Patents by Inventor Yoshiaki Fukuzumi
Yoshiaki Fukuzumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20210288073Abstract: A semiconductor memory device includes a connecting member including a semiconductor material, a first electrode film, a first insulating film, a stacked body and three or more semiconductor pillars. The stacked body includes second electrode films and second insulating films that alternately stacked. The semiconductor pillars are arrayed along two or more directions, extend in a stacking direction, pierce through the stacked body and the first insulating film, and are connected to the connecting member. The device includes a third insulating film provided between the semiconductor pillars and the stacked body and between the connecting member and the first electrode film. A charge storage layer is provided at least between one of the second electrode films and the third insulating film.Type: ApplicationFiled: June 1, 2021Publication date: September 16, 2021Applicant: Toshiba Memory CorporationInventors: Yoshiaki FUKUZUMI, Shinya ARAI, Masaki TSUJI, Hideaki AOCHI, Hiroyasu TANAKA
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Publication number: 20210217768Abstract: Some embodiments include a method of forming a memory device. An assembly is formed to have channel structures extending through a stack of alternating insulative and conductive levels and into a first material under the stack. The assembly is inverted so that the first material is above the stack, and so that first regions of the channel structures are under the stack. At least some of the first regions are electrically coupled with control circuitry. At least some of the first material is removed, and second regions of the channel structures are exposed. Conductively-doped semiconductor material is formed adjacent the exposed second regions of the channel structures. Dopant is out-diffused from the conductively-doped semiconductor material into the channel structures. Some embodiments include memory devices (e.g., NAND memory assemblies).Type: ApplicationFiled: January 15, 2020Publication date: July 15, 2021Applicant: Micron Technology, Inc.Inventors: Yoshiaki Fukuzumi, Akira Goda
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Patent number: 11063064Abstract: A semiconductor memory device includes a connecting member including a semiconductor material, a first electrode film, a first insulating film, a stacked body and three or more semiconductor pillars. The stacked body includes second electrode films and second insulating films that alternately stacked. The semiconductor pillars are arrayed along two or more directions, extend in a stacking direction, pierce through the stacked body and the first insulating film, and are connected to the connecting member. The device includes a third insulating film provided between the semiconductor pillars and the stacked body and between the connecting member and the first electrode film. A charge storage layer is provided at least between one of the second electrode films and the third insulating film.Type: GrantFiled: July 1, 2020Date of Patent: July 13, 2021Assignee: Toshiba Memory CorporationInventors: Yoshiaki Fukuzumi, Shinya Arai, Masaki Tsuji, Hideaki Aochi, Hiroyasu Tanaka
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Publication number: 20210126012Abstract: A nonvolatile semiconductor memory device that have a new structure are provided, in which memory cells are laminated in a three dimensional state so that the chip area may be reduced. The nonvolatile semiconductor memory device of the present invention is a nonvolatile semiconductor memory device that has a plurality of the memory strings, in which a plurality of electrically programmable memory cells is connected in series. The memory strings comprise a pillar shaped semiconductor; a first insulation film formed around the pillar shaped semiconductor; a charge storage layer formed around the first insulation film; the second insulation film formed around the charge storage layer; and first or nth electrodes formed around the second insulation film (n is natural number more than 1). The first or nth electrodes of the memory strings and the other first or nth electrodes of the memory strings are respectively the first or nth conductor layers that are spread in a two dimensional state.Type: ApplicationFiled: January 5, 2021Publication date: April 29, 2021Applicant: Kioxia CorporationInventors: Masaru KITO, Hideaki AOCHI, Ryota KATSUMATA, Akihiro NITAYAMA, Masaru KIDOH, Hiroyasu TANAKA, Yoshiaki FUKUZUMI, Yasuyuki MATSUOKA, Mitsuru SATO
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Publication number: 20210126011Abstract: A nonvolatile semiconductor memory device that have a new structure are provided, in which memory cells are laminated in a three dimensional state so that the chip area may be reduced. The nonvolatile semiconductor memory device of the present invention is a nonvolatile semiconductor memory device that has a plurality of the memory strings, in which a plurality of electrically programmable memory cells is connected in series. The memory strings comprise a pillar shaped semiconductor; a first insulation film formed around the pillar shaped semiconductor; a charge storage layer formed around the first insulation film; the second insulation film formed around the charge storage layer; and first or nth electrodes formed around the second insulation film (n is natural number more than 1). The first or nth electrodes of the memory strings and the other first or nth electrodes of the memory strings are respectively the first or nth conductor layers that are spread in a two dimensional state.Type: ApplicationFiled: January 5, 2021Publication date: April 29, 2021Applicant: Kioxia CorporationInventors: Masaru KITO, Hideaki AOCHI, Ryota KATSUMATA, Akihiro NITAYAMA, Masaru KIDOH, Hiroyasu TANAKA, Yoshiaki FUKUZUMI, Yasuyuki MATSUOKA, Mitsuru SATO
