Abstract: A deformable mirror according to the present invention includes a substrate 1, a plurality of micromirrors 20, which are supported by the substrate 1 while being segmented from each other, and a plurality of driving sections, which drive the micromirrors 20 independently of each other. Each of the driving sections includes a number of fixed electrodes 5 to 7, and the same number of movable electrodes 13 to 15, which are provided so as to face the fixed electrodes 5 to 7. Each of the micromirrors 20 is coupled to at least two of the movable electrodes 13 to 15, which are associated with the micromirror 20. The deformable mirror can displace each micromirror 20 perpendicularly to the substrate 1 and/or tilt the micromirror 20 with respect to the substrate.

Abstract: A projector includes: a spatial light modulator, which receives pattern data, representing a pattern to be formed on a projection plane, and which spatially modulates incoming light in accordance with the pattern data; and a projection optical system for projecting the light, which has been reflected from the spatial light modulator, onto the projection plane in a reduced size. The spatial light modulator includes: an array of micromirrors to be driven in accordance with the pattern data; a substrate to support the array of micromirrors thereon; and a driving section, which is able to change the tilt of each micromirror with respect to the substrate and the displacement of the micromirror perpendicularly to the substrate on a micromirror-by-micromirror basis.

Abstract: According to the present invention, a moving element Ai such as an electrostatically driven actuator is displaced by supplying a drive signal thereto. Meanwhile, a displacement sensing section 6 senses its displacement and a calibrating section 15 automatically calibrates the correlation between the drive signal and the displacement, thereby compensating for a variation in the characteristic of the actuator with time and according to the environment. A switching section 7 selectively connects the single displacement sensing section to a plurality of moving elements Ai one after another, thereby cutting down the circuit for displacement sensing.

Abstract: A motor controlling device includes an acceleration detector for detecting an acceleration of a motor; a motor driver for supplying a driving current to the motor; a heat quantity calculator for calculating a heat quantity generated in the motor at least based on an output from the acceleration detector; and a motor controller for controlling the motor driver based on the heat quantity.

Abstract: To greatly increase the storage density of a storage apparatus, an electron beam E emitted from a cold cathode 101 is accelerated by an accelerating electrode 102, caused to converge by a convergence electrode 103, deflected by a deflection electrode 104 and applied to a minute region of a storage film 105. The storage film 105 includes, for example, a phase change film 105a. The film is rapidly heated and cooled to change into an amorphous state upon irradiation with an electron beam E with high energy, while being gradually cooled to change into a crystallized state upon irradiation with an electron beam E with approximately intermediate energy, thereby storing data. Upon irradiation with an electron beam E with low energy, the potential difference between a detection electrode 105b and an anode 105c is detected depending on the state, i.e., the amorphous or crystallized state, thereby reading stored data.

Abstract: A deformable mirror according to the invention comprises a substrate, a reflector which is supported by said substrate and the shape of whose reflecting areas is variable, and a plurality of drive units for independently driving a plurality of regions of the reflector and thereby controlling the distances between said plurality of regions and said substrate. Each of the plurality of drive units comprises a plurality of electrodes disposed over said substrate, a tilt member which is rotated round the axis of tilt by being attracted by the selected one of the plurality of electrodes, and an action member for varying the distance between a specific region of the reflector and said substrate following the motion of the tilt member.

Abstract: The objective of the present invention is to provide an optical disc which solves the problem that search for data recorded on an exchange-type medium such as an optical disc and the like and which allows search for data recorded in an optical disc to be performed with a simple operation. A transmitting/receiving antenna 231 is provided in an inner peripheral portion of an optical disc. An IC module 201 connected with transmission/reception IC 230 including ID information is formed and embedded into a substrate the optical disc. Thus, an optical disc incorporating an IC module which can be produced on a mass-production basis can be achieved.

Abstract: A circuit element driver includes a control section and a driving section. The control section receives a number n of instruction values of a first group (where n?2) and produces and outputs a number p of instruction values of a second group (where (n+1)?p<2n) in accordance with the n instruction values of the first group. The instruction values of the first group are issued to generate voltages to be applied to n two-terminal circuit elements. The driving section generates and outputs p drive voltages in accordance with the p instruction values of the second group. At least one of the p drive voltages changes with at least one of the instruction values of the first group and is applied in common to two or more of the circuit elements at one terminal thereof.

Abstract: There has been a trade-off between the rigidity and the mass of a movable section of a microactuator, and also between the rigidity of the movable section and the electrostatic force. A microactuator 100 includes: a base 1; a first comb electrode 2 supported by the base 1; a movable section 6 having a second comb electrode 8 opposing the first comb electrode 2, and at least one reinforcement rib 9 protruding toward the base 1; and an elastic supporting member 3 for supporting the movable section 6 so as to allow the movable section 6 to be displaced with respect to the base 1. The height of the second comb electrode 8 is different from the height of the at least one reinforcement rib 9.

Abstract: An optical detection system according to the present invention includes: a spatial light modulator for modulating the phase of incoming light; a photodetector having a plurality of photosensitive areas to receive the light of which the phase has been modulated by the spatial light modulator; a photosensor selecting section for selecting at least one of the photosensitive areas and activating the selected photosensitive area effectively; and a modulation control section for providing a modulation pattern, associated with the photosensitive area that has been selected by the photosensor selecting section, for the spatial light modulator.

