Patents by Inventor Yoshio Watanabe

Yoshio Watanabe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210090926
    Abstract: A processing method of a workpiece in which the workpiece with a plate shape is processed by using a vacuum chamber is provided. In the processing method of a workpiece, a negative pressure is caused to act on a holding surface from a suction path, and suction holding of the workpiece is executed by a chuck table. Then, the gas pressure in the vacuum chamber is reduced to at least 50 Pa and at most 5000 Pa. Then, while the suction holding of the workpiece is executed, an inert gas in a plasma state is supplied to the workpiece, and voltages are applied to electrodes disposed in the chuck table to execute electrostatic adhesion of the workpiece by the chuck table. Then, a processing gas in a plasma state is supplied, and dry etching of the workpiece is executed.
    Type: Application
    Filed: September 17, 2020
    Publication date: March 25, 2021
    Inventors: Yoshio WATANABE, Hiroyuki TAKAHASHI, Kentaro WADA
  • Publication number: 20210028022
    Abstract: There is provided a processing method of a wafer. The processing method includes a frame unit preparation step of fixing the wafer in an opening of an annular frame by an adhesion tape to prepare a frame unit and a frame unit holding step of attracting and holding the wafer of the frame unit by an chuck table in an etching chamber with the intermediary of the adhesion tape. The processing method includes also a shielding step of covering the annular frame and (or) an annular region of the adhesion tape by a cover member to shield the annular frame and (or) the annular region from an external space and a dry etching step of supplying a gas to the etching chamber and executing dry etching for the wafer after execution of the frame unit holding step and the shielding step.
    Type: Application
    Filed: July 16, 2020
    Publication date: January 28, 2021
    Inventors: Hiroyuki TAKAHASHI, Kentaro WADA, Yoshio WATANABE, Susumu YOKOO
  • Patent number: 10563034
    Abstract: To provide a novel expanded polystyrene-based resin formed product that is excellent in expandability, mechanical strength, hardness, antistatic property, heat resistance and flame retardancy and does not generate squeak noises, and a production method thereof. Provided is expandable polystyrene-based resin particles having rubber and melamine cyanurate on the surfaces thereof.
    Type: Grant
    Filed: September 9, 2015
    Date of Patent: February 18, 2020
    Assignee: Takashima & Co., Ltd.
    Inventor: Yoshio Watanabe
  • Patent number: 10209103
    Abstract: A linear encoder includes a scale disposed within a housing and a scanning unit that is displaceable in a measuring direction relative to the scale. The scanning unit includes a scanning head disposed inside of the housing opposite to the scale such that the scale is scannable by the scanning head, as well as a mount to which the scanning head is fastened, and a driving component, via which the mount is coupled to a mounting base disposed outside of the housing. A vibration damper suppresses vibrations transversely to the measuring direction. The vibration damper is disposed on the mount or on the scanning head, and includes a damping mass and an elastic element. The damping mass is fastened by the elastic element to an attachment surface of the mount or of the scanning head.
    Type: Grant
    Filed: January 3, 2017
    Date of Patent: February 19, 2019
    Assignee: DR. JOHANNES HEIDENHAIN GMBH
    Inventors: Daisuke Shimoda, Katsumi Motoyuki, Yoshio Watanabe
  • Patent number: 10176972
    Abstract: A plasma etching apparatus includes: a vacuum chamber; a rotatable electrostatic chuck table for holding a workpiece in the vacuum chamber; a nozzle for supplying a plasma etching gas to part of the workpiece held on the electrostatic chuck table; a nozzle oscillating unit for oscillating the nozzle in such a manner as to describe a horizontal arcuate locus between a region corresponding to the center of the electrostatic chuck table and a region corresponding to the outer periphery of the electrostatic chuck table; and a control unit that controls the rotation amount of the electrostatic chuck table and the position of the nozzle to thereby position the nozzle into a region corresponding to an arbitrary part of the workpiece held on the electrostatic chuck table.
    Type: Grant
    Filed: May 10, 2016
    Date of Patent: January 8, 2019
    Assignee: DISCO Corporation
    Inventors: Yoshio Watanabe, Siry Milan, Hiroyuki Takahashi, Takeshi Seki
  • Patent number: 10177004
    Abstract: A method of processing a wafer includes a plasma etching step of supplying an etching gas in a plasma state to the wafer to remove processing strains, debris, or modified layers. The plasma etching step includes turning an etching gas into a plasma state outside of a vacuum chamber which houses the wafer therein and delivering the etching gas in the plasma state into the vacuum chamber through a supply nozzle connected to the vacuum chamber.
