Patents by Inventor Yoshinori Isoda
Yoshinori Isoda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20160264471Abstract: In an X-ray diffraction diagram of a cordierite sintered body of the present invention, the ratio of the total of the maximum peak intensities of components other than cordierite components to the peak top intensity of the (110) plane of cordierite is 0.0025 or less. Since having a significantly small amount of different phases other than the cordierite components, this cordierite sintered body has a high surface flatness when the surface thereof is mirror-polished.Type: ApplicationFiled: May 20, 2016Publication date: September 15, 2016Applicant: NGK INSULATORS, LTD.Inventors: Yoshinori ISODA, Yosuke SATO, Yuji KATSUDA
-
Patent number: 9437463Abstract: A heating apparatus includes a susceptor having a heating face of heating a semiconductor and a supporting part joined with a back face of the susceptor. The susceptor comprises a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2?=47 to 50° by CuK? X-ray.Type: GrantFiled: April 16, 2013Date of Patent: September 6, 2016Assignee: NGK Insulators, Ltd.Inventors: Nobuyuki Kondo, Morimichi Watanabe, Asumi Jindo, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda
-
Patent number: 9409824Abstract: A ceramic material of the present invention contains magnesium, zirconium, lithium, and oxygen as main components. The crystal phase of a solid solution obtained by dissolving zirconium oxide and lithium oxide in magnesium oxide is a main phase. The XRD peak of a (200) plane of the solid solution with CuK? rays preferably appears at 2?=42.89° or less which is smaller than an angle at which a peak of a cubic crystal of magnesium oxide appears. The XRD peak more preferably appears at 2?=42.38° to 42.89° and further preferably at 2?=42.82° to 42.89°. In the ceramic material, the molar ratio Li/Zr of Li to Zr is preferably in the range of 1.96 or more and 2.33 or less.Type: GrantFiled: April 22, 2015Date of Patent: August 9, 2016Assignee: NGK Insulators, Ltd.Inventors: Yosuke Sato, Yoshinori Isoda, Yuji Katsuda
-
Publication number: 20160185668Abstract: A mullite sintered body according to the present invention has an impurity element content of 1% by mass or less and contains sintered mullite grains having an average grain size of 8 ?m or less. When a surface of the mullite sintered body is finished by polishing, pores in the surface have an average largest pore length of 0.4 ?m or less. The surface preferably has a center line average surface roughness (Ra) of 3 nm or less. The surface preferably has a maximum peak height (Rp) of 30 nm or less. The number of pores in the surface is preferably 10 or less per unit area of 4 ?m×4 ?m.Type: ApplicationFiled: March 9, 2016Publication date: June 30, 2016Inventors: Yoshinori ISODA, Yosuke SATO, Yuji KATSUDA
-
Patent number: 9287144Abstract: A heating apparatus 1A includes a susceptor part 9A having a heating face 9a of heating a semiconductor W, and a ring shaped part 6A provided in the outside of the heating face 9a. The ring shaped part 6A is composed of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2?=47 to 50° taken by using CuK? ray.Type: GrantFiled: April 16, 2013Date of Patent: March 15, 2016Assignee: NGK Insulators, Ltd.Inventors: Nobuyuki Kondo, Morimichi Watanabe, Asumi Jindo, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda
-
Patent number: 9245775Abstract: A heating apparatus 11A includes a susceptor having a heating face 12a of heating a semiconductor. The susceptor includes a plate shaped main body 13 and a surface corrosion resistant layer 14 including the heating face. The surface corrosion resistant layer 14 is made of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2?=47 to 50° by CuK? X-ray.Type: GrantFiled: April 17, 2013Date of Patent: January 26, 2016Assignee: NGK Insulators, Ltd.Inventors: Nobuyuki Kondo, Morimichi Watanabe, Asumi Jindo, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda
-
Patent number: 9202718Abstract: An electrostatic chuck 1A includes a susceptor 11A having an adsorption face 11a of adsorbing a semiconductor, and an electrostatic chuck electrode 4 embedded in the susceptor. The susceptor 11A includes a plate shaped main body 3 and a surface corrosion resistant layer 2 including the adsorption face 2. The surface corrosion resistant layer 2 is made of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2?=47 to 50° by CuK? X-ray.Type: GrantFiled: April 17, 2013Date of Patent: December 1, 2015Assignee: NGK Insulators, Ltd.Inventors: Kenichiro Aikawa, Morimichi Watanabe, Asumi Jindo, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda
-