Abstract: A deformable mirror according to the invention comprises a substrate, a reflector which is supported by said substrate and the shape of whose reflecting areas is variable, and a plurality of drive units for independently driving a plurality of regions of the reflector and thereby controlling the distances between said plurality of regions and said substrate. Each of the plurality of drive units comprises a plurality of electrodes disposed over said substrate, a tilt member which is rotated round the axis of tilt by being attracted by the selected one of the plurality of electrodes, and an action member for varying the distance between a specific region of the reflector and said substrate following the motion of the tilt member.

Abstract: An equipment management system is provided in which: two exchangeable record-medium recording units and an exchangeable record-medium regeneration unit are connected via an in-house network, so that they can communicate with each other; and one of these pieces of equipment is master equipment which manages resource information on the pieces of equipment, and the other pieces of equipment are slave equipment which is controlled by the master equipment.

Abstract: A deformable mirror according to the invention comprises a substrate, a reflector which is supported by said substrate and the shape of whose reflecting areas is variable, and a plurality of drive units for independently driving a plurality of regions of the reflector and thereby controlling the distances between said plurality of regions and said substrate. Each of the plurality of drive units comprises a plurality of electrodes disposed over said substrate, a tilt member which is rotated round the axis of tilt by being attracted by the selected one of the plurality of electrodes, and an action member for varying the distance between a specific region of the reflector and said substrate following the motion of the tilt member.

Abstract: A deformable mirror according to the present invention includes a substrate 1, a plurality of micromirrors 20, which are supported by the substrate 1 while being segmented from each other, and a plurality of driving sections, which drive the micromirrors 20 independently of each other, thereby controlling arrangements of the respective micromirrors 20 with respect to the substrate 1. Each of the driving sections includes a number of fixed electrodes 5 to 7, to which drive voltages are applicable independently of each other, and the same number of movable electrodes 13 to 15, which are provided so as to face the fixed electrodes 5 to 7. Each of the micromirrors 20 is coupled to at least two of the movable electrodes 13 to 15, which are associated with the micromirror 20.

Abstract: A motor controller includes DC motor, driving mechanism, voltage generator circuit and control unit. The driving mechanism moves an object having a predetermined mass against a load applied to the object and by transmitting a rotational force of the motor to the object. The voltage generator circuit generates first and second voltages. The first voltage is high enough to rotate the motor to such a degree as to get the object moved by the driving mechanism. The second voltage has the same polarity as the first voltage and has such amplitude as to prevent the motor from rotating either in a backward direction due to a cogging torque or in a forward direction. The control unit controls the voltage generator circuit in such a manner that the voltage generator circuit applies the second voltage to the motor after having applied the first voltage to the motor.

Abstract: A motor controlling device includes an acceleration detector for detecting an acceleration of a motor; a motor driver for supplying a driving current to the motor; a heat quantity calculator for calculating a heat quantity generated in the motor at least based on an output from the acceleration detector; and a motor controller for controlling the motor driver based on the heat quantity.

Abstract: A motor controlling device includes an acceleration detector for detecting an acceleration of a motor; a motor driver for supplying a driving current to the motor; a heat quantity calculator for calculating a heat quantity generated in the motor at least based on an output from the acceleration detector; and a motor controller for controlling the motor driver based on the heat quantity.

Abstract: A projector includes: a spatial light modulator, which receives pattern data, representing a pattern to be formed on a projection plane, and which spatially modulates incoming light in accordance with the pattern data; and a projection optical system for projecting the light, which has been reflected from the spatial light modulator, onto the projection plane in a reduced size. The spatial light modulator includes: an array of micromirrors to be driven in accordance with the pattern data; a substrate to support the array of micromirrors thereon; and a driving section, which is able to change the tilt of each micromirror with respect to the substrate and the displacement of the micromirror perpendicularly to the substrate on a micromirror-by-micromirror basis.

Abstract: A microelectromechanical system includes a substrate, a transducer supported on the substrate and a conductor layer, which is also supported on the substrate and electrically connected to the transducer. The transducer includes a portion made of silicon or a silicon compound. The conductor layer is made of a refractory conductor, which includes, as its main ingredient, at least one element selected from the group consisting of copper, gold and silver. At least a portion of the conductor layer is located at an intermediate level between the silicon or silicon compound portion of the transducer and the substrate.

Abstract: An apparatus for reading and/or writing data from/on a medium with a light beam includes: a light source for generating the light beam; an objective lens for focusing the beam onto the medium; a lens shift sensor for sensing how much the optical axis of the objective lens has shifted from that of the beam; a wavefront corrector, in which correcting elements are arranged as a two-dimensional array so as to locally correct the wavefront of the beam and to be driven independently of each other; a wavefront calculator for finding correlation between each coordinate on a cross section of the beam and the wavefront phase of the beam; a lens shift correction calculator for modifying the coordinate-wavefront phase correlation according to the output of the lens shift sensor; and a controller for controlling the wavefront corrector in accordance with the output of the lens shift correction calculator.