Patents by Inventor Yoshifumi Ueno
Yoshifumi Ueno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20170215267Abstract: An extreme ultraviolet light generation apparatus may be configured to generate extreme ultraviolet light by irradiating a target with a pulse laser beam outputted from a laser apparatus to generate plasma. The extreme ultraviolet light generation apparatus may include a chamber; a target supply device configured to supply a target to a plasma generation region inside the chamber; a target sensor located between the target supply device and the plasma generation region and configured to detect the target passing through a detection region; and a shield cover disposed between the detection region and the target supply device, having a through-hole that allows the target to pass through, and configured to reduce pressure waves that reach the target supply device from the plasma generation region.Type: ApplicationFiled: April 6, 2017Publication date: July 27, 2017Applicant: GIGAPHOTON INC.Inventors: Tamotsu ABE, Yoshifumi UENO, Hirokazu HOSODA, Takashi SAITO
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Publication number: 20170171955Abstract: An extreme ultraviolet light generation system may include a laser system and a controller. The laser system may irradiate the first target with a first pulse laser beam to disperse the first target and produce a mist target, and irradiate the mist target with a second pulse laser beam. The controller may measure a mist diameter of the mist target and control, based on the mist diameter, at least one of time to emit the second pulse laser beam and energy of a first pulse laser beam to be used to irradiate the second target.Type: ApplicationFiled: February 13, 2017Publication date: June 15, 2017Applicant: GIGAPHOTON INC.Inventors: Yoshifumi UENO, Hirokazu HOSODA, Takayuki YABU
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Publication number: 20170150591Abstract: The transmission system may include: an optical path adjustment device configured to substantially unify optical paths of a first pre-pulse laser beam and a second pre-pulse laser beam; an optical path separation device configured to separate the optical paths of the substantially unified first pre-pulse laser beam and the second pre-pulse laser beam to an optical path for the first pre-pulse laser beam and an optical path for the second pre-pulse laser beam; a first beam adjustment device disposed on the optical path for the first pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the first pre-pulse laser beam; and a second beam adjustment device disposed on the optical path for the second pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the second pre-pulse laser beam.Type: ApplicationFiled: February 2, 2017Publication date: May 25, 2017Applicant: GIGAPHOTON INC.Inventors: Masahiko ANDO, Yoshifumi UENO, Toru SUZUKI
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Publication number: 20170127505Abstract: An extreme ultraviolet light generation system may comprise a chamber, a target supply unit configured to supply, to a predetermined region in the chamber, a target having an atomic density of 8.0×1017 atoms/cm3 or higher and 1.3×1018 atoms/cm3 or lower, and a laser apparatus configured to irradiate the predetermined region with a pulse laser beam having an energy density of 10.5 J/cm2 or higher and 52.3 J/cm2 or lower in the predetermined region.Type: ApplicationFiled: January 6, 2017Publication date: May 4, 2017Applicants: Institute for Laser Technology, Gigaphoton Inc.Inventors: Atsushi SUNAHARA, Georg SOUMAGNE, Yoshifumi UENO, Hideo HOSHINO
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Publication number: 20170094767Abstract: An extreme ultraviolet light generation device is to generate extreme ultraviolet light by irradiating a target with a pulse laser beam and thereby turning the target into plasma. The device may include a chamber, a magnet configured to form a magnetic field in the chamber, and an ion catcher including a collision unit disposed so that ions guided by the magnetic field collide with the collision unit.Type: ApplicationFiled: December 14, 2016Publication date: March 30, 2017Applicant: Gigaphoton Inc.Inventors: Atsushi UEDA, Shinji NAGAI, Yoshifumi UENO, Tamotsu ABE
