Patents by Inventor Yoshinori Isoda

Yoshinori Isoda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190242029
    Abstract: It is provided a layer of a nitride of a group 13 element having a first main face and second main face. The layer of the nitride of the group 13 element includes a first void-depleted layer provided on the side of the first main face, a second void-depleted layer provided on the side of the second main face, and the void-distributed layer provided between the first void-depleted layer and second void-depleted layer.
    Type: Application
    Filed: April 16, 2019
    Publication date: August 8, 2019
    Applicant: NGK INSULATORS, LTD.
    Inventors: Yoshinori ISODA, Suguru NOGUCHI, Tetsuya UCHIKAWA, Takayuki HIRAO, Takanao SHIMODAIRA, Katsuhiro IMAI
  • Patent number: 9981876
    Abstract: A mullite-containing sintered body according to the present invention contains mullite and at least one selected from the group consisting of silicon nitride, silicon oxynitride, and sialon. It is preferable that the mullite-containing sintered body have a thermal expansion coefficient of less than 4.3 ppm/° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1.5 ?m or less.
    Type: Grant
    Filed: March 9, 2017
    Date of Patent: May 29, 2018
    Assignee: NGK Insulators, Ltd.
    Inventors: Yoshinori Isoda, Yoshio Suzuki, Katsuhiro Inoue, Yuji Katsuda
  • Patent number: 9892950
    Abstract: A ceramic member 30 according to the present invention includes a ceramic base 32, which contains a solid solution Mg(Al)O(N) in which Al and N components are dissolved in magnesium oxide as the main phase, and an electrode 34 disposed on a portion of the ceramic base 32 and containing at least one of nitrides, carbides, carbonitrides, and metals as an electrode component. The ceramic base 32 may have an XRD peak of a (111), (200), or (220) plane of Mg(Al)O(N) measured using a CuK? ray at 2?=36.9 to 39, 42.9 to 44.8, or 62.3 to 65.2 degrees, respectively, between a magnesium oxide cubic crystal peak and an aluminum nitride cubic crystal peak.
    Type: Grant
    Filed: April 7, 2014
    Date of Patent: February 13, 2018
    Assignee: NGK Insulators, Ltd.
    Inventors: Morimichi Watanabe, Asumi Jindo, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda, Atsushi Watanabe
  • Patent number: 9776924
    Abstract: A mullite sintered body according to the present invention has an impurity element content of 1% by mass or less and contains sintered mullite grains having an average grain size of 8 ?m or less. When a surface of the mullite sintered body is finished by polishing, pores in the surface have an average largest pore length of 0.4 ?m or less. The surface preferably has a center line average surface roughness (Ra) of 3 nm or less. The surface preferably has a maximum peak height (Rp) of 30 nm or less. The number of pores in the surface is preferably 10 or less per unit area of 4 ?m×4 ?m.
    Type: Grant
    Filed: March 9, 2016
    Date of Patent: October 3, 2017
    Assignee: NGK Insulators, Ltd.
    Inventors: Yoshinori Isoda, Yosuke Sato, Yuji Katsuda
  • Publication number: 20170275207
    Abstract: A cordierite-based sintered body according to the present invention contains cordierite as a main component and silicon nitride or silicon carbide. The cordierite-based sintered body preferably has a thermal expansion coefficient less than 2.4 ppm; ° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1 ?m or less.
    Type: Application
    Filed: March 20, 2017
    Publication date: September 28, 2017
    Applicant: NGK INSULATORS, LTD.
    Inventors: Yoshinori ISODA, Yoshio SUZUKI, Katsuhiro INOUE, Yuji KATSUDA
  • Publication number: 20170275206
    Abstract: A mullite-containing sintered body according to the present invention contains mullite and at least one selected from the group consisting of silicon nitride, silicon oxynitride, and sialon. It is preferable that the mullite-containing sintered body have a thermal expansion coefficient of less than 4.3 ppm/° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1.5 ?m or less.
    Type: Application
    Filed: March 9, 2017
    Publication date: September 28, 2017
    Applicant: NGK INSULATORS, LTD.
    Inventors: Yoshinori ISODA, Yoshio SUZUKI, Katsuhiro INOUE, Yuji KATSUDA
  • Patent number: 9771303
    Abstract: In an X-ray diffraction diagram of a cordierite sintered body of the present invention, the ratio of the total of the maximum peak intensities of components other than cordierite components to the peak top intensity of the (110) plane of cordierite is 0.0025 or less. Since having a significantly small amount of different phases other than the cordierite components, this cordierite sintered body has a high surface flatness when the surface thereof is mirror-polished.
    Type: Grant
    Filed: May 20, 2016
    Date of Patent: September 26, 2017
    Assignee: NGK Insulators, Ltd.