    Type: Grant
    Filed: March 15, 2018
    Date of Patent: January 8, 2019
    Assignee: Disco Corporation
    Inventors: Yoshio Watanabe, Siry Milan, Kenji Okazaki, Hiroyuki Takahashi, Yoshiteru Nishida, Satoshi Kumazawa
  • Publication number: 20180269068
    Abstract: A method of processing a wafer includes a plasma etching step of supplying an etching gas in a plasma state to the wafer to remove processing strains, debris, or modified layers. The plasma etching step includes turning an etching gas into a plasma state outside of a vacuum chamber which houses the wafer therein and delivering the etching gas in the plasma state into the vacuum chamber through a supply nozzle connected to the vacuum chamber.
    Type: Application
    Filed: March 15, 2018
    Publication date: September 20, 2018
    Inventors: Yoshio Watanabe, Siry Milan, Kenji Okazaki, Hiroyuki Takahashi, Yoshiteru Nishida, Satoshi Kumazawa
  • Publication number: 20170199060
    Abstract: A linear encoder includes a scale disposed within a housing and a scanning unit that is displaceable in a measuring direction relative to the scale. The scanning unit includes a scanning head disposed inside of the housing opposite to the scale such that the scale is scannable by the scanning head, as well as a mount to which the scanning head is fastened, and a driving component, via which the mount is coupled to a mounting base disposed outside of the housing. A vibration damper suppresses vibrations transversely to the measuring direction. The vibration damper is disposed on the mount or on the scanning head, and includes a damping mass and an elastic element. The damping mass is fastened by the elastic element to an attachment surface of the mount or of the scanning head.
    Type: Application
    Filed: January 3, 2017
    Publication date: July 13, 2017
    Inventors: Daisuke Shimoda, Katsumi Motoyuki, Yoshio Watanabe
  • Publication number: 20160343544
    Abstract: A plasma etching apparatus includes: a vacuum chamber; a rotatable electrostatic chuck table for holding a workpiece in the vacuum chamber; a nozzle for supplying a plasma etching gas to part of the workpiece held on the electrostatic chuck table; a nozzle oscillating unit for oscillating the nozzle in such a manner as to describe a horizontal arcuate locus between a region corresponding to the center of the electrostatic chuck table and a region corresponding to the outer periphery of the electrostatic chuck table; and a control unit that controls the rotation amount of the electrostatic chuck table and the position of the nozzle to thereby position the nozzle into a region corresponding to an arbitrary part of the workpiece held on the electrostatic chuck table.
    Type: Application
    Filed: May 10, 2016
    Publication date: November 24, 2016
    Inventors: Yoshio Watanabe, Siry Milan, Hiroyuki Takahashi, Takeshi Seki
  • Publication number: 20160068649
    Abstract: To provide a novel expanded polystyrene-based resin formed product that is excellent in expandability, mechanical strength, hardness, antistatic property, heat resistance and flame retardancy and does not generate squeak noises, and a production method thereof. Provided is expandable polystyrene-based resin particles having rubber and melamine cyanurate on the surfaces thereof.
    Type: Application
    Filed: September 9, 2015
    Publication date: March 10, 2016
    Applicant: Takashima & Co., Ltd.
    Inventor: Yoshio Watanabe
  • Patent number: 9121986
    Abstract: This microlens array comprises hexagonal field diaphragms in inverted-image-forming positions, i.e., microlenses, a plurality of which are arranged in the direction perpendicular to a direction of scanning, and from which rows of microlenses are configured. Further, for three rows of microlenses, microlens rows are arranged with offset by (a length S) in a direction perpendicular to the direction of scanning such that triangular portions of the hexagonal field diaphragms overlap in the direction of scanning. Furthermore, microlens row groups, which are configured from three microlens rows, are arranged with offset in the direction perpendicular to the direction of scanning in increments of a minute amount of shifting F (for example, 2 ?m). Thereby, this scanning exposure device using a microlens array is capable of preventing exposure ununiformity even in the direction perpendicular to the direction of scanning.
