    Assignee: Toshiba Memory Corporation
    Inventors: Yoshiaki Fukuzumi, Hideaki Aochi
  • Patent number: 10892269
    Abstract: According to one embodiment, the array chip includes a three-dimensionally disposed plurality of memory cells and a memory-side interconnection layer connected to the memory cells. The circuit chip includes a substrate, a control circuit provided on the substrate, and a circuit-side interconnection layer provided on the control circuit and connected to the control circuit. The circuit chip is stuck to the array chip with the circuit-side interconnection layer facing to the memory-side interconnection layer. The bonding metal is provided between the memory-side interconnection layer and the circuit-side interconnection layer. The bonding metal is bonded to the memory-side interconnection layer and the circuit-side interconnection layer.
    Type: Grant
    Filed: May 10, 2019
    Date of Patent: January 12, 2021
    Assignee: Toshiba Memory Corporation
    Inventors: Yoshiaki Fukuzumi, Hideaki Aochi, Mie Matsuo, Kenichiro Yoshii, Koichiro Shindo, Kazushige Kawasaki, Tomoya Sanuki
  • Patent number: 10868032
    Abstract: In an example of forming a stacked memory array, a stack of alternating first and second dielectrics is formed. A dielectric extension is formed through the stack such that a first portion of the dielectric extension is in a first region of the stack between a first group of semiconductor structures and a second group of semiconductor structures in a second region of the stack and a second portion of the dielectric extension extends into a third region of the stack that does not include the first and second semiconductor structures. An opening is formed through the first region, while the dielectric extension couples the alternating first and second dielectrics in the third region to the alternating first and second dielectrics in the second region.
    Type: Grant
    Filed: October 15, 2018
    Date of Patent: December 15, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Tessariol, Yoshiaki Fukuzumi
  • Publication number: 20200357820
    Abstract: According to an embodiment, a non-volatile memory device includes a first conductive layer, electrodes, an interconnection layer and at least one semiconductor layer. The electrodes are arranged between the first conductive layer and the interconnection layer in a first direction perpendicular to the first conductive layer. The interconnection layer includes a first interconnection and a second interconnection. The semiconductor layer extends through the electrodes in the first direction, and is electrically connected to the first conductive layer and the first interconnection. The device further includes a memory film between each of the electrodes and the semiconductor layer, and a conductive body extending in the first direction. The conductive body electrically connects the first conductive layer and the second interconnection, and includes a first portion and a second portion connected to the second interconnection. The second portion has a width wider than the first portion.
    Type: Application
    Filed: July 28, 2020
    Publication date: November 12, 2020
    Applicant: Toshiba Memory Corporation
    Inventors: Masaki TSUJI, Yoshiaki FUKUZUMI
  • Publication number: 20200335517
    Abstract: A semiconductor memory device includes a connecting member including a semiconductor material, a first electrode film, a first insulating film, a stacked body and three or more semiconductor pillars. The stacked body includes second electrode films and second insulating films that alternately stacked. The semiconductor pillars are arrayed along two or more directions, extend in a stacking direction, pierce through the stacked body and the first insulating film, and are connected to the connecting member. The device includes a third insulating film provided between the semiconductor pillars and the stacked body and between the connecting member and the first electrode film. A charge storage layer is provided at least between one of the second electrode films and the third insulating film.
    Type: Application
    Filed: July 1, 2020
    Publication date: October 22, 2020
    Applicant: Toshiba Memory Corporation
    Inventors: Yoshiaki FUKUZUMI, Shinya ARAI, Masaki TSUJI, Hideaki AOCHI, Hiroyasu TANAKA
  • Patent number: 10763279
    Abstract: According to an embodiment, a non-volatile memory device includes a first conductive layer, electrodes, an interconnection layer and at least one semiconductor layer. The electrodes are arranged between the first conductive layer and the interconnection layer in a first direction perpendicular to the first conductive layer. The interconnection layer includes a first interconnection and a second interconnection. The semiconductor layer extends through the electrodes in the first direction, and is electrically connected to the first conductive layer and the first interconnection. The device further includes a memory film between each of the electrodes and the semiconductor layer, and a conductive body extending in the first direction. The conductive body electrically connects the first conductive layer and the second interconnection, and includes a first portion and a second portion connected to the second interconnection. The second portion has a width wider than the first portion.
    Type: Grant
    Filed: March 21, 2019
    Date of Patent: September 1, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Masaki Tsuji, Yoshiaki Fukuzumi
  • Patent number: 10756105
    Abstract: A method used in forming a memory array comprises forming a tier comprising conductor material above a substrate. Sacrificial islands comprising etch-stop material are formed directly above the conductor material of the tier comprising the conductor material. A stack comprising vertically-alternating insulative tiers and wordline tiers is formed above the sacrificial islands and the tier comprising the conductor material. Etching is conducted through the insulative tiers and the wordline tiers to the etch-stop material of individual of the sacrificial islands to form channel openings that have individual bases comprising the etch-stop material. The sacrificial islands are removed through individual of the channel openings to extend the individual channel openings to the tier comprising the conductor material. Channel material is formed in the extended-channel openings to the tier comprising the conductor material.
