Abstract: An electrostatic chuck apparatus is disclosed which can be prevented from being damaged or fractured when the temperature abruptly increases or decreases when plasma is irradiated on a plate-like specimen, the heater is heated, or the like, and can also prevent corrosion when a corrosive gas or plasma is provided. The electrostatic chuck apparatus has an electrostatic chuck portion 2 having a mounting plate 11 made of a corrosion-resistant ceramic, a supporting plate 12 which is integrated with the mounting plate 11 so as to support the mounting plate 11 and is made of an insulating ceramic having a larger thermal conductivity than the thermal conductivity of the corrosion-resistant ceramic, and an internal electrode for electrostatic adsorption 13 provided between the mounting plate 11 and the supporting plate 12; and a temperature-controlling base portion 3 which adjusts the electrostatic chuck portion 2 to a desired temperature.

Abstract: Provided are a corrosion-resistant member and an electrostatic chuck device using the same, in which corrosion resistance to halogen corrosive gas such as fluorine corrosive gas or chlorine corrosive gas and plasma thereof is high, dielectric constant and volume resistivity are high, and dielectric loss is low. The corrosion-resistant member is formed of a composite oxide sintered compact containing aluminum, samarium, and a rare earth metal element other than samarium, in which the rare earth metal element other than samarium has an ionic radius of 0.88×10?10 m or more.

Abstract: An electrostatic chuck apparatus including: an electrostatic chuck section having one main surface that is a mounting surface on which a plate specimen is mounted, and being equipped with an electrostatic adsorbing internal electrode; and a temperature adjusting base section that adjusts the electrostatic chuck section to a desired temperature, wherein a heating member is bonded to a main surface of the electrostatic chuck section, which is opposite to the mounting surface, via an adhesive material, the whole or a part of the main surface of the temperature adjusting base section, which is on the side of the electrostatic chuck section, is covered with a sheet or film of insulating material, and the electrostatic chuck section bonded with the heating member and the temperature adjusting base section covered with the insulating material are bonded and integrated via an insulating organic adhesive layer formed by curing a liquid adhesive.

Abstract: The electrostatic chucking device 1 of the invention includes an electrostatic chucking portion 2 which includes a plate-like body 11, a top surface 11a of which is used as a mounting surface that mounts a plate-like specimen W, an electrostatic adsorption electrode 12 provided in the plate-like body 11 and a power-feeding terminal 13 that applies a direct-current voltage to the electrostatic adsorption electrode 12; and a base portion 31 that supports the electrostatic chucking portion 2, in which the plate-like body 11 is a corrosion-resistant ceramic, a circular insulation member 21 is provided in a circumferential edge portion between the electrostatic chucking portion 2 and the base portion 31, and a heat radiation plate 34 is provided on the top surface 31a of the base portion 31.

Abstract: Provided is an electrostatic chuck device in which the attachment of particles to the rear surface of a plate-like specimen can be further suppressed by suppressing the generation source of the particles and, furthermore, an effect of cooling the plate-like specimen using a cooling gas can be improved. The electrostatic chuck device is formed by including an electrostatic chuck portion in which an upper surface (2a) of a ceramic plate-like body (2) is used as a placement surface on which a wafer is placed and an electrostatic adsorption electrode is provided inside the ceramic plate-like body (2) or on the rear surface thereof, multiple protrusions (11) are formed on the upper surface (2a), and multiple fine protrusions (13) are formed in regions (12) excluding the multiple protrusions (11) in the upper surface (2a).

Abstract: The electrostatic chucking device 1 of the invention includes an electrostatic chucking portion 2 which includes a plate-like body 11, a top surface 11a of which is used as a mounting surface that mounts a plate-like specimen W, an electrostatic adsorption electrode 12 provided in the plate-like body 11 and a power-feeding terminal 13 that applies a direct-current voltage to the electrostatic adsorption electrode 12; and a base portion 31 that supports the electrostatic chucking portion 2, in which the plate-like body 11 is a corrosion-resistant ceramic, a circular insulation member 21 is provided in a circumferential edge portion between the electrostatic chucking portion 2 and the base portion 31, and a heat radiation plate 34 is provided on the top surface 31a of the base portion 31.

Abstract: An electrostatic chuck apparatus is disclosed which can be prevented from being damaged or fractured when the temperature abruptly increases or decreases when plasma is irradiated on a plate-like specimen, the heater is heated, or the like, and can also prevent corrosion when a corrosive gas or plasma is provided. The electrostatic chuck apparatus has an electrostatic chuck portion 2 having a mounting plate 11 made of a corrosion-resistant ceramic, a supporting plate 12 which is integrated with the mounting plate 11 so as to support the mounting plate 11 and is made of an insulating ceramic having a larger thermal conductivity than the thermal conductivity of the corrosion-resistant ceramic, and an internal electrode for electrostatic adsorption 13 provided between the mounting plate 11 and the supporting plate 12; and a temperature-controlling base portion 3 which adjusts the electrostatic chuck portion 2 to a desired temperature.

Abstract: The present invention relates to an electrostatic chuck comprising a specific composite oxide sintered body, wherein in the sintered body, an L* value of a reflected color tone measured by a C light source on a 2° angle visual field condition is 10 or more and 50 or less in a CIEL*a*b* color system prescribed in JIS Z 8729-1994 and an electrostatic chuck device comprising an electrostatic chuck member (A) having a tabular body provided with a clamping surface for clamping a sample by the electrostatic force, an internal electrode layer for clamping a sample by electrostatic force which is provided on the back face of the tabular body and an insulation layer, wherein at least the sample clamping surface of the tabular body in the electrostatic chuck member (A) comprises the composite oxide sintered body constituting the electrostatic chuck described above.

