Patents by Inventor Yoshiya Hagimoto

Yoshiya Hagimoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10026769
    Abstract: The present technology relates to a semiconductor device and a solid-state imaging device of which crack resistance can be improved in a simpler way. The semiconductor device has an upper substrate that is constituted by a Si substrate and wiring layers laminated on the Si substrate and a second substrate that is constituted by a Si substrate and wiring layers laminated on the Si substrate and is joined to the upper substrate. In addition, a pad for wire bonding or probing is formed in the upper substrate, and pads for protecting corner or side parts of the pad for wire bonding or probing are radially laminated and provided in each of the wiring layers between the pad and the Si substrate of the lower substrate. The present technology can be applied to a solid-state imaging device.
    Type: Grant
    Filed: September 19, 2014
    Date of Patent: July 17, 2018
    Assignee: Sony Corporation
    Inventors: Yoshihisa Kagawa, Nobutoshi Fujii, Masanaga Fukasawa, Tokihisa Kaneguchi, Yoshiya Hagimoto, Kenichi Aoyagi, Ikue Mitsuhashi
  • Patent number: 9941326
    Abstract: The present technology includes: bonding a device formation side of a first substrate having a first device and a device formation side of a second substrate having a second device in opposition to each other; forming a protective film on at least an edge of the second substrate having the second device; and reducing a thickness of the first substrate.
    Type: Grant
    Filed: January 6, 2016
    Date of Patent: April 10, 2018
    Assignee: SONY CORPORATION
    Inventors: Nobutoshi Fujii, Kenichi Aoyagi, Yoshiya Hagimoto, Hayato Iwamoto
  • Patent number: 9911778
    Abstract: Disclosed herein is a semiconductor device, including: a first substrate including a first electrode, and a first insulating film configured from a diffusion preventing material for the first electrode and covering a periphery of the first electrode, the first electrode and the first insulating film cooperating with each other to configure a bonding face; and a second substrate bonded to and provided on the first substrate and including a second electrode joined to the first electrode, and a second insulating film configured from a diffusion preventing material for the second electrode and covering a periphery of the second electrode, the second electrode and the second insulating film cooperating with each other to configure a bonding face to the first substrate.
    Type: Grant
    Filed: August 4, 2016
    Date of Patent: March 6, 2018
    Assignee: Sony Corporation
    Inventors: Yoshihisa Kagawa, Kenichi Aoyagi, Yoshiya Hagimoto, Nobutoshi Fujii
  • Publication number: 20180045383
    Abstract: An electronic component mounting substrate 10A is configured of an electronic component 20, and a mounting substrate 10 mounting the electronic component 20 thereon, in which concave parts 24 are formed on a mounting surface 23 of the electronic component 20 opposite to the mounting substrate 10, a connection part 39 is exposed at the bottom of the concave part 24, and electronic component attachment parts 12 provided on the mounting substrate 10 are soldered to the connection parts 39 provided in the electronic component 20.
    Type: Application
    Filed: January 27, 2016
    Publication date: February 15, 2018
    Applicant: Sony Semiconductor Solutions Corporation
    Inventors: Toshiaki Hasegawa, Kenichi Aoyagi, Yoshiya Hagimoto, Nobutoshi Fujii
  • Publication number: 20180033809
    Abstract: The present technology relates to a solid-state image sensing device and an electronic device capable of reducing noises. The solid-state image sensing device includes: a photoelectric conversion unit; a charge holding unit for holding charges transferred from the photoelectric conversion unit; a first transfer transistor for transferring charges from the photoelectric conversion unit to the charge holding unit; and a light blocking part including a first light blocking part and a second light blocking part, in which the first light blocking part is arranged between a second surface opposite to a first surface as a light receiving surface of the photoelectric conversion unit and the charge holding unit, and covers the second surface, and is formed with a first opening, and the second light blocking part surrounds the side surface of the photoelectric conversion unit. The present technology is applicable to solid-state image sensing devices of backside irradiation type, for example.
    Type: Application
    Filed: February 12, 2016
    Publication date: February 1, 2018
    Inventors: Hiroshi TAYANAKA, Kentaro AKIYAMA, Yorito SAKANO, Takashi OINOUE, Yoshiya HAGIMOTO, Yusuke MATSUMURA, Naoyuki SATO, Yuki MIYANAMI, Yoichi UEDA, Ryosuke MATSUMOTO
  • Publication number: 20170354199
    Abstract: There is provided a semiconductor device, including a semiconductor substrate, an interlayer insulating layer formed on the semiconductor substrate, a bonding electrode formed on a surface of the interlayer insulating layer, and a metal film which covers an entire surface of a bonding surface including the interlayer insulating layer and the bonding electrode.
