Abstract: A highly accurate, downsized ink-jet recording head producible at low cost by using a thin-film deposition technology is provided. The ink-jet recording head, in which a piezoelectric layer is formed subsequent to an electrode layer on a substrate by using a thin-film deposition technology and an energy-generating element for generating energy for ink ejection is formed by etching the electrode and the piezoelectric layers simultaneously by an ion milling process, includes a fine powder reception part on which mixed fine powders including at least those etched off the electrode layer and the piezoelectric layer by the ion milling process are deposited, the fine powder reception part being provided in a periphery of the energy-generating element.

Abstract: With a clip and a lower casing sandwiching a concha of a user so that the lower casing is positioned on the ear, a speaker generates a rhythm tone with a small volume in the vicinity of an ear hole of the user. A rhythm speed and type of the rhythm tone are set by operating switches with reference to a liquid crystal display. An integrated circuit has a memory device for holding recorded data of an analog sound and a reproducing device for reproducing an analog electrical signal from the recorded data according to the set rhythm speed and type to actuate the speaker.

Abstract: A printer having a plurality of nozzles each for discharging ink supplied from an ink supply part (50) comprises a head main body (3) including a plurality of pressure chambers each provided for each of the nozzles and filled up with ink, a plurality of pressurizers each provided for each of the pressure chambers for pressurizing the pressure chamber to discharge the ink in the pressure chamber through the nozzle and ink supply passages for supplying the ink from the ink supply part (50) to the plurality of pressure chambers, and a joint section (8) protruded from the head main body (3) for joining the ink supply part (50) to the head main body (3).

Abstract: The present invention relates to an ink jet recording head and a production method therefor, wherein ink is spouted by vibrating a vibrating plate that is a wall part of a pressure chamber, using an ink jet energy generating part. In the ink jet recording head that comprises a main body formed by a plurality of pressure chambers provided corresponding to nozzles that spout ink, the vibrating plate that constitutes a wall of the compression chamber being provided to the main body and an energy generating part provided on the vibrating plate at a position corresponding to a forming position of the pressure chamber, which makes the ink inside the pressure chambers spouted from the nozzles by deformative-energizing the vibrating plate, the vibrating plate and the ink jet energy generating part are formed using the thin film forming technology.

Abstract: A method of producing a semiconductor device in which a film is formed on a substrate by a chemical vapor deposition (CVD) process, the method comprising purifying a source gas for a film to be formed by selectively removing at least one of components contained in the source gas, which does not pertain to reactions for the deposition of the film, based on the difference in molecular size between the component to be removed and other components.

Abstract: It is an object of the present invention to provide an inkjet head and its manufacturing method, which may realize a high resolution while maintaining at a desired strength those walls which define a plurality of ink supply channels between the common ink chamber and each pressure chamber, and securing the adhesion areas on these walls. The inkjet head is miniaturized in a direction in which the pressure chambers are arranged, by arranging a plurality of ink supply channels that are connected to each pressure chamber perpendicular to the direction in which the pressure chambers are arranged.

Abstract: A bimorph type actuator for which the piezoelectric constant can be maintained even with a thin piezo film, and an ink jet head using the actuator, are disclosed. The bimorph type actuator comprises a diaphragm (18) having a fixed periphery, and a piezo film (19) formed on the diaphragm (18), and the center of the piezo film (19) has a bent shape. Residual stress in the piezo film (19) is thus released, and hence a desired piezoelectric constant can be realized even with a thin piezo film, and thus low-voltage driving becomes possible.

Abstract: A multi-nozzle ink jet head formed by semiconductor processes is disclosed. The multi-nozzle head has a nozzle plate (38) in which are formed a plurality of nozzles (39), an FPC (42) in which are formed a plurality of ink chambers (29), and energy generating layers (23, 26, 27), and wiring patterns (42A, 42B) for the energy generating layers are provided on the FPC (42), thus making connection to external circuitry easy.

Abstract: A multi-nozzle ink jet head having a diaphragm that effectively utilizes the force generated by thin-film piezoelectric elements is disclosed. The head (2) has a head substrate (28) in which are formed a plurality of nozzles (39) and a plurality of pressure chambers (29), a multi-layer diaphragm (23-1, 23-2), piezoelectric elements (27), and individual electrodes (26). By making the thickness of the common electrode layer (23-1) of the multi-layer diaphragm be thin but such that problems do not occur during multi-pin driving, optimization of the rigid layer becomes possible, and hence it is possible to use the force generated by the thin-film piezoelectric elements efficiently in ink ejection.

Abstract: A multi-nozzle ink jet head formed through semiconductor processes is disclosed. The multi-nozzle head has ahead substrate (28) in which are formed a plurality of nozzles (27) and a plurality of pressure chambers (26), a diaphragm (40) that acts as a common electrode and covers the plurality of pressure chambers (26), piezoelectric body layers (41) that are provided in correspondence with the pressure chambers (26) on the diaphragm (40), and individual electrode layers (42) that are provided on the piezoelectric body layers and have individual electrode parts (42-3) corresponding to the pressure chambers and wiring parts (42-1, 42-2) for the individual electrode parts.