Abstract: The present invention provides an electrostatic chuck apparatus including: an electrostatic chuck section having one main surface that is a mounting surface on which a plate specimen is mounted, and being equipped with an electrostatic adsorbing internal electrode; and a temperature adjusting base section that adjusts the electrostatic chuck section to a desired temperature, wherein a heating member is bonded to a main surface of the electrostatic chuck section, which is opposite to the mounting surface, via an adhesive material, the whole or a part of the main surface of the temperature adjusting base section, which is on the side of the electrostatic chuck section, is covered with a sheet-like or film-like insulating material, and the electrostatic chuck section bonded with the heating member and the temperature adjusting base section covered with the sheet-like or the film-like insulating material are bonded and integrated via an insulating organic adhesive layer formed by curing a liquid adhesive.

Abstract: The present invention relates to an electrostatic chuck comprising a specific composite oxide sintered body, wherein in the sintered body, an L* value of a reflected color tone measured by a C light source on a 2° angle visual field condition is 10 or more and 50 or less in a CIEL*a*b* color system prescribed in JIS Z 8729-1994 and an electrostatic chuck device comprising an electrostatic chuck member (A) having a tabular body provided with a clamping surface for clamping a sample by the electrostatic force, an internal electrode layer for clamping a sample by electrostatic force which is provided on the back face of the tabular body and an insulation layer, wherein at least the sample clamping surface of the tabular body in the electrostatic chuck member (A) comprises the composite oxide sintered body constituting the electrostatic chuck described above.

Abstract: A plastic optical fiber cable with a ferrule in which a plastic sheath of the end side of the optical fiber cable is removed to expose a plastic optical fiber from the end of the optical fiber cable, and the ferrule is secured to the outer periphery of the end side of the optical fiber cable, wherein the ferrule is axially formed as a combination of a plastic cylindrical member for forming the end of the ferrule, and a metal cylindrical member for forming the base end, wherein the plastic cylindrical member is in contact with the enlarged part of the end of the optical fiber core at the inner peripheral surface of the end side to be secured to the end of the optical fiber core, and the metal cylindrical member is contacted under pressure with the outer periphery of the end of the plastic sheath by a stopper projecting from the inner peripheral surface of the metal cylindrical member so as to be fastened to the plastic sheath.

Abstract: A data transfer control device is provided having a plurality of shift registers connected through said multiplexers in a closed loop, a selector connected to the inputs of said multiplexer and for selecting a transfer destination of display data according to a common electrode select signal of a display unit, and a gate for selecting the polarity of the display data to be loaded into said shift registers according to the polarity of common output signals for scanning common electrodes of said display unit.

Abstract: A liquid crystal driver circuit has first to fourth resistors serially connected between a positive power source terminal and a reference power source terminal, first and second MOS transistors respectively connected in parallel with the first and fourth resistors, a common electrode driver circuit for generating common electrode bias signals in accordance with common electrode selection signals, and a segment electrode driver circuit for generating segment electrode bias signals in accordance with segment data. A third switching MOS transistor is coupled between the reference power source terminal and the series circuit of the first to fourth resistors.

Abstract: A memory access control system selects a program mode to carry out a cycle steal operation in response to a logic "1" condition of a predetermined bit position included in a command and selects a direct memory access mode to effect a direct memory access in response to a logic "0" condition of the predetermined bit position.

Abstract: An information transferring apparatus comprises a central processing unit, and an input/output unit, a first-in first-out stack having a plurality of memory elements connected in series and being disposed between the central processing unit and the input/output unit, a command register which is set to a predetermined state under program control by the central processing unit, and a control circuit which receives a signal produced from the command register when the command register is set to a predetermined state and applies a signal designating the memory element which is to be the first memory element of the first-in first-out stack from which information is to be transferred and permits the information stored in the first memory element to be read out directly to the input/output unit.

Abstract: A power source voltage change discrimination circuit includes a voltage selection circuit for selectively supplying the greater one of main and auxiliary power source voltages, and a series circuit of a resistor and a capacitor coupled between the output terminal of the voltage selection circuit and ground. There is further provided a Schmitt circuit having hysteresis characteristics whose input terminal is coupled to a junction of the resistor and capacitor.

Abstract: An operand fetch control system wherein an address modification mode code is provided in the instruction word and designates both the general storage location of an operand to be fetched and the mode of addressing required for fetching it. The address modification mode code is a two-bit binary number designating either a direct register addressing mode or a main memory indirect, index, or indirect index addressing mode. Mode code 00 designates the register mode while the codes 10, 01 and 11 designate the indirect mode, the index mode and the indirect index mode, respectively.

Abstract: In a data processing apparatus including an instruction register and an instruction decoder connected therewith, when a designation instruction (operand changing instruction) is set in the instruction register, the operand (the code of source or destination) of the designation instruction is registered in a source address register or a designation address register connected to the instruction register through a gate circuit. The registers produce control signals through decoders respectively for selecting predetermined operands. When the designation instruction is decoded by the instruction decoder a first (for source) and a second (for destination) flip-flop circuits which are connected to the output terminal of the instruction decoder are set. The outputs of these flip-flop circuits are applied to the negative input of an AND gate circuit connected to the instruction decoder.

Abstract: An instruction outputted from an instruction register is decoded by an instruction decoder. In the instructions decoded by said instruction decoder, a subroutine call instruction of which the address field is coded is applied to a data converter of which the address field is connected to said instruction register. The data converter decodes the inputted and coded address to produce a given effective address.

Abstract: The system is constructed to operate to mutually transfer information between a processor and a terminal device via a first-in/first-out type stack. Signal generators are provided on the input and output sides of the stack for generating signals corresponding to the EMPTY and FULL statuses of the stack thereby controlling to inhibit or commence the transfer of the information in response to the direction of transfer of the information and the status of the stack.