Abstract: Also, a plurality of connecting portions are selected from these connecting portions, and the connection configuration shown in the first or second embodiment may be used in the selected connecting portions. For example, the connection configuration shown in the first or second embodiment may be used in the connecting portion between the vacuum vessel 2 and the casing 3 and the connecting portion between the casing 3 and the base 10, or may be used in the connecting portion between the vacuum vessel 2 and the casing 3 and the connecting portion between the casing 8 and the casing 9, or may be used in the connecting portion between the casing 8 and the casing 9 and the connecting portion between the casing 3 and the base 10. That is, the connection configuration shown in the first or second embodiment can be used by changing the combination of connecting portions to which the connecting configuration is applied.

Abstract: A turbo-molecular pump has a main body and a pump case for covering the main body. A first flange is integrally formed with the pump case for connection to a second flange integrally with a vacuum chamber. The flange of the pump case and the flange of the vacuum chamber are integrally connected together with fastening bolts. A clamping structure separately clamps the first and second flanges together by surrounding a portion of each of the first and second flanges.

Abstract: A vacuum pump is removably connected to the underside of a chamber for exhausting gas molecules from the chamber. The vacuum pump has a pump case having a flange extending circumferentially around a top portion thereof, a suction port and an exhaust port. Stator blades are fixedly mounted within the pump case, and a rotor is rotatably mounted in the pump case and has rotor blades alternately disposed with respect to the stator blades. A driving motor rotationally drives the rotor so that the rotating rotor blades coact with the stator blades to evacuate gas molecules from the chamber and pump the gas molecules from the suction port to the exhaust port. Bolt insertion holes are formed in the flange and each hole has a smaller diameter portion opening at a lower surface of the flange and a larger diameter portion opening at an upper surface of the flange which faces the underside of the chamber.

Abstract: The present invention provides a vacuum pump which reduces a damaging torque produced when a rotor rotating at high-speed crashes into a screw stator or the like. The vacuum pump has a rigid ring disposed around the screw stator such that a shock load from the screw stator causes the rigid ring to rotate. When a brittle facture occurs in the rotor rotating at high-speed, for example, and a part of the rotor crashes into the screw stator, a rotating torque, i.e., a damaging torque causing the entire vacuum pump to rotate is likely to occur. However, this damaging torque is absorbed by the rotation of the rigid ring and eventually subsides.

Abstract: The present invention provides a vacuum pump in which a damaging torque produced when a rotating rotor crashes into the inner wall of a pump case, is prevented to transfer to a vacuum chamber so as to protect the vacuum chamber. Bolt-holes of flange portions, through which the vacuum pump and the vacuum chamber and also the pump case and a base member disposed below the pump case are fastened, respectively, are formed so as to have larger diameters than the shank diameters of corresponding bolts by 20% or more. With this arrangement, when the entire vacuum turns moved by the damaging torque, the pump case slips relative to the vacuum chamber and the base member by the gaps between the pump case-base member fastening bolt-holes and the pump case-base member fastening bolts. As a result, the damaging torque is absorbed and is prevented to transfer to the vacuum chamber.

Abstract: In a flange 61 provided at the suction port of a molecular pump, a hollow portion 72 is provided adjacently to a bolt hole 14. The hollow portion 72 is a through hole penetrating the flange 61. Thereby, a thin-walled portion 71 is formed between the bolt hole 14 and the hollow portion 72. If a shock in the direction of rotation of a rotor portion is provided to the molecular pump, for example, by the destruction of the rotor portion, the flange 61 slides in the direction of rotation of the rotor portion together with the molecular pump. Thereupon, a bolt fixing the flange 61 to a flange of a vacuum system hits the thin-walled portion 71, so that the thin-walled portion 71 is plastically deformed in the direction of arrow B. Thus, by the plastic deformation of the thin-walled portion 71, energy for rotating the molecular pump is consumed as energy for plastically deforming the thin-walled portion 71, so that the shock provided to the molecular pump is cushioned.

Abstract: To provide a vacuum pump used for semiconductor manufacturing, which has improved reliability and safety and in which damages to a pump casing, peripheral apparatuses, or the like are prevented from occurring by preventing the occurrence of rotor breakage due to corrosion. A balancer is provided in the outer circumferential surface of the rotor so as to face the inside of the gas passageway. A balancer main body is supported against the outer circumferential surface of a rotor through a fragile portion that is weak with respect to corrosive gasses, the fragile portion of the balancer is damaged by corrosion before any corrosive gas influence appears in rotor blades or the rotor, and the balancer falls off, thus forcibly causing an unbalanced state to appear in the rotor. The balancer thus possesses a function for balancing the rotor and a corrosion detecting function.

Abstract: A vacuum pump has an end portion and a flange extending from a periphery of the end portion. The flange portion has first and second opposed main surfaces, and first and second bolt insertion holes extending through the first and second main surfaces. An auxiliary ring is connected to the first main surface of the flange portion of the pump case. The auxiliary ring has first and second opposed main surfaces, and a third bolt insertion hole extending through the first and second main surfaces of the auxiliary ring. An auxiliary ring attaching bolt extends through the third bolt insertion hole for connecting the auxiliary ring to a chamber housing disposed opposite the end portion of the pump case. A pump case supporting bolt extends through the second bolt insertion hole of the pump case flange portion and is connected to the auxiliary ring, and a pump case fastening bolt extends through the first bolt insertion hole of the pump case flange portion and is connected to the auxiliary ring.

Abstract: The present invention provides a turbo-molecular pump which does not fall even when its rotating body is broken and its pump-chamber fastening bolts are consequently broken. The pump includes support-stays for additionally connecting both flanges of a vacuum chamber and the pump. With this structure, even in case that the pump-chamber fastening bolts are broken, the support-stays keep sandwiching the two flanges, thereby preventing the pump from falling.