    Type: Grant
    Filed: November 26, 2018
    Date of Patent: August 25, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Yoshiaki Fukuzumi, M. Jared Barclay, Emilio Camerlenghi, Paolo Tessariol
  • Patent number: 10741583
    Abstract: A semiconductor memory device includes a connecting member including a semiconductor material, a first electrode film, a first insulating film, a stacked body and three or more semiconductor pillars. The stacked body includes second electrode films and second insulating films that alternately stacked. The semiconductor pillars are arrayed along two or more directions, extend in a stacking direction, pierce through the stacked body and the first insulating film, and are connected to the connecting member. The device includes a third insulating film provided between the semiconductor pillars and the stacked body and between the connecting member and the first electrode film. A charge storage layer is provided at least between one of the second electrode films and the third insulating film.
    Type: Grant
    Filed: October 9, 2019
    Date of Patent: August 11, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Yoshiaki Fukuzumi, Shinya Arai, Masaki Tsuji, Hideaki Aochi, Hiroyasu Tanaka
  • Publication number: 20200243560
    Abstract: A nonvolatile semiconductor memory device, includes: a stacked structural unit including a plurality of insulating films alternately stacked with a plurality of electrode films in a first direction; a selection gate electrode stacked on the stacked structural unit in the first direction; an insulating layer stacked on the selection gate electrode in the first direction; a first semiconductor pillar piercing the stacked structural unit, the selection gate electrode, and the insulating layer in the first direction, a first cross section of the first semiconductor pillar having an annular configuration, the first cross section being cut in a plane orthogonal to the first direction; a first core unit buried in an inner side of the first semiconductor pillar, the first core unit being recessed from an upper face of the insulating layer; and a first conducting layer of the first semiconductor pillar provided on the first core unit to contact the first core unit.
    Type: Application
    Filed: April 15, 2020
    Publication date: July 30, 2020
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventors: Yoshiaki FUKUZUMI, Ryota Katsumata, Masaru Kito, Masaru Kidoh, Hiroyasu Tanaka, Yosuke Komori, Megumi Ishiduki, Junya Matsunami, Tomoko Fujiwara, Hideaki Aochi, Ryouhei Kirisawa, Yoshimasa Mikajiri, Shigeto Oota
  • Publication number: 20200168622
    Abstract: A method used in forming a memory array comprises forming a tier comprising conductor material above a substrate. Sacrificial islands comprising etch-stop material are formed directly above the conductor material of the tier comprising the conductor material. A stack comprising vertically-alternating insulative tiers and wordline tiers is formed above the sacrificial islands and the tier comprising the conductor material. Etching is conducted through the insulative tiers and the wordline tiers to the etch-stop material of individual of the sacrificial islands to form channel openings that have individual bases comprising the etch-stop material. The sacrificial islands are removed through individual of the channel openings to extend the individual channel openings to the tier comprising the conductor material. Channel material is formed in the extended-channel openings to the tier comprising the conductor material.
    Type: Application
    Filed: November 26, 2018
    Publication date: May 28, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Yoshiaki Fukuzumi, M. Jared Barclay, Emilio Camerlenghi, Paolo Tessariol
  • Patent number: 10658383
    Abstract: A nonvolatile semiconductor memory device, includes: a stacked structural unit including a plurality of insulating films alternately stacked with a plurality of electrode films in a first direction; a selection gate electrode stacked on the stacked structural unit in the first direction; an insulating layer stacked on the selection gate electrode in the first direction; a first semiconductor pillar piercing the stacked structural unit, the selection gate electrode, and the insulating layer in the first direction, a first cross section of the first semiconductor pillar having an annular configuration, the first cross section being cut in a plane orthogonal to the first direction; a first core unit buried in an inner side of the first semiconductor pillar, the first core unit being recessed from an upper face of the insulating layer; and a first conducting layer of the first semiconductor pillar provided on the first core unit to contact the first core unit.
    Type: Grant
    Filed: July 23, 2019
    Date of Patent: May 19, 2020
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Yoshiaki Fukuzumi, Ryota Katsumata, Masaru Kito, Masaru Kidoh, Hiroyasu Tanaka, Yosuke Komori, Megumi Ishiduki, Junya Matsunami, Tomoko Fujiwara, Hideaki Aochi, Ryouhei Kirisawa, Yoshimasa Mikajiri, Shigeto Oota
  • Patent number: RE48191
    Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes a substrate, a stacked body, a semiconductor pillar, a charge storage film, and a drive circuit. The stacked body is provided on the substrate. The stacked body includes a plurality of insulating films alternately stacked with a plurality of electrode films. A through-hole is made in the stacked body to align in a stacking direction. The semiconductor pillar is buried in an interior of the through-hole. The charge storage film is provided between the electrode film and the semiconductor pillar. The drive circuit supplies a potential to the electrode film. The diameter of the through-hole differs by a position in the stacking direction. The drive circuit supplies a potential to reduce a potential difference with the semiconductor pillar as a diameter of the through-hole piercing the electrode film decreases.
    Type: Grant
    Filed: February 6, 2018
    Date of Patent: September 1, 2020
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Ryota Katsumata, Hideaki Aochi, Hiroyasu Tanaka, Masaru Kito, Yoshiaki Fukuzumi, Masaru Kidoh, Yosuke Komori, Megumi Ishiduki, Junya Matsunami, Tomoko Fujiwara, Ryouhei Kirisawa, Yoshimasa Mikajiri, Shigeto Oota