Patent number: 9184081Abstract: Each of electrostatic chucks 1A to 1F includes a susceptor 11A having an adsorption face 11a of adsorbing a semiconductor, and an electrostatic chuck electrode 4 embedded in the susceptor. The susceptor includes a plate shaped main body 3 and a surface corrosion resistant layer 2 including the adsorption face 2. The surface corrosion resistant layer 2 is made of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising MgO—AlN solid solution wherein aluminum nitride is dissolved into magnesium oxide.Type: GrantFiled: April 24, 2013Date of Patent: November 10, 2015Assignee: NGK Insulators, Ltd.Inventors: Kenichiro Aikawa, Morimichi Watanabe, Asumi Jindo, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda
-
Publication number: 20150225298Abstract: A ceramic material of the present invention contains magnesium, zirconium, lithium, and oxygen as main components. The crystal phase of a solid solution obtained by dissolving zirconium oxide and lithium oxide in magnesium oxide is a main phase. The XRD peak of a (200) plane of the solid solution with CuK? rays preferably appears at 2?=42.89° or less which is smaller than an angle at which a peak of a cubic crystal of magnesium oxide appears. The XRD peak more preferably appears at 2?=42.38° to 42.89° and further preferably at 2?=42.82° to 42.89°. In the ceramic material, the molar ratio Li/Zr of Li to Zr is preferably in the range of 1.96 or more and 2.33 or less.Type: ApplicationFiled: April 22, 2015Publication date: August 13, 2015Inventors: Yosuke SATO, Yoshinori ISODA, Yuji KATSUDA
-
Publication number: 20150225297Abstract: The present invention provides a ceramic material comprising magnesium, gallium, lithium, and oxygen as main components, wherein a crystal phase of a solid solution attained by dissolving gallium oxide and lithium oxide in magnesium oxide is a main phase. An XRD peak of a (200) plane of the solid solution with CuK? rays preferably appears at 2?=42.91° or more which is larger than an angle at which a peak of a Cubic crystal of magnesium oxide appears, more preferably appears at 2?=42.91° to 43.28°, and further preferably appears at 2?=42.91° to 43.02°. In the ceramic material, a molar ratio Li/Ga of Li to Ga is preferably 0.80 or more and 1.20 or less.Type: ApplicationFiled: April 22, 2015Publication date: August 13, 2015Inventors: Yosuke SATO, Yoshinori ISODA, Yuji KATSUDA
-
Patent number: 8945390Abstract: A carbon membrane formed by carbonizing a phenol resin having at least one kind of atomic groups among a methylene bond, a dimethylene ether bond, and a methylol group, wherein the total mole content of the atomic groups is 100 to 180% with respect to the phenolic nuclei. A pervaporation separation method using the carbon membrane is also disclosed.Type: GrantFiled: September 17, 2012Date of Patent: February 3, 2015Assignee: NGK Insulators, Ltd.Inventors: Akimasa Ichikawa, Kenji Suzuki, Naoto Kinoshita, Yoshinori Isoda, Takafumi Kimata
-
Publication number: 20140290863Abstract: A ceramic member 30 according to the present invention includes a ceramic base 32, which contains a solid solution Mg(Al)O(N) in which Al and N components are dissolved in magnesium oxide as the main phase, and an electrode 34 disposed on a portion of the ceramic base 32 and containing at least one of nitrides, carbides, carbonitrides, and metals as an electrode component. The ceramic base 32 may have an XRD peak of a (111), (200), or (220) plane of Mg(Al)O(N) measured using a CiK? ray at 2?=36.9 to 39, 42.9 to 44.8, or 62.3 to 65.2 degrees, respectively, between a magnesium oxide cubic crystal peak and an aluminum nitride cubic crystal peak.Type: ApplicationFiled: April 7, 2014Publication date: October 2, 2014Applicant: NGK Insulators, Ltd.Inventors: Morimichi WATANABE, Asumi JINDO, Yuji KATSUDA, Yosuke SATO, Yoshinori ISODA, Atsushi WATANABE
-
Publication number: 20140199478Abstract: Provided is a method of producing a carbon membrane including dipping a porous support in a suspension of a phenolic resin or a suspension of a phenolic resin precursor, drying the resulting support to form a membrane made of the phenolic resin or the phenolic resin precursor, and heat treating and thereby carbonizing the resulting membrane into a carbon membrane.Type: ApplicationFiled: March 17, 2014Publication date: July 17, 2014Applicant: NGK Insulators, Ltd.Inventors: Akimasa ICHIKAWA, Tetsuya SAKAI, Naoto KINOSHITA, Yoshinori ISODA, Takafumi KIMATA
-
Patent number: 8764872Abstract: A honeycomb filter includes a honeycomb base material, plugged portions, and a porous collecting layer disposed on the surface of the partition wall parent material in at least the remaining cells. The collecting layer has a constitution in which a plurality of particles combine or intertwine with one another, and the collecting layer includes fibrous fiber particles as the plurality of particles, and includes the particles having an average fiber diameter of 0.1 to 15 ?m and an average aspect ratio of 3 or larger. An open area ratio of the surface of the collecting layer is 20% or larger.Type: GrantFiled: March 9, 2012Date of Patent: July 1, 2014Assignee: NGK Insulators, Ltd.Inventors: Yoshinori Isoda, Yoshio Kikuchi
-