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Publication number: 20210118898Abstract: According to one embodiment, the array chip includes a three-dimensionally disposed plurality of memory cells and a memory-side interconnection layer connected to the memory cells. The circuit chip includes a substrate, a control circuit provided on the substrate, and a circuit-side interconnection layer provided on the control circuit and connected to the control circuit. The circuit chip is stuck to the array chip with the circuit-side interconnection layer facing to the memory-side interconnection layer. The bonding metal is provided between the memory-side interconnection layer and the circuit-side interconnection layer. The bonding metal is bonded to the memory-side interconnection layer and the circuit-side interconnection layer.Type: ApplicationFiled: December 7, 2020Publication date: April 22, 2021Applicant: Toshiba Memory CorporationInventors: Yoshiaki FUKUZUMI, Hideaki AOCHI, Mie MATSUO, Kenichiro YOSHII, Koichiro SHINDO, Kazushige KAWASAKI, Tomoya SANUKI
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Publication number: 20210111189Abstract: According to an embodiment, a non-volatile memory device includes first electrodes stacked on an underlying layer, a second electrode provided on the first electrodes, a semiconductor layer extending in a first direction from the underlying layer to the second electrode, and a memory film provided between each of the first electrodes and the semiconductor layer. The semiconductor layer includes a first portion adjacent to the first electrodes and a second portion adjacent to the second electrode. The second portion has a thickness thinner than a thickness of the first portion in a second direction perpendicular to the first direction.Type: ApplicationFiled: December 21, 2020Publication date: April 15, 2021Applicant: Toshiba Memory CorporationInventors: Takashi ISHIDA, Yoshiaki FUKUZUMI, Takayuki OKADA, Masaki TSUJI
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Publication number: 20210098493Abstract: In an example of forming a stacked memory array, a stack of alternating first and second dielectrics is formed. A dielectric extension is formed through the stack such that a first portion of the dielectric extension is in a first region of the stack between a first group of semiconductor structures and a second group of semiconductor structures in a second region of the stack and a second portion of the dielectric extension extends into a third region of the stack that does not include the first and second semiconductor structures. An opening is formed through the first region, while the dielectric extension couples the alternating first and second dielectrics in the third region to the alternating first and second dielectrics in the second region.Type: ApplicationFiled: December 14, 2020Publication date: April 1, 2021Inventors: Paolo Tessariol, Yoshiaki Fukuzumi
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Publication number: 20210082942Abstract: According to one embodiment, the array chip includes a three-dimensionally disposed plurality of memory cells and a memory-side interconnection layer connected to the memory cells. The circuit chip includes a substrate, a control circuit provided on the substrate, and a circuit-side interconnection layer provided on the control circuit and connected to the control circuit. The circuit chip is stuck to the array chip with the circuit-side interconnection layer facing to the memory-side interconnection layer. The bonding metal is provided between the memory-side interconnection layer and the circuit-side interconnection layer. The bonding metal is bonded to the memory-side interconnection layer and the circuit-side interconnection layer.Type: ApplicationFiled: November 30, 2020Publication date: March 18, 2021Applicant: Toshiba Memory CorporationInventors: Yoshiaki FUKUZUMI, Hideaki AOCHI
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Patent number: 10916562Abstract: According to an embodiment, a non-volatile memory device includes first electrodes stacked on an underlying layer, a second electrode provided on the first electrodes, a semiconductor layer extending in a first direction from the underlying layer to the second electrode, and a memory film provided between each of the first electrodes and the semiconductor layer. The semiconductor layer includes a first portion adjacent to the first electrodes and a second portion adjacent to the second electrode. The second portion has a thickness thinner than a thickness of the first portion in a second direction perpendicular to the first direction.Type: GrantFiled: May 14, 2019Date of Patent: February 9, 2021Assignee: Toshiba Memory CorporationInventors: Takashi Ishida, Yoshiaki Fukuzumi, Takayuki Okada, Masaki Tsuji
