Abstract: In a VCSEL, a first multilayer film reflector, an active layer having a light emitting central region, a second multilayer film reflector, and a transverse mode adjustment layer are layered in this order. The first multilayer film reflector has a quadrangle current injection region with an intersection of diagonal lines corresponding to the light emitting central region. The second multilayer film reflector has a light emitting window provided in a region corresponding to one diagonal line of the current injection region and a pair of grooves provided with the light emitting window in between. The transverse mode adjustment layer is provided correspondingly to the light emitting window, and reflectance of a peripheral region thereof is lower than that of a central region thereof.

Abstract: A plurality of vertical-cavity surface-emitting laser devices each having a different lasing wavelength are arrayed by a simple structure and a manufacturing process without increasing device resistance. Each vertical-cavity surface-emitting laser device comprises a layered structure including an active layer and a current confinement layer. The area of current confinement portion in the laminate structures is set corresponding to a wavelength of laser light emitted from each vertical-cavity surface-emitting laser device. Thereby, the plurality of vertical-cavity surface-emitting laser devices emits laser light with different lasing wavelengths.

Abstract: A plurality of vertical-cavity surface-emitting laser devices each having a different lasing wavelength are arrayed by a simple structure and a manufacturing process without increasing device resistance. Each vertical-cavity surface-emitting laser device comprises a layered structure including an active layer and a current confinement layer. The area of current confinement portion in the laminate structures is set corresponding to a wavelength of laser light emitted from each vertical-cavity surface-emitting laser device. Thereby, the plurality of vertical-cavity surface-emitting laser devices emits laser light with different lasing wavelengths.

Abstract: A plane emission type semiconductor laser device includes, on an n-type GaAs stepped substrate, a laminate structure of a lower reflector, a lower clad layer, an active layer, an upper clad layer, an upper reflector, and a p-type contact layer. The stepped substrate includes a circular (100) plane upper level portion, a step portion, and an annular (100) plane lower level portion surrounding the upper level portion with the step portion therebetween.

Abstract: This invention provides a steam oxidation method of a matter to be oxidized with proper controllability and reproducibility. It is provided a steam oxidation method, where a semiconductor substrate (a matter to be oxidized) is housed in a steam oxidation reactor and is subjected to: a first step of supplying N2 gas to the reactor housing the semiconductor substrate and substituting the inside of the reactor with N2 gas; a second step of stopping supply of the N2 gas and supplying a steam-accompanied N2 gas, in which the N2 gas is accompanied with steam, to the reactor; a third step of increasing a temperature of the semiconductor substrate to 450° C. (a steam oxidation temperature) while supplying the steam-accompanied N2 gas; and a fourth step of holding the semiconductor substrate for a predetermined time at 450° C.

Abstract: A surface emitting semiconductor laser which can perform laser oscillation in a single peak beam like that in a single lateral mode and a manufacturing method which can easily manufacture such a laser at a high yield are provided. When a surface emitting semiconductor laser having a post type mesa structure is formed on an n-type semiconductor substrate, a mesa portion is formed and up to a p-side electrode and an n-side electrode are formed. Thereafter, a voltage is applied across the p-side and n-side electrodes and the laser is subjected to a steam atmosphere while extracting output light, thereby forming an Al oxide layer onto a p-type AlwGa1-wAs layer as a top layer of a p-type DBR layer and forming refractive index distribution like that of a concave lens.

Abstract: A steam oxidation apparatus is provided which is capable of ensuring a desirable controllability and reproducibility of the steam oxidation of an object-to-be-oxidized housed in the reactor, by suppressing condensation of the steam in the steam-accompanied inert gas supplied to the reactor. The steam oxidation apparatus 78 is an apparatus used for forming the current confinement structure into the surface-emitting laser element by subjecting the high-Al-content layer to steam oxidation, and is equipped with a reactor 42 for the steam oxidation, a steam-accompanied inert gas system for supplying a steam-accompanied inert gas to the reactor 42, an inert gas system for supplying an inert gas to the reactor 42, a reactor bypass pipe 52 for allowing the steam-accompanied inert gas system and inert gas system to bypass the reactor, and an exhaust system for discharging exhaust gas from the reactor 42.

Abstract: A small motor in a casing has a motor shaft, which has a worm outside the casing. A worm wheel is rotatably mounted to a housing for a reduction mechanism and meshes with the worm. The motor shaft is supported by radial bearings in the housing, and is supported at the bottom by a thrust bearing thereby simplifying the structure. Furthermore, a rotary disc is fixed to the motor shaft to rotate together with the motor shaft. An angle of rotation of the motor shaft is detected by a rotation detector via the rotary disc and converted to a digital signal by an electronic circuit.