Patent number: 8747508Abstract: There is provided a honeycomb filter including: a honeycomb base material; plugged portions; and a porous collecting layer disposed on the surface of the partition wall parent material in at least the remaining cells. The collecting layer has a constitution in which a plurality of particles combine or intertwine with one another, and the collecting layer includes flat plate-like particles as the plurality of particles. The plurality of particles are particles in which an average long diameter is 0.2 ?m or larger and smaller than 10 ?m, an average value of ratios (long diameters/short diameters) of the long diameters to the short diameters of the respective particles is smaller than 3, and an average value of ratios (the long diameters/thicknesses) of the long diameters to thicknesses of the respective particles is 3 or larger. An open area ratio of the surface of the collecting layer is 10% or larger.Type: GrantFiled: March 15, 2012Date of Patent: June 10, 2014Assignee: NGK Insulators, Ltd.Inventors: Yoshinori Isoda, Yoshio Kikuchi
-
Publication number: 20140031068Abstract: A regional information distribution server for distributing regional information to a mobile terminal includes a posted message obtaining unit configured to obtain posted messages related to a region from a server for storing posted messages; location information receiving unit configured to receive location information of the mobile terminal from the mobile terminal; an associated posted message obtaining unit configured to obtain a posted message associated with the location information of the mobile terminal from the posted messages obtained by the posted message obtaining unit; and an associated posted message distributing unit configured to distribute the posted message obtained by the associated posted message obtaining unit to the mobile terminal.Type: ApplicationFiled: April 6, 2012Publication date: January 30, 2014Applicant: NTT DOCOMO, INC.Inventors: Naoharu Yamada, Yuuichirou Miyazaki, Akira Ishii, Yoshinori Isoda
-
Patent number: 8597776Abstract: A ceramic material mainly contains magnesium, aluminum, oxygen, and nitrogen, in which the ceramic material has a magnesium-aluminum oxynitride phase serving as a main phase, wherein XRD peaks of the magnesium-aluminum oxynitride phase measured with CuK? radiation appear at at least 2?=47 to 50°.Type: GrantFiled: May 23, 2012Date of Patent: December 3, 2013Assignee: NGK Insulators, Ltd.Inventors: Morimichi Watanabe, Asumi Jindo, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda
-
Patent number: 8541328Abstract: A ceramic material according to the present invention mainly contains magnesium, aluminum, oxygen, and nitrogen, the ceramic material has the crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved in magnesium oxide, the crystal phase serving as a main phase. Preferably, XRD peaks corresponding to the (200) and (220) planes of the MgO—AlN solid solution measured with CuK? radiation appear at 2?=42.9 to 44.8° and 62.3 to 65.2°, respectively, the XRD peaks being located between peaks of cubic magnesium oxide and peaks of cubic aluminum nitride. More preferably, the XRD peak corresponding to the (111) plane appears at 2?=36.9 to 39°, the XRD peak being located between a peak of cubic magnesium oxide and a peak of cubic aluminum nitride.Type: GrantFiled: May 23, 2012Date of Patent: September 24, 2013Assignee: NGK Insulators, Ltd.Inventors: Morimichi Watanabe, Asumi Jindo, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda
-
Publication number: 20130235507Abstract: Electrostatic chucks (1A to 1F) are provided with: susceptors (11A to 11F) having an attracting surface (11a) that attracts and holds semiconductors; and electrostatic chuck electrodes (4) that are embedded in the susceptors. The susceptors are provided with plate-shape bodies (3) and surface corrosion-resistant layers (2) that face the attracting surface. The surface corrosion-resistant layer (2) is made from a ceramic material having magnesium, aluminum, oxygen and nitrogen as main components, the ceramic material having, as a main phase, an MgO—AlN solid solution crystal phase obtained by dissolving aluminum nitride in magnesium oxide.Type: ApplicationFiled: April 24, 2013Publication date: September 12, 2013Applicant: NGK Insulators, Ltd.Inventors: Kenichiro AIKAWA, Morimichi WATANABE, Asumi JINDO, Yuji KATSUDA, Yosuke SATO, Yoshinori ISODA
-
Publication number: 20130229746Abstract: An electrostatic chuck 1A includes a susceptor 11A having an adsorption face 11a of adsorbing a semiconductor, and an electrostatic chuck electrode 4 embedded in the susceptor. The susceptor 11A includes a plate shaped main body 3 and a surface corrosion resistant layer 2 including the adsorption face 2. The surface corrosion resistant layer 2 is made of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2?=47 to 50° by CuK? X-ray.Type: ApplicationFiled: April 17, 2013Publication date: September 5, 2013Applicant: NGK INSULATORS, LTD.Inventors: Kenichiro AIKAWA, Morimichi WATANABE, Asumi JINDO, Yuji KATSUDA, Yosuke SATO, Yoshinori ISODA