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Patent number: 9577158Abstract: A phosphor sheet-forming resin composition uses a low-cost resin material having high light fastness and low visible light absorption and is capable of providing a phosphor sheet at low cost with deterioration of a phosphor due to moisture being suppressed. The phosphor sheet-forming resin composition contains a film-forming resin composition and a powdery phosphor that emits fluorescence when irradiated with excitation light. The film-forming resin composition contains a hydrogenated styrene-based copolymer, and uses a sulfide-based phosphor as the phosphor. Examples of the hydrogenated styrene-based copolymer include hydrogenated products of styrene-ethylene-butylene-styrene block copolymers. CaS:Eu is used as a preferred sulfide-based phosphor.Type: GrantFiled: July 5, 2012Date of Patent: February 21, 2017Assignee: DEXERIALS CORPORATIONInventors: Yasushi Ito, Yoshifumi Ueno, Hirofumi Tani
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Publication number: 20170009109Abstract: Provided are a sealing tape that can prevent tape width misalignment, air bubble inclusion, and creasing even when the sealing tape is affixed in a folded state, a phosphor sheet using the same, a lighting device, a liquid-crystal display, a method for manufacturing a phosphor sheet, and a sealing method. The sealing tape (10) includes an adhesive layer (11), a gas barrier layer (12), a bonding layer (13), and a support film layer (14) laminated in stated order, and has an incision (15) into the support film layer (14) in a thickness direction. The incision (15) is located substantially centrally in a width direction and extends in a longitudinal direction. Accordingly, tape width misalignment, air bubble inclusion, and creasing can be prevented even when the sealing tape is affixed in a folded state.Type: ApplicationFiled: February 5, 2015Publication date: January 12, 2017Applicant: Dexerials CorporationInventors: Yasushi ITO, Tomomitsu HORI, Teruo HIYAMA, Akihiro YAMAZAKI, Yoshifumi UENO
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Patent number: 9192037Abstract: A control method for a target supply device includes melting a target material by heating the target material within a target generator using a heating unit, pushing out the target material from a nozzle hole in a nozzle by pressurizing the interior of the target generator using a pressure control unit, determining whether or not the size of an adhering area of the target material that forms when the target material is pushed out from the nozzle hole and adheres to a leading end of the nozzle has reached a set size that covers the entire nozzle hole, stopping the pressurization of the interior of the target generator by the pressure control unit when the size of the adhering area has reached the set size, and hardening the target material in the target generator and the adhering area by stopping the heating of the target material by the heating unit.Type: GrantFiled: August 6, 2013Date of Patent: November 17, 2015Assignee: Gigaphoton Inc.Inventor: Yoshifumi Ueno
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Publication number: 20150083939Abstract: An extreme ultraviolet light generation device may be configured to generate extreme ultraviolet light by irradiating a target with a laser beam to turn the target into plasma. The extreme ultraviolet light generation device may comprise: a chamber provided with at least one through-hole; an optical system configured to introduce the laser beam into a predetermined region in the chamber through the at least one through-hole; and a target supply device configured to supply a powder target as the target to the predetermined region.Type: ApplicationFiled: November 28, 2014Publication date: March 26, 2015Inventors: Yoshifumi UENO, Osamu WAKABAYASHI
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Patent number: 8901522Abstract: A chamber apparatus used with a laser apparatus may include: a chamber provided with at least one inlet through which a laser beam outputted from the laser apparatus enters the chamber; a target supply unit provided to the chamber for supplying a target material to a predetermined region inside the chamber; a magnetic field generation unit for generating a magnetic field in the predetermined region; and a charged particle collection unit disposed in a direction of a magnetic flux of the magnetic field for collecting a charged particle thereinto, the charged particle being generated when the target material is irradiated with the laser beam inside the chamber and traveling along the magnetic flux.Type: GrantFiled: August 2, 2011Date of Patent: December 2, 2014Assignee: Gigaphoton Inc.Inventors: Yoshifumi Ueno, Shinji Nagai, Osamu Wakabayashi
