Patents by Inventor Yoshiaki Kamigaki
Yoshiaki Kamigaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Method for forming nonvolatile memory device including insulating film containing nitrogen (nitride)
Patent number: 7166508Abstract: A nonvolatile memory device has a plurality of nonvolatile memory cells in which a memory gate electrode is formed over a first semiconductor region with a gate insulating film and a gate nitride film interposed therebetween. First and second switch gate electrodes, and first and second signal electrodes used as source/drain electrodes are formed on both sides of the memory gate electrode. Electrons are injected into the gate nitride film from the source side to store information in the memory cells. The memory gate electrode and the switch gate electrodes extend in the same direction. The application of a high electric field to a memory cell which is not selected for writing can be avoided owing to the switch gate electrodes being held in a cut-off state.Type: GrantFiled: June 29, 2004Date of Patent: January 23, 2007Assignee: Renesas Technology Corp.Inventors: Kozo Katayama, Yoshiaki Kamigaki, Shinichi Minami -
Publication number: 20060220100Abstract: A semiconductor device includes a plurality of nonvolatile memory cells (1). Each of the nonvolatile memory cells comprises a MOS type first transistor section (3) used for information storage, and a MOS type second transistor section (4) which selects the first transistor section. The second transistor section has a bit line electrode (16) connected to a bit line, and a control gate electrode (18) connected to a control gate control line. The first transistor section has a source line electrode (10) connected to a source line, a memory gate electrode (14) connected to a memory gate control line, and a charge storage region (11) disposed directly below the memory gate electrode. A gate withstand voltage of the second transistor section is lower than that of the first transistor section.Type: ApplicationFiled: May 2, 2006Publication date: October 5, 2006Inventors: Toshihiro Tanaka, Yukiko Umemoto, Mitsuru Hiraki, Yutaka Shinagawa, Masamichi Fujito, Kazufumi Suzukawa, Hiroyuki Tanikawa, Takashi Yamaki, Yoshiaki Kamigaki, Shinichi Minami, Kozo Katayama, Nozomu Matsuzaki
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Publication number: 20060172482Abstract: A semiconductor memory device having nonvolatile memory cells each formed of a MISFET having both a floating gate and a control gate and first and second semiconductor regions serving as the source and drain regions, respectively. In accordance with the method of manufacture thereof, an impurity, for example, arsenic, is introduced to form both the first and second semiconductor regions but with the second semiconductor region having a lower dose thereof so that the first semiconductor region formed attains a junction depth greater than that of the second semiconductor region, and both the first and second semiconductor regions have portions thereof extending under the floating gate electrode. The device and method therefor further feature the formation of MISFETs of peripheral circuits.Type: ApplicationFiled: March 31, 2006Publication date: August 3, 2006Inventors: Kazuhiro Komori, Toshiaki Nishimoto, Satoshi Meguro, Hitoshi Kume, Yoshiaki Kamigaki
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Patent number: 7071050Abstract: A semiconductor memory device having nonvolatile memory cells each formed of a MISFET having both a floating gate and a control gate and first and second semiconductor regions serving as the source and drain regions, respectively. In accordance with the method of manufacture thereof, an impurity, for example, arsenic, is introduced to form both the first and second semiconductor regions but with the second semiconductor region having a lower dose thereof so that the first semiconductor region formed attains a junction depth greater than that of the second semiconductor region, and both the first and second semiconductor regions have portions thereof extending under the floating gate electrode. The device and method therefor further feature the formation of MISFETs of peripheral circuits.Type: GrantFiled: September 8, 2005Date of Patent: July 4, 2006Assignee: Hitachi, Ltd.Inventors: Kazuhiro Komori, Toshiaki Nishimoto, Satoshi Meguro, Hitoshi Kume, Yoshiaki Kamigaki
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Patent number: 7064090Abstract: A manufacturing technique for a zener diode which includes forming a first semiconductor region in a region such as a well region at a primary face of a semiconductor substrate and then forming a second semiconductor region of opposite conductivity type thereover. The second semiconductor region covers an area greater than the underlying first semiconductor region. The method further calls for forming an insulating film on the primary face of the substrate followed by the forming connection holes in the insulating film to expose an upper part of the second semiconductor region located outside the area covered by the junction affected between the first and second semiconductor regions. This is followed by the formation of a wire at the upper part of the insulating film in which an electrical connection is affected between the wire and the second semiconductor region through the plural connection holes which are distributively arranged.Type: GrantFiled: September 17, 2004Date of Patent: June 20, 2006Assignee: Hitachi, Ltd.Inventors: Shinichi Minami, Yoshiaki Kamigaki, Hideki Yasuoka, Fukuo Owada