Abstract: A plurality of vertical-cavity surface-emitting laser devices each having a different lasing wavelength are arrayed by a simple structure and a manufacturing process without increasing device resistance. Each vertical-cavity surface-emitting laser device comprises a layered structure including an active layer and a current confinement layer. The area of current confinement portion in the laminate structures is set corresponding to a wavelength of laser light emitted from each vertical-cavity surface-emitting laser device. Thereby, the plurality of vertical-cavity surface-emitting laser devices emits laser light with different lasing wavelengths.

Abstract: This invention provides a steam oxidation method of a matter to be oxidized with proper controllability and reproducibility. It is provided a steam oxidation method, where a semiconductor substrate (a matter to be oxidized) is housed in a steam oxidation reactor, which comprises: a step of supplying N2 gas to the reactor housing the semiconductor substrate and substituting the inside of the reactor with N2 gas; a step of stopping supply of the N2 gas and supplying a steam-accompanied N2 gas, in which the N2 gas is accompanied with steam, to the reactor; a step of increasing a temperature of the semiconductor substrate to 450° C. (a steam oxidation temperature) while supplying the steam-accompanied N2 gas; and a subsequent step of holding the semiconductor substrate for a predetermined time at 450° C.

Abstract: A surface light emitting semiconductor laser element, comprises a substrate, a lower reflector including a semiconductor multi-layer disposed on the substrate, an active layer disposed on the lower reflector, an upper reflector including a semiconductor multi-layer disposed on the active layer, a compound semiconductor layer having a first opening for exposing the upper reflector and extending over the upper reflector, and a metal film having a second opening for exposing the upper reflector disposed inside of the first opening and extending over the compound semiconductor layer, wherein the metal film and the compound semiconductor layer constitute a complex refractive index distribution structure where a complex refractive index is changed from the center of the second opening towards the outside. A method of emitting laser light in a single-peak transverse mode is also provided.

Abstract: A plane emission type semiconductor laser device includes, on an n-type GaAs stepped substrate, a laminate structure of a lower reflector, a lower clad layer, an active layer, an upper clad layer, an upper reflector, and a p-type contact layer. The stepped substrate includes a circular (100) plane upper level portion, a step portion, and an annular (100) plane lower level portion surrounding the upper level portion with the step portion therebetween.

Abstract: A small motor in a casing has a motor shaft, which has a worm outside the casing. A worm wheel is rotatably mounted to a housing for a reduction mechanism and meshes with the worm. The motor shaft is supported by radial bearings in the housing, and is supported at the bottom by a thrust bearing thereby simplifying the structure. Furthermore, a rotary disc is fixed to the motor shaft to rotate together with the motor shaft. An angle of rotation of the motor shaft is detected by a rotation detector via the rotary disc and converted to a digital signal by an electronic circuit.

Abstract: A stay housable type motor driven mirror to be attached, for example, to a car body has a drive gear rotatably driven by a drive apparatus, a clutch gear adapted to fit idlingly onto the support shaft and engage with the drive gear, a clutch holder fitted onto the support shaft beneath the clutch gear in order to rotate the support shaft by its rotation, a clutch mechanism having a concave face and a convex face, each so formed on a lower face of the clutch gear and an upper face of the clutch holder as to engage with each other, and a spring pressing the clutch gear to make the concave face and the convex face of the clutch mechanism engaged with each other. Consequently, it is possible to install the clutch mechanism at a side of follower of a large diameter gear and to increase a design allowance of clutch holding torque. In addition, a height of a bracket case is made shorten, design flexibility of stay attachment to the car body.

Abstract: Several embodiments of air-liquid cooled internal combustion engines for powering vehicles such as motor scooters. In each embodiment, the engine is provided with a finned cylinder for air cooling and a cylinder head having a liquid cooling jacket for water cooling. A radiator is provided for exchanging heat from the cylinder head cooling jacket and the atmosphere and a single fan circulates cooling air across both the radiator and the cylinder. In all embodiments, the flow across the fan, radiator and cylinder is in a series flow fashion. In many of the embodiments, the components are axially aligned. The fan is driven by the crankshaft either directly, through a gear train or through a flexible transmitter and in one case this flexible transmitter also drives the camshaft. A water pump is driven off of the camshaft for the liquid cooling system.

Abstract: A drive mechanism for an automatic rear-view mirror assembly of a motor-driven folding type. The driving mechanism includes an electric motor fixed on a mirror housing. The mirror housing is supported rotatably on a shaft fixed to a mirror base which is secured to a vehicle body in such a manner that it can be turned between a normal and retracted position by the drive mechanism. The drive mechanism includes a motor and a gear reducer composed of a plurality of planetary gear units. The planetary gear units include a sun gear connected to an output of the motor, and a group of transmission gears including a first spur gear mounted fixedly on the shaft and a second spur gear connected to an output shaft and meshed with the first spur gear. The reduction gear includes a first casing which houses the planetary gear units on the same shaft and has a ring gear common to these planetary gear units, provided on its inner circumferential surface.