Abstract: A printing apparatus comprises: a control unit that controls to apply a voltage from a power supply unit to printing elements for respective groups each including a plurality of printing elements; a memory that stores, for the respective groups, accumulated times during which the voltage is applied; a obtaining unit that obtains the accumulated times for the respective groups; a measurement unit that measures, for the respective groups, voltage application times during which the voltage is applied for a predetermined time; a calculation unit that adds the voltage application times to the accumulated times; an updating processing unit that writes, in the memory, the accumulated times obtained for the respective groups by the addition; and an inhibition processing unit that performs processing for inhibiting use of a printhead when one of the accumulated times obtained for the respective groups by the addition has exceeded a predetermined time.

Abstract: A substrate transporting device and method 19 transports a plurality of wafers W standing upright in a row, from a previous process, i.e., a cleaning process. A substrate holder 40 is carried by a transporting device 50 arranged outside a drying chamber 20. The substrate holder 40 receives the wafers W from the substrate transporting device 19 while maintaining a posture of the wafers W. The transporting device 50 lowers the substrate holder 40 and sequentially moves it into the drying chamber 20 through an unloading and loading port 21 above the drying chamber 20. Thereafter, the substrate holder 40 is fixed to a rotor 30. After closing the unloading and loading port 21 with a lid body 25, the rotor 30 is rotated. In this way, moisture sticking to surfaces of the wafers W is eliminated.

Abstract: A spin dryer for centrifugally removing water droplets attached to a plurality of substrates comprises a rotor having a main shaft formed in a lower portion, substrate holding means for holding a plurality of substrates such that main surfaces of the substrates are perpendicular to the main shaft of the rotor, the holding means being positioned in symmetry with respect to the main shaft of the rotor and rotated together with the rotor, a treating vessel surrounding the rotor and the substrate holding means, an air inlet port formed in an upper portion of the treating vessel for introducing air into the treating vessel, and an exhaust port formed in a side portion of the treating vessel in a manner to extend upward from the bottom portion of the treating vessel to reach at least the height position of the rotor.

Abstract: A transfer machine having a pair of holding members disposed opposite to each other to hold a plurality of objects arranged at their peripheral edges. A drive mechanism selectively moves the holding members toward and away from each other in order to selectively hold and release the objects by the holding members. A transfer mechanism transfers the objects and the holding members to a bath in order to process the objects in the bath. Each of the holding members has a plurality of holding notches for holding the peripheral edges of the objects, and the notches are disposed in upper and lower holders which are arranged parallel to each other. The holding notches of the upper holder have a first taper part positioned adjacent an opening of the notch and a second taper part positioned adjacent a notch bottom, and the first taper part has an opening angle larger than an opening angle of the second taper part.

Abstract: A substrates-washing apparatus includes a process vessel in which washing solution is stored to wash a plurality of substrates, a boat for holding the substrates parallel to one another in the process vessel, solution supply openings formed in the bottom of the process vessel, a solution supply system communicated with the solution supply openings to supply washing solution into the process vessel through the solution supply openings, and a straightening plate arranged between the substrates held on the boat and the solution supply openings in the bottom of the process vessel and provided with a plurality of apertures through which washing solution passes. The apertures form plural lines in the longitudinal direction of the straightening plate, the apertures in each line are arranged to correspond to the substrates alternately, and the apertures in one line are shifted from those in the other adjacent line.

Abstract: A spindrier comprises a box enclosing a plurality of wafers, a motor for rotating the wafers in the box, upper and lower clamp bars for holding the wafers face to face and substantially perpendicular to a rotating shaft of rotating means, and gas introducing and discharging mechanisms for generating a flow of clean gas in the box. A sectional area of an open bottom of the box is smaller than a sectional area of an open top of the box, and the gas flows from the open top to the open bottom.

Abstract: A spindrier according to the present invention includes a box body enclosing a plurality of wafers, a rotor for holding the wafers in the box body and rotated by a motor, and upper and lower clamp bars for holding the wafers face to face with their faces directed perpendicular to rotating shafts of the rotor. The lower clamp bars are connected and fixed to the rotating shafts so as to hold lower rim portions of the wafers thereon when the wafers are set in the rotor. The upper clamp bars are connected to one of the rotating shafts at their base ends so that they can be swung vertically erect and also and horizontally relative to the rotating shaft and they are locked to the other rotating shaft at their front ends when they are swung horizontally. They include a mechanism for swinging them, a locking mechanism for locking their front ends to the other rotating shaft, and an unlocking mechanism for releasing their front ends from the other rotating shaft.

Abstract: A washing system comprising a wafer washing section having plural chemical washing vessels, plural water washing vessels and a drier, a cassette washing section having a water washing device and a drier, a loader section for taking out the wafers from the cassettes and loading the wafers into the wafer washing section, an unloader section for returning the washed wafers in the washed cassette and unloading the wafers from the wafer washing section, a wafer transfer device the wafers in the wafer washing section, a cassette lifter for carrying the cassettes from the loader section to the cassette washing section, and a wire drive unit for carrying the cassettes in the cassette washing section.

Abstract: A terminal unit for use in an information transmission system disposed between an information transmission line in the information transmission system constituted of signal lines for transmitting a signal by conduction therethrough of a direct current having positive polarity and negative polarity and controlled equipment as one terminal of the system, including at least a coupling circuit for transmitting and receiving a signal to and from the transmission line by converting the signal into a direct current as aforesaid and converting such a direct current into the signal, a transmission control device controlling transmission and reception of a signal according to a protocol for signal transmission, and a transmission circuit and a reception circuit disposed between the coupling circuit and transmission control device for making signal transmission and reception, respectively, and further, comprising a polarity detection circuit for detecting polarity of the direct current voltage supplied from the signal l

Abstract: A home control system includes a pair or plural pairs of home information transmission path (referred to as home bus); information outlets provided at the home bus which serve as connection nodes for appliances; and a plurality of room monitor controllers (hereinafter referred to as RMC) each having a built-in interface unit which has a control function element peculiar to respective rooms and carries out communication control between the information outlets and the appliances.

Abstract: A separated-unit type air conditioner including indoor, outdoor and remote controller units all of which are provided at different locations. Each of the units is provided with a single pair of connecting terminals to which a control device such as a microcomputer is coupled. Data transmission between units is carried out on a single pair of connecting terminals utilizing a high frequency modulated signal. A DC power supply is provided in one of the indoor or outdoor units which supplies DC power to the other units upon the single pair of control lines.