Abstract: A vacuum pump has a cylindrical base member including a groove spacing between the inner and outer peripheries thereof. Accordingly, when the rotor is broken and part of the rotor collides with the inner peripheral portion of the base member during the operation of the vacuum pump, a thicker part of the base member arranged more inside than the groove spacing in the pump case becomes plastically depressed toward the groove spacing by the impact to absorb the rotational collision energy of the rotor.

Abstract: The present invention provides a vacuum pump which reduces a damaging torque produced when a rotor rotating at high-speed crashes into a screw stator or the like. The vacuum pump has a rigid ring disposed around the screw stator such that a shock load from the screw stator causes the rigid ring to rotate. When a brittle facture occurs in the rotor rotating at high-speed, for example, and a part of the rotor crashes into the screw stator, a rotating torque, i.e., a damaging torque causing the entire vacuum pump to rotate is likely to occur. However, this damaging torque is absorbed by the rotation of the rigid ring and eventually subsides.

Abstract: A vacuum pump has a pump case (1) forming a gas suction port (2) at the upper surface thereof; a rotor shaft (5) rotatably supported in the pump case; a rotor (8) being formed a corrosion-resistant film treated by nonelectrolytic plating on the inner and outer circumferential surfaces (8b, 8a) of the rotor; a plurality of rotor blades (10) accommodated in the pump case and integrally formed with an outer circumferential surface of the rotor; a plurality of stator blades (11) fixed in the pump case such that the rotor blades and the stator blades are alternately positioned and arranged; a drive motor (9) for rotating the rotor shaft; and mass-addition means (15) formed by applying an adhesive or a coating, having heat and corrosion resistances, on the inner circumferential surface of the rotor.

Abstract: A vacuum pump has a pump case with a gas suction port at the upper surface thereof and a gas exhaust port at the lower part thereof; a stator column disposed in the pump case as so to be erected; a flange formed along the circumferential top of the pump case; a rotor shaft disposed in the center of the stator column; a rotor rotatably supported by the stator column via the rotor shaft; a rotor blade fixed to the circumferential outer surface of the rotor; a stator blade fixed to the circumferential inner surface of the pump case such that the rotor blade and the stator blade are alternately disposed; a driving motor disposed between the rotor shaft and the stator column; and bolts for connecting the flange to the a chamber. The flange includes bolt insertion holes, each having plural steps which increase in size step by step toward the chamber.

Abstract: The present invention provides a vacuum pump in which a damaging torque produced when a rotating rotor crashes into the inner wall of a pump case, is prevented to transfer to a vacuum chamber so as to protect the vacuum chamber. Bolt-holes of flange portions, through which the vacuum pump and the vacuum chamber and also the pump case and a base member disposed below the pump case are fastened, respectively, are formed so as to have larger diameters than the shank diameters of corresponding bolts by 20% or more. With this arrangement, when the entire vacuum turns moved by the damaging torque, the pump case slips relative to the vacuum chamber and the base member by the gaps between the pump case-base member fastening bolt-holes and the pump case-base member fastening bolts. As a result, the damaging torque is absorbed and is prevented to transfer to the vacuum chamber.

Abstract: To provide a vacuum pump used for semiconductor manufacturing, which has improved reliability and safety and in which damages to a pump casing, peripheral apparatuses, or the like are prevented from occurring by preventing the occurrence of rotor breakage due to corrosion. A balancer is provided in the outer circumferential surface of the rotor so as to face the inside of the gas passageway. A balancer main body is supported against the outer circumferential surface of a rotor through a fragile portion that is weak with respect to corrosive gasses, the fragile portion of the balancer is damaged by corrosion before any corrosive gas influence appears in rotor blades or the rotor, and the balancer falls off, thus forcibly causing an unbalanced state to appear in the rotor. The balancer thus possesses a function for balancing the rotor and a corrosion detecting function.

Abstract: To provide a vacuum pump in which destruction of a rotational body due to corrosion can be prevented, and in which deposition of product is reduced, preventing damage due to contact between the rotational body and a fixed side. The pump case having the gas inlet port opened on its upper surface, the rotor shaft supported within the pump case such that it is capable of rotating, the plurality of the rotor blades formed in the outer circumferential surface of the rotor that is fixed to the rotor shaft, the plurality of the stator blades fixed within the pump case, positioned alternately with the plurality of the rotor blades, and the driving motor for rotating the rotor shaft are provided.

Abstract: The present invention provides a vacuum pump capable of preventing dropping of a pump at the time of occurrence of an abnormality of the pump, and performing a rapid pump changing operation.

Abstract: A 3D image of an object model and images of patterns of a garment are generated. The images of the respective patterns are three-dimensionally deformed by arranging them in corresponding portions of the 3D image of the object model in an image space, and calculating collision deformations caused when the respective patterns are pressed against the corresponding portions based on an externally inputted information on the garment. A stereoscopic image of the garment is generated by connecting the deformed 3D images of the respective patterns based on the information on the garment. Since the pattern images of the garment are so deformed as to be put on the object model in a virtual space of the computer graphics and the stereoscopic image of the garment is generated by connecting the deformed pattern images of the garment, there can be generated a stereoscopic image of the garment realistically representing a state of the garment when the garment is actually put on the object.

Abstract: An orthogonal coordinate type robot comprises a slider and a support frame supporting the slider for movement within a predetermined range along an axis. The support frame has an inner wall surface, at least one hollow portion, and a connecting hole for communicating the hollow portion with the inner wall surface. A suction device evacuates air from the hollow portion of the support frame.

Abstract: An etchant containing 1-hydroxy-ethane-1,1-diphosphonic acid is useful in etching Ba--Cu--O and Ca--Cu--O high-temperature superconductors.