Abstract: The ink replenishment frequency is increased in an inkjet head having nozzles for injecting ink. Independent dampers (13) are provided in ink supply passages (18) to impart an acoustic capacitance to the ink supply passages (18), and therefore a reciprocal action is generated between the pressure chambers (16) and the ink supply passages (18), whereby the operation of ink replenishment can be stimulated. Accordingly, the ink replenishment frequency can be increased by a factor of approximately {square root}3, without having to provide functional elements in the ink supply passage.

Abstract: A multi-nozzle ink jet head using piezoelectric elements and a manufacturing method thereof are disclosed. A head (1) has a nozzle member (10) in which a plurality of nozzles (12) are formed, a pressure chamber wall member (14) in which a plurality of pressure chambers (15) are formed, and piezoelectric type actuators that have a diaphragm (18) and a plurality of piezo elements (19) and apply pressure to each of the plurality of pressure chambers for ejecting ink from the nozzles. A rigid coating member (23, 25) is provided on inner surfaces of the pressure chamber walls or on parts of the diaphragm in contact with the pressure chamber wall member, thus increasing the rigidity of the pressure chamber walls.

Abstract: In a multi-nozzle ink jet head having a plurality of nozzles, cross talk between adjacent elements is suppressed. The head has the nozzles (12), pressure chambers (15), and bimorph drivers. The bimorph drivers have piezos (19) formed on a diaphragm (18). The diaphragm (18) has linear parts (18-1) that convert the generated force from the piezos (19) into displacement, and non-linear parts (18-2) that are provided between the linear parts (18-1) and diaphragm fixing parts. Due to the non-linear parts (18-2), transmission of strain energy to the fixing parts is suppressed, and hence cross talk is suppressed.

Abstract: A method of producing an ink-jet recording head using ion milling is provided. The method includes the steps of forming a piezoelectric layer subsequent to an electrode layer on a substrate by using a thin-film deposition technology, forming an energy-generating element for generating energy for ink ejection by etching the electrode layer and the piezoelectric layer simultaneously by ion milling, and removing a fence formed by deposits of mixed fine powders including those etched off the electrode layer and the piezoelectric layer.

Abstract: A highly accurate, downsized ink-jet recording head producible at low cost by using a thin-film deposition technology is provided.

Abstract: An ink jet head using bimorph drivers and a manufacturing method thereof are disclosed. The head has pressure chambers 6 that each communicates with a nozzle 9 and stores ink, and bimorph drivers that each has a piezoelectric body 1 and a vibrating plate 2 and that are for applying pressure to the pressure chambers 6; three peripheral sides of each of the bimorph drivers are fixed, and the other side is not fixed. Since one side of the piezoelectric body of each of the bimorph drivers is made to be free, tensile stress can be released without pressure leakage. As a result, the displacement and pressure required for ejecting ink drops can be obtained even if the width of the piezoelectric bodies is narrow. A high-density multi-nozzle head can thus be realized.

Abstract: An ink jet head having a plurality of nozzles discharging ink supplied from an ink supply unit. The ink jet head comprises a head main body including a plurality of pressure chambers (112) provided for the respective nozzles, in which ink is filled, and a plurality of pressure units provided for the respective pressure chambers (112), each of the pressure units applying pressure to the pressure chamber (112) to discharge the ink in the pressure chamber (112) from the nozzle, an individual electrode (109) provided for each of the pressure units to drive the pressure unit, at least one contact (121) connected to an external connection wiring member supplying a signal for controlling the pressure unit, and a wiring pattern (123) formed into a thin film to electrically connect the individual electrode (109) to the contact (121), thereby facilitating connection to the external connection wiring member, improving the fabrication efficiency and the reliability.

Abstract: A printer having a plurality of nozzles each for discharging ink supplied from an ink supply part (50) comprises a head main body (3) including a plurality of pressure chambers each provided for each of the nozzles and filled up with ink, a plurality of pressurizers each provided for each of the pressure chambers for pressurizing the pressure chamber to discharge the ink in the pressure chamber through the nozzle and ink supply passages for supplying the ink from the ink supply part (50) to the plurality of pressure chambers, and a joint section (8) protruded from the head main body (3) for joining the ink supply part (50) to the head main body (3).

Abstract: A printing apparatus which includes an ink jet head (100) having a plurality of nozzles for discharging ink supplied thereto from an ink supplying part (50) is configured such that it comprises a head body member (3) including a plurality of pressure chambers provided individually for the nozzles for being filled with the ink and a plurality of pressurization elements provided individually for the pressure chambers for pressurizing the pressure chambers to discharge the ink in the pressure chambers from the nozzles, that an ink staying space (130) for temporarily staying the ink from the ink supplying part (50) therein is formed between the head body member (3) and the ink supplying part (50), and that a plurality of ink supplying paths (129) for communicating the ink staying space (130) and the plurality of pressure chambers individually with each other are formed in the head body member (3) such that one end side of each of the ink supplying paths (129) is open to the ink staying space (130) on an outer fac

Abstract: It is an object of the present invention to provide an inkjet head and its manufacturing method, which may realize a high resolution while maintaining at a desired strength those walls which define a plurality of ink supply channels between the common ink chamber and each pressure chamber, and securing the adhesion areas on these walls. The inkjet head is miniaturized in a direction in which the pressure chambers are arranged, by arranging a plurality of ink supply channels that are connected to each pressure chamber perpendicular to the direction in which the pressure chambers are arranged.