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Patent number: 7057230Abstract: A semiconductor device includes a plurality of nonvolatile memory cells (1). Each of the nonvolatile memory cells comprises a MOS type first transistor section (3) used for information storage, and a MOS type second transistor section (4) which selects the first transistor section. The second transistor section has a bit line electrode (16) connected to a bit line, and a control gate electrode (18) connected to a control gate control line. The first transistor section has a source line electrode (10) connected to a source line, a memory gate electrode (14) connected to a memory gate control line, and a charge storage region (11) disposed directly below the memory gate electrode. A gate withstand voltage of the second transistor section is lower than that of the first transistor section.Type: GrantFiled: July 22, 2002Date of Patent: June 6, 2006Assignees: Renesas Technology Corp., Hitachi ULSI Systems Co., Ltd.Inventors: Toshihiro Tanaka, Yukiko Umemoto, Mitsuru Hiraki, Yutaka Shinagawa, Masamichi Fujito, Kazufumi Suzukawa, Hiroyuki Tanikawa, Takashi Yamaki, Yoshiaki Kamigaki, Shinichi Minami, Kozo Katayama, Nozomu Matsuzaki
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Publication number: 20060102967Abstract: A multi-storage nonvolatile memory of high density, high speed and high reliability has a memory transistor and switch transistors disposed on both the sides of the memory transistor. The memory transistor includes a gate insulating film having discrete traps and a memory gate electrode, whereas the switch transistors include switch gate electrodes. The gate insulating film has the discrete traps for storing information charge, can locally inject carriers, and one memory cell constitutes a multi-storage cell for storing at least information of 2 bits. The switch transistors having the switch gate electrodes realize source side injection. The memory transistor is fommed together with the switch transistors in self-aligned diffusion. The memory gate electrode of the memory transistor is connected to a word line so as to perform word-line erase.Type: ApplicationFiled: December 30, 2005Publication date: May 18, 2006Inventors: Yoshiaki Kamigaki, Shinichi Minami, Kozo Katayama, Masataka Kato
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Patent number: 7012296Abstract: A multi-storage nonvolatile memory of high density, high speed and high reliability has a memory transistor and switch transistors disposed on both the sides of the memory transistor. The memory transistor includes a gate insulating film having discrete traps and a memory gate electrode, whereas the switch transistors include switch gate electrodes. The gate insulating film has the discrete traps for storing information charge, can locally inject carriers, and one memory cell constitutes a multi-storage cell for storing at least information of 2 bits. The switch transistors having the switch gate electrodes realize source side injection. The memory transistor is fommed together with the switch transistors in self-aligned diffusion. The memory gate electrode of the memory transistor is connected to a word line so as to perform word-line erase.Type: GrantFiled: May 11, 2005Date of Patent: March 14, 2006Assignee: Renesas Technology Corp.Inventors: Yoshiaki Kamigaki, Shinichi Minami, Kozo Katayama, Masataka Kato
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Publication number: 20060014347Abstract: A semiconductor memory device having nonvolatile memory cells each formed of a MISFET having both a floating gate and a control gate and first and second semiconductor regions serving as the source and drain regions, respectively. In accordance with the method of manufacture thereof, an impurity, for example, arsenic, is introduced to form both the first and second semiconductor regions but with the second semiconductor region having a lower dose thereof so that the first semiconductor region formed attains a junction depth greater than that of the second semiconductor region, and both the first and second semiconductor regions have portions thereof extending under the floating gate electrode. The device and method therefor further feature the formation of MISFETs of peripheral circuits.Type: ApplicationFiled: September 8, 2005Publication date: January 19, 2006Inventors: Kazuhiro Komori, Toshiaki Nishimoto, Satoshi Meguro, Hitoshi Kume, Yoshiaki Kamigaki
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Publication number: 20050258474Abstract: A semiconductor device includes a plurality of nonvolatile memory cells (1). Each of the nonvolatile memory cells comprises a MOS type first transistor section (3) used for information storage, and a MOS type second transistor section (4) which selects the first transistor section. The second transistor section has a bit line electrode (16) connected to a bit line, and a control gate electrode (18) connected to a control gate control line. The first transistor section has a source line electrode (10) connected to a source line, a memory gate electrode (14) connected to a memory gate control line, and a charge storage region (11) disposed directly below the memory gate electrode. A gate withstand voltage of the second transistor section is lower than that of the first transistor section.Type: ApplicationFiled: July 22, 2002Publication date: November 24, 2005Inventors: Toshihiro Tanaka, Yukiko Umemoto, Mitsuru Hiraki, Yutaka Shinagawa, Masamichi Fujito, Kazufumi Suzukawa, Hiroyuki Tanikawa, Takashi Yamaki, Yoshiaki Kamigaki, Shinichi Minami, Kozo Katayama, Nozomu Matsuzaki