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Patent number: 8841639Abstract: A control method for a target supply device may employ a target supply device, provided in an EUV light generation apparatus including an image sensor, that includes a target generator having a nozzle and configured to hold a target material and a pressure control unit configured to control a pressure within the target generator, and the method may include outputting the target material in the target generator from a nozzle hole in the nozzle by pressurizing the interior of the target generator using the pressure control unit, determining whether or not a difference between an output direction of the target material outputted from the nozzle hole that is detected by the image sensor and a set direction is within a predetermined range, and holding the pressure in the target generator using the pressure control unit until the difference falls within the predetermined range.Type: GrantFiled: September 11, 2013Date of Patent: September 23, 2014Assignee: Gigaphoton Inc.Inventors: Takayuki Yabu, Yoshifumi Ueno, Takeshi Kodama
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Publication number: 20140124813Abstract: A phosphor sheet-forming resin composition uses a low-cost resin material having high light fastness and low visible light absorption and is capable of providing a phosphor sheet at low cost with deterioration of a phosphor due to moisture being suppressed. The resin composition contains a film-forming resin composition and a powdery phosphor that emits fluorescence when irradiated with excitation light. The film-forming resin composition used contains a polyolefin copolymer component and a maleic anhydride component. A sulfurized phosphor, an oxide-based phosphor, or a phosphor mixture thereof is preferably used as the phosphor.Type: ApplicationFiled: July 5, 2012Publication date: May 8, 2014Applicant: DEXERIALS CORPORATIONInventors: Yasushi Ito, Yoshifumi Ueno, Hirofumi Tani
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Patent number: 8710475Abstract: An EUV (Extreme Ultra Violet) light source device ionizes a target material in an ionizer, and supplies the ionized target material to a point of generating a plasma. This reduces the generation of debris. The ionizer simultaneously irradiates laser beams of plural wavelengths corresponding to the excited level of tin on a target material to ionize the target material. The ionized target material is extracted from the ionizer with a high voltage applied from an ion beam extractor, and accelerated and supplied to a plasma generation chamber. When driver laser beam is irradiated on the ionized target material, a plasma is generated, thereby emitting EUV radiation.Type: GrantFiled: March 18, 2013Date of Patent: April 29, 2014Assignee: Gigaphoton Inc.Inventors: Hiroshi Komori, Tatsuya Yanagida, Yoshifumi Ueno, Akira Sumitani, Akira Endo, Tsukasa Hori
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Publication number: 20140097461Abstract: A phosphor sheet-forming resin composition uses a low-cost resin material having high light fastness and low visible light absorption and is capable of providing a phosphor sheet at low cost with deterioration of a phosphor due to moisture being suppressed. The phosphor sheet-forming resin composition contains a film-forming resin composition and a powdery phosphor that emits fluorescence when irradiated with excitation light. The film-forming resin composition contains a hydrogenated styrene-based copolymer, and uses a sulfide-based phosphor as the phosphor. Examples of the hydrogenated styrene-based copolymer include hydrogenated products of styrene-ethylene-butylene-styrene block copolymers. CaS:Eu is used as a preferred sulfide-based phosphor.Type: ApplicationFiled: July 5, 2012Publication date: April 10, 2014Applicant: DEXERIALS CORPORATIONInventors: Yasushi Ito, Yoshifumi Ueno, Hirofumi Tani
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Publication number: 20140070021Abstract: A control method for a target supply device may employ a target supply device, provided in an EUV light generation apparatus including an image sensor, that includes a target generator having a nozzle and configured to hold a target material and a pressure control unit configured to control a pressure within the target generator, and the method may include outputting the target material in the target generator from a nozzle hole in the nozzle by pressurizing the interior of the target generator using the pressure control unit, determining whether or not a difference between an output direction of the target material outputted from the nozzle hole that is detected by the image sensor and a set direction is within a predetermined range, and holding the pressure in the target generator using the pressure control unit until the difference falls within the predetermined range.Type: ApplicationFiled: September 11, 2013Publication date: March 13, 2014Applicant: GIGAPHOTON INC.Inventors: Takayuki YABU, Yoshifumi UENO, Takeshi KODAMA
