Abstract: The filtration system of the present invention comprises first and second filtration tanks. The first filtration tank has a first floating filter media layer, a first upper screen with a first aperture ratio, a first inlet, a first backwash water supply source, and a first backwash water outlet means. The second filtration tank has a second floating filter media layer, a second upper screen with a second aperture ratio, a second inlet, an inflow blocking mechanism capable of blocking inflow of water to be treated through the second inlet, a second backwash water supply source, and a second backwash water outlet means. The first aperture ratio is smaller than the second aperture ratio.

Abstract: With a scanning electron microscope (SEM) adopting a commonly available exhaust system such as a turbo-molecular pump, an ion pump, or a rotary pump, and so forth, there is realized an apparatus capable of safely executing observation, or adsorption of a target substance that is high in rarity. Further, there is realized a safe SEM low in the risk of an electrical discharge by providing the apparatus with a probe, a means for replacing an atmosphere in a specimen chamber, with a predetermined gas, and a means for forming an image by detection of an ion current, and detection of an absorption current. Further, there is provided a means for controlling the polarity of a voltage applied to the probe. Still further, there is provided a control means for controlling a value of the voltage applied to the probe according to a degree of vacuum.

Abstract: The filtration system of the present invention comprises first and second filtration tanks. The first filtration tank has a first floating filter media layer, a first upper screen with a first aperture ratio, a first inlet, a first backwash water supply source, and a first backwash water outlet means. The second filtration tank has a second floating filter media layer, a second upper screen with a second aperture ratio, a second inlet, an inflow blocking mechanism capable of blocking inflow of water to be treated through the second inlet, a second backwash water supply source, and a second backwash water outlet means. The first aperture ratio is smaller than the second aperture ratio.

Abstract: With a scanning electron microscope (SEM) adopting a commonly available exhaust system such as a turbo-molecular pump, an ion pump, or a rotary pump, and so forth, there is realized an apparatus capable of safely executing observation, or adsorption of a target substance that is high in rarity. Further, there is realized a safe SEM low in the risk of an electrical discharge by providing the apparatus with a probe, a means for replacing an atmosphere in a specimen chamber, with a predetermined gas, and a means for forming an image by detection of an ion current, and detection of an absorption current. Further, there is provided a means for controlling the polarity of a voltage applied to the probe. Still further, there is provided a control means for controlling a value of the voltage applied to the probe according to a degree of vacuum.

Abstract: An imaging device with an enhanced degree of freedom in device settings based on commands, thereby improving the usability of an imaging device. When the user of an imaging device operates a menu switch, a composite image of a top menu image superimposed on a currently set source image, for example, a camera image, as a background image is displayed on a monitor. In response to the user's selection of an advanced settings command icon on the top menu image through the operations of the menu switch and circumferential switches surrounding the menu switch, the display on the monitor is changed from the composite image including the top menu image to a lower-layer menu image. Some of command icons included in the lower-layer menu image are different from command icons included in the top menu image. A top menu return command icon and a menu image deletion command icon may be included.

Abstract: In response to a power-on of a main switch, a composite image comprising a menu image including multiple command icons for device settings, and a source image from a currently set image input source as a background image, is displayed on an internal monitor of an imaging device. The user can thus select desired command icons for device settings among the multiple command icons in the menu image, while visually checking the background source image. Only the source image without the menu image is displayed on an external display device, which is used for a presentation given to the audience. This arrangement desirably improves the usability of the imaging device, while preventing the display of the menu image on the external display device from damaging the effect of the presentation given to the audience.

Abstract: Using, as a detector, a CCD detector having a CCD element to which a scintillator is closely fixed, a backscattered or scanning transmission image is obtained by the following method. The detector is disposed directly under an objective lens to obtain the backscattered electron image. When one point of a specimen is irradiated with an electron beam, backscattered or transmission electrons generated from the specimen collide with the scintillator to form a luminescent pattern. This pattern is detected by the CCD detector, and stored in a memory. This processing is sequentially repeated for each irradiation position to obtain all the patterns in an electron beam scanning range. Arithmetic processing is performed on each pattern to convert it into an image. Usually, image data for one pixel is calculated from one pattern. By sequentially repeating this, a backscattered or transmission electron image in the electronic beam scanning range can be obtained.

Abstract: There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.

Abstract: There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.

Abstract: A method of exposure control in an image pickup apparatus includes determining whether a zoom lens has been moved, determining whether an F value obtained from information about focal position of a focus lens linked to movement of the zoom lens has changed, estimating a variation in the focus luminance before and after a change in the F value from the F values before and after the change when the F value has been changed, changing the shutter speed determined according to a focus luminance before the change to a shutter speed determined according to the focus luminance after the change, based on the estimated variation in the focus luminance, and changing a frame rate determined according to the focus luminance before the change to a frame rate determined according to a focus luminance after the change according to the changed shutter speed.