    Inventors: Yoshinori Isoda, Yosuke Sato, Yuji Katsuda
  • Patent number: 9475733
    Abstract: The present invention provides a ceramic material comprising magnesium, gallium, lithium, and oxygen as main components, wherein a crystal phase of a solid solution attained by dissolving gallium oxide and lithium oxide in magnesium oxide is a main phase. An XRD peak of a (200) plane of the solid solution with CuK? rays preferably appears at 2?=42.91° or more which is larger than an angle at which a peak of a Cubic crystal of magnesium oxide appears, more preferably appears at 2?=42.91° to 43.28°, and further preferably appears at 2?=42.91° to 43.02°. In the ceramic material, a molar ratio Li/Ga of Li to Ga is preferably 0.80 or more and 1.20 or less.
    Type: Grant
    Filed: April 22, 2015
    Date of Patent: October 25, 2016
    Assignee: NGK Insulators, Ltd.
    Inventors: Yosuke Sato, Yoshinori Isoda, Yuji Katsuda
  • Publication number: 20160264471
    Abstract: In an X-ray diffraction diagram of a cordierite sintered body of the present invention, the ratio of the total of the maximum peak intensities of components other than cordierite components to the peak top intensity of the (110) plane of cordierite is 0.0025 or less. Since having a significantly small amount of different phases other than the cordierite components, this cordierite sintered body has a high surface flatness when the surface thereof is mirror-polished.
    Type: Application
    Filed: May 20, 2016
    Publication date: September 15, 2016
    Applicant: NGK INSULATORS, LTD.
    Inventors: Yoshinori ISODA, Yosuke SATO, Yuji KATSUDA
  • Patent number: 9437463
    Abstract: A heating apparatus includes a susceptor having a heating face of heating a semiconductor and a supporting part joined with a back face of the susceptor. The susceptor comprises a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2?=47 to 50° by CuK? X-ray.
    Type: Grant
    Filed: April 16, 2013
    Date of Patent: September 6, 2016
    Assignee: NGK Insulators, Ltd.
    Inventors: Nobuyuki Kondo, Morimichi Watanabe, Asumi Jindo, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda
  • Patent number: 9409824
    Abstract: A ceramic material of the present invention contains magnesium, zirconium, lithium, and oxygen as main components. The crystal phase of a solid solution obtained by dissolving zirconium oxide and lithium oxide in magnesium oxide is a main phase. The XRD peak of a (200) plane of the solid solution with CuK? rays preferably appears at 2?=42.89° or less which is smaller than an angle at which a peak of a cubic crystal of magnesium oxide appears. The XRD peak more preferably appears at 2?=42.38° to 42.89° and further preferably at 2?=42.82° to 42.89°. In the ceramic material, the molar ratio Li/Zr of Li to Zr is preferably in the range of 1.96 or more and 2.33 or less.
    Type: Grant
    Filed: April 22, 2015
    Date of Patent: August 9, 2016
    Assignee: NGK Insulators, Ltd.
    Inventors: Yosuke Sato, Yoshinori Isoda, Yuji Katsuda
  • Publication number: 20160185668
    Abstract: A mullite sintered body according to the present invention has an impurity element content of 1% by mass or less and contains sintered mullite grains having an average grain size of 8 ?m or less. When a surface of the mullite sintered body is finished by polishing, pores in the surface have an average largest pore length of 0.4 ?m or less. The surface preferably has a center line average surface roughness (Ra) of 3 nm or less. The surface preferably has a maximum peak height (Rp) of 30 nm or less. The number of pores in the surface is preferably 10 or less per unit area of 4 ?m×4 ?m.
    Type: Application
    Filed: March 9, 2016
    Publication date: June 30, 2016
    Inventors: Yoshinori ISODA, Yosuke SATO, Yuji KATSUDA
  • Patent number: 9287144
    Abstract: A heating apparatus 1A includes a susceptor part 9A having a heating face 9a of heating a semiconductor W, and a ring shaped part 6A provided in the outside of the heating face 9a. The ring shaped part 6A is composed of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2?=47 to 50° taken by using CuK? ray.
    Type: Grant
    Filed: April 16, 2013
    Date of Patent: March 15, 2016
    Assignee: NGK Insulators, Ltd.
    Inventors: Nobuyuki Kondo, Morimichi Watanabe, Asumi Jindo, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda
  • Patent number: 9245775
    Abstract: A heating apparatus 11A includes a susceptor having a heating face 12a of heating a semiconductor. The susceptor includes a plate shaped main body 13 and a surface corrosion resistant layer 14 including the heating face. The surface corrosion resistant layer 14 is made of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2?=47 to 50° by CuK? X-ray.
    Type: Grant
    Filed: April 17, 2013
    Date of Patent: January 26, 2016
    Assignee: NGK Insulators, Ltd.