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Publication number: 20140042653Abstract: A control method for a target supply device includes melting a target material by heating the target material within a target generator using a heating unit, pushing out the target material from a nozzle hole in a nozzle by pressurizing the interior of the target generator using a pressure control unit, determining whether or not the size of an adhering area of the target material that forms when the target material is pushed out from the nozzle hole and adheres to a leading end of the nozzle has reached a set size that covers the entire nozzle hole, stopping the pressurization of the interior of the target generator by the pressure control unit when the size of the adhering area has reached the set size, and hardening the target material in the target generator and the adhering area by stopping the heating of the target material by the heating unit.Type: ApplicationFiled: August 6, 2013Publication date: February 13, 2014Applicant: GIGAPHOTON INC.Inventor: Yoshifumi UENO
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Publication number: 20140029238Abstract: Provided is an illumination device that can be made thin and increases the efficiency of extracting light to the outside. The present invention is provided with: light-emitting structures wherein a blue light-emitting element is embedded in a transparent resin having a convex surface shape; a substrate wherein the light-emitting structures are disposed two-dimensionally; a diffuser plate that diffuses the blue light of the blue light-emitting elements; and a fluorescent sheet that is disposed spaced from the substrate and that contains a particulate fluorescent body that obtains a white light from the blue light of the blue light-emitting elements.Type: ApplicationFiled: July 5, 2012Publication date: January 30, 2014Applicant: DEXERIALS CORPORATIONInventors: Yasushi Ito, Yoshifumi Ueno, Hirofumi Tani, Tomomitsu Hori
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Publication number: 20140021376Abstract: An extreme ultra violet light source device of a laser produced plasma type, in which charged particles such as ions emitted from plasma can be efficiently ejected. The extreme ultra violet light source device includes: a target nozzle that supplies a target material; a laser oscillator that applies a laser beam to the target material supplied from the target nozzle to generate plasma; collector optics that collects extreme ultra violet light radiated from the plasma; and a magnetic field forming unit that forms an asymmetric magnetic field in a position where the laser beam is applied to the target material.Type: ApplicationFiled: July 3, 2013Publication date: January 23, 2014Applicant: GIGAPHOTON INC.Inventors: Hiroshi KOMORI, Yoshifumi UENO, Georg SOUMAGNE
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Patent number: 8604453Abstract: An extreme ultraviolet light source apparatus, which is to generate an extreme ultraviolet light by irradiating a target with a main pulse laser light after irradiating the target with a prepulse laser light, the extreme ultraviolet light source apparatus comprises: a prepulse laser light source generating a pre-plasma by irradiating the target with the prepulse laser light while a part of the target remains, the pre-plasma being generated at a different region from a target region, the different region being located on an incident side of the prepulse laser light; and a main pulse laser light source generating the extreme ultraviolet light by irradiating the pre-plasma with the main pulse laser light.Type: GrantFiled: May 29, 2013Date of Patent: December 10, 2013Assignee: Gigaphoton Inc.Inventors: Akira Endo, Yoshifumi Ueno, Youichi Sasaki, Osamu Wakabayashi
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Patent number: 8586953Abstract: An extreme ultra violet light source device of a laser produced plasma type, in which charged particles such as ions emitted from plasma can be efficiently ejected. The extreme ultra violet light source device includes: a target nozzle that supplies a target material; a laser oscillator that applies a laser beam to the target material supplied from the target nozzle to generate plasma; collector optics that collects extreme ultra violet light radiated from the plasma; and a magnetic field forming unit that forms an asymmetric magnetic field in a position where the laser beam is applied to the target material.Type: GrantFiled: February 9, 2012Date of Patent: November 19, 2013Assignee: Gigaphoton Inc.Inventors: Hiroshi Komori, Yoshifumi Ueno, Georg Soumagne