    Type: Application
    Filed: June 27, 2017
    Publication date: December 14, 2017
    Inventors: Yoshiya Hagimoto, Nobutoshi Fujii, Kenichi Aoyagi
  • Publication number: 20170263666
    Abstract: A semiconductor device includes a first substrate having an attaching surface on which first electrodes and a first insulating film are exposed, an insulating thin film that covers the attaching surface of the first substrate, and a second substrate which has an attaching surface on which second electrodes and a second insulating film are exposed and is attached to the first substrate in a state in which the attaching surface of the second substrate and the attaching surface of the first substrate are attached together sandwiching the insulating thin film therebetween, and the first electrodes and the second electrodes deform and break a part of the insulating thin film so as to be directly electrically connected to each other.
    Type: Application
    Filed: May 30, 2017
    Publication date: September 14, 2017
    Inventors: Nobutoshi Fujii, Yoshiya Hagimoto, Kenichi Aoyagi, Yoshihisa Kagawa
  • Patent number: 9716076
    Abstract: There is provided a semiconductor device, including a semiconductor substrate, an interlayer insulating layer formed on the semiconductor substrate, a bonding electrode formed on a surface of the interlayer insulating layer, and a metal film which covers an entire surface of a bonding surface including the interlayer insulating layer and the bonding electrode.
    Type: Grant
    Filed: August 17, 2015
    Date of Patent: July 25, 2017
    Assignee: Sony Corporation
    Inventors: Yoshiya Hagimoto, Nobutoshi Fujii, Kenichi Aoyagi
  • Patent number: 9666627
    Abstract: A semiconductor device includes a first substrate having an attaching surface on which first electrodes and a first insulating film are exposed, an insulating thin film that covers the attaching surface of the first substrate, and a second substrate which has an attaching surface on which second electrodes and a second insulating film are exposed and is attached to the first substrate in a state in which the attaching surface of the second substrate and the attaching surface of the first substrate are attached together sandwiching the insulating thin film therebetween, and the first electrodes and the second electrodes deform and break a part of the insulating thin film so as to be directly electrically connected to each other.
    Type: Grant
    Filed: October 12, 2015
    Date of Patent: May 30, 2017
    Assignee: Sony Corporation
    Inventors: Nobutoshi Fujii, Yoshiya Hagimoto, Kenichi Aoyagi, Yoshihisa Kagawa
  • Publication number: 20160343763
    Abstract: Disclosed herein is a semiconductor device, including: a first substrate including a first electrode, and a first insulating film configured from a diffusion preventing material for the first electrode and covering a periphery of the first electrode, the first electrode and the first insulating film cooperating with each other to configure a bonding face; and a second substrate bonded to and provided on the first substrate and including a second electrode joined to the first electrode, and a second insulating film configured from a diffusion preventing material for the second electrode and covering a periphery of the second electrode, the second electrode and the second insulating film cooperating with each other to configure a bonding face to the first substrate.
    Type: Application
    Filed: August 4, 2016
    Publication date: November 24, 2016
    Inventors: Yoshihisa Kagawa, Kenichi Aoyagi, Yoshiya Hagimoto, Nobutoshi Fujii
  • Publication number: 20160343762
    Abstract: Disclosed herein is a semiconductor device, including: a first substrate including a first electrode, and a first insulating film configured from a diffusion preventing material for the first electrode and covering a periphery of the first electrode, the first electrode and the first insulating film cooperating with each other to configure a bonding face; and a second substrate bonded to and provided on the first substrate and including a second electrode joined to the first electrode, and a second insulating film configured from a diffusion preventing material for the second electrode and covering a periphery of the second electrode, the second electrode and the second insulating film cooperating with each other to configure a bonding face to the first substrate.
    Type: Application
    Filed: August 4, 2016
    Publication date: November 24, 2016
    Inventors: Yoshihisa Kagawa, Kenichi Aoyagi, Yoshiya Hagimoto, Nobutoshi Fujii
  • Patent number: 9443802
    Abstract: Disclosed herein is a semiconductor device, including: a first substrate including a first electrode, and a first insulating film configured from a diffusion preventing material for the first electrode and covering a periphery of the first electrode, the first electrode and the first insulating film cooperating with each other to configure a bonding face; and a second substrate bonded to and provided on the first substrate and including a second electrode joined to the first electrode, and a second insulating film configured from a diffusion preventing material for the second electrode and covering a periphery of the second electrode, the second electrode and the second insulating film cooperating with each other to configure a bonding face to the first substrate.
    Type: Grant
    Filed: May 21, 2015
    Date of Patent: September 13, 2016
    Assignee: Sony Corporation
    Inventors: Yoshihisa Kagawa, Kenichi Aoyagi, Yoshiya Hagimoto, Nobutoshi Fujii
  • Publication number: 20160233264
    Abstract: The present technology relates to a semiconductor device and a solid-state imaging device of which crack resistance can be improved in a simpler way. The semiconductor device has an upper substrate that is constituted by a Si substrate and wiring layers laminated on the Si substrate and a second substrate that is constituted by a Si substrate and wiring layers laminated on the Si substrate and is joined to the upper substrate. In addition, a pad for wire bonding or probing is formed in the upper substrate, and pads for protecting corner or side parts of the pad for wire bonding or probing are radially laminated and provided in each of the wiring layers between the pad and the Si substrate of the lower substrate. The present technology can be applied to a solid-state imaging device.
