Abstract: In a plasma processing apparatus, a first electrode is attached to a grounded evacuable processing chamber via an insulating material or a space and a second electrode disposed in parallel with the first electrode spaced apart therefrom in the processing chamber, the second electrode supporting a target substrate to face the first electrode. A first radio frequency power supply unit applies a first radio frequency power of a first frequency to the second electrode, and a second radio frequency power supply unit applies a second radio frequency power of a second frequency lower than the first frequency to the second electrode. Further, a processing gas supply unit supplies a processing gas to a processing space formed by the first and the second electrode and a sidewall of the processing chamber. Moreover, an inductor electrically is connected between the first electrode and a ground potential.

Abstract: A plasma processing apparatus includes a processing vessel capable of being vacuum evacuated; a first electrode disposed in the processing vessel in a state electrically floating via an insulating member or a space; a second electrode, arranged in the processing vessel to face and be in parallel to the first electrode with a specific interval, supporting a substrate to be processed; a processing gas supply unit for supplying a desired processing gas into a processing space surrounded by the first electrode, the second electrode and a sidewall of the processing vessel; and a first radio frequency power supply unit for applying a first radio frequency power to the second electrode to generate a plasma of the processing gas in the processing space. An electrostatic capacitance between the first electrode and the processing vessel is set such that a desired plasma density distribution is obtained for the generated plasma.

Abstract: A plasma processing apparatus includes a processing vessel capable of being vacuum evacuated; a first electrode installed in the processing vessel to be in a state electrically floating via an insulating member or a space; a second electrode disposed in the processing vessel to be in parallel to the first electrode with a specific interval, for supporting a target substrate thereon to face the first electrode; a processing gas supply unit for supplying a processing gas into a processing space between the first electrode, the second electrode and a sidewall of the processing vessel; and a first radio frequency power supply unit for applying a first radio frequency power to the second electrode to generate a plasma of the processing gas in the processing space. A protrusion projected toward the second electrode is formed at a central portion of the first electrode.

Abstract: A drink component thermally sterilized and flavors which has been removed of microorganism by filtration are formulated under aseptic conditions, and a mixture obtained is filled into containers. Milk-containing soft drinks are produced by a process including obtaining a first drink component containing milk and an emulsifier, sterilizing the first drink component at a high temperature and cooling the same, obtaining a second drink component not containing milk, sterilizing the second drink component at a high temperature and cooling the same, obtaining a flavor component removed of microorganism by filtration, and blending the cooled first drink component and the cooled second drink component under aseptic conditions.

Abstract: A drink component thermally sterilized and flavors which has been removed of microorganism by filtration are formulated under aseptic conditions, and a mixture obtained is filled into containers. Milk-containing soft drinks are produced by a process comprising obtaining a first drink component containing milk and an emulsifier, sterilizing the first drink component at a high temperature and cooling the same, obtaining a second drink component not containing milk, sterilizing the second drink component at a high temperature and cooling the same, obtaining a flavor component removed of microorganism by filtration, and blending the cooled first drink component and the cooled second drink component under aseptic conditions.

Abstract: The present invention relates to a method for producing high-quality drinks filled in containers, which is characterized in that containers are made to have a nitrogen gas atmosphere to be in a substantially deoxidated condition prior to being filled with drinks. According to the method of the present invention, the inside of empty containers is made in a substantially oxygen-free condition, and drinks as prepared in the presence of an inert gas or in a deoxidated condition are filled into the containers. Therefore, all steps constituting the method, including the step of preparing raw materials through the step of filling and sealing drinks in containers, can be conducted all the way in a deoxidated condition to give high-quality drinks filled in containers.