Abstract: At the time when an aligning unit collects and aligns a recording sheet, the front portion of a movable supporting member of a collecting tray is moved toward the recording sheet to close a space in the collecting tray. Moreover, the front portion of the movable supporting member abuts against the front end of the recording sheet. As a result, the front end of the recording sheet does not hang loose in the space.

Abstract: As an image forming method including comparison between images for three-dimensional image construction or the like and an apparatus for forming such images, there are provided an image forming method and an electron microscope capable of obtaining with high accuracy or efficiency information required for comparison. In the image forming method, an image is formed on the basis of comparison between a plurality of images obtained by applying an electron beam to a specimen at different tilt angles. The method includes obtaining a first transmission image with the electron beam applied in a first direction and a second transmission image with the electron beam applied in a second direction, the second transmission image being formed within a region different from a peripheral blurred region resulting from tilting, and making a search in the first transmission image by using the second transmission image.

Abstract: At the time when an aligning unit collects and aligns a recording sheet, the front portion of a movable supporting member of a collecting tray is moved toward the recording sheet to close a space in the collecting tray. Moreover, the front portion of the movable supporting member abuts against the front end of the recording sheet. As a result, the front end of the recording sheet does not hang loose in the space.

Abstract: There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.

Abstract: Using, as a detector, a CCD detector having a CCD element to which a scintillator is closely fixed, a backscattered or scanning transmission image is obtained by the following method. The detector is disposed directly under an objective lens to obtain the backscattered electron image. When one point of a specimen is irradiated with an electron beam, backscattered or transmission electrons generated from the specimen collide with the scintillator to form a luminescent pattern. This pattern is detected by the CCD detector, and stored in a memory. This processing is sequentially repeated for each irradiation position to obtain all the patterns in an electron beam scanning range. Arithmetic processing is performed on each pattern to convert it into an image. Usually, image data for one pixel is calculated from one pattern. By sequentially repeating this, a backscattered or transmission electron image in the electronic beam scanning range can be obtained.

Abstract: This attempts to improve the usability, while preventing a damage of the effect of presentation given to the audience. In response to a power-on of a main switch 110S, a composite image of a menu image including multiple command icons for device settings with a source image from a currently set image input source as a background image is displayed on an internal monitor 114 of an imaging device 100. The user can thus select desired command icons for device settings among the multiple command icons in the menu image, while visually checking the background source image. Only the source image without the menu image is displayed on an external display device, which is used for a presentation given to the audience. This arrangement desirably improves the usability of the imaging device, while preventing the display of the menu image on the external display device from damaging the effect of the presentation given to the audience.

Abstract: This attempts to reduce the total number of physical operation switches while simplifying device settings based on commands. In a command setting mode where a composite image of a menu image with a source image as a background is displayed on a monitor 114, a menu switch 112M functions to set a selected command icon. An up switch 112U and other circumferential switches surrounding the menu switch 112M function to select one of multiple command icons included in the menu image. In a mode other than the command setting mode, the circumferential switches function as physical operation switches to change over an on-off condition of a lighting unit and to select an image input source. This arrangement desirably reduces the total number of physical operation switches, while simplifying the device settings based on commands.

Abstract: This attempts to improve the user's visibility on the device settings and variety of other conditions of the imaging device and thereby enhancing the usability of the imaging device. In an imaging device, a modulated light source 119 located below a menu switch 112M is under control of a switch display light modulator 230 to change the color of light emission. A displayed image on a monitor 114 or an external display device is selectable among a camera image taken with a camera head 120, a memory image read from a memory SD, and a PC image input from a personal computer 410 as an image of a currently set image input source. The color of light emission from the modulated light source 119 is changed according to the setting of the image input source. This arrangement improves the user's visibility of a variety of device settings and thereby enhances the usability of the imaging device.

Abstract: This attempts to enhance the degree of freedom in device settings based on commands and thereby improving the usability of an imaging device. When the user of an imaging device operates a menu switch 112M, a composite image of a top menu image superimposed on a currently set source image, for example, a camera image, as a background image is displayed on a monitor 114. In response to the user's selection of an advanced settings command icon MC on the top menu image through the operations of the menu switch 112M and circumferential switches surrounding the menu switch 112M, the display on the monitor 114 is changed from the composite image including the top menu image to a lower-layer menu image. Some of command icons included in the lower-layer menu image are different from command icons included in the top menu image. This arrangement desirably enhances the degree of freedom in device settings based on commands and thereby improves the usability of the imaging device.

Abstract: A method of exposure control in an image pickup apparatus includes determining whether a zoom lens has been moved, determining whether an F value obtained from information about focal position of a focus lens linked to movement of the zoom lens has changed, estimating a variation in the focus luminance before and after a change in the F value from the F values before and after the change when the F value has been changed, changing the shutter speed determined according to a focus luminance before the change to a shutter speed determined according to the focus luminance after the change, based on the estimated variation in the focus luminance, and changing a frame rate determined according to the focus luminance before the change to a frame rate determined according to a focus luminance after the change according to the changed shutter speed.