    Type: Grant
    Filed: July 27, 2012
    Date of Patent: September 1, 2015
    Assignee: V TECHNOLOGY CO., LTD.
    Inventors: Michinobu Mizumura, Yoshio Watanabe
  • Publication number: 20140168622
    Abstract: This microlens array comprises hexagonal field diaphragms in inverted-image-forming positions, i.e., microlenses, a plurality of which are arranged in the direction perpendicular to a direction of scanning, and from which rows of microlenses are configured. Further, for three rows of microlenses, microlens rows are arranged with offset by (a length S) in a direction perpendicular to the direction of scanning such that triangular portions of the hexagonal field diaphragms overlap in the direction of scanning. Furthermore, microlens row groups, which are configured from three microlens rows, are arranged with offset in the direction perpendicular to the direction of scanning in increments of a minute amount of shifting F (for example, 2 ?m). Thereby, this scanning exposure device using a microlens array is capable of preventing exposure ununiformity even in the direction perpendicular to the direction of scanning.
    Type: Application
    Filed: July 27, 2012
    Publication date: June 19, 2014
    Applicant: V Technology Co., Ltd.
    Inventors: Michinobu Mizumura, Yoshio Watanabe
  • Patent number: 8217276
    Abstract: A multilayer printed circuit board which can surely establish interlayer connection with low resistance. The multilayer printed circuit board comprises: a first substrate having a conductive pattern on one face and a non-penetration connection hole on the other face, for exposing the conductive pattern to outside; a second substrate having a conductive pattern formed on a face opposed to the other face of first substrate and a conductive bump on the conductive pattern integrally. The first substrate and the second substrate are integrated by engaging the bump of the second substrate with the connection hole of the first substrate and by intervening a conductive cement between the bumps and the conductive pattern exposed to outside from the connection holes.
    Type: Grant
    Filed: April 10, 2003
    Date of Patent: July 10, 2012
    Assignee: Sony Corporation
    Inventors: Kentaro Fujii, Yoshio Watanabe, Toru Takebe
  • Patent number: 8156908
    Abstract: An engine of the present invention comprises a valve body configured to open and close ports and formed in a cylinder head, a drive cam mechanism operable in association with a crankshaft by a driving power transmission mechanism, a pivot cam mechanism which is configured to be pivoted according to movement of the drive cam mechanism to cause the valve body to open and close and is configured to change a pivot state to change a lift characteristic of the valve; and a servo motor configured to change the pivot state of the pivot cam mechanism, wherein the servo motor is positioned at one end portion of the pivot cam mechanism such that the servo motor is distant from the driving power transmission mechanism.
    Type: Grant
    Filed: March 2, 2009
    Date of Patent: April 17, 2012
    Assignee: Kawasaki Jukogyo Kabushiki Kaisha
    Inventors: Toru Nishida, Kazuki Nagasawa, Yoshio Watanabe, Yoji Fukami, Toshiyuki Yanamoto
  • Patent number: 8118003
    Abstract: A pivot cam mechanism included in a valve operating system is configured such that a coupling pin is supported at a pivot member in a position closer to a camshaft than a control shaft, and the pivot member and the driven member are integrally pivotable according to the rotation of the drive cam while changing relative attitudes of the driven member and the pivot member. Positions and shapes of the drive cam, the driven member, and the pivot member are designed so that a valve maximum acceleration point at which an acceleration of a valve body is at a maximum is located in a front part of a valve acceleration period in which the acceleration of the valve body has a positive value while the drive cam is rotating once.
    Type: Grant
    Filed: March 11, 2009
    Date of Patent: February 21, 2012
    Assignee: Kawasaki Jukogyo Kabushiki Kaisha
    Inventors: Toru Nishida, Kazuki Nagasawa, Yoshio Watanabe, Yoji Fukami, Toshiyuki Yanamoto
  • Patent number: 7969081
    Abstract: A plasma display panel includes: pairs of electrodes having first electrode and second electrode which are arranged in parallel with each other; first substrate having dielectric layer formed so that the dielectric layer can cover the pairs of electrodes; and second substrate having third electrode which is arranged crossing the pairs of electrodes, and the plasma display panel further includes: floating electrodes, protruding onto a discharge space provided on dielectric layer at positions respectively corresponding to first electrode and second electrode, wherein floating electrodes are opposed to each other. Due to the above composition, the discharge starting voltage is reduced and the drive voltage is decreased. Accordingly, the light emitting efficiency is enhanced.