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Patent number: 10916559Abstract: A nonvolatile semiconductor memory device that have a new structure are provided, in which memory cells are laminated in a three dimensional state so that the chip area may be reduced. The nonvolatile semiconductor memory device of the present invention is a nonvolatile semiconductor memory device that has a plurality of the memory strings, in which a plurality of electrically programmable memory cells is connected in series. The memory strings comprise a pillar shaped semiconductor; a first insulation film formed around the pillar shaped semiconductor; a charge storage layer formed around the first insulation film; the second insulation film formed around the charge storage layer; and first or nth electrodes formed around the second insulation film (n is natural number more than 1). The first or nth electrodes of the memory strings and the other first or nth electrodes of the memory strings are respectively the first or nth conductor layers that are spread in a two dimensional state.Type: GrantFiled: January 11, 2019Date of Patent: February 9, 2021Assignee: Kioxia CorporationInventors: Masaru Kito, Hideaki Aochi, Ryota Katsumata, Akihiro Nitayama, Masaru Kidoh, Hiroyasu Tanaka, Yoshiaki Fukuzumi, Yasuyuki Matsuoka, Mitsuru Sato
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Patent number: 10892269Abstract: According to one embodiment, the array chip includes a three-dimensionally disposed plurality of memory cells and a memory-side interconnection layer connected to the memory cells. The circuit chip includes a substrate, a control circuit provided on the substrate, and a circuit-side interconnection layer provided on the control circuit and connected to the control circuit. The circuit chip is stuck to the array chip with the circuit-side interconnection layer facing to the memory-side interconnection layer. The bonding metal is provided between the memory-side interconnection layer and the circuit-side interconnection layer. The bonding metal is bonded to the memory-side interconnection layer and the circuit-side interconnection layer.Type: GrantFiled: May 10, 2019Date of Patent: January 12, 2021Assignee: Toshiba Memory CorporationInventors: Yoshiaki Fukuzumi, Hideaki Aochi, Mie Matsuo, Kenichiro Yoshii, Koichiro Shindo, Kazushige Kawasaki, Tomoya Sanuki
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Patent number: 10892270Abstract: According to one embodiment, the array chip includes a three-dimensionally disposed plurality of memory cells and a memory-side interconnection layer connected to the memory cells. The circuit chip includes a substrate, a control circuit provided on the substrate, and a circuit-side interconnection layer provided on the control circuit and connected to the control circuit. The circuit chip is stuck to the array chip with the circuit-side interconnection layer facing to the memory-side interconnection layer. The bonding metal is provided between the memory-side interconnection layer and the circuit-side interconnection layer. The bonding metal is bonded to the memory-side interconnection layer and the circuit-side interconnection layer.Type: GrantFiled: July 11, 2019Date of Patent: January 12, 2021Assignee: Toshiba Memory CorporationInventors: Yoshiaki Fukuzumi, Hideaki Aochi
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Patent number: 10868032Abstract: In an example of forming a stacked memory array, a stack of alternating first and second dielectrics is formed. A dielectric extension is formed through the stack such that a first portion of the dielectric extension is in a first region of the stack between a first group of semiconductor structures and a second group of semiconductor structures in a second region of the stack and a second portion of the dielectric extension extends into a third region of the stack that does not include the first and second semiconductor structures. An opening is formed through the first region, while the dielectric extension couples the alternating first and second dielectrics in the third region to the alternating first and second dielectrics in the second region.Type: GrantFiled: October 15, 2018Date of Patent: December 15, 2020Assignee: Micron Technology, Inc.Inventors: Paolo Tessariol, Yoshiaki Fukuzumi
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Publication number: 20200357820Abstract: According to an embodiment, a non-volatile memory device includes a first conductive layer, electrodes, an interconnection layer and at least one semiconductor layer. The electrodes are arranged between the first conductive layer and the interconnection layer in a first direction perpendicular to the first conductive layer. The interconnection layer includes a first interconnection and a second interconnection. The semiconductor layer extends through the electrodes in the first direction, and is electrically connected to the first conductive layer and the first interconnection. The device further includes a memory film between each of the electrodes and the semiconductor layer, and a conductive body extending in the first direction. The conductive body electrically connects the first conductive layer and the second interconnection, and includes a first portion and a second portion connected to the second interconnection. The second portion has a width wider than the first portion.Type: ApplicationFiled: July 28, 2020Publication date: November 12, 2020Applicant: Toshiba Memory CorporationInventors: Masaki TSUJI, Yoshiaki FUKUZUMI