    Type: Application
    Filed: September 19, 2014
    Publication date: August 11, 2016
    Applicant: SONY CORPORATION
    Inventors: Yoshihisa KAGAWA, Nobutoshi FUJII, Masanaga FUKASAWA, Tokihisa KANEGUCHI, Yoshiya HAGIMOTO, Kenichi AOYAGI, Ikue MITSUHASHI
  • Patent number: 9362106
    Abstract: A wafer is held horizontally and rotated by a substrate holding mechanism. An aqueous alkaline solution is supplied to a wafer by a nozzle and caused to flow from a central portion to a peripheral edge portion of the wafer, thereby etching the wafer. An amount of oxygen, which is equal to or more than the amount of oxygen in atmospheric air involved in the aqueous alkaline solution flowing on the wafer, is previously dissolved in the aqueous alkaline solution.
    Type: Grant
    Filed: June 5, 2013
    Date of Patent: June 7, 2016
    Assignees: Sony Corporation, Tokyo Electron Limited
    Inventors: Hayato Iwamoto, Yoshiya Hagimoto, Tomoki Tetsuka, Shinichiro Shimomura, Teruomi Minami, Hiroki Sakurai, Hirotaka Maruyama, Yosuke Kawabuchi, Hiroshi Tanaka
  • Publication number: 20160141267
    Abstract: There is provided a semiconductor device, including a semiconductor substrate, an interlayer insulating layer formed on the semiconductor substrate, a bonding electrode formed on a surface of the interlayer insulating layer, and a metal film which covers an entire surface of a bonding surface including the interlayer insulating layer and the bonding electrode.
    Type: Application
    Filed: August 17, 2015
    Publication date: May 19, 2016
    Inventors: Yoshiya Hagimoto, Nobutoshi Fujii, Kenichi Aoyagi
  • Publication number: 20160118436
    Abstract: The present technology includes: bonding a device formation side of a first substrate having a first device and a device formation side of a second substrate having a second device in opposition to each other; forming a protective film on at least an edge of the second substrate having the second device; and reducing a thickness of the first substrate.
    Type: Application
    Filed: January 6, 2016
    Publication date: April 28, 2016
    Inventors: Nobutoshi Fujii, Kenichi Aoyagi, Yoshiya Hagimoto, Hayato Iwamoto
  • Patent number: 9263496
    Abstract: The present technology includes: bonding a device formation side of a first substrate having a first device and a device formation side of a second substrate having a second device in opposition to each other; forming a protective film on at least an edge of the second substrate having the second device; and reducing a thickness of the first substrate.
    Type: Grant
    Filed: January 8, 2013
    Date of Patent: February 16, 2016
    Assignee: SONY CORPORATION
    Inventors: Nobutoshi Fujii, Kenichi Aoyagi, Yoshiya Hagimoto, Hayato Iwamoto
  • Publication number: 20160035777
    Abstract: A semiconductor device includes a first substrate having an attaching surface on which first electrodes and a first insulating film are exposed, an insulating thin film that covers the attaching surface of the first substrate, and a second substrate which has an attaching surface on which second electrodes and a second insulating film are exposed and is attached to the first substrate in a state in which the attaching surface of the second substrate and the attaching surface of the first substrate are attached together sandwiching the insulating thin film therebetween, and the first electrodes and the second electrodes deform and break a part of the insulating thin film so as to be directly electrically connected to each other.
    Type: Application
    Filed: October 12, 2015
    Publication date: February 4, 2016
    Inventors: Nobutoshi Fujii, Yoshiya Hagimoto, Kenichi Aoyagi, Yoshihisa Kagawa
  • Patent number: 9190275
    Abstract: A semiconductor device includes a first substrate having an attaching surface on which first electrodes and a first insulating film are exposed, an insulating thin film that covers the attaching surface of the first substrate, and a second substrate which has an attaching surface on which second electrodes and a second insulating film are exposed and is attached to the first substrate in a state in which the attaching surface of the second substrate and the attaching surface of the first substrate are attached together sandwiching the insulating thin film therebetween, and the first electrodes and the second electrodes deform and break a part of the insulating thin film so as to be directly electrically connected to each other.
    Type: Grant
    Filed: March 12, 2014
    Date of Patent: November 17, 2015
    Assignee: SONY CORPORATION
    Inventors: Nobutoshi Fujii, Yoshiya Hagimoto, Kenichi Aoyagi, Yoshihisa Kagawa
  • Patent number: 9147650
    Abstract: There is provided a semiconductor device, including a semiconductor substrate, an interlayer insulating layer formed on the semiconductor substrate, a bonding electrode formed on a surface of the interlayer insulating layer, and a metal film which covers an entire surface of a bonding surface including the interlayer insulating layer and the bonding electrode.
    Type: Grant
    Filed: January 31, 2013
    Date of Patent: September 29, 2015
    Assignee: Sony Corporation
    Inventors: Yoshiya Hagimoto, Nobutoshi Fujii, Kenichi Aoyagi