    Inventors: Nobuyuki Kondo, Morimichi Watanabe, Asumi Jindo, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda
  • Patent number: 9202718
    Abstract: An electrostatic chuck 1A includes a susceptor 11A having an adsorption face 11a of adsorbing a semiconductor, and an electrostatic chuck electrode 4 embedded in the susceptor. The susceptor 11A includes a plate shaped main body 3 and a surface corrosion resistant layer 2 including the adsorption face 2. The surface corrosion resistant layer 2 is made of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2?=47 to 50° by CuK? X-ray.
    Type: Grant
    Filed: April 17, 2013
    Date of Patent: December 1, 2015
    Assignee: NGK Insulators, Ltd.
    Inventors: Kenichiro Aikawa, Morimichi Watanabe, Asumi Jindo, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda
  • Patent number: 9184081
    Abstract: Each of electrostatic chucks 1A to 1F includes a susceptor 11A having an adsorption face 11a of adsorbing a semiconductor, and an electrostatic chuck electrode 4 embedded in the susceptor. The susceptor includes a plate shaped main body 3 and a surface corrosion resistant layer 2 including the adsorption face 2. The surface corrosion resistant layer 2 is made of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising MgO—AlN solid solution wherein aluminum nitride is dissolved into magnesium oxide.
    Type: Grant
    Filed: April 24, 2013
    Date of Patent: November 10, 2015
    Assignee: NGK Insulators, Ltd.
    Inventors: Kenichiro Aikawa, Morimichi Watanabe, Asumi Jindo, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda
  • Publication number: 20150225298
    Abstract: A ceramic material of the present invention contains magnesium, zirconium, lithium, and oxygen as main components. The crystal phase of a solid solution obtained by dissolving zirconium oxide and lithium oxide in magnesium oxide is a main phase. The XRD peak of a (200) plane of the solid solution with CuK? rays preferably appears at 2?=42.89° or less which is smaller than an angle at which a peak of a cubic crystal of magnesium oxide appears. The XRD peak more preferably appears at 2?=42.38° to 42.89° and further preferably at 2?=42.82° to 42.89°. In the ceramic material, the molar ratio Li/Zr of Li to Zr is preferably in the range of 1.96 or more and 2.33 or less.
    Type: Application
    Filed: April 22, 2015
    Publication date: August 13, 2015
    Inventors: Yosuke SATO, Yoshinori ISODA, Yuji KATSUDA
  • Publication number: 20150225297
    Abstract: The present invention provides a ceramic material comprising magnesium, gallium, lithium, and oxygen as main components, wherein a crystal phase of a solid solution attained by dissolving gallium oxide and lithium oxide in magnesium oxide is a main phase. An XRD peak of a (200) plane of the solid solution with CuK? rays preferably appears at 2?=42.91° or more which is larger than an angle at which a peak of a Cubic crystal of magnesium oxide appears, more preferably appears at 2?=42.91° to 43.28°, and further preferably appears at 2?=42.91° to 43.02°. In the ceramic material, a molar ratio Li/Ga of Li to Ga is preferably 0.80 or more and 1.20 or less.
    Type: Application
    Filed: April 22, 2015
    Publication date: August 13, 2015
    Inventors: Yosuke SATO, Yoshinori ISODA, Yuji KATSUDA
  • Patent number: 8945390
    Abstract: A carbon membrane formed by carbonizing a phenol resin having at least one kind of atomic groups among a methylene bond, a dimethylene ether bond, and a methylol group, wherein the total mole content of the atomic groups is 100 to 180% with respect to the phenolic nuclei. A pervaporation separation method using the carbon membrane is also disclosed.
    Type: Grant
    Filed: September 17, 2012
    Date of Patent: February 3, 2015
    Assignee: NGK Insulators, Ltd.
    Inventors: Akimasa Ichikawa, Kenji Suzuki, Naoto Kinoshita, Yoshinori Isoda, Takafumi Kimata
  • Publication number: 20140290863
    Abstract: A ceramic member 30 according to the present invention includes a ceramic base 32, which contains a solid solution Mg(Al)O(N) in which Al and N components are dissolved in magnesium oxide as the main phase, and an electrode 34 disposed on a portion of the ceramic base 32 and containing at least one of nitrides, carbides, carbonitrides, and metals as an electrode component. The ceramic base 32 may have an XRD peak of a (111), (200), or (220) plane of Mg(Al)O(N) measured using a CiK? ray at 2?=36.9 to 39, 42.9 to 44.8, or 62.3 to 65.2 degrees, respectively, between a magnesium oxide cubic crystal peak and an aluminum nitride cubic crystal peak.
    Type: Application
    Filed: April 7, 2014
    Publication date: October 2, 2014
    Applicant: NGK Insulators, Ltd.
    Inventors: Morimichi WATANABE, Asumi JINDO, Yuji KATSUDA, Yosuke SATO, Yoshinori ISODA, Atsushi WATANABE