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Patent number: 6960501Abstract: A semiconductor memory device having nonvolatile memory cells each formed of a MISFET having both a floating gate and a control gate and first and second semiconductor regions serving as the source and drain regions, respectively. In accordance with the method of manufacture thereof, an impurity, for example, arsenic, is introduced to form both the first and second semiconductor regions but with the second semiconductor region having a lower dose thereof so that the first semiconductor region formed attains a junction depth greater than that of the second semiconductor region, and both the first and second semiconductor regions have portions thereof extending under the floating gate electrode. The device and method therefor further feature the formation of MISFETs of peripheral circuits.Type: GrantFiled: April 7, 2004Date of Patent: November 1, 2005Assignee: Renesas Technology Corp.Inventors: Kazuhiro Komori, Toshiaki Nishimoto, Satoshi Meguro, Hitoshi Kume, Yoshiaki Kamigaki
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Publication number: 20050219900Abstract: A multi-storage nonvolatile memory of high density, high speed and high reliability has a memory transistor and switch transistors disposed on both the sides of the memory transistor. The memory transistor includes a gate insulating film having discrete traps and a memory gate electrode, whereas the switch transistors include switch gate electrodes. The gate insulating film has the discrete traps for storing information charge, can locally inject carriers, and one memory cell constitutes a multi-storage cell for storing at least information of 2 bits. The switch transistors having the switch gate electrodes realize source side injection. The memory transistor is fommed together with the switch transistors in self-aligned diffusion. The memory gate electrode of the memory transistor is connected to a word line so as to perform word-line erase.Type: ApplicationFiled: May 11, 2005Publication date: October 6, 2005Inventors: Yoshiaki Kamigaki, Shinichi Minami, Kozo Katayama, Masataka Kato
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Patent number: 6936888Abstract: A nonvolatile memory device has a plurality of nonvolatile memory cells in which a memory gate electrode is formed over a first semiconductor region with a gate insulating film and a gate nitride film interposed therebetween. First and second switch gate electrodes, and first and second signal electrodes used as source/drain electrodes are formed on both sides of the memory gate electrode. Electrons are injected into the gate nitride film from the source side to store information in the memory cells. The memory gate electrode and the switch gate electrodes extend in the same direction. The application of a high electric field to a memory cell which is not selected for writing can be avoided owing to the switch gate electrodes being held in a cut-off state.Type: GrantFiled: October 2, 2003Date of Patent: August 30, 2005Assignee: Renesas Technology Corp.Inventors: Kozo Katayama, Yoshiaki Kamigaki, Shinichi Minami
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Patent number: 6894344Abstract: A multi-storage nonvolatile memory of high density, high speed and high reliability has a memory transistor and switch transistors disposed on both the sides of the memory transistor. The memory transistor includes a gate insulating film having discrete traps and a memory gate electrode, whereas the switch transistors include switch gate electrodes. The gate insulating film has the discrete traps for storing information charge, can locally inject carriers, and one memory cell constitutes a multi-storage cell for storing at least information of 2 bits. The switch transistors having the switch gate electrodes realize source side injection. The memory transistor is fommed together with the switch transistors in self-aligned diffusion. The memory gate electrode of the memory transistor is connected to a word line so as to perform word-line erase.Type: GrantFiled: September 17, 2003Date of Patent: May 17, 2005Assignee: Renesas Technology Corp.Inventors: Yoshiaki Kamigaki, Shinichi Minami, Kozo Katayama, Masataka Kato
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Publication number: 20050032298Abstract: A manufacturing technique for a zener diode which includes forming a first semiconductor region in a region such as a well region at a primary face of a semiconductor substrate and then forming a second semiconductor region of opposite conductivity type thereover. The second semiconductor region covers an area greater than the underlying first semiconductor region. The method further calls for forming an insulating film on the primary face of the substrate followed by the forming connection holes in the insulating film to expose an upper part of the second semiconductor region located outside the area covered by the junction affected between the first and second semiconductor regions. This is followed by the formation of a wire at the upper part of the insulating film in which an electrical connection is affected between the wire and the second semiconductor region through the plural connection holes which are distributively arranged.Type: ApplicationFiled: September 17, 2004Publication date: February 10, 2005Inventors: Shinichi Minami, Yoshiaki Kamigaki, Hideki Yasuoka, Fukuo Owada