    Type: Grant
    Filed: September 7, 2006
    Date of Patent: June 28, 2011
    Assignee: Panasonic Corporation
    Inventors: Naoki Kosugi, Yukihiro Morita, Masanori Miura, Shinichiro Hashimoto, Yoshio Watanabe
  • Patent number: 7909596
    Abstract: The resin molding machine is capable of cleaning a resin molding die while performing a molding action without stopping the molding action and capable of securely removing contaminations from the resin molding die. The resin molding machine comprises: a press unit including a resin molding die; and a cleaning unit for cleaning a molding face of the resin molding die. The cleaning unit has an energy ray irradiation section, which irradiates an energy ray to the molding face of the resin molding die so as to easily peel off a contamination, which has been stuck on the molding face during a molding action, from the molding face. The contamination is stuck onto resin of a molded product when the product is resin-molded, so that the molded product is released from the resin molding die together with the contamination.
    Type: Grant
    Filed: November 20, 2007
    Date of Patent: March 22, 2011
    Assignee: Apic Yamada Corporation
    Inventors: Fumio Miyajima, Yoshio Watanabe, Tetsuya Nishizawa, Hiroaki Yamagishi, Mitsugi Yoshino, Takashi Katayama
  • Patent number: 7891328
    Abstract: A lubricating system for a valve operating system includes a valve operating system configured to reciprocate a valve for substantially opening and closing a port connected to a combustion chamber of an engine, and an ejecting device provided with an outlet from which a lubricating liquid is ejected. The valve operating system includes a drive cam, a driven member configured to contact the drive cam, a pivot member which is attached to the driven member and is configured to transmit movement of the driven member to the valve, and a relative position changing device configured to change relative positions of the driven member and the pivot member. The outlet of the ejecting device is oriented to face sliding surfaces of the driven member and the drive cam at least in a period which is a part of one rotation of the drive cam.
    Type: Grant
    Filed: October 23, 2008
    Date of Patent: February 22, 2011
    Assignee: Kawasaki Jukogyo Kabushiki Kaisha
    Inventors: Toru Nishida, Kazuki Nagasawa, Yoshio Watanabe, Yoji Fukami, Toshiyuki Yanamoto
  • Publication number: 20100224377
    Abstract: Low-pressure fire-extinguishing liquid is converted into mist. A fire-extinguishing spray nozzle (10) comprises a main body (30) and an obstacle (36). The main body (30) has a port (40) for radially injecting the fire-extinguishing liquid. The obstacle (36) has an opposing surface (60) and is opposite to the port (40). The opposing surface (60) is arranged within a radial-injection region (102) of the fire-extinguishing liquid radially injected from the port (40). One part of the fire-extinguishing liquid radially injected from the port (40) collides with the opposing surface (60) and is reflected therefrom. The other part of the fire-extinguishing liquid radially injected from the port (40) passes around the opposing surface (60). The one part of the fire-extinguishing liquid is reflected from the opposing surface (60) and the other part passes around the opposing surface (60).
    Type: Application
    Filed: June 16, 2008
    Publication date: September 9, 2010
    Applicant: Yamato Protec Corporation
    Inventors: Akimitsu Kikkawa, Yoshio Watanabe, Takahiro Ishihara, Takafumi Anezaki, Tatsuki Endo
  • Publication number: 20100203842
    Abstract: A wireless communication terminal apparatus 10 is comprised of a plurality of antennas Ant1 and Ant2, a switch circuit 11 for switching to one selected antenna among the plurality of antennas Ant1 and Ant2, for carrying out a communication, and a control unit 14 for selecting another antenna among antennas in a non-selection status in response to the status of the reception signal, in a case where a status of a reception signal of an antenna in a selection status is not in the predetermined condition, and regardless a status of the reception signal of the antennas in a non-selection status, and controlling the switch circuit for making the switching of another antenna in a non-selection status at a transmission.
    Type: Application
    Filed: July 30, 2008
    Publication date: August 12, 2010
    Applicant: KYOCERA CORPORATION
    Inventors: Koichi Tachikawa, Yoshio Watanabe