Abstract: An oxidation method for performing direct oxidation includes respectively supplying an oxidizing gas and a deoxidizing gas to the process field, and directly oxidizing a surface target substrates by use of oxygen radicals and hydroxyl group radicals generated by a reaction between the oxidizing gas and the deoxidizing gas. The oxidizing gas is supplied through an oxidizing gas nozzle extending over a vertical length corresponding to the process field and is spouted from a plurality of gas spouting holes formed on the oxidizing gas nozzle and arrayed over the vertical length corresponding to the process field. The deoxidizing gas is supplied through a plurality of deoxidizing gas nozzles having different heights respectively corresponding to a plurality of zones of the process field arrayed vertically and is spouted from gas spouting holes respectively formed on the deoxidizing gas nozzles each at height of a corresponding zone.

Abstract: An oxidation method for performing direct oxidation includes respectively supplying an oxidizing gas and a deoxidizing gas to the process field, and directly oxidizing a surface target substrates by use of oxygen radicals and hydroxyl group radicals generated by a reaction between the oxidizing gas and the deoxidizing gas. The oxidizing gas is supplied through an oxidizing gas nozzle extending over a vertical length corresponding to the process field and is spouted from a plurality of gas spouting holes formed on the oxidizing gas nozzle and arrayed over the vertical length corresponding to the process field. The deoxidizing gas is supplied through a plurality of deoxidizing gas nozzles having different heights respectively corresponding to a plurality of zones of the process field arrayed vertically and is spouted from gas spouting holes respectively formed on the deoxidizing gas nozzles each at height of a corresponding zone.

Abstract: An oxidation apparatus for a semiconductor process includes a process container having a process field configured to accommodate target substrates at intervals vertically, a heater configured to heat the process field; an exhaust system configured to exhaust gas from inside the process field; an oxidizing gas supply circuit configured to supply an oxidizing gas to the process field; and a deoxidizing gas supply circuit configured to supply a deoxidizing gas to the process field. The oxidizing gas supply circuit includes an oxidizing gas nozzle extending over a vertical length corresponding to the process field, and having gas spouting holes arrayed over the vertical length corresponding to the process field. The deoxidizing gas supply circuit includes deoxidizing gas nozzles having different heights respectively corresponding to zones of the process field arrayed vertically, and each having a gas spouting hole formed at height of a corresponding zone.

Abstract: An apparatus for manufacturing a fiber reinforcement body which is to be incorporated into a metal matrix in a fabrication technique based on a molten metal infiltration process for producing a metal matrix composite material are disclosed herein. The apparatus of the invention comprises means for supporting the chill members in longitudinally spaced relation to each other, means for forming uniformly distributed windings of the yarn on each of the chills, and means for forming similar windings of the yarn around, and extending between the chills in a way so as to connect them together.

Abstract: A method and an apparatus for manufacturing a fiber reinforcement body which is to be incorporated into a metal matrix in a fabrication technique based on a molten metal infiltration process for producing a metal matrix composite material are disclosed herein. The method according to the invention comprises preparing at least two metal insert chills each having the shape of a spool or reel, forming windings of a yarn of reinforcing fibers on each of the two chills, and forming windings of the yarn around, and extending between the two chill members so as to connect them together. The apparatus of the invention comprises means for supporting the chill members in longitudinally spaced relation to each other, means for forming uniformly distributed windings of the yarn on each of the chills, and means for forming similar windings of the yarn around, and extending between the chills in a way so as to connect them together.