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Publication number: 20040241944Abstract: Disclosed herein is a nonvolatile memory device having a plurality of nonvolatile memory cells. In the nonvolatile memory cell, a memory gate electrode is formed over a first semiconductor region with a gate insulating film and a gate nitride film interposed therebetween. First and second switch gate electrodes, and first and second signal electrodes used as source/drain electrodes are formed on both sides of the memory gate electrode. Electrons are injected into the gate nitride film from the source side so that each of the memory cells stores information therein. The memory gate electrode and the switch gate electrodes extend in the same direction.Type: ApplicationFiled: June 29, 2004Publication date: December 2, 2004Applicant: Renesas Technology Corp.Inventors: Kozo Katayama, Yoshiaki Kamigaki, Shinichi Minami
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Patent number: 6803644Abstract: A plurality of connection holes 24 for connecting n+ type semiconductor region 20 of zener diodes (D1, D2) and wires 21 and 22 to each other are not arranged in the center of the n+ type semiconductor region 20, that is, in a region in which a p+ type semiconductor region 6 and the n+ type semiconductor region 20 form a junction but is arranged in the periphery which is deeper than the center in junction depth. In addition, these connection holes 24 are spaced from each other so that a pitch between the adjacent connection holes 24 is greater than a minimum pitch between connection holes of the circuit, and thereby a substrate shaving quantity is reduced when the respective connection holes 24 are formed by means of dry etching.Type: GrantFiled: January 25, 2001Date of Patent: October 12, 2004Assignee: Renesas Technology Corp.Inventors: Shinichi Minami, Yoshiaki Kamigaki, Hideki Yasuoka, Fukuo Owada
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Publication number: 20040191979Abstract: A semiconductor memory device having nonvolatile memory cells each formed of a MISFET having both a floating gate and a control gate and first and second semiconductor regions serving as the source and drain regions, respectively. In accordance with the method of manufacture thereof, an impurity, for example, arsenic, is introduced to form both the first and second semiconductor regions but with the second semiconductor region having a lower dose thereof so that the first semiconductor region formed attains a junction depth greater than that of the second semiconductor region, and both the first and second semiconductor regions have portions thereof extending under the floating gate electrode. The device and method therefor further feature the formation of MISFETs of peripheral circuits.Type: ApplicationFiled: April 7, 2004Publication date: September 30, 2004Inventors: Kazuhiro Komori, Toshiaki Nishimoto, Satoshi Meguro, Hitoshi Kume, Yoshiaki Kamigaki
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Patent number: 6777282Abstract: A semiconductor memory device having nonvolatile memory cells each formed of a MISFET having both a floating gate and a control gate and first and second semiconductor regions serving as the source and drain regions, respectively. In accordance with the method of manufacture thereof, an impurity, for example, arsenic, is introduced to form both the first and second semiconductor regions but with the second semiconductor region having a lower dose thereof so that the first semiconductor region formed attains a junction depth greater than that of the second semiconductor region, and both the first and second semiconductor regions have portions thereof extending under the floating gate electrode. The device and method therefor further feature the formation of MISFETs of peripheral circuits.Type: GrantFiled: June 10, 2002Date of Patent: August 17, 2004Assignee: Renesas Technology Corp.Inventors: Kazuhiro Komori, Toshiaki Nishimoto, Satoshi Meguro, Hitoshi Kume, Yoshiaki Kamigaki
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Publication number: 20040070026Abstract: A multi-storage nonvolatile memory of high density, high speed and high reliability has a memory transistor and switch transistors disposed on both the sides of the memory transistor. The memory transistor includes a gate insulating film having discrete traps and a memory gate electrode, whereas the switch transistors include switch gate electrodes. The gate insulating film has the discrete traps for storing information charge, can locally inject carriers, and one memory cell constitutes a multi-storage cell for storing at least information of 2 bits. The switch transistors having the switch gate electrodes realize source side injection. The memory transistor is fommed together with the switch transistors in self-aligned diffusion. The memory gate electrode of the memory transistor is connected to a word line so as to perform word-line erase.Type: ApplicationFiled: September 17, 2003Publication date: April 15, 2004Applicant: Hitachi, Ltd.Inventors: Yoshiaki Kamigaki, Shinichi Minami, Kozo Katayama, Masataka Kato