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Publication number: 20200335517Abstract: A semiconductor memory device includes a connecting member including a semiconductor material, a first electrode film, a first insulating film, a stacked body and three or more semiconductor pillars. The stacked body includes second electrode films and second insulating films that alternately stacked. The semiconductor pillars are arrayed along two or more directions, extend in a stacking direction, pierce through the stacked body and the first insulating film, and are connected to the connecting member. The device includes a third insulating film provided between the semiconductor pillars and the stacked body and between the connecting member and the first electrode film. A charge storage layer is provided at least between one of the second electrode films and the third insulating film.Type: ApplicationFiled: July 1, 2020Publication date: October 22, 2020Applicant: Toshiba Memory CorporationInventors: Yoshiaki FUKUZUMI, Shinya ARAI, Masaki TSUJI, Hideaki AOCHI, Hiroyasu TANAKA
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Patent number: 10763279Abstract: According to an embodiment, a non-volatile memory device includes a first conductive layer, electrodes, an interconnection layer and at least one semiconductor layer. The electrodes are arranged between the first conductive layer and the interconnection layer in a first direction perpendicular to the first conductive layer. The interconnection layer includes a first interconnection and a second interconnection. The semiconductor layer extends through the electrodes in the first direction, and is electrically connected to the first conductive layer and the first interconnection. The device further includes a memory film between each of the electrodes and the semiconductor layer, and a conductive body extending in the first direction. The conductive body electrically connects the first conductive layer and the second interconnection, and includes a first portion and a second portion connected to the second interconnection. The second portion has a width wider than the first portion.Type: GrantFiled: March 21, 2019Date of Patent: September 1, 2020Assignee: Toshiba Memory CorporationInventors: Masaki Tsuji, Yoshiaki Fukuzumi
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Patent number: 10756105Abstract: A method used in forming a memory array comprises forming a tier comprising conductor material above a substrate. Sacrificial islands comprising etch-stop material are formed directly above the conductor material of the tier comprising the conductor material. A stack comprising vertically-alternating insulative tiers and wordline tiers is formed above the sacrificial islands and the tier comprising the conductor material. Etching is conducted through the insulative tiers and the wordline tiers to the etch-stop material of individual of the sacrificial islands to form channel openings that have individual bases comprising the etch-stop material. The sacrificial islands are removed through individual of the channel openings to extend the individual channel openings to the tier comprising the conductor material. Channel material is formed in the extended-channel openings to the tier comprising the conductor material.Type: GrantFiled: November 26, 2018Date of Patent: August 25, 2020Assignee: Micron Technology, Inc.Inventors: Yoshiaki Fukuzumi, M. Jared Barclay, Emilio Camerlenghi, Paolo Tessariol
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Patent number: 10741583Abstract: A semiconductor memory device includes a connecting member including a semiconductor material, a first electrode film, a first insulating film, a stacked body and three or more semiconductor pillars. The stacked body includes second electrode films and second insulating films that alternately stacked. The semiconductor pillars are arrayed along two or more directions, extend in a stacking direction, pierce through the stacked body and the first insulating film, and are connected to the connecting member. The device includes a third insulating film provided between the semiconductor pillars and the stacked body and between the connecting member and the first electrode film. A charge storage layer is provided at least between one of the second electrode films and the third insulating film.Type: GrantFiled: October 9, 2019Date of Patent: August 11, 2020Assignee: Toshiba Memory CorporationInventors: Yoshiaki Fukuzumi, Shinya Arai, Masaki Tsuji, Hideaki Aochi, Hiroyasu Tanaka
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Patent number: RE48191Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes a substrate, a stacked body, a semiconductor pillar, a charge storage film, and a drive circuit. The stacked body is provided on the substrate. The stacked body includes a plurality of insulating films alternately stacked with a plurality of electrode films. A through-hole is made in the stacked body to align in a stacking direction. The semiconductor pillar is buried in an interior of the through-hole. The charge storage film is provided between the electrode film and the semiconductor pillar. The drive circuit supplies a potential to the electrode film. The diameter of the through-hole differs by a position in the stacking direction. The drive circuit supplies a potential to reduce a potential difference with the semiconductor pillar as a diameter of the through-hole piercing the electrode film decreases.Type: GrantFiled: February 6, 2018Date of Patent: September 1, 2020Assignee: TOSHIBA MEMORY CORPORATIONInventors: Ryota Katsumata, Hideaki Aochi, Hiroyasu Tanaka, Masaru Kito, Yoshiaki Fukuzumi, Masaru Kidoh, Yosuke Komori, Megumi Ishiduki, Junya Matsunami, Tomoko Fujiwara, Ryouhei Kirisawa, Yoshimasa Mikajiri, Shigeto Oota